Microsystems & Nanoengineering最新文献

{"title":"Special Issue 2025: Micro and nano technologies in the UK.","authors":"Ian H White, Tianhong Cui","doi":"10.1038/s41378-025-00965-9","DOIUrl":"10.1038/s41378-025-00965-9","url":null,"abstract":"","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"104"},"PeriodicalIF":7.3,"publicationDate":"2025-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12106690/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144151115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A local de-insulation method and its application in neural microneedle array.","authors":"Xin Zhao, Chunrong Wei, Deguang Zhu, Xiaowei Yang, Guowei Han, Jin Ning, Qiang Gui, Rongyu Tang, Yijun Wang, Jingfeng Zhou, Zhaoxin Geng, Weihua Pei","doi":"10.1038/s41378-025-00922-6","DOIUrl":"10.1038/s41378-025-00922-6","url":null,"abstract":"<p><p>Silicon-based neural microneedle arrays, such as the Utah Array, have demonstrated excellent performance in chronic recordings from the cerebral cortex. Unlike planar thin-film electrodes with recording sites arranged on the surface of a silicon film, the recording sites of microneedle arrays are located at the tips of three-dimensional needles, which significantly complicates the fabrication process required for single-neuron recordings. To address this challenge, we develop a local de-insulation method for microneedle recording electrodes that eliminates the need for etching: the microneedle tips are encapsulated in a controllable-thickness protective layer, followed by deposition of a Parylene-C insulation layer. By optimizing the elasticity of the protection material, as well as its adhesion and shape on both the protective layer and the electrode shaft, we were able to precisely control the area of the removed insulated layers, resulting in consistent tip exposure. Experimental results show that the non-uniformity of the exposed microneedle recording sites in the silicon-based neural microelectrode arrays (each has 10 × 10 array) fabricated using this method is 3.32 ± 1.02%. Furthermore, the arrays exhibited high stability and reliability in both mechanical performance and electrical characteristics. They achieved an average spike signal-to-noise ratio of 12.63 ± 6.64 during in vivo testing. This fabrication technique provides a valuable method for the development of high-performance neural microelectrode array.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"103"},"PeriodicalIF":7.3,"publicationDate":"2025-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12106818/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144151083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation of viscous damping in perforated MEMS devices.","authors":"Zeyu Jia, Yuhao Wang, Xiaoxu Wang, Xiang Xu, Jinshuai Sun, Mengqi Sun, Jian Bai, Wei Huang, Qianbo Lu","doi":"10.1038/s41378-025-00928-0","DOIUrl":"10.1038/s41378-025-00928-0","url":null,"abstract":"<p><p>Perforated structures are widely employed in MEMS devices for dissipation control, energy absorption, and performance optimization. Among these, the damping weakening effect is particularly intriguing, attracting considerable attention and widespread application. Evaluating the impact of perforations on damping is crucial for enhancing the performance of MEMS devices. This paper investigates the damping tuning mechanisms of perforations and presents two theoretical models for accurately predicting viscous damping. The two models exhibit unique advantages under high and low perforation ratios, respectively. Both models account for complex boundary conditions and various hole geometries, including cylindrical, conical, prismatic, and trapezoidal holes. Modeling and simulations demonstrate the complementarity of the two models, enabling accurate viscous damping predictions across nearly all perforation ratios. Subsequently, the theoretical models are validated through a series of vibration tests on perforated oscillators, with errors consistently controlled within 10%. Experimental results demonstrate that perforations can easily achieve a damping reduction of more than one order of magnitude. Moreover, compared to normal cylindrical holes, trapezoidal holes are found to achieve superior damping reduction with a smaller sacrifice in surface area, which holds great potential for capacitive, acoustic, and optical MEMS devices. This work lays the foundation for viscous damping design and optimization of MEMS device dynamics, creating new applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"106"},"PeriodicalIF":7.3,"publicationDate":"2025-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12106816/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144151111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A tough semi-dry hydrogel electrode with anti-bacterial properties for long-term repeatable non-invasive EEG acquisition.","authors":"Dongyang Wang, Hailing Xue, Long Xia, Zongqi Li, Yubo Zhao, Xinan Fan, Kai Sun, Huanan Wang, Timo Hamalainen, Chi Zhang, Fengyu Cong, Yanhua Li, Fei Song, Jiaqi Lin","doi":"10.1038/s41378-025-00908-4","DOIUrl":"10.1038/s41378-025-00908-4","url":null,"abstract":"<p><p>Non-invasive brain-computer interfaces (NI-BCIs) have garnered significant attention due to their safety and wide range of applications. However, developing non-invasive electroencephalogram (EEG) electrodes that are highly sensitive, comfortable to wear, and reusable has been challenging due to the limitations of conventional electrodes. Here, we introduce a simple method for fabricating semi-dry hydrogel EEG electrodes with antibacterial properties, enabling long-term, repeatable acquisition of EEG. By utilizing N-acryloyl glycinamide and hydroxypropyltrimethyl ammonium chloride chitosan, we have prepared electrodes that not only possess good mechanical properties (compression modulus 65 kPa) and anti-fatigue properties but also exhibit superior antibacterial properties. These electrodes effectively inhibit the growth of both Gram-negative (E. coli) and Gram-positive (S. epidermidis) bacteria. Furthermore, the hydrogel maintains stable water retention properties, resulting in an average contact impedance of <400 Ω measured over 12 h, and an ionic conductivity of 0.39 mS cm^-1. Cytotoxicity and skin irritation tests have confirmed the high biocompatibility of the hydrogel electrodes. In an N170 event-related potential (ERP) test on human volunteers, we successfully captured the expected ERP signal waveform and a high signal-to-noise ratio (20.02 dB), comparable to that of conventional wet electrodes. Moreover, contact impedance on the scalps remained below 100 kΩ for 12 h, while wet electrodes became unable to detect signals after 7-8 h due to dehydration. In summary, our hydrogel electrodes are capable of detecting ERPs over extended periods in an easy-to-use manner with antibacterial properties. This reduces the risk of bacterial infection associated with prolonged reuse and expands the potential of NI-BCIs in daily life.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"105"},"PeriodicalIF":7.3,"publicationDate":"2025-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12106760/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144151088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Centrifugation-assisted lateral flow assay platform: enhancing bioassay sensitivity with active flow control.","authors":"Hang Yuan, Ruiqi Yong, Wenwen Yuan, Quan Zhang, Eng Gee Lim, Yongjie Wang, Fuzhou Niu, Pengfei Song","doi":"10.1038/s41378-025-00923-5","DOIUrl":"10.1038/s41378-025-00923-5","url":null,"abstract":"<p><p>Lateral flow assays (LFAs) are widely used in point-of-care testing (POCT) due to their simplicity and rapid operation. However, their reliance on passive capillary flow limits sensitivity, making it challenging to detect low-abundance biomarkers accurately. Approaches such as computer signal processing, chemical modification, and physical regulation have been explored to improve LFA sensitivity, but they remain limited by passive capillary-driven flow and uncontrollable flow rate. An alternative approach is to actively regulate fluid dynamics to optimize analyte binding and signal generation. The key challenge is to enhance LFA sensitivity while preserving compatibility with existing lateral flow strips (LFSs). Here, this study introduces a centrifugation-assisted LFA (CLFA) platform with smartphone-based result processing. This platform applies centrifugal force opposite to capillary flow, actively regulating fluid movement to optimize incubation time at the reaction zone and enhance detection performance. This approach increases signal intensity while maintaining a rapid detection process (5 min) and ensuring integration with traditional LFSs. As a proof-of-concept, the CLFA platform successfully detected human chorionic gonadotropin (hCG) and hemoglobin (Hb) in artificial urine without requiring custom-designed centrifugal discs or modified chromatography membranes. Its adaptability to diverse biomarkers and smartphone-based quantification make it a promising POCT tool, particularly in resource-limited settings.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"101"},"PeriodicalIF":7.3,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12098874/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144128101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming.","authors":"Sheng Yu, Xianfeng Huang, Jiangkun Sun, Peng Xie, Kun Lu, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao","doi":"10.1038/s41378-025-00872-z","DOIUrl":"10.1038/s41378-025-00872-z","url":null,"abstract":"<p><p>The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the frequency mismatch of MSRG can fundamentally be reduced by mechanical trimming. However, it is challenged by the precise characterization. Previous studies about the characterization of frequency mismatch are almost based on frequency spectrum analysis and sweeping, which can only meet the requirement of trimming efficiency of over 100 mHz, limited by the signal noise and temperature drift. In this paper, a novel characterization method of frequency mismatch based on the quadrature-control force under the self-precession mode is proposed to meet the requirement of high-precision mechanical trimming. Furthermore, the phase errors which affect the accuracy of characterization is analyzed, and methods for the correction of phase errors are proposed. Based on this characterization method, 0.32 mHz frequency mismatch of micro-shell resonator is achieved by mechanical trimming, which is the best-reported performance for mechanical trimming of MEMS gyroscopes so far. More importantly, this novel characterization method can be applied for other kinds of resonators which can be mechanical trimmed.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"102"},"PeriodicalIF":7.3,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12098733/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144128100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Engineering in vitro vascular microsystems.","authors":"Qiao Liu, Guoliang Ying, Chenyan Hu, Lingyu Du, Huaiyi Zhang, Zhenye Wang, Hongyan Yue, Ali K Yetisen, Guixue Wang, Yang Shen, Nan Jiang","doi":"10.1038/s41378-025-00956-w","DOIUrl":"10.1038/s41378-025-00956-w","url":null,"abstract":"<p><p>Blood vessels are hierarchical microchannels that transport nutrients and oxygen to different tissues and organs, while also eliminating metabolic waste from the body. Disorders of the vascular system impact both physiological and pathological processes. Conventional animal vascular models are complex, high-cost, time-consuming, and low-validity, which have limited the exploration of effective in vitro vascular microsystems. The morphologies of micro-scaled tubular structures and physiological properties of vascular tissues, including mechanical strength, thrombogenicity, and immunogenicity, can be mimicked in vitro by engineering strategies. This review highlights the state-of-the-art and advanced engineering strategies for in vitro vascular microsystems, covering the domains related to rational designs, manufacturing approaches, supporting materials, and organ-specific cell types. A broad range of biomedical applications of in vitro vascular microsystems are also summarized, including the recent advances in engineered vascularized tissues and organs for physiological and pathological study, drug screening, and personalized medicine. Moreover, the commercialization of in vitro vascular microsystems, the feasibility and limitations of current strategies and commercially available products, as well as perspectives on future directions for exploration, are elaborated. The in vitro modeling of vascular microsystems will facilitate rapid, robust, and efficient analysis in tissue engineering and broader regenerative medicine towards the development of personalized treatment approaches.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"100"},"PeriodicalIF":7.3,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12095634/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144120262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator.","authors":"Jiaxin Qin, Wenliang Xia, Junbo Wang, Deyong Chen, Yulan Lu, Xiaoye Huo, Bo Xie, Jian Chen","doi":"10.1038/s41378-025-00937-z","DOIUrl":"10.1038/s41378-025-00937-z","url":null,"abstract":"<p><p>Wide-range vacuum sensors (0.1-10⁵ Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 10³ Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 10³ Pa to 10⁵ Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"98"},"PeriodicalIF":7.3,"publicationDate":"2025-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12092574/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144111367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators.","authors":"Rui Wang, Lei Han, Man-Na Zhang, Li-Feng Wang, Qing-An Huang","doi":"10.1038/s41378-025-00952-0","DOIUrl":"10.1038/s41378-025-00952-0","url":null,"abstract":"<p><p>Parity-time (PT) symmetric resonators have an exact phase with real frequency eigenvalues and a broken phase with complex-conjugate frequency eigenvalues. In the presence of nonlinear gain, the PT-symmetric resonator exhibits nonreciprocal transmission when it is biased at the broken phase, which promises applications for isolators and circulators in modern communication systems. The nonlinear distortion performance is one of the most important metrics in most electronic applications where linearity is critical. This article provides the first experimental results of nonlinear distortion of nonreciprocal transmission in a pair of electrically coupled silicon micromechanical resonators at the broken phase. The results show the 1 dB gain compression point (P1dB) with 5 dBm and the input-referred third-order intercept point (IIP3) with 11.5 dBm.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"99"},"PeriodicalIF":7.3,"publicationDate":"2025-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12092821/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144111369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On-demand droplet formation at a T-junction: modelling and validation.","authors":"Hongyu Zhao, William Mills, Andrew Glidle, Peng Liang, Bei Li, Jonathan M Cooper, Huabing Yin","doi":"10.1038/s41378-025-00950-2","DOIUrl":"10.1038/s41378-025-00950-2","url":null,"abstract":"<p><p>Droplet microfluidics have found increasing applications across many fields. While droplet generation at a T-junction is a common method, its reliance on trial-and-error operation imposes undesirable constraints on its performance and applicability. In this study, we demonstrate a simple method for on-demand droplet formation at a T-junction with precise temporal control over individual droplet formation. Based on experimental observations, we also develop a physical model to describe the relationships among pressures, droplet generation, device geometry, and interfacial properties. Experimental validation demonstrates excellent performance of the model in predicting the pressure thresholds for switching droplet generation on and off. To address parameter uncertainties arising from real-world complexities, we show that monitoring droplet generation frequency provides a rapid, in situ approach for optimising experimental conditions. Our findings offer valuable guidelines for the design and automation of robust droplet-on-demand microfluidic systems, which can be readily implemented in conventional laboratories for a broad range of applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"94"},"PeriodicalIF":7.3,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12086211/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144094195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}