用数字光处理方法在各种基底上制造用于微电极和物理传感应用的导电聚合物

Muhammad Faizul Zaki, Chen-Fang Sun, Pin-Chuan Chen, A. Saravanan, Bohr‐Ran Huang
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引用次数: 0

摘要

这项研究介绍了一种通过 DLP 3D 打印在各种基底(包括 PDMS、PMMA 和玻璃)上制造聚合物微电极的新方法。本文介绍了简单快速的制造工艺,只需紫外光照射一次,就能在几分钟内打印出电极。数字掩模定义了紫外光图案,无需物理掩模。电极材料采用了聚丙烯酸酯树脂-碳纳米管纳米复合材料,在各种基底上的片状电导率为 3.52×10-2 S/cm。该微电极的分辨率为宽度约 130 微米,厚度约 150 微米。作为概念验证,利用所提出的方法,结合多材料印刷和顺序数字掩模,制造出了具有微结构特征的柔性触觉传感器。该传感器的压力检测范围宽(80 至 800,000 Pa)、稳定性高,并能在高压动态负载下持续感应 30 分钟以上。制造过程不涉及物理光学掩膜、退火过程或有害化学物质,因此更加省时环保。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Digital Light Processing Method to Fabricate Conductive Polymer on Various Substrates for Microelectrode and Physical Sensing Application
This research introduces a novel method for manufacturing polymer microelectrodes via DLP 3D printing on various substrates, including PDMS, PMMA, and glass. Simple and rapid fabrication processes are described herein by allowing a single exposure of UV light to print the electrode within minutes. Digital masks define the UV light pattern, eliminating the need for physical masks. A polyacrylate resin-CNT nanocomposite was employed as the electrode material, exhibiting a sheet conductivity of 3.52×10-2 S/cm on various substrates. The microelectrode achieved a resolution of ~130µm in width and 150µm in thickness. As a proof of concept, a flexible tactile sensor with microstructural features was fabricated using the proposed method, incorporating multi-material printing and sequential digital masks. The sensors enabled a broad pressure detection range (80 to 800,000 Pa), high stability, and durable sensing performance under high-pressure dynamic loading for over 30 minutes. The manufacturing process did not involve physical optical masks, an annealing process, or harmful chemicals, making it more time-efficient and environmentally friendly.
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