Transduction mechanisms and their applications in micromechanical devices

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77976

M. Elwenspoek, F. Blom, S. Bouwstra, T. Lammerink, F.C.M. van de Pol, H. Tilmans, T. Popma, J. Fluitman

引用次数: 19

Abstract

Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed.<>

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本文章由计算机程序翻译，如有差异，请以英文原文为准。

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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