摆动电机:静电、行星电枢、微致动器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77953

Stephen C. Jacobsen, Richard H. Price, J. E. Wood, T. Rytting, M. Rafaelof

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引用次数: 78

摘要

各种各样的微电机概念已经被评估，其中摆动电机(WM)方法是被广泛研究的方法之一。使用有限元方法和封闭形式的解决方案对各种WM配置进行了分析评估。估计了重要的性能特征，如失速转矩和自由速度，并研究了电机控制的替代策略。五种电机配置和各种硅基和非硅基制造技术已经详细检查。在探索性的练习中，使用直接机械装配、电火花加工(EDM)、圆柱形光刻蚀刻以及金属和塑料的共挤压来制造电机。选择电火花加工方法作为电机备选方案，作为实验试验台。已经建造了15台电火花加工WMs并用于实验目的。已经进行了旨在产生简单初步数据的实验，结果与分析研究比较合理。

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The wobble motor: an electrostatic, planetary-armature, microactuator

A variety of micromotor concepts has been evaluated, with the wobble motor (WM) approach being one of those selected for extensive study. Various WM configurations have been analytically evaluated using finite-element methods and closed-form solutions. Important performance characteristics have been estimated such as stall torque and free speed, and alternate strategies for motor control have been examined. Five motor configurations and a variety of silicon-based and non-silicon-based fabrication techniques have been examined in detail. In exploratory exercises, motors have been fabricated using direct mechanical assembly, electro-discharge machining (EDM), cylindrical photolithographic etching, and coextrusion of metal and plastic. The EDM approach was selected as the motor alternative which could function as an experimental testbed. Fifteen EDM WMs have been constructed and utilized for experimental purposes. Experiments aimed at generating simple preliminary data have been conducted, and results compare reasonably to analytical studies.<>

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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