{"title":"基于近红外波段表面晶格共振元表面的生化传感器","authors":"Liye Li, Lijun Ma, Wengang Wu","doi":"10.1109/MEMS58180.2024.10439383","DOIUrl":null,"url":null,"abstract":"This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 4","pages":"1055-1058"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Biochemical Sensor Based on a Surface Lattice Resonance Metasurface in the Near-Infrared Band\",\"authors\":\"Liye Li, Lijun Ma, Wengang Wu\",\"doi\":\"10.1109/MEMS58180.2024.10439383\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.\",\"PeriodicalId\":518439,\"journal\":{\"name\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"26 4\",\"pages\":\"1055-1058\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS58180.2024.10439383\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439383","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Biochemical Sensor Based on a Surface Lattice Resonance Metasurface in the Near-Infrared Band
This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.