A proposal for a superconducting actuator using Meissner effect

A superconducting actuator with magnetic levitation using Meissner effect in mu m order is proposed to remove the friction between moving elements and fixed elements in micromachines. The actuator, called Meissnac, is analyzed by the discrete surface current method. A driving method for the actuator is proposed. The driving force can be obtained by using the difference of the pitch of the stator and that of the slider, and the control of superconducting and normal states of superconductors. The control of the state can be achieved either by applying current over J/sub c/ to the superconductor or by heating it above T/sub c/. Maximum values of the levitating force and the driving force are 1.7 and 0.26 (N/m/sup 2/A/sup 2/). The lateral movement in a particular direction of a slider is obtained by choosing appropriate superconductors and by transforming them into the normal state. A scale model is fabricated using a YBaCuO high-T/sub c/ superconductor. The levitating force and the driving force of a scale model are 84 and 31 (mgf) when the slider is composed of a permanent magnet.<>