对准光纤的微致动器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77956

R. Jebens, W. Trimmer, J. Walker

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引用次数: 15

摘要

介绍了两种用于光纤对准的微致动器。一种是使用形状记忆合金薄链的致动器，用于将输入纤维与两根输出纤维中的一根对齐。这个元件对交换光纤信号很有用。第二种是静电致动器，能够切换光纤并进行微调以纠正不对准。单点金刚石加工(以及相关的成型技术)已被证明是一种可行的替代方法，可以在硅中蚀刻v型凹槽，用于保持和对准纤维。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micro actuators for aligning optical fibers

Two microactuators to align fiber optics are described. One, an actuator using a thin strand of shape memory alloy, is used to align an input fiber with one of two output fibers. This component is useful for switching fiber-optic signals. The second is an electrostatic actuator capable of switching optical fibers and making fine adjustments to correct for misalignments. Single-point diamond machining (and associated molding technology) has been shown to be a viable alternative to etching Vee grooves in silicon for holding and aligning fibers.<>

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来源期刊

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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