Microsystems & Nanoengineering最新文献

{"title":"A novel gyroscope based on the slow surface acoustic wave in a phononic metamaterial.","authors":"Fei Ge, Liye Zhao, Jiawen Xu, Xukai Ding","doi":"10.1038/s41378-024-00787-1","DOIUrl":"10.1038/s41378-024-00787-1","url":null,"abstract":"<p><p>Limited to the direct modulation on the surface acoustic wave (SAW) by the rotation, the conventional SAW gyroscopes incur weak Coriolis effects and gyroscopic effects. In this paper, we innovatively utilize a phononic metamaterial (PM) operated at whispering-gallery modes (WGMs) as the vehicle for the Coriolis effect rather than SAW itself. The gyroscopic effects of this PM are investigated, and a new SAW gyroscope is subsequently proposed based on the slow SAW in PM. We show, combining theoretical modeling and finite element method simulation, that the rate of rotation can linearly induce the splitting of WGMs and modulate the phase velocity of SAW down to 4600 m/s (initial phase velocity of 5355 m/s); the direction of rotation results in the chiral symmetry of the PM vibration and the asymmetric distribution of the transmissive SAW. Besides, the proposed SAW gyroscope measures the angular velocity by detecting the phase shift resulting from rotation-dependent slow SAW in PM, obtaining a sensitivity of 0.016 deg/Hz when 50-cell PM. Compared with the existing SAW gyroscopes based on phase velocity modulation, the gyroscopic gain factor in this paper is enhanced by 430-1600 times. This work jumps out of the framework of directly modulating SAW in gyroscopes and provides an innovative scheme of the indirect modulations from the rotation-dependent PM on SAW, showing excellent performance and potential for angular velocity measurement in extreme environments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"169"},"PeriodicalIF":7.3,"publicationDate":"2024-11-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11564662/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142623792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Defect-insensitive cylindrical surface lattice resonance array and its batch replication for enhanced immunoassay.","authors":"Bin Zhou, Chao Hu, Haoyang Li, Xiangyi Ye, Baohua Wen, Zhangkai Zhou, Jingxuan Cai, Jianhua Zhou","doi":"10.1038/s41378-024-00793-3","DOIUrl":"10.1038/s41378-024-00793-3","url":null,"abstract":"<p><p>Surface lattice resonances (SLR) have been demonstrated to enhance the sensitivity and reduce the full width at half maximum (FWHM) of the plasmonic resonances. However, their widespread application in immunoassays has been hindered by limitations of high structural defect sensitivity and fabrication costs. Here, we design a novel three-layer cylindrical SLR array that exhibits high tolerance against structural defects, which would facilitate straightforward fabrication. By integrating metal evaporation and nanoimprint lithography, we demonstrate the replication of the SLR array with exceptional quality. Theoretical simulations indicate that the resonance dips of these arrays exhibit are not sensitive to various structural defects. The experimental results reveal that the FWHM of these arrays can be as low as 5.1 nm while maintaining robust resonance characteristics. Furthermore, we demonstrated the high spectral sensitivity of the SLR array, which enabled the detection of immunoglobulin G (IgG) at concentrations as low as 609 pg/mL. These findings emphasize the potential of the defect-insensitive SLR array as a highly scalable immunoassay platform with exceptional performance.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"168"},"PeriodicalIF":7.3,"publicationDate":"2024-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11560952/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142623794","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film.","authors":"Zhiwei You, Jinghan Gan, Chong Yang, Renati Tuerhong, Lei Zhao, Yipeng Lu","doi":"10.1038/s41378-024-00767-5","DOIUrl":"10.1038/s41378-024-00767-5","url":null,"abstract":"<p><p>In this study, a controllable mass‒frequency tuning method is presented using the etching of rib structures on a single-crystal PZT membrane. The rib structures were optimized to reduce the membrane mass while maintaining the stiffness; therefore, the center frequency could be increased to improve the low-frequency bandwidth of microphones. Additionally, this methodology could reduce the modulus and improve the sensitivity for the same resonant frequency, which typically indicates the maximum acoustic overload point (AOP). The PZT film was chosen because of its greater density; the simulation results showed that PZT could provide a greater frequency tuning (24.9%) compared to that of the AlN film (5.8%), and its large dielectric constant enabled the optimal design to have small electrodes at the maximum stress location while mitigating the sacrificial capacitance effect on electrical gain. An analytical model of rib-structure microphones was established and greatly reduced the computing time. The experimental results of the impedance tests revealed that the center frequencies of the six microphones shifted from 74.6 kHz to 106.3 kHz with rib-structure inner radii ranging from 0 μm to 340 μm; this result was in good agreement with the those of the analytical analysis and finite element modeling. While the center frequency greatly varied, the measured sensitivities at 1 kHz only varied within a small range from 22.3 mV/Pa to 25.7 mV/Pa; thus, the membrane stiffness minimally changed. Moreover, a single-crystal PZT film with a (100) crystal orientation and 0.24-degree full width at half maximum (FWHM) was used to enable differential sensing and a low possibility of undesirable polarization. Paired with a two-stage differential charge amplifier, a differential sensing microphone was experimentally demonstrated to improve the sensitivity from 25.7 mV/Pa to 36.1 mV/Pa and reduce the noise from -68.2 dBV to -82.8 dBV.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"167"},"PeriodicalIF":7.3,"publicationDate":"2024-11-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11549332/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142623798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein.","authors":"Naresh Mandal, Raja Mitra, Bidhan Pramanick","doi":"10.1038/s41378-023-00601-4","DOIUrl":"10.1038/s41378-023-00601-4","url":null,"abstract":"<p><p>According to a World Health Organization (WHO) report, the world has experienced more than 766 million cases of positive SARS-CoV-2 infection and more than 6.9 million deaths due to COVID through May 2023. The WHO declared a pandemic due to the rapid spread of the severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) virus, and the fight against this pandemic is not over yet. Important reasons for virus spread include the lack of detection kits, appropriate detection techniques, delay in detection, asymptomatic cases and failure in mass screening. In the last 3 years, several researchers and medical companies have introduced successful test kits to detect the infection of symptomatic patients in real time, which was necessary to monitor the spread. However, it is also important to have information on asymptomatic cases, which can be obtained by antibody testing for the SARS-CoV-2 virus. In this work, we developed a simple, advantageous immobilization procedure for rapidly detecting the SARS-CoV-2 spike protein. Carbon-MEMS-derived glassy carbon (GC) is used as the sensor electrode, and the detection is based on covalently linking the SARS-CoV-2 antibody to the GC surface. Glutaraldehyde was used as a cross-linker between the antibody and glassy carbon electrode (GCE). The binding was investigated using Fourier transform infrared spectroscopy (FTIR) characterization and cyclic voltammetric (CV) analysis. Electrochemical impedance spectroscopy (EIS) was utilized to measure the change in total impedance before and after incubation of the SARS-CoV-2 antibody with various concentrations of SARS-CoV-2 spike protein. The developed sensor can sense 1 fg/ml to 1 µg/ml SARS-CoV-2 spike protein. This detection is label-free, and the chances of false positives are minimal. The calculated LOD was ~31 copies of viral RNA/mL. The coefficient of variation (<i>C</i>V) number is calculated from EIS data at 100 Hz, which is found to be 0.398%. The developed sensor may be used for mass screening because it is cost-effective. A schematic representation of the SARS-CoV-2 spike protein sensing using surface functionalized glassy carbon electrode.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"137"},"PeriodicalIF":7.9,"publicationDate":"2023-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10625972/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"71483551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Removal of the rate table: MEMS gyrocompass with virtual maytagging.","authors":"Tongqiao Miao, Qingsong Li, Liangqian Chen, Junjian Li, Xiaoping Hu, Xuezhong Wu, Wenqi Wu, Dingbang Xiao","doi":"10.1038/s41378-023-00610-3","DOIUrl":"10.1038/s41378-023-00610-3","url":null,"abstract":"<p><p>High-performance micro-electro-mechanical system (MEMS) gyrocompasses for north-finding systems have been very popular for decades. In this paper, a MEMS north-finding system (NFS) based on virtual maytagging (VM) is presented for the first time. In stark contrast to previous schemes of MEMS-based NFSs (e.g., carouseling, maytagging) and the abandoning rate table, we developed a honeycomb disk resonator gyroscope (HDRG) and two commercial accelerometers for azimuth detection. Instead of the physical rotation of the integrated turntable in traditional NFSs, the vibratory working modes of the HDRG are rotated periodically with electronic control to reduce the uncertainty in the azimuth. After systematically analyzing the principle of NFSs with VM, we designed tests to verify the practicability at the sensor level. A bias instability of 0.0078°/h can be obtained during one day with VM in an HDRG. We also implemented comparative north-finding experiments to further check our strategy at the system level. The accuracy in the azimuth can reach 0.204° for 5 min at 28.2° latitude with VM and 0.172° with maytagging. The results show that without any mechanical turning parts, VM technology makes it possible to develop high-precision handheld MEMS NFSs.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"138"},"PeriodicalIF":7.9,"publicationDate":"2023-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10628254/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"71521973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis.","authors":"Avisek Roy, Bao Q Ta, Mehdi Azadmehr, Knut E Aasmundtveit","doi":"10.1038/s41378-023-00598-w","DOIUrl":"10.1038/s41378-023-00598-w","url":null,"abstract":"<p><p>Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-CNT integration, a key requirement is the development of necessary post-processing steps on CMOS chips for fabricating CMOS-MEMS polysilicon heaters that can locally generate the required CNT synthesis temperatures (~650-900 °C). In our post-CMOS processing, a subtractive fabrication technique is used for micromachining the polysilicon heaters, where the passivation layers in CMOS are used as masks to protect the electronics. For dielectric etching, it is necessary to achieve high selectivity, uniform etching and a good etch rate to fully expose the polysilicon layers without causing damage. We achieved successful post-CMOS processing by developing two-step reactive ion etching (RIE) of the SiO₂ dielectric layer and making design improvements to a second-generation CMOS chip. After the dry etching process, CMOS-MEMS microheaters are partially suspended by SiO₂ wet etching with minimum damage to the exposed aluminium layers, to obtain high thermal isolation. The fabricated microheaters are then successfully utilized for synthesizing CNTs by a local thermal CVD process. The CMOS post-processing challenges and design aspects to fabricate CMOS-MEMS polysilicon microheaters for such high-temperature applications are detailed in this article. Our developed process for heterogeneous monolithic integration of CMOS-CNT shows promise for wafer-level manufacturing of CNT-based sensors by incorporating additional steps in an already existing foundry CMOS process.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"136"},"PeriodicalIF":7.9,"publicationDate":"2023-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10625928/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"71483552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Varifocal MEMS mirrors for high-speed axial focus scanning: a review.","authors":"Jaka Pribošek,&nbsp;Markus Bainschab,&nbsp;Takashi Sasaki","doi":"10.1038/s41378-022-00481-0","DOIUrl":"https://doi.org/10.1038/s41378-022-00481-0","url":null,"abstract":"<p><p>Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"135"},"PeriodicalIF":7.9,"publicationDate":"2023-10-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10603115/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"71413018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors.","authors":"Qinggang Meng, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie, Yulan Lu","doi":"10.1038/s41378-023-00596-y","DOIUrl":"10.1038/s41378-023-00596-y","url":null,"abstract":"<p><p>In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V^-1 MPa^-1 and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"134"},"PeriodicalIF":7.9,"publicationDate":"2023-10-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"71413017","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures.","authors":"Le Li, Bian Tian, Zhongkai Zhang, Meng Shi, Jiangjiang Liu, Zhaojun Liu, Jiaming Lei, Shuimin Li, Qijing Lin, Libo Zhao, Zhuangde Jiang","doi":"10.1038/s41378-023-00599-9","DOIUrl":"10.1038/s41378-023-00599-9","url":null,"abstract":"<p><p>With the growing demand for thermal management of electronic devices, cooling of high-precision instruments, and biological cryopreservation, heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative. However, current heat flux sensors (HFSs) are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions, such as low sensitivity and embrittlement. In this study, we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures, ranging from -196 °C to 273 °C. The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm, which are efficiently manufactured by the screen-printing method, reach 11.21 μV/(W/m²) and 13.43 μV/(W/m²), respectively. The experimental results show that there is a less than 3% resistance change from bending to stretching. Additionally, the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m². Additionally, we demonstrate the application of the HFS to the measurement of minuscule heat flux, such as heat dissipation of human skin and cold water. This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces, which has great importance in the superconductor and cryobiology field.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"133"},"PeriodicalIF":7.9,"publicationDate":"2023-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10598026/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"54230019","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication of a three-dimensional micro/nanocarbon structure with sub-10 nm carbon fiber arrays based on the nanoforming and pyrolysis of polyacrylonitrile-based jet fibers.","authors":"Jufeng Deng,&nbsp;Chong Liu,&nbsp;Dian Song,&nbsp;Marc Madou","doi":"10.1038/s41378-023-00604-1","DOIUrl":"https://doi.org/10.1038/s41378-023-00604-1","url":null,"abstract":"<p><p>To produce a three-dimensional micro/nanocarbon structure, a manufacturing design technique for sub-10 nm carbon fiber arrays on three-dimensional carbon micropillars has been developed; the method involves initiating electrostatic jetting, forming submicron-to-nanoscale PAN-based fibers, and maximizing the shrinkage from polyacrylonitrile (PAN)-based fibers to carbon fibers. Nanoforming and nanodepositing methods for polyacrylonitrile-based jet fibers as precursors of carbon fibers are proposed for the processing design of electrostatic jet initiation and for the forming design of submicron-to-nanoscale PAN-based fibers by establishing and analyzing mathematical models that include the diameter and tensile stress values of jet fibers and the electric field intensity values on the surfaces of carbon micropillars. In accordance with these methods, an array of jet fibers with diameters of ~80 nm is experimentally formed based on the thinning of the electrospinning fluid on top of a dispensing needle, the poking of drum into an electrospinning droplet, and the controlling of the needle-drum distance. When converting thin PAN-based jet fibers to carbon fibers, a pyrolysis method consisting of the suspension of jet nanofibers between carbon micropillars, the bond between the fibers and the surface of the carbon micropillar, and the control of micropillar spacing, stabilization temperature, and carbonation rate is presented to maximize the shrinkage from PAN-based fibers to carbon fibers and to form sub-10 nm carbon fiber arrays between three-dimensional carbon micropillars. The manufacturing design of a three-dimensional micro/nanocarbon structure can produce thin PAN-based jet nanofibers and nanofiber arrays aligned on micropillar surfaces, obtain shrinkage levels reaching 96% and incorporate sub-10 nm carbon fibers into three-dimensional carbon micropillars; these actions provide new research opportunities for correlated three-dimensional micro/nanocarbon structures that have not previously been technically possible.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"132"},"PeriodicalIF":7.9,"publicationDate":"2023-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10579398/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49679520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}