{"title":"石墨烯/PDMS中的蒸汽诱导孔隙:高性能压力传感器的可扩展路径。","authors":"Nadeem Tariq Beigh, Nouha Alcheikh","doi":"10.1038/s41378-025-01027-w","DOIUrl":null,"url":null,"abstract":"<p><p>In the present paradigm of flexible and wearable technologies, piezoresistive sensors hold immense promise as e-skin in sensing applications. Introducing porosity in these sensors elevates the performance multi-fold. However, fabrication of porous piezoresistive sensors is complicated, energy-intensive and cost-ineffective, negating their pertinent advantages. We present a new method of developing porous, thin films based piezoresistive sensors by utilizing the inherent vaporability of ethanol to introduce controlled porosity in graphene nanoplatelet (GNP)/ polydimethylsiloxane (PDMS) nanocomposites. The resulting vapor-channeled (VC) GNP/PDMS is formed without utilizing scaffolds, skeletons, high temperature etching or prolonged chemical processing. The fabrication process for porous nanocomposites is highly repeatable and controllable; the fabricated VC-GNP/PDMS thin films are reliable and show immense promise as flexible/wearable pressure sensors. The VC-GNP/PDMS achieves an achieve exceptional compressibility (up to 68.97% strain) without structural failure, yielding a flexible pressure sensor with an unprecedented linear response (R<sup>2</sup> = 0.99) across an ultra-wide dynamic range up to 2.5 MPa and a high sensitivity of 33.2% MPa<sup>-1</sup>. The engineered porosity and micro-structure synergistically enable a tunable gauge factor, shifting from 0.66 (0-45% strain) to 1.72 (>45% strain). Critically, the sensor exhibits negligible hysteresis (1.08%), remarkable long-term stability over 5 weeks, and rapid response/relaxation (0.3/0.7 s), alongside robust insensitivity to temperature (25-60 °C) and humidity (5-100% RH). This unique fabrication strategy and the resulting high-performance pressure sensor, offering exceptional tunability in sensitivity and range, position it as a leading candidate for next-generation, cost-effective tactile biomechanical sensing.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"181"},"PeriodicalIF":9.9000,"publicationDate":"2025-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors.\",\"authors\":\"Nadeem Tariq Beigh, Nouha Alcheikh\",\"doi\":\"10.1038/s41378-025-01027-w\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>In the present paradigm of flexible and wearable technologies, piezoresistive sensors hold immense promise as e-skin in sensing applications. Introducing porosity in these sensors elevates the performance multi-fold. However, fabrication of porous piezoresistive sensors is complicated, energy-intensive and cost-ineffective, negating their pertinent advantages. We present a new method of developing porous, thin films based piezoresistive sensors by utilizing the inherent vaporability of ethanol to introduce controlled porosity in graphene nanoplatelet (GNP)/ polydimethylsiloxane (PDMS) nanocomposites. The resulting vapor-channeled (VC) GNP/PDMS is formed without utilizing scaffolds, skeletons, high temperature etching or prolonged chemical processing. The fabrication process for porous nanocomposites is highly repeatable and controllable; the fabricated VC-GNP/PDMS thin films are reliable and show immense promise as flexible/wearable pressure sensors. The VC-GNP/PDMS achieves an achieve exceptional compressibility (up to 68.97% strain) without structural failure, yielding a flexible pressure sensor with an unprecedented linear response (R<sup>2</sup> = 0.99) across an ultra-wide dynamic range up to 2.5 MPa and a high sensitivity of 33.2% MPa<sup>-1</sup>. The engineered porosity and micro-structure synergistically enable a tunable gauge factor, shifting from 0.66 (0-45% strain) to 1.72 (>45% strain). Critically, the sensor exhibits negligible hysteresis (1.08%), remarkable long-term stability over 5 weeks, and rapid response/relaxation (0.3/0.7 s), alongside robust insensitivity to temperature (25-60 °C) and humidity (5-100% RH). This unique fabrication strategy and the resulting high-performance pressure sensor, offering exceptional tunability in sensitivity and range, position it as a leading candidate for next-generation, cost-effective tactile biomechanical sensing.</p>\",\"PeriodicalId\":18560,\"journal\":{\"name\":\"Microsystems & Nanoengineering\",\"volume\":\"11 1\",\"pages\":\"181\"},\"PeriodicalIF\":9.9000,\"publicationDate\":\"2025-10-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microsystems & Nanoengineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1038/s41378-025-01027-w\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-025-01027-w","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors.
In the present paradigm of flexible and wearable technologies, piezoresistive sensors hold immense promise as e-skin in sensing applications. Introducing porosity in these sensors elevates the performance multi-fold. However, fabrication of porous piezoresistive sensors is complicated, energy-intensive and cost-ineffective, negating their pertinent advantages. We present a new method of developing porous, thin films based piezoresistive sensors by utilizing the inherent vaporability of ethanol to introduce controlled porosity in graphene nanoplatelet (GNP)/ polydimethylsiloxane (PDMS) nanocomposites. The resulting vapor-channeled (VC) GNP/PDMS is formed without utilizing scaffolds, skeletons, high temperature etching or prolonged chemical processing. The fabrication process for porous nanocomposites is highly repeatable and controllable; the fabricated VC-GNP/PDMS thin films are reliable and show immense promise as flexible/wearable pressure sensors. The VC-GNP/PDMS achieves an achieve exceptional compressibility (up to 68.97% strain) without structural failure, yielding a flexible pressure sensor with an unprecedented linear response (R2 = 0.99) across an ultra-wide dynamic range up to 2.5 MPa and a high sensitivity of 33.2% MPa-1. The engineered porosity and micro-structure synergistically enable a tunable gauge factor, shifting from 0.66 (0-45% strain) to 1.72 (>45% strain). Critically, the sensor exhibits negligible hysteresis (1.08%), remarkable long-term stability over 5 weeks, and rapid response/relaxation (0.3/0.7 s), alongside robust insensitivity to temperature (25-60 °C) and humidity (5-100% RH). This unique fabrication strategy and the resulting high-performance pressure sensor, offering exceptional tunability in sensitivity and range, position it as a leading candidate for next-generation, cost-effective tactile biomechanical sensing.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.