雪崩光离子化探测器

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439447

Xiaheng Huang, Weishu Wu, Xudong Fan

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引用次数: 0

摘要

本文报告了一种名为雪崩光离子化检测器（APID）的微流体气体传感器。APID 采用微型真空紫外（VUV）灯作为光离子化源，在由 MgF2 衬底与蚀刻穿透硅微流体通道结合而成的微流体电离室中电离挥发性有机化合物（VOC）。由此产生的电子被一个反向偏压雪崩 P/N 结收集，随后在该结的耗尽区内经历雪崩过程，从而产生大量内部增益。

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Avalanche Photoionization Detector

This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain.

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来源期刊

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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