Miniature crystalline quartz electronical structure

Abstract

The photolithographic and chemical milling techniques used in fabricating a variety of three-dimensional monocrystalline quartz microstructures are presented. The piezoelectric effect, which is the electromechanical phenomenon utilized in the various applications of quartz technology, is described. Examples of quartz resonators used in sensing applications are presented. These miniature quartz sensors are incorporated into transducer systems which measure pressure, temperature, force, and acceleration. Some of the analytical tools used to design miniature quartz devices are outlined.<>