Microsystems & Nanoengineering最新文献_第5页

A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links. 用于激光星间链路的集成压阻式角度传感器的高性能10 mm直径MEMS快速转向镜。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-29 DOI: 10.1038/s41378-025-00935-1

Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu

{"title":"A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links.","authors":"Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu","doi":"10.1038/s41378-025-00935-1","DOIUrl":"https://doi.org/10.1038/s41378-025-00935-1","url":null,"abstract":"This paper presents a compact and high-performance piezoelectric micro-electro-mechanical system (MEMS) fast steering mirror (FSM) designed for use in laser inter-satellite links (ISLs). The FSM features a large optical aperture of 10 mm and is batch fabricated using an 8-inch wafer-level eutectic bonding process, packaged into a volume of 26 × 22 × 3 mm3. Notably, the piezoresistive (PZR) sensor is integrated on the spring of the FSM to facilitate precise beam control. Furthermore, an intermediate directional defect structure is novelly designed to create a Stress Concentration Region (SCR), effectively improving PZR sensitivity from 3.3 mV/(V∙mrad) to 5.4 mV/(V∙mrad). In this article, various performance metrics of the FSM are tested, including the mechanical characteristics, PZR sensor properties, and mirror optical quality, which all meet the requirements for laser ISLs. Results indicate that the FSM achieves a high resonant frequency (>1 kHz) and a low nonlinearity of 0.05%@ ± 2.1 mrad. A remarkable minimum angular resolution of 0.3 μrad and a repeated positioning accuracy of 1.11 μrad ensure exceptional pointing precision. The open-loop control is driven by the double-step algorithm, resulting in a step response time of 0.41 ms and achieving a control bandwidth over 2 kHz. Additionally, the integrated angular sensor demonstrates a nonlinearity of 0.09%@ ± 1.05 mrad, a sensitivity of 5.1 mV/(V∙mrad), and a minimum angular resolution of 0.3 μrad. Under quasi-static driven conditions (500 Hz @ ± 2 mrad), the maximum dynamic deformation of the mirror surface is merely 2 nm.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"75"},"PeriodicalIF":7.3,"publicationDate":"2025-04-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12038044/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143990212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments. 用于恶劣环境的无引线封装重掺杂n型4H-SiC压力传感器系列的开发。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-28 DOI: 10.1038/s41378-025-00929-z

Lukang Wang, Nuo Wan, Yu Yang, Yabing Wang, You Zhao, Jiaoyang Zhu, Minye Yang, Yi Lyu, Ming Liu, Yulong Zhao

{"title":"Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments.","authors":"Lukang Wang, Nuo Wan, Yu Yang, Yabing Wang, You Zhao, Jiaoyang Zhu, Minye Yang, Yi Lyu, Ming Liu, Yulong Zhao","doi":"10.1038/s41378-025-00929-z","DOIUrl":"https://doi.org/10.1038/s41378-025-00929-z","url":null,"abstract":"In many industries, there is a growing demand for semiconductor pressure sensors capable of operating in harsh environments with extremely high and low temperatures and high vibrations. Utilizing the piezoresistive effect of heavily doped N-type 4H-SiC, we proposed a family design of eight pressure sensor chip structures featuring different diaphragm shapes of circles and squares, along with different piezoresistor configurations. The 4H-SiC piezoresistive pressure sensor was developed using micro-electromechanical systems (MEMS) technology and encapsulated in a leadless package structure via low-stress connection achieved by glass frit sintering. The 4H-SiC pressure sensor demonstrates impressive performance, exhibiting an accuracy of 0.18% FSO and a temperature tolerance range from -50 to 600 °C, with a temperature coefficient of zero output as low as 0.08%/°C at 600 °C. Furthermore, the developed sensor shows remarkable stability under conditions of high-temperature vibration coupling. The advancement of this family of 4H-SiC pressure sensors provides a promising solution for pressure measurement in harsh industrial environments.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"74"},"PeriodicalIF":7.3,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12037772/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143978131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection. 用于能量收集和超低气流检测的超灵敏微热电装置。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-28 DOI: 10.1038/s41378-025-00921-7

Bo Yan, Jiaxiang Wang, Yi Chen, Yahui Li, Xiangxiang Gao, Zhiyuan Hu, Xiaowen Zhou, Mengqiu Li, Zhuoqing Yang, Congchun Zhang

{"title":"Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection.","authors":"Bo Yan, Jiaxiang Wang, Yi Chen, Yahui Li, Xiangxiang Gao, Zhiyuan Hu, Xiaowen Zhou, Mengqiu Li, Zhuoqing Yang, Congchun Zhang","doi":"10.1038/s41378-025-00921-7","DOIUrl":"https://doi.org/10.1038/s41378-025-00921-7","url":null,"abstract":"Micro thermoelectric device (μ-TED) emerges with great attention in energy generation, thermal management, and heat sensing applications. However, the large sensitive area is necessary to accommodate enough thermoelectric couples (TCs) for a high thermoelectric performance. This limits the potential in micro energy harvesting and ultra-sensitive sensing applications. Here, we adopted an optimized MEMS-based process to fabricate the ultra-sensitive micro-thermoelectric device (μ-TED). With the help of MEMS-compatible electrochemical deposition, the small size (25 μm), high aspect ratio (1:1.25), and alternating distributed P/N structures are achieved. As a result, the μ-TED realizes an ultra-high integration density of 19,900 thermoelectric couples per cm2. Moreover, it shows a great thermoelectric sensitivity of 212 mV/(K·cm2) and a competitive power factor of 0.51 μW/(K2·cm2), which means the μ-TED is competent for miniaturized applications. Additionally, the μ-TED shows an ultra-low detection limit of 5 mm/s and a short response time of 100 ms, revealing great potential in fast detections of the ultra-low airflow. Furthermore, the ultra-sensitive μ-TED is utilized as a flexible breath sensor, due to its compact size. The breath signal of different motion states is successfully detected. These results confirm that the ultra-sensitive μ-TED holds outstanding potential for ultra-sensitive airflow sensing and energy harvesting devices.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"73"},"PeriodicalIF":7.3,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12034818/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144022851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor. 无线超声功率传输使用预充电CMUT结构与内置电荷存储电容器。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-23 DOI: 10.1038/s41378-025-00902-w

Muhammetgeldi Annayev, Feysel Yalçın Yamaner, Ömer Oralkan

{"title":"Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor.","authors":"Muhammetgeldi Annayev, Feysel Yalçın Yamaner, Ömer Oralkan","doi":"10.1038/s41378-025-00902-w","DOIUrl":"https://doi.org/10.1038/s41378-025-00902-w","url":null,"abstract":"Capacitive micromachined ultrasonic transducer (CMUT) technology is a potential candidate to implement an ultrasonic power receiver for implantable medical devices (IMDs) because CMUT technology employs photolithography-based microfabrication techniques amenable to miniaturization, integration with electronics, and biocompatibility. Pre-charged CMUTs operating in constant-charge mode eliminate the DC bias and this mode of operation is more suitable for ultrasound power transfer to IMDs. We designed and fabricated a novel pre-charged CMUT structure with a built-in charge storage capacitor. This new configuration features a floating electrode between the upper and lower electrodes. Charges are stored on this floating electrode prior to implantation by directly bringing the floating electrode into contact with the bottom electrode while applying a DC bias between the top and bottom electrodes of the CMUT. After pre-charging the CMUT, the charges are retained without any leakage, as confirmed by occasional measurements over the course of about two years. We have also demonstrated that this device allows operation without a DC bias and can be used as a power receiver in an IMD. In the presented design, the CMUT can be pre-charged at a desired precise charge level. The amount of trapped charge can be controlled by holding the floating electrode in contact with the bottom electrode by applying external ultrasound pressure and simultaneously maintaining a DC bias. The maximum received power was 10.1 mW, corresponding to a received power density of 3.1 mW/mm2, with a 14.5% efficiency. We have achieved an acoustic-to-electrical power conversion efficiency as high as 29.7% at lower input power levels.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"70"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12015486/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144044354","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate. 基于弹性电极衬底的微半球谐振器中不平衡质量的识别与校正。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-23 DOI: 10.1038/s41378-025-00932-4

Yimo Chen, Yan Shi, Xiang Xi, Yang Yu, Kun Lu, Dingbang Xiao, Xuezhong Wu

{"title":"Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate.","authors":"Yimo Chen, Yan Shi, Xiang Xi, Yang Yu, Kun Lu, Dingbang Xiao, Xuezhong Wu","doi":"10.1038/s41378-025-00932-4","DOIUrl":"https://doi.org/10.1038/s41378-025-00932-4","url":null,"abstract":"This study presents a scheme for the identification and trimming of the first three harmonics of mass defects in micro hemispherical resonators (MHRs), aiming to refine their mass balancing techniques. Given the manufacturing and structural uniqueness of MHRs, a multimodal elastic electrode substrate is designed to respond to the first three harmonics. Configured as cantilever beams with a load platform, this substrate forms an identification assembly with the MHR. The radial eccentric forces generated by the 1st and 3rd harmonics in the MHR can excite the swing modes of the assembly, while the axial force generated by the 2nd harmonic can induce axial mode vibrations along the Z-axis. A method is proposed to decompose the vibration information of the elastic electrode substrate into double-cycle, single-cycle, and offset components under the N = 2 modes, enabling the extraction of swing mode and Z-axis translational mode response signals and the retro-calculation of the first three harmonics. Finite element simulation, based on a model of the identification assembly, validates the proposed scheme by simulating the identification and trimming process. Subsequently, an identification assembly sample is fabricated and subjected to identification and trimming of the first three harmonics using a laser vibrometer and femtosecond laser ablation process. After multiple iterations, the first three harmonics are reduced by 92.8%, 89.3%, and 75.5%, respectively, effectively suppressing the swing modes and axial translation modes induced by unbalanced mass.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"71"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12019184/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144017793","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification. 脉冲驱动MEMS气体传感器与机器学习相结合，用于选择性气体识别。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-23 DOI: 10.1038/s41378-025-00934-2

Wenxin Luo, Fa Dai, Yijun Liu, Xin Wang, Mingjie Li

{"title":"Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification.","authors":"Wenxin Luo, Fa Dai, Yijun Liu, Xin Wang, Mingjie Li","doi":"10.1038/s41378-025-00934-2","DOIUrl":"https://doi.org/10.1038/s41378-025-00934-2","url":null,"abstract":"The sensing and identification of trace gases are essential for ensuring chemical safety and protecting human health. This study introduces a low-power electronic nose system that utilizes a single sensor driven by repeated pulsed power inputs, offering a viable alternative to conventional sensor array-based methods. The sensor's compact design and suspended architecture facilitate a rapid thermal response, effectively decoupling the influences of temperature, physisorption, and charge exchange on the conductivity of the sensing material. This mechanism generates distinct gas sensing responses, characterized by alternating dual responses within a single time period. The unique dynamics of the dual signals, which vary with gas type and concentration, enable precise identification of multiple gas species using machine learning (ML) algorithms. Microfabricated through wafer-level batch processing, our innovative electronic nose system holds significant potential for battery-powered mobile devices and IoT-based monitoring applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"72"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12019587/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144012399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application. 带有涂层ZIF-8的多自由度al -on- soi BAW MEMS谐振器，用于气体传感应用。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-23 DOI: 10.1038/s41378-025-00917-3

Linlin Wang, Yuan Wang, Max Tietze, Bernardo Pereira Madeira, Rui P Martins, Pui-In Mak, Nicolas Chanut, Divya Rajagopal, Masaya Sugihara, Rob Ameloot, Chen Wang

{"title":"Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application.","authors":"Linlin Wang, Yuan Wang, Max Tietze, Bernardo Pereira Madeira, Rui P Martins, Pui-In Mak, Nicolas Chanut, Divya Rajagopal, Masaya Sugihara, Rob Ameloot, Chen Wang","doi":"10.1038/s41378-025-00917-3","DOIUrl":"https://doi.org/10.1038/s41378-025-00917-3","url":null,"abstract":"This paper explored the practical utility of gas sensing applications based on the multi-degree-of-freedom (Multi-DoF) bulk acoustic wave (BAW) resonant sensors, including 1, 2, and 3-DoF devices, where piezoelectric actuation and sensing methods were adopted. Zeolitic imidazolate framework-8 (ZIF-8) was chosen for the adsorption and desorption of the ethanol vapor, thereby facilitating the gas sensing mechanism and introducing the external mass changes to the multi-DoF resonating system. Similar to conventional quartz crystal microbalance (QCM) gas sensors, the frequency shift of all the devices (1, 2, and 3-DoF devices) was tracked to characterize the sensitivity. Besides, for the 2 and 3-DoF devices, the amplitude ratio (AR) change was also recorded and observed with an enhancement in performance. Compared with the state-of-the-art gas sensor based on 2-DoFcapacitively coupled resonators, the presented devices achieved better Q factor in air, stability, and resolution in terms of both frequency shifts and AR changes. The dominant mass change (dominant stiffness change in the state-of-the-art) of the proposed resonant devices matched well with the theoretical mass sensing principle, which is both predictable and crucial for the accurate modeling of the practical mass sensor. Furthermore, a lower ethanol vapor concentration from 0.1% to 2% was successfully detected by the proposed 2-DoF device, demonstrating even better sensing performance than that of the state-of-the-art.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"69"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12015448/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143971994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Gecko-inspired soft actuators for wafer handling via overcuring-induced anisotropic microstructures in DLP 3D printing. DLP 3D打印中通过过固化诱导各向异性微结构处理晶圆的壁虎启发软致动器。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-22 DOI: 10.1038/s41378-025-00920-8

Sooheon Kim, Jongwon Kim, Sangbo Seo, Hongyun So

{"title":"Gecko-inspired soft actuators for wafer handling via overcuring-induced anisotropic microstructures in DLP 3D printing.","authors":"Sooheon Kim, Jongwon Kim, Sangbo Seo, Hongyun So","doi":"10.1038/s41378-025-00920-8","DOIUrl":"https://doi.org/10.1038/s41378-025-00920-8","url":null,"abstract":"The anisotropic setae structures of geckos demonstrate a natural anisotropic response to external forces, thereby enabling rapid and repeated attachment and detachment. Considering this biological mechanism, this study proposes an innovative process that harnesses the overcuring of resins in digital light processing (DLP) 3D printing to emulate setae structures. The proposed method facilitates the spontaneous fabrication of anisotropic shapes from isotropically modeled geometries. Furthermore, it reduces the number of hierarchical structures typically produced in conventional 3D printing and creates smooth surfaces, thereby enhancing the structural stability for directional adhesion and detachment. The anisotropic structures were processed into functional surfaces through a double-casting method, exhibiting an adhesive strength akin to that of gecko-setae structures while maintaining easy detachment capabilities. Finally, a simple mechanical module was fabricated to directly demonstrate the detachment effect. This study introduces a novel approach to DLP printing for fabricating enhanced anisotropic structures that can be seamlessly integrated with existing 3D printing techniques. By strategically utilizing overcuring, a phenomenon often perceived as a limitation, this study demonstrated its potential to expand the boundaries of next-generation 3D printing technologies.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"68"},"PeriodicalIF":7.3,"publicationDate":"2025-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12015356/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144027958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Levitation and controlled MHz rotation of a nanofabricated rod by a high-NA metalens. 高na超构透镜对纳米棒的悬浮和可控兆赫旋转。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-21 DOI: 10.1038/s41378-025-00886-7

Hailong Pi, Chuang Sun, Kian Shen Kiang, Tiberius Georgescu, Bruce Jun-Yu Ou, Hendrik Ulbricht, Jize Yan

{"title":"Levitation and controlled MHz rotation of a nanofabricated rod by a high-NA metalens.","authors":"Hailong Pi, Chuang Sun, Kian Shen Kiang, Tiberius Georgescu, Bruce Jun-Yu Ou, Hendrik Ulbricht, Jize Yan","doi":"10.1038/s41378-025-00886-7","DOIUrl":"https://doi.org/10.1038/s41378-025-00886-7","url":null,"abstract":"An optically levitated nanoparticle in a vacuum provides an ideal platform for ultra-precision measurements and fundamental physics studies because of the exceptionally high-quality factor and rich motion modes, which can be engineered by manipulating the optical field and the geometry of the nanoparticle. Nanofabrication technology with the ability to create arbitrary nanostructure arrays offers a precise way of engineering the optical field and the geometry of the nanoparticle. Here, for the first time, we optically levitate and rotate a nanofabricated nanorod via a nanofabricated a-Si metalens which strongly focuses a 1550 nm laser beam with a numerical aperture of 0.953. By manipulating the laser beam's polarization, the levitated nanorod's translation frequencies can be tuned, and the spin rotation mode can be switched on and off. Then, we showed the control of rotational frequency by changing the laser beam's intensity and polarization as well as the air pressure. Finally, a MHz spin rotation frequency of the nanorod is achieved in the experiment. This is the first demonstration of controlled optical spin in a metalens-based compact optical levitation system. Our research holds promise for realizing scalable on-chip integrated optical levitation systems.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"67"},"PeriodicalIF":7.3,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12012181/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143992964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Anti-aliasing multi-bit sigma-delta modulated cobweb-like disk resonator gyroscope with extending input range. 具有扩展输入范围的抗混叠多比特σ - δ调制蛛网状圆盘谐振陀螺仪。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-21 DOI: 10.1038/s41378-025-00919-1

Bo Fan, Shihao Du, Jingchuan Zhou, Zhenghao Lu, Dacheng Xu, Shuwen Guo, Yuyu Tan, Fang Chen

引用次数: 0