利用激光透射热解技术制作的柔性高灵敏度应变传感器与 Pdms 微通道阵列

Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French
{"title":"利用激光透射热解技术制作的柔性高灵敏度应变传感器与 Pdms 微通道阵列","authors":"Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French","doi":"10.1109/MEMS58180.2024.10439302","DOIUrl":null,"url":null,"abstract":"In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"367-370"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology\",\"authors\":\"Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French\",\"doi\":\"10.1109/MEMS58180.2024.10439302\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.\",\"PeriodicalId\":518439,\"journal\":{\"name\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"6 1\",\"pages\":\"367-370\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS58180.2024.10439302\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439302","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

近年来,基于金属裂纹的柔性应变传感器因其超高的灵敏度而备受关注。然而,如何在灵敏度和检测范围之间取得平衡仍是一项重大挑战,这往往限制了其广泛应用。在本文中,我们引入了一种创新的激光透射热解技术,利用 PDMS 表面的微通道阵列来制造基于(金)金属裂纹的高性能柔性应变传感器。制造出的柔性应变传感器具有灵敏度高、检测范围宽、应变分辨率精确、响应和恢复时间快以及坚固耐用等特点。此外,这项技术在微流控、微机电系统和光学传感领域也有潜在的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology
In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.
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