{"title":"History Dependent Recovery of NBTI under Alternating DC and AC Stress","authors":"H. Kufluoglu, C. Prasad, M. Agostinelli","doi":"10.1109/RELPHY.2007.369572","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369572","url":null,"abstract":"Fast NBTI recovery experiments performed for alternating DC and AC stress modes show that recovery behavior is strongly influenced by degradation history. Proper modeling of PMOS recovery in circuits as well as projections of product lifetime must comprehend the interaction of DC and AC usage states.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126758557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Impact of Gate Tunneling Leakage on Performances of Phase Locked Loop Circuit in Nanoscale CMOS Technology","authors":"Jung-Sheng Chen, M. Ker","doi":"10.1109/RELPHY.2007.370002","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.370002","url":null,"abstract":"The influence of gate tunneling leakage on the circuit performances of phase locked loop (PLL) in nanoscale CMOS technology has been investigated by simulation. The basic PLL with second-order loop filter is used to simulate the impact of gate tunneling leakage on performance degradation of PLL in a standard 90-nm CMOS process. The MOS capacitors with different oxide thicknesses are used to investigate this impact to PLL. The locked time, static phase error, and jitter of second-order PLL are degraded by the gate tunneling leakage of MOS capacitor in loop filter.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123996471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Basic Research for the Air Force of the 21st Century","authors":"Thomas Hussey","doi":"10.1109/RELPHY.2007.369857","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369857","url":null,"abstract":"","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134139380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Douin, V. Pouget, D. Lewis, P. Fouillat, P. Perdu
{"title":"Picosecond Timing Analysis in Integrated Circuits with Pulsed Laser Stimulation","authors":"A. Douin, V. Pouget, D. Lewis, P. Fouillat, P. Perdu","doi":"10.1109/RELPHY.2007.369945","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369945","url":null,"abstract":"This paper presents new approaches for timing analysis in fast integrated circuits using picosecond pulsed laser stimulation. The proposed techniques provide very good temporal resolution as illustrated by several case studies on digital test structures. They can be used for localizing defects inducing timing faults.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134428612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Matsuyama, M. Shiozu, T. Kouno, T. Suzuki, H. Ehara, S. Otsuka, T. Hosoda, T. Nakamura, Y. Mizushima, M. Miyajima, K. Shono
{"title":"New Degradation Phenomena of Stress-Induced Voiding Inside via in Copper Interconnects","authors":"H. Matsuyama, M. Shiozu, T. Kouno, T. Suzuki, H. Ehara, S. Otsuka, T. Hosoda, T. Nakamura, Y. Mizushima, M. Miyajima, K. Shono","doi":"10.1109/RELPHY.2007.369989","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369989","url":null,"abstract":"Stress induced voiding inside vias has been investigated in detail using three different kinds of test patterns. Resistance increase which is caused by voiding inside via has been seen larger in \"extrusion pattern\" than in \"wide pattern\". The resistance shift depends upon the length of the narrow pattern within the \"extrusion pattern\". Our new finding is that resistance shift through 10Khour is dominated by the \"body metal area\". These phenomena can be explained with the effect of vacancy diffusion through the path of the copper and barrier metal side interface.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"50 6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134290558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Bouyssou, G. Guégan, S. Bruyère, R. Pezzani, L. Berneux, J. Rebrasse, C. Anceau, C. Nopper
{"title":"Extended Reliability Study of High Density PZT Capacitors: Intrinsic Lifetime Determination and Wafer Level Screening Strategy","authors":"E. Bouyssou, G. Guégan, S. Bruyère, R. Pezzani, L. Berneux, J. Rebrasse, C. Anceau, C. Nopper","doi":"10.1109/RELPHY.2007.369929","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369929","url":null,"abstract":"The processing of high-k PZT material enables to reach specific capacitance values up to 30 nF/mm2. This paper proposed an extended reliability study of integrated PZT capacitors, including both intrinsic and extrinsic issues. The intrinsic lifetime projections are given by a complete reliability model, developed from a basic time-dependent dielectric breakdown characterization. Several intrinsic failure mechanisms were identified depending on the applied voltage stress level. Hence, the authors adopted a testing methodology based on cumulated voltage and temperature accelerations, which enables to emulate only the relevant failure mechanism for lifetime extrapolation. Concerning the early failure rate issue, the authors developed an efficient wafer level screening procedure which enables to get rid of the whole extrinsic population. This screening methodology consists in applying an in-line bias pulse to all capacitors after the last etching step. The main difficulty to overcome for the industrial implementation of this procedure was the detection of defective devices. This issue was solved through the detection of negative dV/dt discharging peaks during the bias pulse application. Finally both intrinsic lifetime results and early failure rate obtained by this screening methodology turns out to be satisfying enough for technology qualification and industrialization.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130687856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"ESD Testing of Aluminum and Copper Vertical Parallel plate (VPP) Capacitor Structures","authors":"S. Voldman, E. Gebreselasie, Z. He","doi":"10.1109/RELPHY.2007.369963","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369963","url":null,"abstract":"Vertical parallel plate (VPP) capacitor elements are being used in RF components for RF CMOS and RF BiCMOS technologies. ESD robustness evaluation of the VPP capacitor is very important for RF applications when these elements are used on the input pads of RF receiver networks. In this paper, the first ESD measurements of VPP structures are shown for the first time. The purpose of the work is to evaluate the electrical response of the VPP structure for HBM, and transmission line pulse (TLP) waveforms. In addition, new discoveries are disclosed with aluminum and copper vertical parallel plate capacitor elements.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123182250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
O. Amusan, A. L. Steinberg, A. Witulski, B. Bhuva, J. Black, M. Baze, L. Massengill
{"title":"Single Event Upsets in a 130 nm Hardened Latch Design Due to Charge Sharing","authors":"O. Amusan, A. L. Steinberg, A. Witulski, B. Bhuva, J. Black, M. Baze, L. Massengill","doi":"10.1109/RELPHY.2007.369908","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369908","url":null,"abstract":"Critical charge to represent a logic HIGH is steadily decreasing with decreasing technology feature size. Many methods have been developed to increase critical charge requirement for storage elements, thereby reducing the soft error rates. Design-based approaches have been proposed that use four storage nodes instead of two nodes to retain data. Such designs are considered single event upset (SEU) immune at low energy ion hits for all practical purposes because a single ion hit at a storage node does not cause an upset. However, such designs are vulnerable to ion hits that result in multiple nodes collecting charges. For deep sub-micron technologies, the proximity of circuit nodes results in charge collection at multiple nodes when a single ion strikes a node. Researchers first observed the effect of such charge sharing in SRAM designs. In this paper, circuit and 3D technology computer aided design (TCAD) mixed-mode simulations are used to characterize charge sharing between sensitive pairs of devices and the resulting upsets in a hardened storage cell. The simulation results were verified with experimental data showing upsets due to charge sharing in a hardened cell when exposed to low energy ions","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115851310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A New \"Multi-step\" Power-law TDDB Lifetime Model and Boron Penetration Effect on TDDB of Ultra Thin oxide","authors":"P. Liao, C. Chen, C.J. Wang, K. Wu","doi":"10.1109/RELPHY.2007.369957","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369957","url":null,"abstract":"In this work, the \"multi-step\" power law TDDB model is proposed for ultra thin oxide. The nitrogen concentration effect on the voltage acceleration slope in p-FET is modeled by the boron penetration, and the voltage acceleration slope can be well explained by the \"multi-step\" power-law TDDB model.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114713993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Themixed-Mode Damage Spectrum of Sige HBTs","authors":"P. Cheng, Chendong Zhu, J. Cressler, A. Joseph","doi":"10.1109/RELPHY.2007.369953","DOIUrl":"https://doi.org/10.1109/RELPHY.2007.369953","url":null,"abstract":"We present a new mixed-mode stress technique for assessing the complete mixed-mode damage spectrum of SiGe HBTs, and apply it to three SiGe technology generations. We are able to distinguish four distinct regions of cross-generational SiGe HBT stress-response, identify a new low-current density damage mechanism in 3rd generation devices, and observe for the first time a novel stress-induced annealing phenomenon. The implications of these observations are addressed.","PeriodicalId":433104,"journal":{"name":"2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128446690","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}