Microsystems & Nanoengineering最新文献_第10页

Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle. 灵活的大范围多维力传感器，灵感来自嵌入肌肉的骨骼。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-22 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00711-7

Jie Zhang, Xiaojuan Hou, Shuo Qian, Jiabing Huo, Mengjiao Yuan, Zhigang Duan, Xiaoguang Song, Hui Wu, Shuzheng Shi, Wenping Geng, Jiliang Mu, Jian He, Xiujian Chou

{"title":"Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle.","authors":"Jie Zhang, Xiaojuan Hou, Shuo Qian, Jiabing Huo, Mengjiao Yuan, Zhigang Duan, Xiaoguang Song, Hui Wu, Shuzheng Shi, Wenping Geng, Jiliang Mu, Jian He, Xiujian Chou","doi":"10.1038/s41378-024-00711-7","DOIUrl":"10.1038/s41378-024-00711-7","url":null,"abstract":"Flexible sensors have been widely studied for use in motion monitoring, human‒machine interactions (HMIs), personalized medicine, and soft intelligent robots. However, their practical application is limited by their low output performance, narrow measuring range, and unidirectional force detection. Here, to achieve flexibility and high performance simultaneously, we developed a flexible wide-range multidimensional force sensor (FWMFS) similar to bones embedded in muscle structures. The adjustable magnetic field endows the FWMFS with multidimensional perception for detecting forces in different directions. The multilayer stacked coils significantly improved the output from the μV to the mV level while ensuring FWMFS miniaturization. The optimized FWMFS exhibited a high voltage sensitivity of 0.227 mV/N (0.5-8.4 N) and 0.047 mV/N (8.4-60 N) in response to normal forces ranging from 0.5 N to 60 N and could detect lateral forces ranging from 0.2-1.1 N and voltage sensitivities of 1.039 mV/N (0.2-0.5 N) and 0.194 mV/N (0.5-1.1 N). In terms of normal force measurements, the FWMFS can monitor finger pressure and sliding trajectories in response to finger taps, as well as measure plantar pressure for assessing human movement. The plantar pressure signals of five human movements collected by the FWMFS were analyzed using the k-nearest neighbors classification algorithm, which achieved a recognition accuracy of 92%. Additionally, an artificial intelligence biometric authentication system is being developed that classifies and recognizes user passwords. Based on the lateral force measurement ability of the FWMFS, the direction of ball movement can be distinguished, and communication systems such as Morse Code can be expanded. This research has significant potential in intelligent sensing and personalized spatial recognition.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"64"},"PeriodicalIF":7.9,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11111798/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141088005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrochemical protein biosensors for disease marker detection: progress and opportunities. 用于疾病标志物检测的电化学蛋白质生物传感器：进展与机遇。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-22 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00700-w

Lanpeng Guo, Yunong Zhao, Qing Huang, Jing Huang, Yanbing Tao, Jianjun Chen, Hua-Yao Li, Huan Liu

{"title":"Electrochemical protein biosensors for disease marker detection: progress and opportunities.","authors":"Lanpeng Guo, Yunong Zhao, Qing Huang, Jing Huang, Yanbing Tao, Jianjun Chen, Hua-Yao Li, Huan Liu","doi":"10.1038/s41378-024-00700-w","DOIUrl":"10.1038/s41378-024-00700-w","url":null,"abstract":"The development of artificial intelligence-enabled medical health care has created both opportunities and challenges for next-generation biosensor technology. Proteins are extensively used as biological macromolecular markers in disease diagnosis and the analysis of therapeutic effects. Electrochemical protein biosensors have achieved desirable specificity by using the specific antibody-antigen binding principle in immunology. However, the active centers of protein biomarkers are surrounded by a peptide matrix, which hinders charge transfer and results in insufficient sensor sensitivity. Therefore, electrode-modified materials and transducer devices have been designed to increase the sensitivity and improve the practical application prospects of electrochemical protein sensors. In this review, we summarize recent reports of electrochemical biosensors for protein biomarker detection. We highlight the latest research on electrochemical protein biosensors for the detection of cancer, viral infectious diseases, inflammation, and other diseases. The corresponding sensitive materials, transducer structures, and detection principles associated with such biosensors are also addressed generally. Finally, we present an outlook on the use of electrochemical protein biosensors for disease marker detection for the next few years.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"65"},"PeriodicalIF":7.9,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11111687/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141088003","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors. 在临时锚的辅助下提高线性微镜阵列产量的新制造方法。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-20 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00679-4

Xingchen Xiao, Ting Mao, Yingchao Shi, Kui Zhou, Jia Hao, Yiting Yu

{"title":"A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors.","authors":"Xingchen Xiao, Ting Mao, Yingchao Shi, Kui Zhou, Jia Hao, Yiting Yu","doi":"10.1038/s41378-024-00679-4","DOIUrl":"10.1038/s41378-024-00679-4","url":null,"abstract":"As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based on microelectromechanical system (MEMS) processes are currently utilized in many fields. However, two crucial challenges exist in the fabrication of such devices: the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual stress. To solve these issues, an innovative processing method assisted by temporary anchors is presented. This approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon film. Importantly, these temporary anchors are strategically placed within the primary etching areas, enabling easy removal without additional processing steps. As a result, we successfully achieved wafer-level, high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%. Demonstrating superior capabilities to those of original MMAs, our enhanced version boasts a total of 60 linear micromirror elements, each featuring a length-to-width ratio of 52.6, and the entire optical aperture measures 5 mm × 6 mm. The linear MMA exhibits an optical deflection angle of 20.4° at 110 Vdc while maintaining exceptional deflection flatness and uniformity. This study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields, and the proposed MMA is promising as a replacement for digital micromirror devices (DMDs, by TI Corp.) in fields such as spectral imaging and optical communication.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"63"},"PeriodicalIF":7.9,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11102899/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141070655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

SPEED: an integrated, smartphone-operated, handheld digital PCR Device for point-of-care testing. SPEED：用于床旁检测的集成式、智能手机操作的手持数字 PCR 设备。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-20 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00689-2

Haoqing Zhang, Xiaocheng Liu, Xinlu Wang, Zhiqiang Yan, Ying Xu, Martina Gaňová, Tomáš Řezníček, Marie Korabečná, Pavel Neuzil

{"title":"SPEED: an integrated, smartphone-operated, handheld digital PCR Device for point-of-care testing.","authors":"Haoqing Zhang, Xiaocheng Liu, Xinlu Wang, Zhiqiang Yan, Ying Xu, Martina Gaňová, Tomáš Řezníček, Marie Korabečná, Pavel Neuzil","doi":"10.1038/s41378-024-00689-2","DOIUrl":"10.1038/s41378-024-00689-2","url":null,"abstract":"This study elaborates on the design, fabrication, and data analysis details of SPEED, a recently proposed smartphone-based digital polymerase chain reaction (dPCR) device. The dPCR chips incorporate partition diameters ranging from 50 μm to 5 μm, and these partitions are organized into six distinct blocks to facilitate image processing. Due to the superior thermal conductivity of Si and its potential for mass production, the dPCR chips were fabricated on a Si substrate. A temperature control system based on a high-power density Peltier element and a preheating/cooling PCR protocol user interface shortening the thermal cycle time. The optical design employs four 470 nm light-emitting diodes as light sources, with filters and mirrors effectively managing the light emitted during PCR. An algorithm is utilized for image processing and illumination nonuniformity correction including conversion to a monochromatic format, partition identification, skew correction, and the generation of an image correction mask. We validated the device using a range of deoxyribonucleic acid targets, demonstrating its potential applicability across multiple fields. Therefore, we provide guidance and verification of the design and testing of the recently proposed SPEED device.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"62"},"PeriodicalIF":7.9,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11102901/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141070749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems. 具有高灵敏度、宽带宽和低噪音密度的聚合物压电加速度计，适用于有机电子产品和可穿戴微型系统。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-15 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00704-6

Chang Ge, Edmond Cretu

{"title":"Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems.","authors":"Chang Ge, Edmond Cretu","doi":"10.1038/s41378-024-00704-6","DOIUrl":"10.1038/s41378-024-00704-6","url":null,"abstract":"Piezoelectric accelerometers excel in vibration sensing. In the emerging trend of fully organic electronic microsystems, polymeric piezoelectric accelerometers can be used as vital front-end components to capture dynamic signals, such as vocal vibrations in wearable speaking assistants for those with speaking difficulties. However, high-performance polymeric piezoelectric accelerometers suitable for such applications are rare. Piezoelectric organic compounds such as PVDF have inferior properties to their inorganic counterparts such as PZT. Consequently, most existing polymeric piezoelectric accelerometers have very unbalanced performance metrics. They often sacrifice resonance frequency and bandwidth for a flat-band sensitivity comparable to those of PZT-based accelerometers, leading to increased noise density and limited application potentials. In this study, a new polymeric piezoelectric accelerometer design to overcome the material limitations of PVDF is introduced. This new design aims to simultaneously achieve high sensitivity, broad bandwidth, and low noise. Five samples were manufactured and characterized, demonstrating an average sensitivity of 29.45 pC/g within a ± 10 g input range, a 5% flat band of 160 Hz, and an in-band noise density of 1.4 µg/<math><msqrt><mrow><mi>Hz</mi></mrow></msqrt></math>. These results surpass those of many PZT-based piezoelectric accelerometers, showing the feasibility of achieving comprehensively high performance in polymeric piezoelectric accelerometers to increase their potential in novel applications such as organic microsystems.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"61"},"PeriodicalIF":7.9,"publicationDate":"2024-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11093978/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140945510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings. 方位旋转控制的纳米刻蚀技术，用于周期和形状可调的非对称纳米格拉特的连续图案化。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-11 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00687-4

Useung Lee, Hyein Kim, Dong Kyo Oh, Nayeong Lee, Jonggab Park, Jaewon Park, Hyunji Son, Hyunchan Noh, Junsuk Rho, Jong G Ok

{"title":"Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings.","authors":"Useung Lee, Hyein Kim, Dong Kyo Oh, Nayeong Lee, Jonggab Park, Jaewon Park, Hyunji Son, Hyunchan Noh, Junsuk Rho, Jong G Ok","doi":"10.1038/s41378-024-00687-4","DOIUrl":"10.1038/s41378-024-00687-4","url":null,"abstract":"We present an azimuthal-rotation-controlled dynamic nanoinscribing (ARC-DNI) process for continuous and scalable fabrication of asymmetric nanograting structures with tunable periods and shape profiles. A sliced edge of a nanograting mold, which typically has a rectangular grating profile, slides over a polymeric substrate to induce its burr-free plastic deformation into a linear nanopattern. During this continuous nanoinscribing process, the \"azimuthal angle,\" that is, the angle between the moving direction of the polymeric substrate and the mold's grating line orientation, can be controlled to tailor the period, geometrical shape, and profile of the inscribed nanopatterns. By modulating the azimuthal angle, along with other important ARC-DNI parameters such as temperature, force, and inscribing speed, we demonstrate that the mold-opening profile and temperature- and time-dependent viscoelastic polymer reflow can be controlled to fabricate asymmetric, blazed, and slanted nanogratings that have diverse geometrical profiles such as trapezoidal, triangular, and parallelogrammatic. Finally, period- and profile-tunable ARC-DNI can be utilized for the practical fabrication of diverse optical devices, as is exemplified by asymmetric diffractive optical elements in this study.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"60"},"PeriodicalIF":7.9,"publicationDate":"2024-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11088629/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140912400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Acoustofluidic scanning fluorescence nanoscopy with a large field of view. 大视场声流体扫描荧光纳米镜。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-10 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00683-8

Geonsoo Jin, Neil Upreti, Joseph Rich, Jianping Xia, Chenglong Zhao, Tony Jun Huang

{"title":"Acoustofluidic scanning fluorescence nanoscopy with a large field of view.","authors":"Geonsoo Jin, Neil Upreti, Joseph Rich, Jianping Xia, Chenglong Zhao, Tony Jun Huang","doi":"10.1038/s41378-024-00683-8","DOIUrl":"10.1038/s41378-024-00683-8","url":null,"abstract":"Large-field nanoscale fluorescence imaging is invaluable for many applications, such as imaging subcellular structures, visualizing protein interactions, and high-resolution tissue imaging. Unfortunately, conventional fluorescence microscopy requires a trade-off between resolution and field of view due to the nature of the optics used to form the image. To overcome this barrier, we developed an acoustofluidic scanning fluorescence nanoscope that simultaneously achieves superior resolution, a large field of view, and strong fluorescent signals. The acoustofluidic scanning fluorescence nanoscope utilizes the superresolution capabilities of microspheres that are controlled by a programmable acoustofluidic device for rapid fluorescence enhancement and imaging. The acoustofluidic scanning fluorescence nanoscope resolves structures that cannot be resolved with conventional fluorescence microscopes with the same objective lens and enhances the fluorescent signal by a factor of ~5 without altering the field of view of the image. The improved resolution realized with enhanced fluorescent signals and the large field of view achieved via acoustofluidic scanning fluorescence nanoscopy provides a powerful tool for versatile nanoscale fluorescence imaging for researchers in the fields of medicine, biology, biophysics, and biomedical engineering.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"59"},"PeriodicalIF":7.9,"publicationDate":"2024-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11081950/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140912398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator. 基于硅基氮化铝 MEMS 谐振器的单结构三轴洛伦兹力磁力计。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-09 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00696-3

Cheng Tu, Xu-Heng Ou-Yang, Ying-Jie Wu, Xiao-Sheng Zhang

{"title":"Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator.","authors":"Cheng Tu, Xu-Heng Ou-Yang, Ying-Jie Wu, Xiao-Sheng Zhang","doi":"10.1038/s41378-024-00696-3","DOIUrl":"10.1038/s41378-024-00696-3","url":null,"abstract":"This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible manipulation of applied excitation currents in different directions and frequencies, enabling the effective actuation of two mechanical vibration modes in a single device for magnetic field measurements in three axes. Specifically, the excited out-of-plane drum-like mode at 277 kHz is used for measuring the x- and y-axis magnetic fields, while the in-plane square-extensional mode at 5.4 MHz is used for measuring the z-axis magnetic field. The different configurations of applied excitation currents ensure good cross-interference immunity among the three axes. Compared to conventional capacitive LFMs, the proposed piezoelectric LFM utilizes strong electromechanical coupling from the AlN layer, which allows it to operate at ambient pressure with a high sensitivity. To understand and analyze the measured results, a novel equivalent circuit model for the proposed LFM is also reported in this work, which serves to separate the effect of Lorentz force from the unwanted capacitive feedthrough. The demonstrated 3-axis LFM exhibits measured magnetic responsivities of 1.74 ppm/mT, 1.83 ppm/mT and 6.75 ppm/mT in the x-, y- and z-axes, respectively, which are comparable to their capacitive counterparts.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"58"},"PeriodicalIF":7.9,"publicationDate":"2024-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11079019/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140897314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bioinspired integrated triboelectric electronic tongue. 受生物启发的集成三电电子舌。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-08 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00690-9

Jiaming Liu, Jingui Qian, Murtazt Adil, Yali Bi, Haoyi Wu, Xuefeng Hu, Zuankai Wang, Wei Zhang

{"title":"Bioinspired integrated triboelectric electronic tongue.","authors":"Jiaming Liu, Jingui Qian, Murtazt Adil, Yali Bi, Haoyi Wu, Xuefeng Hu, Zuankai Wang, Wei Zhang","doi":"10.1038/s41378-024-00690-9","DOIUrl":"10.1038/s41378-024-00690-9","url":null,"abstract":"An electronic tongue (E-tongue) comprises a series of sensors that simulate human perception of taste and embedded artificial intelligence (AI) for data analysis and recognition. Traditional E-tongues based on electrochemical methods suffer from a bulky size and require larger sample volumes and extra power sources, limiting their applications in in vivo medical diagnosis and analytical chemistry. Inspired by the mechanics of the human tongue, triboelectric components have been incorporated into E-tongue platforms to overcome these limitations. In this study, an integrated multichannel triboelectric bioinspired E-tongue (TBIET) device was developed on a single glass slide chip to improve the device's taste classification accuracy by utilizing numerous sensory signals. The detection capability of the TBIET was further validated using various test samples, including representative human body, environmental, and beverage samples. The TBIET achieved a remarkably high classification accuracy. For instance, chemical solutions showed 100% identification accuracy, environmental samples reached 98.3% accuracy, and four typical teas demonstrated 97.0% accuracy. Additionally, the classification accuracy of NaCl solutions with five different concentrations reached 96.9%. The innovative TBIET exhibits a remarkable capacity to detect and analyze droplets with ultrahigh sensitivity to their electrical properties. Moreover, it offers a high degree of reliability in accurately detecting and analyzing various liquid samples within a short timeframe. The development of a self-powered portable triboelectric E-tongue prototype is a notable advancement in the field and is one that can greatly enhance the feasibility of rapid on-site detection of liquid samples in various settings.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"57"},"PeriodicalIF":7.9,"publicationDate":"2024-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11079038/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140897067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Unraveling the nature of sensing in electrostatic MEMS gas sensors. 揭示静电 MEMS 气体传感器的传感本质。

IF 7.9 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-05-06 eCollection Date: 2024-01-01 DOI: 10.1038/s41378-024-00688-3

Yasser S Shama, Sasan Rahmanian, Hamza Mouharrar, Rana Abdelrahman, Alaaeldin Elhady, Eihab M Abdel-Rahman

{"title":"Unraveling the nature of sensing in electrostatic MEMS gas sensors.","authors":"Yasser S Shama, Sasan Rahmanian, Hamza Mouharrar, Rana Abdelrahman, Alaaeldin Elhady, Eihab M Abdel-Rahman","doi":"10.1038/s41378-024-00688-3","DOIUrl":"10.1038/s41378-024-00688-3","url":null,"abstract":"This paper investigates the fundamental sensing mechanism of electrostatic MEMS gas sensors. It compares among the responsivities of a set of MEMS isopropanol sensors before and after functionalization, and in the presence and absence of electrostatic fields when operated in static and dynamic detection modes. In the static mode, we found that the sensors do not exhibit a measurable change in displacement due to added mass. On the other hand, bare sensors showed a clear change in displacement in response to isopropanol vapor. In the dynamic mode, functionalized sensors showed a measurable frequency shift due to the added mass of isopropanol vapor. In the presence of strong electrostatic fields, the measured frequency shift was found to be threefold larger than that in their absence in response to the same concentration of isopropanol vapor. The enhanced responsivity of dynamic detection allows the sensors to measure the vapor mass captured by the functional material, which is not the case for static detection. The detection of isopropanol by bare sensors in static mode shows that change in the medium permittivity is the primary sensing mechanism. The enhanced responsivity of dynamic mode sensors when operated in strong electrostatic fields shows that their sensing mechanism is a combination of a weaker added mass effect and a stronger permittivity effect. These findings show that electrostatic MEMS gas sensors are independent of the direction of the gravitational field and are, thus, robust to changes in alignment. It is erroneous to refer to them as 'gravimetric' sensors.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 ","pages":"56"},"PeriodicalIF":7.9,"publicationDate":"2024-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11074296/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140876825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0