Microsystems & Nanoengineering最新文献

{"title":"A fully automated rotary microfluidic platform for high-throughput multiplex detection of respiratory tract pathogens.","authors":"Daoguangyao Zhang, Anyi Li, Chuanlong Li, Pei Ren, Liming Zhang, Bin Liu, Shiyong Yu, Xuefei Lv, Wenzhe Si, Yulin Deng","doi":"10.1038/s41378-025-01044-9","DOIUrl":"https://doi.org/10.1038/s41378-025-01044-9","url":null,"abstract":"<p><p>Rapid, high-throughput, timely, multiplex diagnosis of respiratory-tract infections still relies on laboratory infrastructure, sequential assays, and trained personnel, thereby delaying targeted therapy and outbreak containment. In this study, a Fully Automated rotary microfluidic platform (FA-RMP) for high-throughput multiplex respiratory tract pathogens detection was presented. FA-RMP enables a true \"sample-in, result-out\" workflow through the integration of swab lysis, reagent partitioning, lyophilized reverse transcription loop-mediated isothermal amplification (RT-LAMP), and moving-probe fluorescence read-out, all encapsulated with a disposable microfluidic cartridge and paired with a 9 kg, four-channel benchtop reader. The FA-RMP enables parallel processing of 16 independent reactions within 30 min, supporting simultaneous detection of up to 4 distinct clinical samples. Analytical validation using serially diluted Mycoplasma pneumoniae (MP) DNA established a limit of detection (LoD) of 50 copies µL^-1 and a log-linear correlation between threshold time and template load (R² = 0.9528). Testing with eight non-target respiratory pathogens yielded no amplification, confirming high analytical specificity. FA-RMP successfully detected the clinical samples with influenza A, influenza B, and MP, further demonstrating its robust multiplex detection capability. By integrating automated sample preparation, multiplex isothermal amplification and quantitative detection into a portable, high-throughput system, the platform delivers laboratory-grade performance at the point of care, serving as a scalable tool for routine respiratory pathogens screening and rapid epidemic response.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"186"},"PeriodicalIF":9.9,"publicationDate":"2025-10-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145292984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Flexible tactile sensors based on gold nanoparticles-precipitated carbon nanotubes with low contact resistance and high sensitivity.","authors":"Sangjun Sim, Euichul Chung, Yunsung Kang, Kyubin Bae, Jongbaeg Kim","doi":"10.1038/s41378-025-01056-5","DOIUrl":"10.1038/s41378-025-01056-5","url":null,"abstract":"<p><p>Flexible tactile sensors are receiving considerable interest due to their potential in diverse fields, including physiological monitoring and wearable electronics. Despite numerous studies to broaden their practical use, it remains difficult to simultaneously attain high sensitivity and a wide-range pressure detection. In this study, we have fabricated a tactile sensor with highly porous three-dimensional conductive architecture based on carbon nanotubes (CNTs) functionalized with gold nanoparticles (AuNPs). The zero-dimensional AuNPs, directly precipitated onto the CNT surface, exerted minimal effect on the sensor's initial resistance. Upon applying pressure to the tactile sensor, the contact resistance among the AuNPs-precipitated CNTs changes significantly, resulting in a high sensitivity of 23.23 kPa^-1 in the low-pressure range (0.05-500 kPa) and 11.06 kPa^-1 in the high-pressure range (500-1125 kPa). The sensor also exhibits outstanding sensing characteristics, including low hysteresis and excellent repeatability. Leveraging these advantages, the sensor has successfully detected pulse wave signals, neck/jaw muscle movements, and walking motions, confirming its practical applicability in wearable healthcare technologies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"185"},"PeriodicalIF":9.9,"publicationDate":"2025-10-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12515986/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145280642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A microfluidic platform for the co-culturing of microtissues with continuously recirculating suspension cells.","authors":"Christian Lohasz, Tamara Häfeli, Dzhansu Hasanova, Lisa Hölting, Michal Rudnik, Laure-Anne Ligeon, Svenja Lützow, Avni Mehta, Bettina Kritzer, Sandra Laternser, Javad Nazarian, Andreas Hierlemann, Olivier Frey, Mario M Modena","doi":"10.1038/s41378-025-01028-9","DOIUrl":"10.1038/s41378-025-01028-9","url":null,"abstract":"<p><p>In vitro evaluation of novel therapeutic approaches often fails to reliably predict efficacy and toxicity, especially when recapitulating conditions involving recirculating cells. Current testing strategies are often based on static co-culturing of cells in suspension and 3D tissue models, where cell sedimentation on the target tissue can occur. The observed effects may then mostly be a consequence of sedimentation and of the corresponding forced cell-tissue interactions. The realization of continuous medium flow helps to better recapitulate physiological conditions and cell-tissue interactions. To tackle current limitations of perfused organ-on-chip approaches, we developed a microfluidic chip and operation concept, which prevents undesired sedimentation and accumulation of suspended cells during multiple days by relying on gravity-driven perfusion. Our platform, which we termed \"human immune flow (hiFlow) chip\", enables to co-culture cells in suspension with up to 7 preformed microtissue models. Here, we present the design principle and operation of the platform, and we validate its performance by culturing cells and microtissues of a variety of different origins. Cells and tissues could be monitored on chip via high-resolution microscopy, while cell suspensions and microtissues could be easily retrieved for off-chip analysis. Our results demonstrate that primary immune cells and a range of different spheroid models of healthy and diseased tissues can be maintained for over 6 days on chip. As proof-of-concept cell-tissue interaction assay, we used an antibody treatment against diffuse midline glioma, a highly aggressive pediatric tumor. We are confident that our platform will help to increase the prediction power of in vitro preclinical testing of novel therapeutics that rely on the interaction of circulating cells with organ tissues.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"184"},"PeriodicalIF":9.9,"publicationDate":"2025-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12514218/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145275132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Origami-inspired reprogrammable microactuator system.","authors":"Vincent Gottwald, Lena Seigner, Makoto Ohtsuka, Rundong Jia, Pejman Shayanfard, Frank Wendler, Lars Bumke, Eckhard Quandt, Manfred Kohl","doi":"10.1038/s41378-025-01026-x","DOIUrl":"10.1038/s41378-025-01026-x","url":null,"abstract":"<p><p>A reprogrammable microactuator system is presented, consisting of antagonistic shape memory alloy (SMA) microactuators for bidirectional folding of miniature-scale tiles following the concept of origami. Additional integrated heatable soft-magnetic pads with low ferromagnetic transition temperature allow for control of magnetic latching forces. The strongly coupled thermo-mechanical and thermo-magnetic properties of the microactuator and magnetic subsystems are taken into account in a model-based design to enable their selective control by Joule heating. A procedure for local shape setting of the SMA microactuators is presented to adjust their memory shape at either maximum or minimum bending angle and, thus, to functionalize their performance as protagonists or antagonists. A microfabrication process is developed that takes the specific requirements for processing the various materials and structures into account. A demonstrator system consisting of four triangular tiles with an edge length of 500 µm and an angular range of about ±100° is introduced that is programmed to adopt the shape of a pyramid and later on reprogrammed to self-unlatch, self-unfold, and subsequently to adopt the shape of a table.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"182"},"PeriodicalIF":9.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12511558/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145258530","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A MEMS wall shear stress sensor with floating cover plate for aerospace flow monitoring in harsh environments.","authors":"Yunzhe Liu, Chuqiao Wang, Guanghui Ding, Xingxu Zhang, Jinjun Deng, Yang He, Binghe Ma, Weizheng Yuan","doi":"10.1038/s41378-025-01050-x","DOIUrl":"10.1038/s41378-025-01050-x","url":null,"abstract":"<p><p>Wall shear stress is one of the key parameters in turbulent boundary layers, playing a pivotal role in aerodynamic optimization and fuel efficiency enhancement. Although MEMS-based direct measurement stands as the most promising approach for wall shear stress quantification, the inherent limitations of floating sensing structures under harsh environments lead to mechanical failure, representing persistent technical barriers in practical applications. This work presents a novel MEMS sensor equipped with a protective floating cover plate, achieving high-robustness measurement through coordinated structural-process innovations. Based on the Dual Silicon-On-Insulator (DSOI) fabrication process, a protective floating configuration is developed. The critical process techniques, including deep silicon etching, wet etching of glass through vias, and silicon-glass anodic bonding synergistically establish protection for the sensing structures. The established electromechanical coupling mathematical model elucidates quantitative mapping relationships between critical structural parameters and sensing performance. Experimental characterization reveals a linear sensitivity of 28.3 mV Pa^-1 and a resonance frequency of 2.9 kHz. In supersonic tunnel experiments at Mach 2.0, the sensor achieves unprecedented full-cycle dynamic capture from establishment through stabilization to dissipation with millisecond-level transient response characteristics. This work provides a robust, high-precision solution for aerodynamic and fluid dynamics applications, paving the way for improving energy efficiency and flow control strategies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"183"},"PeriodicalIF":9.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12511368/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145258559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors.","authors":"Nadeem Tariq Beigh, Nouha Alcheikh","doi":"10.1038/s41378-025-01027-w","DOIUrl":"10.1038/s41378-025-01027-w","url":null,"abstract":"<p><p>In the present paradigm of flexible and wearable technologies, piezoresistive sensors hold immense promise as e-skin in sensing applications. Introducing porosity in these sensors elevates the performance multi-fold. However, fabrication of porous piezoresistive sensors is complicated, energy-intensive and cost-ineffective, negating their pertinent advantages. We present a new method of developing porous, thin films based piezoresistive sensors by utilizing the inherent vaporability of ethanol to introduce controlled porosity in graphene nanoplatelet (GNP)/ polydimethylsiloxane (PDMS) nanocomposites. The resulting vapor-channeled (VC) GNP/PDMS is formed without utilizing scaffolds, skeletons, high temperature etching or prolonged chemical processing. The fabrication process for porous nanocomposites is highly repeatable and controllable; the fabricated VC-GNP/PDMS thin films are reliable and show immense promise as flexible/wearable pressure sensors. The VC-GNP/PDMS achieves an achieve exceptional compressibility (up to 68.97% strain) without structural failure, yielding a flexible pressure sensor with an unprecedented linear response (R² = 0.99) across an ultra-wide dynamic range up to 2.5 MPa and a high sensitivity of 33.2% MPa^-1. The engineered porosity and micro-structure synergistically enable a tunable gauge factor, shifting from 0.66 (0-45% strain) to 1.72 (>45% strain). Critically, the sensor exhibits negligible hysteresis (1.08%), remarkable long-term stability over 5 weeks, and rapid response/relaxation (0.3/0.7 s), alongside robust insensitivity to temperature (25-60 °C) and humidity (5-100% RH). This unique fabrication strategy and the resulting high-performance pressure sensor, offering exceptional tunability in sensitivity and range, position it as a leading candidate for next-generation, cost-effective tactile biomechanical sensing.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"181"},"PeriodicalIF":9.9,"publicationDate":"2025-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12508130/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145251947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Wearable bioelectronics for cancer theranostics.","authors":"Zhichen Hua, Changhao Dai, Yufan Yang, Yu Song","doi":"10.1038/s41378-025-01048-5","DOIUrl":"10.1038/s41378-025-01048-5","url":null,"abstract":"<p><p>Cancer has emerged as a critical global health concern due to its elevated heterogeneity and mortality rate. Despite the continuous efforts put into medical research, current clinical approaches still face limitations, including dependency on costly facilities, trained operators and suboptimal diagnostic precision. Therefore, innovative strategies for accurate, personalized and patient-friendly cancer theranostic solutions are urgently required. Among all the platforms, wearable bioelectronics stand out for advantages such as non-invasive detection, responsive therapy and long-term monitoring, owing to their functional bioelectronic interfaces. This review summarizes the latest advances in wearable bioelectronics, aiming to provide a new strategy for cancer theranostics. Initially, the clinical status and emerging wearable bioelectronics are briefly described to provide a general overview. The subsequent contents focus on the implementation of wearable bioelectronics across early diagnosis, treatment, prognostic monitoring and rehabilitation with multiple device configurations. Finally, we discuss the current challenges and prospective future development in advanced cancer theranostics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"180"},"PeriodicalIF":9.9,"publicationDate":"2025-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12508454/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145251471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Polarity control of 2D semiconductor for reconfigurable electronics.","authors":"Xiaoqian He, Kejie Guan, Fuqin Sun, Xiaoshuang Gou, Lin Liu, Yingyi Wang, Weifan Zhou, Yang Xia, Cheng Zhang, Hao Dai, Zhanxia Zhao, Xiaowei Wang, Ting Zhang","doi":"10.1038/s41378-025-01029-8","DOIUrl":"10.1038/s41378-025-01029-8","url":null,"abstract":"<p><p>The controllable modulation of carrier polarity in semiconductors is essential for enabling dynamic configurations in reconfigurable devices. Ambipolar two-dimensional (2D) semiconductors, characterized by their atomic-scale thickness and excellent gate modulation efficiency, have emerged as highly promising channel materials for such devices. However, existing methods for polarity control encounter challenges in achieving reversible modulation during device operation. Here, we report a novel strategy for reversibly modulating the polarity of ambipolar 2D semiconductors through gate-controlled charge trapping. We demonstrate a double-gate TaO_x/WSe₂/h-BN field-effect transistor, which can reversibly switch between n-type and p-type transport characteristics via electric-field-driven bipolar charge trapping at the TaO_x/WSe₂ interface. With this method, an electrically configurable complementary inverter is created with a single WSe₂ flake, exhibiting a power consumption of just 0.7 nW. Additionally, a programmable p-n/n-p diode is realized with a > 100,000-fold change in the rectification ratio. These results demonstrate the great potential of gate-controlled bipolar charge trapping for advancing reconfigurable electronics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"178"},"PeriodicalIF":9.9,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12480568/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145192039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A decade of innovation: the journey of Microsystems & Nanoengineering on its 10th anniversary.","authors":"Tianhong Cui, Ian White, Yirong Wu","doi":"10.1038/s41378-025-00963-x","DOIUrl":"10.1038/s41378-025-00963-x","url":null,"abstract":"","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"176"},"PeriodicalIF":9.9,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12480712/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145191996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.","authors":"Yohan Jung, Dongseok Lee, Jongbaeg Kim","doi":"10.1038/s41378-025-01053-8","DOIUrl":"10.1038/s41378-025-01053-8","url":null,"abstract":"<p><p>Piezoelectric microelectromechanical systems (MEMS) mirrors enable precise and rapid beam steering with low power consumption, making them essential components in light detection and ranging (LiDAR) and advanced optical imaging systems. Lead zirconate titanate (PZT) offers a high piezoelectric coefficient suitable for such applications. However, its elevated processing temperatures (typically 500 °C-700 °C), lead content that raises contamination concerns during complementary metal-oxide-semiconductor (CMOS) integration, and hysteresis-induced nonlinearity limit its broader integration into MEMS mirrors. In contrast, aluminum nitride (AlN), with low deposition temperatures (below 400 °C) and contamination-free composition, offers CMOS compatibility, environmental stability, and low hysteresis, making it a promising lead-free alternative. However, its intrinsically low piezoelectric coefficient limits actuation efficiency for large scan angles. To overcome this limitation, scandium (Sc) doping has emerged as an effective strategy to enhance the piezoelectric response of AlN. Sc-doped AlN (AlScN) enables relatively large scan angles in MEMS mirror applications due to its significantly enhanced piezoelectric coefficients and reduced mechanical stiffness, while retaining essential advantages, such as CMOS compatibility and environmental robustness. This review comprehensively examines the recent progress in AlN and AlScN for MEMS mirror applications. We focus on its impact on piezoelectric properties, fabrication techniques, and mirror performance. Furthermore, we provide a comparative assessment of AlN- and AlScN-based MEMS mirrors, highlighting their respective advantages, limitations, and application potentials. Finally, this review summarizes recent developments and research trends, providing insights into their performance benefits and directions for future research.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"179"},"PeriodicalIF":9.9,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12479902/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145192075","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}