H. Paik, S. Srinivasan, S. Rosenblatt, J. Chavez-Garcia, D. Bogorin, O. Jinka, G. Keefe, Dongbing Shao, J. Yau, M. Brink, J. Chow
{"title":"Coupler characterization of superconducting transmons qubits for cross-resonance gate","authors":"H. Paik, S. Srinivasan, S. Rosenblatt, J. Chavez-Garcia, D. Bogorin, O. Jinka, G. Keefe, Dongbing Shao, J. Yau, M. Brink, J. Chow","doi":"10.1109/IEDM13553.2020.9371955","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371955","url":null,"abstract":"We characterize two-qubit cross-resonance gates and unintended residual coupling on various coupled qubit arrangements. Direct coupling versus coupling via a quantum bus are studied on the basis of cross-resonance gate rate and fall-off of non-nearest neighbor coupling. We experimentally extract coupling rates using Hamiltonian tomography methods, and compare with microwave simulations.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130894178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Cryo-CMOS Compact Modeling","authors":"C. Enz, A. Beckers, F. Jazaeri","doi":"10.1109/IEDM13553.2020.9371894","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371894","url":null,"abstract":"This paper highlights some of the challenges faced for the modeling of MOSFET devices for operation at cryogenic temperature (CT). A special focus is given on the modeling of the threshold voltage VT and the subthreshold swing SS. The significant increase of VT at CT reduces the available overdrive voltage and therefore needs to be modeled properly. The SS saturates to a constant value below a critical temperature Tc of typically 40 K. This mitigates the current saving that could be expected from reducing the temperature since the transconductance for a given current does not scale inversely with 1/T below Tc. A correct modeling of these two phenomena is therefore key for developing an improved compact model (CM) that scales with T from RT down to CT.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133964470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kevin L. Lin, M. Anders, R. Bristol, M. Christenson, G. Elbaz, B. Holybee, Himanshu Kaul, M. Kobrinsky, R. Krishnamurthy, M. Reshotko, H. Yoo
{"title":"Staggered Metallization with Air gaps for Independently Tuned Interconnect Resistance and Capacitance","authors":"Kevin L. Lin, M. Anders, R. Bristol, M. Christenson, G. Elbaz, B. Holybee, Himanshu Kaul, M. Kobrinsky, R. Krishnamurthy, M. Reshotko, H. Yoo","doi":"10.1109/IEDM13553.2020.9371946","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371946","url":null,"abstract":"An innovative 300mm process architecture that improves interconnect resistance and capacitance is presented. Test structures patterned in novel geometries that lower wiring RC are fabricated, and electrical measurements are compared to simulated values from material and geometrical parameters. Circuit studies with representative examples of such interconnects were performed to quantify the benefit in microprocessor performance and power.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"346 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132680641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Hyeon-Bhin Jo, Seung-Won Yun, Jun-Gyu Kim, D. Yun, I. Lee, Daehyun Kim, Tae-Woo Kim, Sang-Kuk Kim, J. Yun, T.E. Kim, T. Tsutsumi, H. Sugiyama, H. Matsuzaki
{"title":"Lg = 19 nm In0.8Ga0.2As composite-channel HEMTs with fT = 738 GHz and fmax = 492 GHz","authors":"Hyeon-Bhin Jo, Seung-Won Yun, Jun-Gyu Kim, D. Yun, I. Lee, Daehyun Kim, Tae-Woo Kim, Sang-Kuk Kim, J. Yun, T.E. Kim, T. Tsutsumi, H. Sugiyama, H. Matsuzaki","doi":"10.1109/IEDM13553.2020.9372070","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372070","url":null,"abstract":"We present L<inf>g</inf> = 19 nm In<inf>0.8</inf>Ga<inf>0.2</inf>As composite-channel high-electron mobility transistors (HEMTs) with outstanding DC and high-frequency characteristics. We adopted a composite-channel design with an In<inf>0.8</inf>Ga<inf>0.2</inf>As core layer that led to superior carrier transport properties. The device with L<inf>g</inf> = 19 nm displayed an excellent combination of R<inf>ON</inf> = 271 Ω-μm, g<inf>m_max</inf> = 2.5 mS/μm and f<inf>T</inf>/f<inf>max</inf> = 738/492 GHz. To understand the physical origin of such an excellent combination of DC and RF responses, we analyzed the effective mobility (μ<inf>n_eff</inf>) and delay time for both long- and short-L<inf>g</inf> devices, revealing a very high μ<inf>n_eff</inf> value of 13,200 cm<sup>2</sup>/V•s and an average velocity under the gate (v<inf>avg</inf>) of 6.2 × 10<sup>7</sup> cm/s. We also studied the impact of the gate-to-source spacing (L<inf>GS</inf>) and the electrostatic integrity of the device, finding that a reduction of L<inf>GS</inf> less than 0.6 μm was of little use in improving g<inf>m_max</inf> and f<inf>T</inf>. Additionally, the intrinsic output conductance (g<inf>o_int</inf>) had an important impact on f<inf>T</inf> in short-L<inf>g</inf> HEMTs.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130859628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Vertical Gate-All-Around Tunnel FETs Using InGaAs Nanowire/Si with Core-Multishell Structure","authors":"K. Tomioka, H. Gamo, J. Motohisa, T. Fukui","doi":"10.1109/IEDM13553.2020.9371991","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371991","url":null,"abstract":"We present vertical gate-all-around (VGAA) tunnel FETs (TFETs) using InGaAs nanowire (NW)/Si heterojunction with modulation doped core-multishell NW structures. The NW/Si heterojunction was composed of the axial n+-InGaAs/intrinsic InGaAs NW/p-Si. We investigated effect of using modulation-doped InGaAs/InP/InAlAs/InP core-multishell NW structure for switching performance and showed current enhancement with a steep subthreshold slope (SS). The device exhibited a minimum SS of 21 mV/decade. In addition, the device showed high transconductance efficiency of around 520/V, which exceeded the theoretical maximum limit for conventional FETs (38.5/V). And we demonstrated p-channel switching behavior while maintaining steep SS with same architecture.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133721983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiaoxin Xu, Jie Yu, Tiancheng Gong, Jianguo Yang, Jiahao Yin, Da Nian Dong, Q. Luo, Jing Liu, Zhaoan Yu, Qi Liu, H. Lv, Ming Liu
{"title":"First Demonstration of OxRRAM Integration on 14nm FinFet Platform and Scaling Potential Analysis towards Sub-10nm Node","authors":"Xiaoxin Xu, Jie Yu, Tiancheng Gong, Jianguo Yang, Jiahao Yin, Da Nian Dong, Q. Luo, Jing Liu, Zhaoan Yu, Qi Liu, H. Lv, Ming Liu","doi":"10.1109/IEDM13553.2020.9371971","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371971","url":null,"abstract":"For the first time, the oxide based resistive random access memory (OxRRAM) integrated at 14nm FinFET platform was demonstrated. The scalability potential towards 10nm and beyond was analysis by considering the programing voltage, current and stability factors. Negative bias scheme with deep N well was proposed to solve the voltage mismatch between the OxRRAM and transistor. In order to meet the product-level stability requirement, the operation current was suggested to be higher than 100uA. Based on such constrain, cell size at different technology is projected. As an attempt, a design rule and array architecture was proposed to implement the OxRRAM on 5nm FinFET platform.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132100605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Sebastiano, J. V. van Dijk, P. Hart, B. Patra, J. van Staveren, X. Xue, C. G. Almudever, G. Scappucci, M. Veldhorst, L. Vandersypen, A. Vladimirescu, S. Pellerano, M. Babaie, E. Charbon
{"title":"Cryo-CMOS Interfaces for Large-Scale Quantum Computers","authors":"F. Sebastiano, J. V. van Dijk, P. Hart, B. Patra, J. van Staveren, X. Xue, C. G. Almudever, G. Scappucci, M. Veldhorst, L. Vandersypen, A. Vladimirescu, S. Pellerano, M. Babaie, E. Charbon","doi":"10.1109/IEDM13553.2020.9372075","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372075","url":null,"abstract":"Cryogenic CMOS (cryo-CMOS) is a viable technology for the control interface of the large-scale quantum computers able to address non-trivial problems. In this paper, we demonstrate state-of-the-art cryo-CMOS circuits and systems for such application and we discuss the challenges still to be faced on the path towards practical quantum computers.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132954305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"GaN Power ICs: Reviewing Strengths, Gaps, and Future Directions","authors":"O. Trescases, S. Murray, W. L. Jiang, M. S. Zaman","doi":"10.1109/IEDM13553.2020.9371918","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371918","url":null,"abstract":"This paper reviews monolithic GaN integration for power ICs, focusing on current technological capabilities. We highlight key opportunities for integrating low-voltage circuits alongside power devices to support converter operation. Simulations and experimental results from the imec 200 V GaN-on-SOI and ON Semiconductor 650 V GaN-on-Si processes provide quantitative insights for digital and analog circuitry.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132481277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Eiler, Pierre-Marie Faure, J. Sugita, S. Ihida, D. Zhu, Y. Sakai, K. Fujiu, K. Komori, H. Toshiyoshi, A. Tixier-Mita
{"title":"Thin-Film Transistor Platform for Electrophysiological and Electrochemical Characterization of Biological Cells","authors":"A. Eiler, Pierre-Marie Faure, J. Sugita, S. Ihida, D. Zhu, Y. Sakai, K. Fujiu, K. Komori, H. Toshiyoshi, A. Tixier-Mita","doi":"10.1109/IEDM13553.2020.9372043","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372043","url":null,"abstract":"This paper presents a locally-addressable 2-dimensional arrayed transparent electrode platform with integrated Thin-Film Transistor (TFT) for electrophysiology. 2D electrical measurements on 28 parallel-connected lines selected from a 22,500 microelectrode array were successfully performed for heart cell investigation for the first time. Amperometry measurement was also demonstrated using transparent electrodes functionalized with Ag/AgCl by additive manufacturing. The applicability of this transparent TFT substrate platform to electrochemical sensors was confirmed by experiments. The platform offers a unique access to versatile lab-on-a-chip devices that integrate many measurement techniques on one chip (electrical, chemical and optical) for the study of large cell cultures, tissues or organoids.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114368650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Sonoda, Kazuki Monta, Takaaki Okidono, Y. Araga, N. Watanabe, H. Shimamoto, K. Kikuchi, N. Miura, Takuji Miki, M. Nagata
{"title":"Secure 3D CMOS Chip Stacks with Backside Buried Metal Power Delivery Networks for Distributed Decoupling Capacitance","authors":"H. Sonoda, Kazuki Monta, Takaaki Okidono, Y. Araga, N. Watanabe, H. Shimamoto, K. Kikuchi, N. Miura, Takuji Miki, M. Nagata","doi":"10.1109/IEDM13553.2020.9372073","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372073","url":null,"abstract":"Secure three-dimensional (3D) CMOS chip stacks with backside buried metal (BBM) routing provide low series impedance and high decoupling capability in a power delivery network (PDN), thanks to its distributed capacitances over a full-chip backside area. The Si demonstrator with cryptographic functionality was fabricated in a 0.13-µm CMOS technology with post-Si wafer-level BBM Cu processing with 10 µm, 15 µm and 35 µm of thickness, line width and space, along with through Si vias (TSVs) with 10 µm and 40 µm of diameter and depth, respectively. The capacitance of 0.18 nF/mm2 in the effective backside area of 71 mm2 suppressed dynamic IR drops in 10% and 59% for the single chip and four chip stack samples, respectively, during the operation of a 3.9M-gate crypto core at 30 MHz. This was confirmed by on-chip power noise monitoring. The 3D BBM PDN also effectively reduces power side channel information leakage, which is evaluated by 8x increase in the number of externally observed electromagnetic (EM) noise waveforms to attain the t-test value of larger than 4.5 if we assume the statistically effective correlation between EM noise emission and secret information in the crypto core.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114428751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}