Multifunctional Thermal Biosensor Based on Silicon Thermocouple Junction and Suspended Microfluidic Channel

Abstract

A multifunctional thermal biosensor based on a single thermocouple junction and suspended microfluidic multi-channels is presented in this paper. The thermal sensor was fabricated on silicon on insulator (SOI) wafers using a standard MEMS process. To minimize heat loss and increase sensitivity, suspended bridge structures were prepared on SOI substrates using a single SU8 polymer. The designed biosensor is capable of detecting multiple markers of multiple targets simultaneously, which solves the problem of low efficiency of single-channel detection and improves the detection efficiency and accuracy of biosensors. The biosensor designed for multifunctional detection exhibits an extremely high response level, with a response time of less than 100 ms and a highly linear relationship between the targets, characterized by a sensitivity of 0.5 V/W. This biosensor shows great potential for portable medical detection and Will further meet the needs of the people for modern home medical testing.