Microsystems & Nanoengineering最新文献

{"title":"Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.","authors":"Hao Hong, Xin Lei, Jiangtao Wei, Wenjun Tang, Minjie Ye, Jianwen Sun, Guoqi Zhang, Pasqualina M Sarro, Zewen Liu","doi":"10.1038/s41378-025-00973-9","DOIUrl":"https://doi.org/10.1038/s41378-025-00973-9","url":null,"abstract":"<p><p>The three-step wet etching (TSWE) method has been proven to be a promising technique for fabricating silicon nanopores. Despite its potential, one of the bottlenecks of this method is the precise control of the silicon etching and etch-stop, which results in obtaining a well-defined nanopore size. Herein, we present a novel strategy leveraging electrochemical passivation to achieve accurate control over the silicon etching process. By dynamically controlling the oxide layer growth, rapid and reliable etch-stop was achieved in under 4 s, enabling the controllable fabrication of sub-10 nm silicon nanopores. The thickness of the oxide layer was precisely modulated by adjusting the passivation potential, achieving nanopore size shrinkage with a precision better than 2 nm, which can be further enhanced with more refined potential control. This scalable method significantly enhances the TSWE process, offering an efficient approach for producing small-size silicon nanopores with high precision. Importantly, the precise etching control facilitated by electrochemical passivation holds promise for the cost-effective production of high-density, air-insulated monolithic integrated circuits.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"128"},"PeriodicalIF":7.3,"publicationDate":"2025-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144369064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration.","authors":"Samaneh Shamsian, Abu Bakar Siddique, Vahid Kordzadeh-Kermani, Luna de la Vega Tejuca, Francisco Falcone, Mallar Ray, Seyed Nezameddin Ashrafizadeh, Sergio Omar Martínez Chapa, Marc J Madou, Masoud Madadelahi","doi":"10.1038/s41378-025-00898-3","DOIUrl":"10.1038/s41378-025-00898-3","url":null,"abstract":"<p><p>As a popular process in molecular-based diagnostics, polymerase chain reaction (PCR) can be employed for amplifying small amounts of DNA/RNA from different sources such as tissue, cells, peripheral blood and so on. Thanks to the unique physicochemical characteristics of nanomaterials and their progress, researchers have been encouraged to employ them as suitable candidates to address the PCR optimization challenges for enhancing efficiency, yield, specificity, and sensitivity. In nanoparticle-assisted PCR (nanoPCR), different nanoparticles (NPs) such as carbon nanotubes (CNTs), graphene, quantum dots (QDs), and gold (Au) might be used. Among different nanoPCR assays, photothermal PCR has emerged as a technique leveraging the excellent light absorption and heat conversion capabilities of nanomaterials. In addition to presenting recent advances in nanoPCR, this review also delves into the specific use of nanomaterials for photothermal PCR, including their applications in microfluidics as one of the best platforms for miniaturization of diagnostic techniques. Different types of NPs used in PCR are comprehensively examined, and detailed charts and tables are provided that outline features such as optimal concentration and size. The appropriate choice of nanomaterials for enhancing light conversion to heat in PCR applications is discussed. Finally, the related challenges and future trends are explored.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"127"},"PeriodicalIF":7.3,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12177080/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144326237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Intelligent planetary gear fault diagnosis system based on MEMS acoustic emission sensor.","authors":"Hanjie Dou, Tao Liu, Zhihao Li, Jixuan Zhang, Jiaqian Yang, Yuchen Mao, Wanyu Xu, Xiaojing Mu","doi":"10.1038/s41378-025-00961-z","DOIUrl":"10.1038/s41378-025-00961-z","url":null,"abstract":"<p><p>Early equipment fault diagnosis can identify potential risks, significantly reduce maintenance costs, and minimize property damage. However, vibration, strain, and force sensors operating at low frequencies with narrow bandwidths are insufficiently sensitive to fault information, making early fault prediction challenging. Here, we introduce a high-performance, cost-effective, and tiny-sized micro-electromechanical system (MEMS) acoustic emission sensor. This sensor utilizes a 10 × 11 hexagonal array of piezoelectric micromachined ultrasonic transducers with a chip size of 4 mm × 4 mm × 0.4 mm. The sensor is encapsulated using an epoxy/Al₂O₃ composite for acoustic impedance matching, and its overall size is Φ 16 mm × H 5.5 mm, with a weight of approximately 3 g. This acoustic emission sensor achieves a peak sensitivity of 88.4 dB (ref. V/(m/s)) at 335 kHz, and its sensitivity remains above 60 dB across the frequency range from 15 kHz to 620 kHz. In addition, combined with the residual neural networks, an intelligent fault diagnosis of the planetary gear is realized. This MEMS acoustic emission sensor can provide a promising approach for in-situ fault monitoring of highly integrated and miniaturized industrial equipment.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"126"},"PeriodicalIF":7.3,"publicationDate":"2025-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12177076/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144326236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Battery-free and self-propelled bionic microneedle system for chemically controlled on-demand drug delivery.","authors":"Yuyu Tan, Cao Tan, Mengli Luo, Yuxue Miao, Jiaoli Wang, Xinlin Wang, Zhu Chen, Lelun Jiang, Jian Yang","doi":"10.1038/s41378-025-00970-y","DOIUrl":"10.1038/s41378-025-00970-y","url":null,"abstract":"<p><p>Developing a promising on-demand controllable microneedle drug delivery system could provide stronger self-control and precision delivery of a large payload capacity. Nevertheless, the efficacy of existing systems has been constrained by limitations in the therapeutic payload capacity and slow diffusion of molecules, as well as the necessity for external resource configurations. Drawing inspiration from the multidimensional biomimetic strategies observed in the material properties and functional mechanisms of the bombardier beetle's defensive secretion system, a battery-free and self-propelled biomimetic microneedle system (BSBMs) is proposed for improving therapeutic outcomes and enabling controlled, on-demand drug delivery. The self-powered microneedle delivery platform fully emulates the structure and spray mechanism of bombardier, employing Pt nanoparticles and H₂O₂ loaded in the reaction chamber, as a built-in fuel source for active and controllable payload delivery. The robust bionic gas injector can serve as an active engine, facilitating the effective permeation of drugs through hollow microneedles without a complex pumping system. This BSBMs triggers the H₂O₂ decomposition reaction through thumb pressure, generating O₂ pressure as an endogenous driving force to achieve transdermally precise and on-demand drug delivery. The pharmacokinetics of drug release from the BSBMs were evaluated in vivo by quantifying the levels of levonorgestrel (LNG). This active delivery system maintains in vivo LNG concentrations within the therapeutic window range, greatly enhancing on-demand, controlled, and stable drug delivery. This versatile and efficient self-propelled bionic microneedle delivery technology holds substantial promise for a broad spectrum of transdermal therapeutic applications, offering a simplified, convenient, and improved method of administration.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"125"},"PeriodicalIF":7.3,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12174333/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144317451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fluidic-manipulation-enabled multiplexed dose delivery of RONS by a CAP chip for dose optimization enhancement.","authors":"Fang Wang, Liangyu Zhou, Wei Guo, Haisong Lin, Ruotong Zhang, Shaolong Kuang, Yuan Liu, Xiaoxue Fan, Yau Kei Chan, Hui Deng, Ho Cheung Shum","doi":"10.1038/s41378-025-00974-8","DOIUrl":"10.1038/s41378-025-00974-8","url":null,"abstract":"<p><p>The plasma-derived reactive oxygen and nitrogen species (RONS) enable cold atmospheric plasma (CAP) to combat cancer and infectious wounds. Achieving therapeutic outcomes with CAP necessitates precise treatment doses. Current CAP devices are constrained by their capability of delivering a single dose to a single sample, limiting dose optimization. We propose a novel \"one exposure, multiple-dose delivery\" strategy by programming gas flows. This approach facilitates efficient screening of optimal CAP dose by distributing feed gas through boundary-conditioned transport channels to generate multiple, flux-varied gas streams, which ignite plasmas with diverse chemical compositions and dose gradients across samples. Our developed demonstration device, capable of administering three doses to sixteen samples, significantly reduces experimental complexity, particularly when handling large candidate doses or samples for treatment. Leveraging multiplexed treatment, we capably optimize the CAP dose to effectively eradicate the liver cancer cell line of Huh7 and bacteria of S. aureus within one exposure. Furthermore, we find manipulating gas flow velocities allows targeted generation of short-lived species. This approach disentangles the roles of short-lived and long-lived RONS in therapeutic applications, offering critical insights into their bio-functional mechanisms. The concept of multiplexed dose treatment with fluidic manipulation promises to catalyze the development of high-efficiency CAP devices and advance research in CAP-based therapies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"123"},"PeriodicalIF":7.3,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12167743/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144302451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Patch-type capacitive micromachined ultrasonic transducer for ultrasonic power and data transfer.","authors":"Chaerin Oh, Young-Min Kim, Taemin Lee, Sang-Mok Lee, Joontaek Jung, Hyeon-Min Bae, Chul Kim, Hyunjoo J Lee","doi":"10.1038/s41378-025-00967-7","DOIUrl":"10.1038/s41378-025-00967-7","url":null,"abstract":"<p><p>Ultrasonic power and data transfer is a promising technology for implantable medical devices because of its non-invasiveness, deep penetration depth, and potential for a high-power transmission rate with a low specific absorption rate. However, ultrasound-powered implantable devices still suffer from low power transfer efficiency due to beam misalignment and are limited to short-term use due to the bulkiness of the transmitting transducers. Here, we report the first proof of concept for adaptive positioning and targeting of ultrasound-based implantable devices through ultrasound image guidance. A lightweight patch-type ultrasonic transducer array is fabricated to enable ultrasound imaging and beam-forming during long-term operation. The uniform performance of the array is established through the silicon micromachining process. We demonstrate the complete scheme of imaging, positioning, and targeted power transfer in an ex vivo environment, achieving precise targeting of moving implanted devices through real-time ultrasound imaging. Enhanced power transfer efficiency through the use of patch-type ultrasonic transducers can enhance patient comfort and minimize invasive procedures, opening new applications for ultrasonic-powered implantable devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"124"},"PeriodicalIF":7.3,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12170874/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144310194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A 70 MPa silicon resonant pressure microsensor with resonators supported by micro beams based on volume compressed sensing.","authors":"Zongze Yu, Pan Qian, Yulan Lu, Bo Xie, Deyong Chen, Junbo Wang, Jian Chen","doi":"10.1038/s41378-025-00957-9","DOIUrl":"10.1038/s41378-025-00957-9","url":null,"abstract":"<p><p>Meeting the growing demands for accuracy, resolution and response time of high-pressure microsensors applicated in ocean science and petroleum industry, this paper developed a silicon resonant high pressure microsensor based on volume compressed sensing with dual resonators supported by micro beams. In operation, the frequency of resonators shifts while the volume of microsensor compressed under high pressure. A couple of micro beams were introduced to support resonators and protect resonators from buckling in high pressure. At the meanwhile, the theoretical model of micro beams was established. Based on the expression between geometric parameters of micro beams and pressure sensitivity of resonators, the micro beams of the two resonators were modified that results in different pressure sensitivities of two resonators, which effectively performed temperature self-compensation. An eutectic bonding is adopted for wafer vacuum packaged. Dealing with potentially complex hydraulic measurement, the microsensors were surrounded by silicone oil and sealed with a corrugated diaphragm and a base. The pressure sensitivities of fabricated microsensors were quantified as 0.003 kHz/MPa ( ~ 30 ppm/MPa) of Resonator I and -0.118 kHz/MPa (~-1311 ppm/MPa) of Resonator II under 20 °C, which match with theoretical analysis. Finally, the accuracy of this microsensors is better than 0.01% FS with temperature self-compensation under the pressure range of 0.1~70 MPa from -10 °C to 50 °C, along with a response time better than 10 ms and a resolution of 100 Pa. This paper provided an effective structure of micro beams for resonant high-pressure microsensors combined with volume compressed sensing, derived the quantitative relationship between key structural parameters and sensitivity, and performed a possibility of high accuracy and high resolution measurements of a much wider pressure range.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"121"},"PeriodicalIF":7.3,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12162831/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144285480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Near-zero nonlinear error pressure sensor based on piezoresistor sensitivity matching for wind tunnel pressure test.","authors":"Yuanying Zhang, Fengyun Liu, Zechen Zhou, Xiubing Liang, Riming Sun, Jinjun Deng, Xiaoliang Luo, Jian Lin, Xing Chen, Xingxu Zhang, Jian Luo, Xiaojing Wang, Binghe Ma","doi":"10.1038/s41378-025-00959-7","DOIUrl":"10.1038/s41378-025-00959-7","url":null,"abstract":"<p><p>High-precision piezoresistive pressure sensors play a significant role in aerospace, automotive, and other fields. Nonlinear error is the key factor that restricts the improvement of the sensor precision. A mathematical model for evaluating the sensor's nonlinear error is established, based on which a piezoresistor sensitivity matching method is proposed to suppress the nonlinear error. By adjusting the piezoresistors' structure and position on the sensing membrane, four piezoresistors with equal sensitivity are obtained, and theoretical quasi-zero nonlinear error is achieved. To verify the design, sensor prototypes are fabricated utilizing the MEMS technology. After sensor packaging, a cylindrical absolute pressure sensor featuring a 4 mm diameter with a range from 0 to 100 kPa is acquired. The experimental results demonstrate the excellent performance of the proposed sensor, which indicates a nonlinear error as low as ±0.004%FS. Besides, the proposed sensor has a sensitivity of 1.6810 mV/kPa, a hysteresis of 0.025%, a repeatability of 0.015%, a zero drift of 0.03%FS, and a 3 dB frequency from 0 to 121.82 kHz. Moreover, the prototype is tested in the Mach 4 wind tunnel, and the measurement error between the proposed sensor and the true pressure is ±0.98%. This paper provides key sensing technology for high-precision surface pressure analysis of aircraft.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"122"},"PeriodicalIF":7.3,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12163088/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144285481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Long-term culture and morphological maturation of taste organoids enhance taste discrimination in a biomimetic biosensor.","authors":"Shuge Liu, Yating Chen, Yuqi Chen, Yuxuan Yuan, Minggao Liu, Zhiyao Wang, Wei Chen, Liping Du, Chunsheng Wu","doi":"10.1038/s41378-025-00978-4","DOIUrl":"10.1038/s41378-025-00978-4","url":null,"abstract":"<p><p>Taste is a multifaceted sensory experience that involves various human senses related to food and is a key indicator of food quality. A biomimetic taste-based biosensor, which utilizes taste bud organoids as sensitive elements, is able to simulate the real responses of taste transduction in vitro. Taste bud organoids are three-dimensional structures created from taste stem/progenitor cells, integrated with transducers to develop the biosensor. In this research, organoids derived from mouse taste epithelium were employed as the sensitive element, while a microelectrode array (MEA) device served as the transduction element to create the biosensor. Following exposure to sour, sweet, bitter, and salty stimuli, one specific channel was chosen, and the average discharge rates were calculated as 6.5 ± 2.29 Hz, 7.25 ± 3.77 Hz, 3.33 ± 2.62 Hz, and 4.6 ± 2.42 Hz, respectively. Statistical analysis indicated that, apart from the sour taste, the frequency and amplitude of the other three taste stimuli showed significant increases. Principal component analysis (PCA) demonstrated the ability to identify and differentiate various tastes during taste conduction monitoring. Additionally, it was observed that on day 14, the taste bud organoids exhibited aggregation and fusion, leading to the formation of typical taste bud structures, indicating their maturation. This research offers a theoretical foundation and a valuable tool for effective and objective taste detection in vitro.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"120"},"PeriodicalIF":7.3,"publicationDate":"2025-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12152158/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144266645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging.","authors":"Younghwan Yang, Dohyun Kang, Junhwa Seong, Kyungtae Kim, Seokwoo Kim, Chunghwan Jung, Eunji Lee, Hyeonsu Heo, Hyunjung Kang, Nara Jeon, Jihae Lee, Youngsun Jeon, Yujin Park, Junsuk Rho","doi":"10.1038/s41378-025-00925-3","DOIUrl":"10.1038/s41378-025-00925-3","url":null,"abstract":"<p><p>Metalenses-two-dimensionally arranged artificial nanostructures that focus light-have been extensively studied due to their great potential for applications in consumer goods and industrial products. However, when metalenses are exposed to harsh environments, they can suffer from mechanical shocks and damage, leading to degradation in optical performance. Here, we present mechanically robust and self-cleanable encapsulated metalenses using spin-on-glass coatings on structured hydrogenated amorphous silicon (a-Si:H), whose optical properties are optimized for effective waveguiding. The atomic structure of a-Si:H has been precisely engineered to achieve a high refractive index (3.23) with near-zero optical losses at the wavelength of 635 nm by adjusting deposition parameters. We develop an analytical model to determine how the refractive index of nanostructures influences light manipulation, highlighting the correlation between refractive indices of structures and metalens efficiencies. Using the high refractive index of the a-Si:H, our encapsulated metalenses achieved a calculated conversion efficiency of 97.2% at the wavelength of 635 nm. Additionally, we verify their mechanical robustness by sonicating encapsulated metalenses with sand for 120 min, demonstrating strong mechanical durability. Furthermore, with the capability of the encapsulated metalenses to perform self-cleaning, this work paves the way for practical applications of metalenses in diverse environments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"118"},"PeriodicalIF":7.3,"publicationDate":"2025-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12152127/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144266646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}