{"title":"Micro actuators for aligning optical fibers","authors":"R. Jebens, W. Trimmer, J. Walker","doi":"10.1109/MEMSYS.1989.77956","DOIUrl":null,"url":null,"abstract":"Two microactuators to align fiber optics are described. One, an actuator using a thin strand of shape memory alloy, is used to align an input fiber with one of two output fibers. This component is useful for switching fiber-optic signals. The second is an electrostatic actuator capable of switching optical fibers and making fine adjustments to correct for misalignments. Single-point diamond machining (and associated molding technology) has been shown to be a viable alternative to etching Vee grooves in silicon for holding and aligning fibers.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1989.77956","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15
Abstract
Two microactuators to align fiber optics are described. One, an actuator using a thin strand of shape memory alloy, is used to align an input fiber with one of two output fibers. This component is useful for switching fiber-optic signals. The second is an electrostatic actuator capable of switching optical fibers and making fine adjustments to correct for misalignments. Single-point diamond machining (and associated molding technology) has been shown to be a viable alternative to etching Vee grooves in silicon for holding and aligning fibers.<>