基于双晶片结构的硅微致动器的应用

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77974

W. Benecke, W. Riethmuller

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引用次数: 63

摘要

介绍了用于机电信号转换的微致动器。换能器的基本元件是双晶片结构和集成热源。由于热膨胀系数的差异，双晶结构发生温控变形。体和表面微加工技术可用于实现垂直于基板平面或在基板平面内的物体位移。这类执行器的主要优点是制造工艺简单，在标准IC(集成电路)电压水平下操作，允许进一步的系统集成。描述了转换特性，并讨论了这些换能器在微阀、光学元件、机械手和电机中的应用。

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Applications of silicon microactuators based on bimorph structures

Microactuators for electromechanical signal conversion are described. Basic elements of the transducer are a bimorph structure and an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature-controlled deformation of the the bimorph structure occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC (integrated circuit) voltage levels, allowing further system integration. The conversion characteristics are described, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed.<>

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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