利用同相和反相叠加振荡进行模式定位和频率调制传感

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439528

T. Tsukamoto, R. Forke, S. Weidlich, D. Bülz, Alexey Shaporin, Karla Hiller, Shuji Tanaka

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引用次数: 0

摘要

本文报告了一种使用叠加同相（IP）和反相（AP）振荡模式的模式定位传感器。开发的 IP/AP 模式分离器可同时控制这些模式，即使这些模式重叠时也是如此。利用 AP 和 IP 控制回路之间的干扰信号，提出并演示了模态振型（振幅比）检测方法。IP 和 AP 的模态形状以及共振频率被同时检测到，这意味着所提出的系统也可用作频率调制（FM）传感器。

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Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations

This paper reports on a mode-localized sensor that uses superposed in-phase (IP) and anti-phase (AP) oscillation modes. The IP/AP mode separator was developed to control these modes simultaneously, even when these modes overlap. The modal-shape (amplitude ratio) detection method using the interference signals between AP and IP control loops is proposed and demonstrated. The IP and AP modal shapes as well as resonant frequencies were simultaneously detected, which means the proposed system can also be used as a frequency modulation (FM) sensor.

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来源期刊

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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