IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'最新文献_第3页

The wobble motor: an electrostatic, planetary-armature, microactuator 摆动电机:静电、行星电枢、微致动器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77953

Stephen C. Jacobsen, Richard H. Price, J. E. Wood, T. Rytting, M. Rafaelof

{"title":"The wobble motor: an electrostatic, planetary-armature, microactuator","authors":"Stephen C. Jacobsen, Richard H. Price, J. E. Wood, T. Rytting, M. Rafaelof","doi":"10.1109/MEMSYS.1989.77953","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77953","url":null,"abstract":"A variety of micromotor concepts has been evaluated, with the wobble motor (WM) approach being one of those selected for extensive study. Various WM configurations have been analytically evaluated using finite-element methods and closed-form solutions. Important performance characteristics have been estimated such as stall torque and free speed, and alternate strategies for motor control have been examined. Five motor configurations and a variety of silicon-based and non-silicon-based fabrication techniques have been examined in detail. In exploratory exercises, motors have been fabricated using direct mechanical assembly, electro-discharge machining (EDM), cylindrical photolithographic etching, and coextrusion of metal and plastic. The EDM approach was selected as the motor alternative which could function as an experimental testbed. Fifteen EDM WMs have been constructed and utilized for experimental purposes. Experiments aimed at generating simple preliminary data have been conducted, and results compare reasonably to analytical studies.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124995237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 78

Mechanical property measurements of thin films using load-deflection of composite rectangular membrane 用复合矩形膜的载荷-挠度法测量薄膜的力学性能

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77981

O. Tabata, K. Kawahata, S. Sugiyama, I. Igarashi

引用次数: 72

Applications of silicon microactuators based on bimorph structures 基于双晶片结构的硅微致动器的应用

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77974

W. Benecke, W. Riethmuller

引用次数: 63

Fluid flow in micron and submicron size channels 流体在微米和亚微米大小的通道中流动

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77954

J. Harley, H. Bau, J. Zemel, V. Dominko

引用次数: 40

An operational harmonic electrostatic motor 可运行的谐波静电马达

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77952

W. Trimmer, R. Jebens

引用次数: 50

IC-processed micro-motors: design, technology, and testing 集成电路微电机:设计、技术和测试

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77950

Yu-Chong Tai, L. Fan, Richard S. Muller

引用次数: 127

A tele-microrobot for manipulation and dynamic mechanical testing of single living cells 用于单个活细胞操作和动态力学测试的远程微型机器人

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77971

I. Hunter, S. Lafontaine, Poul M. F. Nielsen, P. Hunter, J. Hollerbach

{"title":"A tele-microrobot for manipulation and dynamic mechanical testing of single living cells","authors":"I. Hunter, S. Lafontaine, Poul M. F. Nielsen, P. Hunter, J. Hollerbach","doi":"10.1109/MEMSYS.1989.77971","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77971","url":null,"abstract":"A high-performance parallel-drive microrobot has been developed for manipulation, surgery, and dynamic mechanical testing of single living muscle cells. The microrobot has two limbs which more in overlapping spherical workspaces of 1 mm diameter with minimum open-loop and closed-loop movements of 1 nm and 10 nm, respectively. Under nonlinear model-based control the limbs can move at up to 2 m/s relative to each other. Ferroelectric polymer microgrippers have been fabricated to facilitate cell manipulation. The microrobot has a three-dimensional laser vision system with a resolution of 50 to 100 nm. Volume images containing magnitude, phase, polarization, and spectral information can be acquired. The microrobot incorporates facilities to keep single living cells alive for long periods. A macro version of the microrobot has been built to allow force-reflecting teleoperation of the microrobot. The tele-microrobot system constitutes a mechanical microscope in which microscopic objects can be felt. The macro-interface also enables the operator to feel mechanical continuum models. A parallel computation and control computer has been designed to meet the substantial numerical requirements of the tele-microrobot system.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134153654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13

Micro actuators for aligning optical fibers 对准光纤的微致动器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77956

R. Jebens, W. Trimmer, J. Walker

引用次数: 15

The world's largest one cubic inch robot 世界上最大的一立方英寸机器人

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77970

A. Flynn, R. Brooks, W.M. Wells, D. Barrett

引用次数: 23

Residual strain effects on large aspect ratio micro-diaphragms (capacitance transducer) 大宽高比微膜片(电容传感器)的残余应变效应

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1988-09-30 DOI: 10.1109/MEMSYS.1989.77977

R.S. Hijab, R. Muller

{"title":"Residual strain effects on large aspect ratio micro-diaphragms (capacitance transducer)","authors":"R.S. Hijab, R. Muller","doi":"10.1109/MEMSYS.1989.77977","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77977","url":null,"abstract":"The authors describe techniques that result in low-strain materials and that reduce the effects of residual strain in microdiaphragms, which are used in capacitive-readout sensors. Square polysilicon grilles and perforated diaphragms made from both single and double polysilicon layers and from single-crystal silicon, with aspect ratios (side/thickness) of up to 1000 and very low compressive strain (about 6*10/sup -5/), have been fabricated. Strain reduction is achieved by combining thermal annealing with one of two mechanical design techniques. The first technique makes use of a series of cantilever beams to support the diaphragms. In a second procedure, corrugated surfaces, in thinned membranes of single-crystal silicon are formed. The corrugations result from the use of boron doping and anisotropic silicon etching. In both of these techniques to produce low-strain diaphragms, an etched cavity is purposely formed in the substrate crystal below them. Only one-sided processing of wafers is used, thus aiding reproducibility and providing ease of compatibility with a metal-oxide-semiconductor process. A fast etching sacrificial-support layer (phosphorus-doped chemical-vapor-deposited oxide) is used.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116021350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13