常闭微阀和微泵在硅片上制造

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77955

Masaki Esashi, Shuichi Shoji, Akira Nakano

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引用次数: 175

摘要

采用微加工技术在硅片上制备了常闭微阀和微泵。常闭微阀有一个硅膜片和一个小型压电驱动器来驱动它。可控气体流速为0.1 ml/min ~ 85 ml/min，气体压力为0.75 kgf/cm/sup 2/。微泵是一种隔膜式泵，由两个多晶硅单向阀和一个由小型压电驱动器驱动的隔膜组成。最大泵送流量和压力分别为20 mu l/min和780 mmH/sub /O/cm/sup /。

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Normally close microvalve and micropump fabricated on a silicon wafer

A normally closed microvalve and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm/sup 2/. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 mu l/min and 780 mmH/sub 2/O/cm/sup 2/, respectively.<>

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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