Resoswitch Squegging Control by Compact Model-Assisted Impact Electrode Design

Abstract

This paper demonstrates, via a novel compact model and experiments, that squegging in micromechanical resonant electrical switches (resoswitches) [1] is controllable via impact electrode design. The model captures the nonlinear dynamics of impact contact and predicts squegging. Unlike other numeric and finite-element (FEM)-based models, this physical parameter-based model has no convergence difficulties when simulating impact, accurately captures squegging, and runs within any circuit simulator with up to 100× simulation time improvement compared to commercial software. Matching of compact model simulations to measurements of a 1-kHz RF-powered micromechanical clock receiver [2] validate the model. Proper electrode design yields a 10× reduction in output jitter.