K. Zhao, J. Stathis, B. Linder, E. Cartier, A. Kerber
{"title":"PBTI under dynamic stress: From a single defect point of view","authors":"K. Zhao, J. Stathis, B. Linder, E. Cartier, A. Kerber","doi":"10.1109/IRPS.2011.5784502","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784502","url":null,"abstract":"In this paper, fundamental aspects of the Bias Temperature Instability (BTI) in FETs with metal gate/high-k (HKMG) gate stacks are discussed from a single defect point of view. First, Random Telegraph Noise (RTN) measurements are used to show that the capture/emission processes of individual defects in highly scaled HKMG FETs exhibit very similar Poisson statistics and can be fully characterized by a characteristic electron/hole capture, τc, and emission time, τe, in NFET/PFET. In all cases, capture and emission are found to be thermally activated. These observations suggest that NBTI and PBTI share similar microscopic trapping/de-trapping mechanism, for holes and electrons, respectively. Based on these findings, a simple physical model is introduced which describes the behavior of a distribution of identical defects (characterized by τc and τe) but provides deep insights into the BTI dynamics under AC stress in general. The occupancy level of identical defects at equilibrium is found to becomes frequency, ƒ, independent for ƒ ≫ [1/τc, 1/τe], such that the BTI behavior at operation conditions (∼GHz) can be measured at relatively low frequencies (in the kHz range). The single defect model was then expanded to predict the macroscopic BTI behaviors in NMOS devices for arbitrary stress conditions. Excellent agreement between model prediction and experimental data is demonstrated, confirming that PBTI in HKMG gate stacks can be understood as a superposition of trapping/de-trapping events from individual defects in the gate stack. The overall dynamics of PBTI is thus largely governed by the distribution of electron capture and emission times of the defects in the gate stack. The challenges for using a capture and emission time based model for product lifetime predictions are addressed.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132733092","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Bieler, Bite Zhou, L. Blair, A. Zamiri, P. Darbandi, F. Pourboghrat, Tae-Kyu Lee, K. Liu
{"title":"The role of elastic and plastic anisotropy of Sn on microstructure and damage evolution in lead-free solder joints","authors":"T. Bieler, Bite Zhou, L. Blair, A. Zamiri, P. Darbandi, F. Pourboghrat, Tae-Kyu Lee, K. Liu","doi":"10.1109/IRPS.2011.5784538","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784538","url":null,"abstract":"The elastic, thermal expansion, and plastic anisotropy of Sn is examined to assess how anisotropy affects the microstructural evolution and damage nucleation processes in SAC305 solder joints. Examination of all joints in a package indicates that upon solidification, crystal orientations are nearly randomly distributed. Initial studies of cracked joints after thermal cycling showed that orientations with the c-axis parallel to the joint interface (red orientations) are more likely to crack arising from tensile stresses during the hot part of the cycle. Subsequent studies show that package design has a large influence on how the microstructure evolves; higher strain designs stimulate recrystallization at earlier times. Recrystallization appears to be strongly correlated with crack nucleation and propagation processes, as red orientations often develop and lead to crack nucleation and propagation. The details of the recrystallization process depend strongly on the plastic slip and recovery processes arising from the specific crystal orientation / temperature / strain history that makes microstructural evolution of each joint unique. The unique history for each joint implies that worst case scenarios need to be identified and models developed that can predict microstructural evolution that leads to worst case scenarios.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"46 32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132976033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Castillo, D. Mavis, P. Eaton, M. Sibley, Donald Elkins, Rich Floyd
{"title":"An automated approach to isolate dominant SER susceptibilities in microcircuits","authors":"J. Castillo, D. Mavis, P. Eaton, M. Sibley, Donald Elkins, Rich Floyd","doi":"10.1109/IRPS.2011.5784595","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784595","url":null,"abstract":"With the ever decreasing feature sizes of modern integrated circuits (IC), new test and analysis approaches are needed to isolate dominant soft error rate (SER) susceptibilities. A new test capability which provides SER raster scanning of microcircuits with a collimated heavy-ion beam, having spatial isolation as small as 10 microns, is presented. The system termed the Milli-Beam™ provides, through post processing, three-dimensional surface plots showing the location of error counts over an entire IC. A new cross section measurement technique that accounts for beam variations and uncertainties independent of laboratory dosimetry is also presented.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125227315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The effect of temperature on dielectric charging of capacitive MEMS","authors":"M. Koutsoureli, L. Michalas, G. Papaioannou","doi":"10.1109/IRPS.2011.5784490","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784490","url":null,"abstract":"The present paper investigates the effect of temperature on the charging process in dielectric films of MEMS capacitive switches. The investigation includes the assessment of MIM capacitors and MEMS capacitive switches. The data analysis shows that the dielectric charging is thermally activated and the process can be described by a system with a wide distribution of relaxation times that exhibits power-law relaxation. The activation energies obtained from MIM and MEMS are attributed to different charge collection mechanisms.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130319210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Nakanishi, H. Arie, H. Maeda, Y. Hirose, N. Hattori, T. Koyama, E. Murakami
{"title":"High reliable strain measurement for power devices using STEM-CBED method","authors":"N. Nakanishi, H. Arie, H. Maeda, Y. Hirose, N. Hattori, T. Koyama, E. Murakami","doi":"10.1109/IRPS.2011.5784525","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784525","url":null,"abstract":"Scanning transmission electron microscopy convergent beam electron diffraction (STEM-CBED) was applied to strain analysis of deep trench electrodes for devices such as power devices. Source-drain current leak, which was one of the crucial failures of this kind of structure, depends on boron concentration in boron doped poly-Si (BP) layers. TEM/STEM and diffraction analysis showed that the BP layers consist of epitaxial phase and poly-Si phase, and the proportion of these phases depends on the boron concentration in the BP layer. Clear strain distribution around the BP layers was obtained with STEM-CBED. This revealed that the origin of the strain is volume shrinkage of the epitaxial phase in the BP layer, and the poly-Si phase acts as buffer against this strain. Relationship between Si phases and boron concentration in the BP layers was examined with STEM and scanning capacitance microscopy. These analyses suggested that boron segregation occurred in samples having a higher boron concentration, and prevented epitaxial growth in the BP layers. As a result, the core of the BP layer remains as poly-Si or amorphous Si and acts as strain buffer. Our analysis concluded that boron concentration in the BP layer is one of the most important factors enabling high production yield for the structure.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129039323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Sierawski, R. Reed, M. Mendenhall, R. Weller, peixiong zhao, S. Wen, R. Wong, N. Tam, R. Baumann
{"title":"Effects of scaling on muon-induced soft errors","authors":"B. Sierawski, R. Reed, M. Mendenhall, R. Weller, peixiong zhao, S. Wen, R. Wong, N. Tam, R. Baumann","doi":"10.1109/IRPS.2011.5784484","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784484","url":null,"abstract":"Experimental results are presented that indicate technology scaling increases the sensitivity of microelectronics to soft errors from low-energy muons. Results are presented for 65, 55, 45, and 40 nm bulk CMOS SRAM test arrays. Simulations suggest an increasing role of muons in the soft error rate for smaller technologies.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129091932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Transient latchup in power analog circuits","authors":"V. Vashchenko, D. LaFonteese, A. Concannon","doi":"10.1109/IRPS.2011.5784508","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784508","url":null,"abstract":"Two cases of transient latchup specific to power management analog integrated circuit design are described and analyzed experimentally. The representative case studies include the interaction of a power array and ESD clamp and the interaction of two high voltage ESD clamps","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126398679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Kerber, N. Pimparkar, S. Balasubramanian, T. Nigam, W. McMahon, E. Cartier
{"title":"Fast characterization of the Static Noise Margin degradation of cross-coupled inverters and correlation to BTI instabilities in MG/HK devices","authors":"A. Kerber, N. Pimparkar, S. Balasubramanian, T. Nigam, W. McMahon, E. Cartier","doi":"10.1109/IRPS.2011.5784449","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784449","url":null,"abstract":"A fast BTI characterization setup is introduced to study the Static Noise Margin (SNM) of cross-coupled inverters using metal gate / high-k devices. It is shown that static stress leads to significant SNM degradation due to positive bias temperature instability (PBTI) at high stress voltage consistent with device level data. For the dynamic stress mode the bias temperature instability (BTI) induced degradation of the Pull UP and Pull down devices becomes symmetric which can mask the “worst-case” SNM degradation depending on the initial cell symmetry.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126417069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Ahlbin, T. D. Loveless, Dennis R. Ball, Bharat L. Bhuva, A. Witulski, Lloyd W. Massengill, M. Gadlage
{"title":"Double-pulse-single-event transients in combinational logic","authors":"J. Ahlbin, T. D. Loveless, Dennis R. Ball, Bharat L. Bhuva, A. Witulski, Lloyd W. Massengill, M. Gadlage","doi":"10.1109/IRPS.2011.5784486","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784486","url":null,"abstract":"For the first time, double-pulse-single-event transients (DPSETs) are observed during heavy-ion broad beam testing. The transients are generated in a serially connected string of inverters and measured with an autonomous on-chip SET pulse-width measurement circuit. Three-dimensional mixed-mode technology computer aided design (TCAD) simulations show that DPSETs are the result of multiple inverters being upset by a single ion strike.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117211129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Jang, Kyung-do Kim, Min-Soo Yoo, Yong-Taik Kim, S. Cha, Jae-Goan Jeong, Sung-Joo Hong
{"title":"STI stress-induced degradation of data retention time in DRAM and a new characterizing method for mechanical stress","authors":"T. Jang, Kyung-do Kim, Min-Soo Yoo, Yong-Taik Kim, S. Cha, Jae-Goan Jeong, Sung-Joo Hong","doi":"10.1109/IRPS.2011.5784458","DOIUrl":"https://doi.org/10.1109/IRPS.2011.5784458","url":null,"abstract":"The effect of mechanical stress induced by shallow trench isolation (STI) slope on the data retention characteristics of DRAM is investigated and a new electrical parameter for monitoring the mechanical stress is proposed. To maintain high and uniform retention time for the reliable operation of DRAM, the STI slope should not be vertical and should be kept below 86-degree. The new electrical parameter measures the current gain of the parasitic BJT in DRAM cell and shows a strong correlation with the retention time induced by the mechanical stress.","PeriodicalId":242672,"journal":{"name":"2011 International Reliability Physics Symposium","volume":"129 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117092658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}