Microsystems & Nanoengineering最新文献

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Nanoplasmonic SERS on fidget spinner for digital bacterial identification. 指尖陀螺纳米等离子体SERS用于数字细菌鉴定。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-03 DOI: 10.1038/s41378-025-00870-1
Mamata Karmacharya, Issac Michael, Jiyun Han, Elizabeth Maria Clarissa, Oleksandra Gulenko, Sumit Kumar, Yoon-Kyoung Cho
{"title":"Nanoplasmonic SERS on fidget spinner for digital bacterial identification.","authors":"Mamata Karmacharya, Issac Michael, Jiyun Han, Elizabeth Maria Clarissa, Oleksandra Gulenko, Sumit Kumar, Yoon-Kyoung Cho","doi":"10.1038/s41378-025-00870-1","DOIUrl":"10.1038/s41378-025-00870-1","url":null,"abstract":"<p><p>Raman spectroscopy offers non-destructive and highly sensitive molecular insights into bacterial species, making it a valuable tool for detection, identification, and antibiotic susceptibility testing. However, achieving clinically relevant accuracy, quantitative data, and reproducibility remains challenging due to the dominance of bulk signals and the uncontrollable heterogeneity of analytes. In this study, we introduce an innovative diagnostic tool: a plasmonic fidget spinner (P-FS) incorporating a nitrocellulose membrane integrated with a metallic feature, referred to as a nanoplasmonic-enhanced matrix, designed for simultaneous bacterial filtration and detection. We developed a method to fabricate a plasmonic array patterned nitrocellulose membrane using photolithography, which is then integrated with a customized fidget spinner. Testing the P-FS device with various bacterial species (E. coli 25922, S. aureus 25923, E. coli MG1655, Lactobacillus brevis, and S. mutans 3065) demonstrated successful identification based on their unique Raman fingerprints. The bacterial interface with regions within the plasmonic array, where the electromagnetic field is most intensely concentrated-called nanoplasmonic hotspots-on the P-FS significantly enhances sensitivity, enabling more precise detection. SERS intensity mappings from the Raman spectrometer are transformed into digital signals using a threshold-based approach to identify and quantify bacterial distribution. Given the P-FS's ability to enhance vibrational signatures and its scalable fabrication under routine conditions, we anticipate that nanoplasmonic-enhanced Raman spectroscopy-utilizing nanostructures made from metals (specifically gold and silver) deposited onto a nitrocellulose membrane to amplify Raman scattering signals-will become the preferred technology for reliable and ultrasensitive detection of various analytes, including those crucial to human health, with strong potential for transitioning from laboratory research to clinical applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"38"},"PeriodicalIF":7.3,"publicationDate":"2025-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11873259/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143537345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Brain inspired iontronic fluidic memristive and memcapacitive device for self-powered electronics. 用于自供电电子器件的脑启发离子流体忆阻和忆容装置。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-28 DOI: 10.1038/s41378-025-00882-x
Muhammad Umair Khan, Bilal Hassan, Anas Alazzam, Shimaa Eissa, Baker Mohammad
{"title":"Brain inspired iontronic fluidic memristive and memcapacitive device for self-powered electronics.","authors":"Muhammad Umair Khan, Bilal Hassan, Anas Alazzam, Shimaa Eissa, Baker Mohammad","doi":"10.1038/s41378-025-00882-x","DOIUrl":"10.1038/s41378-025-00882-x","url":null,"abstract":"<p><p>Ionic fluidic devices are gaining interest due to their role in enabling self-powered neuromorphic computing systems. In this study, we present an approach that integrates an iontronic fluidic memristive (IFM) device with low input impedance and a triboelectric nanogenerator (TENG) based on ferrofluid (FF), which has high input impedance. By incorporating contact separation electromagnetic (EMG) signals with low input impedance into our FF TENG device, we enhance the FF TENG's performance by increasing energy harvesting, thereby enabling the autonomous powering of IFM devices for self-powered computing. Further, replicating neuronal activities using artificial iontronic fluidic systems is key to advancing neuromorphic computing. These fluidic devices, composed of soft-matter materials, dynamically adjust their conductance by altering the solution interface. We developed voltage-controlled memristor and memcapacitor memory in polydimethylsiloxane (PDMS) structures, utilising a fluidic interface of FF and polyacrylic acid partial sodium salt (PAA Na<sup>+</sup>). The confined ion interactions in this system induce hysteresis in ion transport across various frequencies, resulting in significant ion memory effects. Our IFM successfully replicates diverse electric pulse patterns, making it highly suitable for neuromorphic computing. Furthermore, our system demonstrates synapse-like learning functions, storing and retrieving short-term (STM) and long-term memory (LTM). The fluidic memristor exhibits dynamic synapse-like features, making it a promising candidate for the hardware implementation of neural networks. FF TENG/EMG device adaptability and seamless integration with biological systems enable the development of advanced neuromorphic devices using iontronic fluidic materials, further enhanced by intricate chemical designs for self-powered electronics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"37"},"PeriodicalIF":7.3,"publicationDate":"2025-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11871289/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143531561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Artificial intelligence-enabled microfluidic cytometer using gravity-driven slug flow for rapid CD4+ T cell quantification in whole blood. 人工智能驱动的微流控细胞仪使用重力驱动的段塞流快速定量全血中CD4+ T细胞。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-28 DOI: 10.1038/s41378-025-00881-y
Desh Deepak Dixit, Tyler P Graf, Kevin J McHugh, Peter B Lillehoj
{"title":"Artificial intelligence-enabled microfluidic cytometer using gravity-driven slug flow for rapid CD4<sup>+</sup> T cell quantification in whole blood.","authors":"Desh Deepak Dixit, Tyler P Graf, Kevin J McHugh, Peter B Lillehoj","doi":"10.1038/s41378-025-00881-y","DOIUrl":"10.1038/s41378-025-00881-y","url":null,"abstract":"<p><p>The quantification of immune cell subpopulations in blood is important for the diagnosis, prognosis and management of various diseases and medical conditions. Flow cytometry is currently the gold standard technique for cell quantification; however, it is laborious, time-consuming and relies on bulky/expensive instrumentation, limiting its use to laboratories in high-resource settings. Microfluidic cytometers offering enhanced portability have been developed that are capable of rapid cell quantification; however, these platforms involve tedious sample preparation and processing protocols and/or require the use of specialized/expensive instrumentation for flow control and cell detection. Here, we report an artificial intelligence-enabled microfluidic cytometer for rapid CD4<sup>+</sup> T cell quantification in whole blood requiring minimal sample preparation and instrumentation. CD4<sup>+</sup> T cells in blood are labeled with anti-CD4 antibody-coated microbeads, which are driven through a microfluidic chip via gravity-driven slug flow, enabling pump-free operation. A video of the sample flowing in the chip is recorded using a microscope camera, which is analyzed using a convolutional neural network-based model that is trained to detect bead-labeled cells in the blood flow. The functionality of this platform was evaluated by analyzing fingerprick blood samples obtained from healthy donors, which revealed its ability to quantify CD4<sup>+</sup> T cells with similar accuracy as flow cytometry (<10% deviation between both methods) while being at least 4× faster, less expensive, and simpler to operate. We envision that this platform can be readily modified to quantify other cell subpopulations in blood by using beads coated with different antibodies, making it a promising tool for performing cell count measurements outside of laboratories and in low-resource settings.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"36"},"PeriodicalIF":7.3,"publicationDate":"2025-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11868388/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143523971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
3D printing of micro-nano devices and their applications. 微纳器件的3D打印及其应用。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-27 DOI: 10.1038/s41378-024-00812-3
Naibo Zhang, Zilai Wang, Zixin Zhao, Dongxing Zhang, Junyu Feng, Linghao Yu, Zhanhong Lin, Qiuquan Guo, Jianming Huang, Junfa Mao, Jun Yang
{"title":"3D printing of micro-nano devices and their applications.","authors":"Naibo Zhang, Zilai Wang, Zixin Zhao, Dongxing Zhang, Junyu Feng, Linghao Yu, Zhanhong Lin, Qiuquan Guo, Jianming Huang, Junfa Mao, Jun Yang","doi":"10.1038/s41378-024-00812-3","DOIUrl":"10.1038/s41378-024-00812-3","url":null,"abstract":"<p><p>In recent years, the utilization of 3D printing technology in micro and nano device manufacturing has garnered significant attention. Advancements in 3D printing have enabled achieving sub-micron level precision. Unlike conventional micro-machining techniques, 3D printing offers versatility in material selection, such as polymers. 3D printing technology has been gradually applied to the general field of microelectronic devices such as sensors, actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturing processes. Furthermore, 3D printing technology has also been instrumental in the fabrication of microfluidic devices, both through direct and indirect processes. This paper provides an overview of the evolving landscape of 3D printing technology, delineating the essential materials and processes involved in fabricating microelectronic and microfluidic devices in recent times. Additionally, it synthesizes the diverse applications of these technologies across different domains.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"35"},"PeriodicalIF":7.3,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11865619/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143516146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hollow fiber-based strain sensors with desirable modulus and sensitivity at effective deformation for dexterous electroelastomer cylindrical actuator. 灵巧电弹性体圆柱形执行器中具有理想模量和有效变形灵敏度的中空纤维应变传感器。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-27 DOI: 10.1038/s41378-025-00878-7
Yang Zhang, Keqi Deng, Tingting Shen, Yong Huang, Zhenjin Xu, Jinhui Zhang, Hang Jin, Xin Liu, Lida Xu, Lianjie Lu, Shiying Li, Daoheng Sun, Dezhi Wu
{"title":"Hollow fiber-based strain sensors with desirable modulus and sensitivity at effective deformation for dexterous electroelastomer cylindrical actuator.","authors":"Yang Zhang, Keqi Deng, Tingting Shen, Yong Huang, Zhenjin Xu, Jinhui Zhang, Hang Jin, Xin Liu, Lida Xu, Lianjie Lu, Shiying Li, Daoheng Sun, Dezhi Wu","doi":"10.1038/s41378-025-00878-7","DOIUrl":"10.1038/s41378-025-00878-7","url":null,"abstract":"<p><p>The electroelastomer cylindrical actuators, a typical representation of soft actuators, have recently aroused increasing interest owing to their advantages in flexibility, deformability, and spatial utilization rate. Proprioception is crucial for controlling and monitoring the shape and position of these actuators. However, most existing flexible sensors have a modulus mismatch with the actuation unit, hindering the free movement of these actuators. Herein, a low-modulus strain sensor based on laser-induced cellular graphitic flakes (CGF) onto the surface of hollow TPU fibers (HTF) is present. Through the electrostatic self-assembly technology, the flexible sensor features a unique hybrid sensing unit including soft HTF as substrate and rigid CGF as conductive path. As a result, the sensor simultaneously possesses desirable modulus (~0.155 MPa), a gauge factor of 220.3 (25% < ε < 50%), fast response/recovery behaviors (31/62 ms), and a low detection limit (0.1% strain). Integrating the sensor onto the electroelastomer cylindrical actuators enables precise measurement of deformation modes, directions, and quantity. As proof-of-concept demonstrations, a prototype soft robot with high-precision perception is successfully designed, achieving real-time detection of its deformations during the crawling process. Thus, the proposed scheme sheds new light on the development of intelligent soft robots.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"34"},"PeriodicalIF":7.3,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11865588/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143516151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes. 工具包集成毫米大小的微流体生物医学设备与多个膜和电极。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-27 DOI: 10.1038/s41378-025-00871-0
Xudong Tao, Tobias E Naegele, Etienne Rognin, Niamh Willis-Fox, Poppy Oldroyd, Chaoqun Dong, Stefany Kissovsky, Antonio Dominguez-Alfaro, Santiago Velasco-Bosom, Ronan Daly, George G Malliaras
{"title":"Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes.","authors":"Xudong Tao, Tobias E Naegele, Etienne Rognin, Niamh Willis-Fox, Poppy Oldroyd, Chaoqun Dong, Stefany Kissovsky, Antonio Dominguez-Alfaro, Santiago Velasco-Bosom, Ronan Daly, George G Malliaras","doi":"10.1038/s41378-025-00871-0","DOIUrl":"10.1038/s41378-025-00871-0","url":null,"abstract":"<p><p>In recent years, microfluidic systems have evolved to incorporate increasingly complex multi-layer and multi-material structures. While conventional 2-dimensional microfluidic systems are typically fabricated with lithographic techniques, the increase in system complexity necessitates a more versatile set of fabrication techniques. Similarly, although 3D printing can easily produce intricate microfluidic geometries, integrating multiple membranes and electrode components remains challenging. This study proposes a toolkit for fabricating free-standing 3-dimensional microfluidic systems for biomedical devices, incorporating flow channels, electrodes, and membranes. The fabrication techniques include molding separation using 3D printed molds, laser-based processing, and component assembly, each achieving micron resolution. Here, we introduce a novel approach to integrate membranes into microfluidics by directly curing elastomer-based microfluidics with the membrane through replica molding, while preserving membrane functionality by effectively removing elastomer residues through reactive ion etching. The resulting membrane-elastomer microfluidic component significantly simplifies the assembly of intricate microfluidic systems, reducing the device size to millimeter dimensions, suitable for implantable applications. The toolkit's versatility is demonstrated by a redox flow iontophoretic drug delivery prototype at the millimeter scale, featuring two electrodes, four membranes, and four microfluidic channels.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"33"},"PeriodicalIF":7.3,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11865549/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143516161","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transparent, flexible graphene-ITO-based neural microelectrodes for simultaneous electrophysiology recording and calcium imaging of intracortical neural activity in freely moving mice. 透明、柔性石墨烯- ito神经微电极,用于同时记录自由运动小鼠皮质内神经活动的电生理和钙成像。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-25 DOI: 10.1038/s41378-025-00873-y
Miao Yuan, Fei Li, Feng Xue, Yang Wang, Baoqiang Li, Rongyu Tang, Yijun Wang, Guo-Qiang Bi, Weihua Pei
{"title":"Transparent, flexible graphene-ITO-based neural microelectrodes for simultaneous electrophysiology recording and calcium imaging of intracortical neural activity in freely moving mice.","authors":"Miao Yuan, Fei Li, Feng Xue, Yang Wang, Baoqiang Li, Rongyu Tang, Yijun Wang, Guo-Qiang Bi, Weihua Pei","doi":"10.1038/s41378-025-00873-y","DOIUrl":"10.1038/s41378-025-00873-y","url":null,"abstract":"<p><p>To understand the complex dynamics of neural activity in the brain across various temporal and spatial scales, it is crucial to record intracortical multimodal neural activity by combining electrophysiological recording and calcium imaging techniques. This poses significant constraints on the geometrical, mechanical, and optical properties of the electrodes. Here, transparent flexible graphene-ITO-based neural microelectrodes with small feature sizes are developed and validated for simultaneous electrophysiology recording and calcium imaging in the hippocampus of freely moving mice. A micro-etching technique and an oxygen plasma pre-treating method are introduced to facilitate large-area graphene transfer and establish stable low-impedance contacts between graphene and metals, leading to the batch production of high-quality microelectrodes with interconnect widths of 10 μm and recording sites diameters of 20 μm. These electrodes exhibit appropriate impedance and sufficient transparency in the field of view, enabling simultaneous recording of intracortical local field potentials and even action potentials along with calcium imaging in freely moving mice. Both types of electrophysiological signals are found to correlate with calcium activity. This proof-of-concept work demonstrates that transparent flexible graphene-ITO-based neural microelectrodes are promising tools for multimodal neuroscience research.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"32"},"PeriodicalIF":7.3,"publicationDate":"2025-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11850855/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143492949","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dual-mode temperature monitoring using high-performance flexible thermocouple sensors based on PEDOT:PSS/CNTs and MXene/Bi2Se3. 采用基于PEDOT:PSS/CNTs和MXene/Bi2Se3的高性能柔性热电偶传感器进行双模式温度监测。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-25 DOI: 10.1038/s41378-025-00867-w
Baichuan Sun, Gaobin Xu, Zhaohui Yang, Cunhe Guan, Xu Ji, Shirong Chen, Xing Chen, Yuanming Ma, Jianguo Feng
{"title":"Dual-mode temperature monitoring using high-performance flexible thermocouple sensors based on PEDOT:PSS/CNTs and MXene/Bi<sub>2</sub>Se<sub>3</sub>.","authors":"Baichuan Sun, Gaobin Xu, Zhaohui Yang, Cunhe Guan, Xu Ji, Shirong Chen, Xing Chen, Yuanming Ma, Jianguo Feng","doi":"10.1038/s41378-025-00867-w","DOIUrl":"10.1038/s41378-025-00867-w","url":null,"abstract":"<p><p>Due to the limited thermoelectric (TE) performance of polymer materials and the inherent rigidity of inorganic materials, developing low-cost, highly flexible, and high-performance materials for flexible thermocouple sensors (FTCSs) remains challenging. Additionally, dual-mode (contact/non-contact) temperature monitoring in FTCSs is underexplored. This study addresses these issues by using p-type (PEDOT:PSS/CNTs, 2:1) and n-type (MXene/Bi<sub>2</sub>Se<sub>3</sub>, 2:1) TE materials applied via screen printing and compression onto a PPSN substrate (paper/PDMS/Si<sub>3</sub>N₄). The resulting FTCSs exhibit excellent TE properties: electrical conductivities of 61,197.88 S/m (n-type) and 55,697.77 S/m (p-type), Seebeck coefficients of 39.88 μV/K and -29.45 μV/K, and power factors (PFs) of 97.66 μW/mK² and 55.64 μW/mK², respectively. In contact mode, the sensor shows high-temperature sensitivity (S<sub>T</sub> = 379.5 μV/°C), a broad detection range (20-200 °C), high resolution (~0.3 °C), and fast response (~12.6 ms). In non-contact mode, it maintains good sensitivity (S<sub>Tmax</sub> = 52.67 μV/°C), a broad detection range, high resolution (~0.8 °C), and even faster response (~9.8 ms). The sensor also demonstrates strong mechanical durability, maintaining stable performance after 1000 bending cycles. When applied to dual-mode temperature monitoring in wearable devices and lithium batteries, the FTCS shows high accuracy and reliability compared to commercial K-type thermocouples, indicating significant potential for advanced medical monitoring systems and smart home technologies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"31"},"PeriodicalIF":7.3,"publicationDate":"2025-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11850902/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143492947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators. 利用热压阻式微机械谐振器的谐波提取机械品质因子并消除馈通。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-20 DOI: 10.1038/s41378-025-00869-8
Geer Teng, Chenhao Yang, Aojie Quan, Chengxin Li, Haojie Li, Yuxuan Cheng, Honglong Chang, Michael Kraft, Hemin Zhang
{"title":"Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators.","authors":"Geer Teng, Chenhao Yang, Aojie Quan, Chengxin Li, Haojie Li, Yuxuan Cheng, Honglong Chang, Michael Kraft, Hemin Zhang","doi":"10.1038/s41378-025-00869-8","DOIUrl":"10.1038/s41378-025-00869-8","url":null,"abstract":"<p><p>Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting simple self-oscillation and better sensing performance in the air. However, the ratio of the pumped effective quality factor to the inherent mechanical quality factor, crucial for characterizing the amplification, is hard to obtain. The main difficulty stems from hidden Lorentz peaks caused by feedthrough effects and the pump effect once the current is applied. In this paper, we demonstrated the presence of high-order harmonic components in the output of thermal-piezoresistive resonators when the oscillation amplitude is sufficiently large. By utilizing second-order harmonics, we achieved the improvement in signal-to-bias ratio of, 20.85 dB compared to that without feedthrough cancellation and 9.67 dB compared to that using a de-embedded method when the bias current is 6.20 mA. Furthermore, the inherent mechanical quality factor is extracted at a low current of 1.8 mA with a value of 5800 using the second-order harmonics, and a nearly two orders of magnitude enhancement in Q factor can be obtained before entering the self-oscillation regime. An amplitude bias instability as good as 55 ppm and a frequency bias instability as good as 10 ppb are realized in the nonlinear operation regime with a pumped effective quality factor of 576k. The paper contributes to the fundamental understanding of the Q pump effect together with harmonic analysis of the thermal-piezoresistive resonators and also pushes forward the development of low-power consumption self-oscillation resonant sensors.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"30"},"PeriodicalIF":7.3,"publicationDate":"2025-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11842816/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143468070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and developing a robot-assisted cell batch microinjection system for zebrafish embryo. 设计和开发用于斑马鱼胚胎的机器人辅助细胞批量显微注射系统。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-02-20 DOI: 10.1038/s41378-024-00809-y
Xiangyu Guo, Antian Zhao, Youchao Zhang, Huanyu Jiang, Longhua Tang, Bo Lu, Yibin Ying, Mingchuan Zhou
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