Yan Wang, Peng Chen, Junning Zhang, Zihan Li, Hongbin Yu
{"title":"基于悬臂梁的压电微机械超声换能器及其后处理软互连策略的空中测距。","authors":"Yan Wang, Peng Chen, Junning Zhang, Zihan Li, Hongbin Yu","doi":"10.1038/s41378-025-00939-x","DOIUrl":null,"url":null,"abstract":"<p><p>Despite of good performance immunity to stress and high transmitting/receiving sensitivity advantages, the fabrication imperfection induced asynchronous vibration and the resultant prolonged ring-down tail severely limit the potential of the cantilever beam-based piezoelectric micromachined ultrasonic transducer (PMUT) in pulse-echo applications as transceiver. To address this issue, a novel post processing soft interconnecting strategy is presented. In this case, specific reservoir structure is intentionally integrated into the cantilever-beam based PMUT design, under the assistance of which the liquid PDMS can be accurately applied and spontaneously driven to seal the air gaps between the already released cantilever beams via the capillary effect. After curing, the PDMS will be transformed from liquid to solid and serve as soft interconnecting spring between adjacent cantilever beams so as to force them to vibrate in synchronous mode. At the same time, this treatment does not change the existing fabrication process and has little effect on the original PMUT performance. From both of the mechanical and acoustic response measurement results, effective suppression for the asynchronous vibration and significant reduction of the ring-down tail have been successfully demonstrated for the treated PMUT device. In the subsequent pulse-echo rangefinding experiment, a distance detection range covering from 270.8 mm to 3.8 m with a divergence angle close to 170° has been achieved when it is driven at resonant frequency of 69.2 kHz with 40 V<sub>pp</sub>, 40-cycles sinusoidal signal. Given the simple yet effective treatment, the proposed strategy shows great prospective in developing high performance PMUT for in-air rangefinding applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"97"},"PeriodicalIF":9.9000,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12089283/pdf/","citationCount":"0","resultStr":"{\"title\":\"Cantilever beam-based piezoelectric micromachined ultrasonic transducer with post processing soft interconnecting strategy for in-air rangefinding.\",\"authors\":\"Yan Wang, Peng Chen, Junning Zhang, Zihan Li, Hongbin Yu\",\"doi\":\"10.1038/s41378-025-00939-x\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Despite of good performance immunity to stress and high transmitting/receiving sensitivity advantages, the fabrication imperfection induced asynchronous vibration and the resultant prolonged ring-down tail severely limit the potential of the cantilever beam-based piezoelectric micromachined ultrasonic transducer (PMUT) in pulse-echo applications as transceiver. To address this issue, a novel post processing soft interconnecting strategy is presented. In this case, specific reservoir structure is intentionally integrated into the cantilever-beam based PMUT design, under the assistance of which the liquid PDMS can be accurately applied and spontaneously driven to seal the air gaps between the already released cantilever beams via the capillary effect. After curing, the PDMS will be transformed from liquid to solid and serve as soft interconnecting spring between adjacent cantilever beams so as to force them to vibrate in synchronous mode. At the same time, this treatment does not change the existing fabrication process and has little effect on the original PMUT performance. From both of the mechanical and acoustic response measurement results, effective suppression for the asynchronous vibration and significant reduction of the ring-down tail have been successfully demonstrated for the treated PMUT device. In the subsequent pulse-echo rangefinding experiment, a distance detection range covering from 270.8 mm to 3.8 m with a divergence angle close to 170° has been achieved when it is driven at resonant frequency of 69.2 kHz with 40 V<sub>pp</sub>, 40-cycles sinusoidal signal. Given the simple yet effective treatment, the proposed strategy shows great prospective in developing high performance PMUT for in-air rangefinding applications.</p>\",\"PeriodicalId\":18560,\"journal\":{\"name\":\"Microsystems & Nanoengineering\",\"volume\":\"11 1\",\"pages\":\"97\"},\"PeriodicalIF\":9.9000,\"publicationDate\":\"2025-05-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12089283/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microsystems & Nanoengineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1038/s41378-025-00939-x\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-025-00939-x","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
摘要
尽管悬臂梁式压电微机械超声换能器具有良好的抗应力性能和高的发射/接收灵敏度等优点,但由于其制造缺陷引起的异步振动和由此产生的长尾环衰严重限制了其作为脉冲回波收发器的应用潜力。为了解决这一问题,提出了一种新的后处理软互连策略。在这种情况下,特定的储层结构被有意集成到基于悬臂梁的PMUT设计中,在此帮助下,液体PDMS可以精确地施加并自发驱动,通过毛细效应密封已经释放的悬臂梁之间的气隙。固化后,PDMS将由液态变为固态,作为相邻悬臂梁之间的软连接弹簧,迫使其同步振动。同时,该处理不改变现有的制备工艺,对PMUT原有的性能影响不大。从机械和声学响应测量结果来看,处理后的PMUT装置有效地抑制了异步振动,并显著减少了环衰尾。在后续的脉冲回波测距实验中,在69.2 kHz谐振频率、40 Vpp、40周期正弦信号驱动下,实现了270.8 mm ~ 3.8 m的距离探测范围,发散角接近170°。由于处理方法简单而有效,该策略在开发高性能的空中测距PMUT方面具有很大的前景。
Cantilever beam-based piezoelectric micromachined ultrasonic transducer with post processing soft interconnecting strategy for in-air rangefinding.
Despite of good performance immunity to stress and high transmitting/receiving sensitivity advantages, the fabrication imperfection induced asynchronous vibration and the resultant prolonged ring-down tail severely limit the potential of the cantilever beam-based piezoelectric micromachined ultrasonic transducer (PMUT) in pulse-echo applications as transceiver. To address this issue, a novel post processing soft interconnecting strategy is presented. In this case, specific reservoir structure is intentionally integrated into the cantilever-beam based PMUT design, under the assistance of which the liquid PDMS can be accurately applied and spontaneously driven to seal the air gaps between the already released cantilever beams via the capillary effect. After curing, the PDMS will be transformed from liquid to solid and serve as soft interconnecting spring between adjacent cantilever beams so as to force them to vibrate in synchronous mode. At the same time, this treatment does not change the existing fabrication process and has little effect on the original PMUT performance. From both of the mechanical and acoustic response measurement results, effective suppression for the asynchronous vibration and significant reduction of the ring-down tail have been successfully demonstrated for the treated PMUT device. In the subsequent pulse-echo rangefinding experiment, a distance detection range covering from 270.8 mm to 3.8 m with a divergence angle close to 170° has been achieved when it is driven at resonant frequency of 69.2 kHz with 40 Vpp, 40-cycles sinusoidal signal. Given the simple yet effective treatment, the proposed strategy shows great prospective in developing high performance PMUT for in-air rangefinding applications.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.