{"title":"3D solid modeling of IC structures using simulated surface topography","authors":"K. Wang, H. Park, Zhiping Yu, E. Kan, R. Dutton","doi":"10.1109/SISPAD.1996.865309","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865309","url":null,"abstract":"The importance of 3D effects in semiconductor processes and devices is growing as structures are scaled into the deep submicron regime. In order to perform 3D analysis, however, designers need to accurately specify the structure to be simulated. A virtual integrated process modeling tool, based on a set of techniques which enable the construction of 3D device structures, is presented with emphasis on a new technique to build 3D LOCOS geometries. Examples illustrate how this technique is used to construct both a test structure as well as an actual memory cell design.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134349292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Three-dimensional simulation of ion implantation","authors":"J. Lorenz, K. Tietzel, A. Bourenkov, H. Ryssel","doi":"10.1109/SISPAD.1996.865255","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865255","url":null,"abstract":"With shrinking dimensions and growing complexity of advanced ULSI devices three-dimensional effects are becoming more and more important for their development and optimization. For this reason, within the project PROMPT a multidimensional process simulation software capable to provide appropriate input to three-dimensional device simulation has been developed by a European consortium. The PROMPT software compiles the geometry and the dopant profiles of the device from the results of existing one- and two-dimensional process simulators and three-dimensional modules newly developed. Within this presentation, the capabilities of the three-dimensional ion implantation module developed at FhG-IIS-B within PROMPT are being outlined.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"126 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126873743","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effect of passivation film stress on shift in threshold voltage of GaAs FETs","authors":"H. Miura, K. Ohshika, H. Masuda","doi":"10.1109/SISPAD.1996.865268","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865268","url":null,"abstract":"GaAs FETs are widely used for high-speed and low-power devices, especially in optical communication systems. To improve product reliability, it is very important to control mechanical stress in device structures. This is because the stress field changes the dopant distribution and shifts electronic characteristic of devices due to piezoelectric effect. There are several stress development processes in the device manufacturing, such as thermal stress due to mismatch in thermal expansion coefficients among thin film materials used in the device structure and intrinsic stress which occurs during film deposition. To evaluate precise stress fields in actual device structures, the authors have developed stress simulation methods based on finite element analysis, a measurement method for mechanical properties of thin films, and a microscopic stress measurement method. To improve product reliability of silicon devices, it is confirmed that these methods are effective for control or optimization of mechanical stress fields in the device structure. In this paper, the stress evaluation methods are applied to discuss the effect of passivation film stress on the shift in threshold voltage of GaAs FETs.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126060519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Control of crystalline defects on wafers by using simulation in heat treating","authors":"K. Nakao, S. Segawa, T. Shimazu","doi":"10.1109/SISPAD.1996.865278","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865278","url":null,"abstract":"We can realize the actual phenomena about thermal stress which occurs during heat treating and know the limitations which affect the occurrence of crystalline defects on semiconductor wafers by using simulation. Though there are still a lot of unknown factors which affect the crystalline defects, we can control and minimize the generation of defects more so than we did in the past. In fact the simulation will not give us everything but it will be a great help for developing equipment and lowering development cost.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123527248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Simulation of boron diffusion in Si based on the kick-out mechanism","authors":"M. Uematsu","doi":"10.1109/SISPAD.1996.865256","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865256","url":null,"abstract":"B in-diffusion profiles in Si were simulated based on the kick-out mechanism, taking into account neutral boron interstitials and positively charged and neutral self-interstitials as the diffusion species which primarily contribute to the diffusion. The profiles were satisfactorily fitted by just three parameters, each of which has a clear physical meaning. This study clarifies the essential parameters for B diffusion, which helps to develop a more widely applicable diffusion simulator.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125226352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Simulation of isothermal current filament states in GaAs structures","authors":"A. Vashchenko, Y. Martynov, V.F. Sinkevitch","doi":"10.1109/SISPAD.1996.865304","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865304","url":null,"abstract":"Using 2-D numerical simulation the spatial instability and formation of stable spatial dissipate states (DS) are studied for breakdown of GaAs n-i-n (n-p-n) and Schottky M-i-n structures with long n-layer. It is revealed, that at some value of n-region length the DS is formed spontaneously like a multifilament periodic state. Spatial period of DS is of order of the n-region length and filament dimension of i-region length. Formation and evolution of the multifilament states in the n-i-n GaAs structure corresponds to the experimental data for MESFET and HEMT breakdown in pulse regime.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129274425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A consistent dynamic MOSFET model for low-voltage applications","authors":"G. Schrom, A. Stach, S. Selberherr","doi":"10.1109/SISPAD.1996.865327","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865327","url":null,"abstract":"The development towards lower voltages and even ultra-low-power (ULP) technologies makes ever higher demands on compact device model accuracy. We present a new approach to dynamic MOSFET modeling, which is especially suited for the simulation of low-voltage mixed analog digital circuits. The model is based on terminal charges and conductive currents which are determined from transient current/voltage data which can be easily obtained through measurement or simulation of the devices.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127739238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Fleischmann, R. Sabelka, A. Stach, R. Strasser, S. Selberherr
{"title":"Grid generation for three-dimensional process and device simulation","authors":"P. Fleischmann, R. Sabelka, A. Stach, R. Strasser, S. Selberherr","doi":"10.1109/SISPAD.1996.865321","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865321","url":null,"abstract":"The growing importance of three-dimensional simulation has made mesh generation the key to accurate and fast solutions. Where in two dimensions many different and only moderately sophisticated methods are established and feasible, there is the need in three dimensions for far more efficient strategies. Not only the amount of data and the complexity of the simulated structures pose an increasing challenge, but also the visualization of the three-dimensional grid as an important feedback for the developer becomes more difficult. Meshing has been geared more and more towards automation. Especially, in Technology Computer-Aided Design (TCAD) where the input to the gridder can be the output from a topography simulator the degree of automation requires further discussion. The authors investigate the state of the art and give an overview of activities in that field.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129921199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nano-electronics-a new field for SISPAD","authors":"T. Sugano","doi":"10.1109/SISPAD.1996.865245","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865245","url":null,"abstract":"Although silicon microelectronics will remain in the main stream of electronics, evolution to nanoelectronics will be emerging. In nanoelectronics the wave-like characteristics of carriers and Coulomb blockade of tunneling of carriers are two principal physical principles and the continuum model for space charge due to ionized dopants is no longer valid. Atomic level modeling of carrier-wave scattering from the boundary and materials processing, and statistical and dynamical modeling of tunneling of carriers through a potential barrier, and single electron circuits will be a new field of SISPAD for nanoelectronics.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127602512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Modeling and simulation of oxygen precipitation in Si: precipitate-point defect interactions and influence of hydrogen","authors":"S. Senkader, G. Hobler, C. Schmeiser","doi":"10.1109/SISPAD.1996.865259","DOIUrl":"https://doi.org/10.1109/SISPAD.1996.865259","url":null,"abstract":"In this work we present recent model developments which describes the precipitation of oxygen and the formation of stacking faults simultaneously in Czochralski-silicon wafers using rate- and Fokker-Planck equations. We have improved the model to consider the influence of vacancies on precipitation in addition that of self interstitials. A partitioning between vacancies and self interstitials is obtained by assuming that the system always seeks its minimum energy configuration. We additionally report our attempt to model the influence of hydrogen on oxygen precipitation.","PeriodicalId":341161,"journal":{"name":"1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)","volume":"114 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115581637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}