Microsystems & Nanoengineering最新文献

{"title":"A passive flow microreactor for urine creatinine test.","authors":"Dumitru Tomsa, Yang Liu, Amanda Stefanson, Xiaoou Ren, AbdulRazaq A H Sokoro, Paul Komenda, Navdeep Tangri, Rene P Zahedi, Claudio Rigatto, Francis Lin","doi":"10.1038/s41378-025-00880-z","DOIUrl":"10.1038/s41378-025-00880-z","url":null,"abstract":"<p><p>Chronic kidney disease (CKD) significantly affects people's health and quality of life and presents a high economic burden worldwide. There are well-established biomarkers for CKD diagnosis. However, the existing routine standard tests are lab-based and governed by strict regulations. Creatinine is commonly measured as a filtration biomarker in blood to determine estimated Glomerular Filtration Rate (eGFR), as well as a normalization factor to calculate urinary Albumin-to-Creatinine Ratio (uACR) for CKD evaluation. In this study, we developed a passive flow microreactor for colorimetric urine creatinine measurement (uCR-Chip), which is highly amenable to integration with our previously developed microfluidic urine albumin assay. The combination of the 2-phase pressure compensation (2-PPC) technique and microfluidic channel network design accurately controls the fluidic mixing ratio and chemical reaction. Together with an optimized observation window (OW) design, a uniform and stable detection signal was achieved within 7 min. The color signal was measured by a simple USB microscope-based platform to quantify creatinine concentration in the sample. The combination of the custom in-house photomask production techniques and dry-film photoresist-based lithography enabled rapid iterative design optimization and precise chip fabrication. The developed assay achieved a dynamic linear detection range up to 40 mM and a lower limit of detection (LOD) of 0.521 mM, meeting the clinical precision requirements (comparable to existing point-of-care (PoC) systems). The microreactor was validated using creatinine standards spiked into commercial artificial urine that mimics physiological matrix. Our results showed acceptable recovery rate and low matrix effect, especially for the low creatinine concentration range in comparison to a commercial PoC uACR test. Altogether, the developed uCR-Chip offers a viable PoC test for CKD assessment and provides a potential platform technology to measure various disease biomarkers.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"56"},"PeriodicalIF":7.3,"publicationDate":"2025-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11965425/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143772885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor.","authors":"Qing Wang, Zhou Zhou, Jizhang He, Liang Zhuo, Chenlin Zhu, Wenjie Qian, Wei Shi, Daoheng Sun","doi":"10.1038/s41378-025-00915-5","DOIUrl":"10.1038/s41378-025-00915-5","url":null,"abstract":"<p><p>The development of electronic skin, soft robots, and smart wearables has significantly driven advances in flexible pressure sensing technology. However, traditional multilayer solid-structure flexible pressure sensors encounter challenges at temperatures between 100 °C and 150 °C due to high-temperature modal distortion. Changes in the conductivity of the sensor's conductive components interfere with accurate pressure measurement. In this research, a flexible pressure sensor with a convective liquid metal sensitive layer is proposed. The sensor uses a cyclic self-cooling mechanism to lower the temperature of its conductive components, reducing the impact of external high temperatures on the pressure measurement accuracy. At a 2.8 W thermal load, the flexible sensor, with liquid metal circulating at 2.0 mL/min, exhibits a sensitivity of 0.11 kPa⁻¹ within the pressure range from 0 to 12.5 kPa, and its maximum measurable pressure is 30 kPa. In addition, the resistance of the sensor is 18.5 mΩ less than that of a stationary liquid metal sensor, representing a 38.1% reduction. The sensor proposed in this research introduces a novel strategy for pressure measurement in high-temperature applications, extending the application scope to aircraft, special robots, and hydraulic oil circuits.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"55"},"PeriodicalIF":7.3,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11961582/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143764482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Thermocouple-integrated resonant microcantilever for on-chip thermogravimetric (TG) and differential thermal analysis (DTA) dual characterization applications.","authors":"Yuhang Yang, Hao Jia, Zechun Li, Zhi Cao, Haozhi Zhang, Pengcheng Xu, Xinxin Li","doi":"10.1038/s41378-024-00828-9","DOIUrl":"10.1038/s41378-024-00828-9","url":null,"abstract":"<p><p>This work presents an integrated microsensor that combines the dual characterization capabilities of thermogravimetric analysis (TGA) and differential thermal analysis (DTA). We integrated two pairs of thermocouples, heating resistors, and resonant drive/detection resistors into a single microcantilever, where the cantilever resonant frequency shifts respond to the mass change and the output voltage of the integrated thermocouples respond to the sample temperature. This integration enables programmable temperature control, temperature variation, and mass detection on a single chip. Our chip can achieve heating and cooling rates above 600 °C/min, which is significantly faster than commercial instruments with satisfactory measurement accuracy. The integrated polysilicon thermocouples bring high power responsivity of 6 V/W, making them suitable for highly sensitive DTA measurements on a chip. Moreover, the cantilever offers picogram (10^-12g) level mass resolution, reducing sample consumption from milligrams to nanogram levels. Additionally, the on-chip sample heating allows for easy observation of sample morphological evolution during heating under an optical microscope. We validated the dual functionality by conducting TGA measurements on a standard sample of calcium oxalate monohydrate (CaC₂O₄ ∙ H₂O) and DTA measurements on high-purity indium (In) and tin (Sn). The results indicate consistent measurements with the true values of the standard sample and high measurement efficiency. Our integrated cantilever chip is anticipated to have broad applications in high-performance and efficient TGA and DTA characterization.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"54"},"PeriodicalIF":7.3,"publicationDate":"2025-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11937515/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143710777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation towards nanomechanical sensor array for real-time detection of complex gases.","authors":"Md Abdul Momin, Masaya Toda, Zhuqing Wang, Mai Yamazaki, Krzysztof Moorthi, Yasuaki Kawaguchi, Takahito Ono","doi":"10.1038/s41378-025-00899-2","DOIUrl":"10.1038/s41378-025-00899-2","url":null,"abstract":"<p><p>This study presents the development and characterization of a nanomechanical gas sensor array with piezoresistive detectors for a wide range of applications. The sensors, made of silicon and polymers and integrated with the piezoresistive sensors on a silicon-on-insulator wafer, convert to electrical signals the stress caused by volume change of polymer induced by gas absorption. The fabrication of the sensors incorporates a process where Polymer A (Polyolefin), Polymer B (Fluorocarbon polymer) Polymer C (Acrylic resin), and Polymer D (Amino polymer), are deposited within silicon slits, demonstrating their distinct responses to various vapor species. These sensors show swift response times and efficient recovery periods, which makes them promising for real-time multiple gas and smell monitoring applications. An array of four nanomechanical sensors with polymers shows high repeatability and sensitivity when subjected to multiple gas exposure and turn-off cycles. The gas sensor arrays, effectively monitoring fish quality over several days, suggest a potential for determining optimal storage and early spoilage detection in perishables. The study demonstrates that the nanomechanical sensor array can accurately distinguish between different gas concentrations using principal component analysis, paving the way for real-time, automated multiple gas detection and analysis without human intervention.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"53"},"PeriodicalIF":7.3,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11930958/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143692711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots.","authors":"Seonhyoung Kim, Dong-In Kim, Hong Goo Yeo, Gyudong Lee, Jin-Young Kim, Hongsoo Choi","doi":"10.1038/s41378-025-00900-y","DOIUrl":"10.1038/s41378-025-00900-y","url":null,"abstract":"<p><p>Targeted stem cell delivery utilizing a magnetic actuation system is an emerging technology in stem cell engineering that efficiently targets stem cells in specific areas in vitro. However, integrating precise magnetic control systems with selective neural differentiation has not yet been widely considered for building successful neural networks. Challenges arise in creating targeted functional neuronal networks, largely due to difficulties in simultaneously controlling the positions of stem cells and selectively stimulating their differentiation. These challenges often result in suboptimal differentiation rates and abnormalities in transplanted neural stem cells. In contrast, ultrasound stimulation has superior tissue penetration and focusing capability, and represents a promising noninvasive neural stimulation technique capable of modulating neural activity and promoting selective differentiation into neuronal stem cells. In this study, we introduce a method for targeted neural differentiation using localized ultrasonic stimulation with a piezoelectric micromachined ultrasound transducer (pMUT) array. Differentiation was assessed quantitatively by monitoring neurite outgrowth as the ultrasound intensity was increased. The neurite length of cells ultrasonically stimulated for 40 min was found to have increased, compared to the non-stimulated group (119.9 ± 34.3 μm vs. 63.2 ± 17.3 μm, respectively). Targeted differentiation was confirmed by measuring neurite lengths, where selective ultrasound stimulation induced differentiation in cells that were precisely delivered via an electromagnetic system. Magnetic cell-based robots reaching the area of localized ultrasound stimulation were confirmed to have enhanced differentiation. This research demonstrated the potential of the combination of precise stem cell delivery with selective neural differentiation to establish functional neural networks.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"52"},"PeriodicalIF":7.3,"publicationDate":"2025-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11926166/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143670401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices.","authors":"Jiuhong Yi, Shuqi Yang, Liang Yue, Iek Man Lei","doi":"10.1038/s41378-025-00885-8","DOIUrl":"10.1038/s41378-025-00885-8","url":null,"abstract":"<p><p>Flexible devices are increasingly crucial in various aspects of our lives, including healthcare devices and human-machine interface systems, revolutionizing human life. As technology evolves rapidly, there is a high demand for innovative manufacturing methods that enable rapid prototyping of custom and multifunctional flexible devices with high quality. Recently, digital light processing (DLP) 3D printing has emerged as a promising manufacturing approach due to its capabilities of creating intricate customized structures, high fabrication speed, low-cost technology and widespread adoption. This review provides a state-of-the-art overview of the recent advances in the creation of flexible devices using DLP printing, with a focus on soft actuators, flexible sensors and flexible energy devices. We emphasize how DLP printing and the development of DLP printable materials enhance the structural design, sensitivity, mechanical performance, and overall functionality of these devices. Finally, we discuss the challenges and perspectives associated with DLP-printed flexible devices. We anticipate that the continued advancements in DLP printing will foster the development of smarter flexible devices, shortening the design-to-manufacturing cycles.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"51"},"PeriodicalIF":7.3,"publicationDate":"2025-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11923083/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143663667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Superior sensitive graphene fiber sensor enabled by constructing multiple nanoembossments for glucose detection.","authors":"Feng Han, Yangguang Wu, Yifan Zhao, Weixuan Jing, Kun Zheng, Chenying Wang, Song Wang, Yaxin Zhang, Tao Dong, Zhuangde Jiang","doi":"10.1038/s41378-025-00903-9","DOIUrl":"10.1038/s41378-025-00903-9","url":null,"abstract":"<p><p>Metal oxides have been extensively investigated in non-enzymatic biosensors for detecting diabetes owing to their electrochemical catalytic properties and excellent stability. However, lower conductivity and catalytic activity are major obstacles to the commercialization of metal oxide-based non-enzymatic glucose sensors. Herein, we present a novel flexible nonenzymatic glucose sensor utilizing graphene fiber (GF)/Au/Ni(OH)₂ composite fiber. The integration of GFs enables a significant uptake of sensing molecules due to its expansive surface area and high electron mobility, ultimately resulting in a decrease in the detection limit. Consequently, the incorporation of Ni(OH)₂ provides abundant attachment sites by introducing Au atoms, thereby promoting electron migration and enhancing sensitivity and detection limits. An impressive sensitivity (1095.63 µA mM^-1 cm^-2) within the detection range (5 µM-2.2 mM) of the integrated GF/Au/Ni(OH)₂ fiber is achieved, leading to an incredibly low detection limit (0.294 µM). Additionally, the outstanding repeatability, anti-interference properties, and flexibility of the GF/Au/Ni(OH)₂ sensors are obtained as well. Our findings offer a novel method for constructing nano embossments on GFs to achieve superior glucose detection capabilities in the field of wearable electronics in the future.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"48"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914602/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Automated and collision-free navigation of multiple micro-objects in obstacle-dense microenvironments using optoelectronic tweezers.","authors":"Lixiang Zheng, Gong Li, Henan Du, Zonghao Li, Bingrui Xu, Fan Yang, Yanan Mao, Jing Wei, Hainan Xie, Wei Xie, Rongxin Fu, Na Liu, Shuailong Zhang, Lianqing Liu, Wen Jung Li, Yu Sun","doi":"10.1038/s41378-025-00892-9","DOIUrl":"10.1038/s41378-025-00892-9","url":null,"abstract":"<p><p>Automated parallel manipulation of multiple micro-objects with optoelectronic tweezers (OET) has brought significant research interests recently. However, the parallel manipulation of multiple objects in complex obstacle-dense microenvironment using OET technology based on negative dielectrophoresis (nDEP) remain a big technical challenge. In this work, we proposed an adaptive light pattern design strategy to achieve automated parallel OET manipulation of multiple micro-objects and navigate them through obstacles to target positions with high precision and no collision. We first developed a multi-micro-object parallel manipulation OET system, capable of simultaneous image processing and microparticles path planning. To overcome microparticle collisions caused by overlapping light patterns, we employed a novel adaptive light pattern design that can dynamically adjust the layout of overlapping light patterns according to surrounding environment, ensuring enough space for each microparticle and preventing unintended escapes from the OET trap. The efficacy of this approach has been verified through systematic simulations and experiments. Utilizing this strategy, multiple polystyrene microparticles were autonomously navigated through obstacles and microchannels to their intended destinations, demonstrating the strategy's effectiveness and potential for automated parallel micromanipulation of multiple microparticles in complex and confined microenvironments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"49"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914063/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Advanced passive 3D bioelectronics: powerful tool for the cardiac electrophysiology investigation.","authors":"Keda Shi, Chengwen He, Hui Pan, Dong Liu, Ji Zhang, Weili Han, Yuting Xiang, Ning Hu","doi":"10.1038/s41378-025-00891-w","DOIUrl":"10.1038/s41378-025-00891-w","url":null,"abstract":"<p><p>Cardiovascular diseases (CVDs) are the first cause of death globally, posing a significant threat to human health. Cardiac electrophysiology is pivotal for the understanding and management of CVDs, particularly for addressing arrhythmias. A significant proliferation of micro-nano bioelectric devices and systems has occurred in the field of cardiomyocyte electrophysiology. These bioelectronic platforms feature distinctive electrode geometries that improve the fidelity of native electrophysiological signals. Despite the prevalence of planar microelectrode arrays (MEAs) for simultaneous multichannel recording of cellular electrophysiological signals, extracellular recordings often yield suboptimal signal quality. In contrast, three-dimensional (3D) MEAs and advanced penetration strategies allow high-fidelity intracellular signal detection. 3D nanodevices are categorized into the active and the passive. Active devices rely on external power sources to work, while passive devices operate without external power. Passive devices possess simplicity, biocompatibility, stability, and lower power consumption compared to active ones, making them ideal for sensors and implantable applications. This review comprehensively discusses the fabrication, geometric configuration, and penetration strategies of passive 3D micro/nanodevices, emphasizing their application in drug screening and disease modeling. Moreover, we summarize existing challenges and future opportunities to develop passive micro/nanobioelectronic devices from cardiac electrophysiological research to cardiovascular clinical practice.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"50"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914486/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution.","authors":"Anıl Çağrı Atak, Emre Ünal, Hilmi Volkan Demir","doi":"10.1038/s41378-025-00888-5","DOIUrl":"10.1038/s41378-025-00888-5","url":null,"abstract":"<p><p>Three-dimensional (3D) printing allows for the construction of complex structures. However, 3D-printing vertical structures with a high aspect ratio remains a pending challenge, especially when a high lateral resolution is required. Here, to address this challenge, we propose and demonstrate micro-3D sculptured metastructures with deep trenches of 1:4 (width:height) aspect ratio for sub-10 µm resolution. Our construction relies on two-photon polymerization for a 3D-pattern with its trenches, followed by electroplating of a thick metal film and its dry etching to remove the seed layer. To test the proposed fabrication process, we built up three-dimensional RF metastructures showcasing the depth effect as the third dimension. Using the numerical solutions, we custom-tailored these metastructure resonators to fall within a specific resonance frequency range of 4-6 GHz while undertaking comparative analyses regarding overall footprint, quality factor, and resonance frequency shift as a function of their cross-sectional aspect ratio. The proposed process flow is shown to miniaturize metal footprint and tune the resonance frequency of these thick 3D-metastructures while increasing their quality factor. These experimental findings indicate that this method of producing trenches via 3D-printing provides rich opportunities to implement high-aspect-ratio, complex structures.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"47"},"PeriodicalIF":7.3,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11897358/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143605675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}