IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'最新文献_第2页

Microstructures for fracture toughness characterization of brittle thin films 脆性薄膜断裂韧性表征的显微结构

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77957

L. Fan, R. Howe, R. Muller

引用次数: 4

Miniature crystalline quartz electronical structure 微型晶体石英电子结构

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77975

L. Clayton, E. P. Eernisse, R. W. Ward, R.B. Wiggins

引用次数: 0

Transduction mechanisms and their applications in micromechanical devices 传导机制及其在微机械装置中的应用

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77976

M. Elwenspoek, F. Blom, S. Bouwstra, T. Lammerink, F.C.M. van de Pol, H. Tilmans, T. Popma, J. Fluitman

引用次数: 19

A novel technique and structure for the measurement of intrinsic stress and Young's modulus of thin films 一种测量薄膜内禀应力和杨氏模量的新技术和结构

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77969

K. Najafi, K. Suzuki

引用次数: 78

Self-testable accelerometer systems 自检加速度计系统

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77973

H. Allen, S. Terry, D. de Bruin

引用次数: 20

A proposal for a superconducting actuator using Meissner effect 一种利用迈斯纳效应的超导致动器的设计

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77972

Y. Kim, M. Katsurai, H. Fujita

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引用次数: 21

OYSTER, a 3D structural simulator for microelectromechanical design OYSTER，一个用于微机电设计的三维结构模拟器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77967

G. Koppelman

引用次数: 7

Advances in processing techniques for silicon micromechanical devices with smooth surfaces 光滑表面硅微机械器件的加工技术进展

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77964

H. Guckel, J. Sniegowski, T. Christenson

引用次数: 42

Normally close microvalve and micropump fabricated on a silicon wafer 常闭微阀和微泵在硅片上制造

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77955

Masaki Esashi, Shuichi Shoji, Akira Nakano

引用次数: 175

Millimeter size joint actuator using shape memory alloy 毫米尺寸的关节驱动器采用形状记忆合金

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI: 10.1109/MEMSYS.1989.77978

K. Kuribayashi

引用次数: 23