Microsystems & Nanoengineering最新文献

{"title":"Conductive cobalt-based deposits grown by Cryo-FEBID for application as top-contact electrodes in large-area molecular electronic devices.","authors":"Alba Salvador-Porroche, Alejandro Gómez-González, José María Bonastre, Santiago Martín, Soraya Sangiao, José María De Teresa, Pilar Cea","doi":"10.1038/s41378-026-01280-7","DOIUrl":"https://doi.org/10.1038/s41378-026-01280-7","url":null,"abstract":"<p><p>The growth of functional materials at precise locations using focused electron irradiation has recently attracted considerable attention, including techniques such as Focused Electron Beam Induced Deposition (FEBID), growth by decomposition of spin-coated organometallic films, ice lithography, and others. Ice lithography requires lowering the substrate temperature, which can be achieved by means of a cryogenic module or a Peltier accessory. The same approach is applied to FEBID growth under cryogenic conditions (Cryo-FEBID) and to the related technique Cryo-FIBID, where ions constitute the irradiating charge instead of electrons. These techniques outperform their corresponding room-temperature processes due to their higher speed. In this manuscript, we present the optimization of cobalt-based deposit growth using Cryo-FEBID. For the first time, a conductive material grown using Cryo-FEBID is demonstrated, opening the possibility of applying this technique to create nanoscale electrical contacts. These cobalt-based Cryo-FEBID deposits are used to fabricate the top-contact electrode in vertical, large-area molecular electronic devices, achieving state-of-the-art yield and performance. Importantly, this nanofabrication method offers unique advantages, including direct-writing with precise control over substrate location, size, shape and thickness, paving the way for the integration of molecular-scale functionalities into conventional microelectronic platforms.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13109405/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Programmable viscoelastic hydrogels exhibit antimicrobial and regenerative properties to promote cell migration, wound healing, and tissue remodeling.","authors":"Jiaqi Wang, Xiangsai Li, George Michael Nicolas, Yongde Cai, Tianying Yuan, Xiu Yan, Jin Wang, Chuqian Ruan, Zitian Wang, Weijie Zhang, Xiaoyong Dai, Shaohua Ma, Xudong Chen","doi":"10.1038/s41378-026-01233-0","DOIUrl":"https://doi.org/10.1038/s41378-026-01233-0","url":null,"abstract":"<p><p>The growing challenges of conventional ECM bio-inks for 3D cell culture underscore the development of novel hydrogels that fully recapitulate specialized in vivo cell microenvironments. We developed HA-gel-dex hydrogels by double-crosslinking ECM components (hyaluronic acid and gelatin) with synthetic dextran. Engineered with irreversible amide bonds and dynamic imine crosslinks, the HA-gel-dex enables viscoelastic property modifications to replicate native ECM characteristics, with the highest yield ratio reaching ~1000%. This programmability derive from tunable crosslinking architectures and network dynamics, where controlled HA-gel to dex-CHO ratios and peptide functionalization yield optimized hydrogel viscoelasticity and predictable bioprinting performance. Functionalization with selective cell-ligation groups (RGD, collagen, and laminin peptides) strengthened cell-matrix interaction, promoting increased cell proliferation, differentiation, and micro-organo-sphere formation. Moreover, rheological analyses revealed significantly enhanced stress-relaxing and self-healing hydrogel properties; while showing cytocompatibility, increased cell viability, bioprinting capacity, significant biofilm inhibition properties, and synergism with antimicrobials. Further assays on BALB/c mice showed remarkably improved wound healing, hair follicle regeneration, and nature ECM production abilities, the performance of which are further augmented with the presence and encapsulation of therapeutic mesenchymal stem cells (MSCs). The study shows their future promise as wound dressings and potentially antibiotic treatment scaffolds for infection-associated wounds. Above all, HA-gel-dex hydrogels provide an improved ECM-like, reproducible, and cost-effective alternative to traditional ECM bio-inks for 3D cell culture, 3D bioprinting, and tissue repair studies - advancing synthetic ECM alternatives for translational applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13106852/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High-fidelity bioassembly of organoids and spheroids using inertial droplet microfluidics for precision oncology and tumor microenvironment modeling.","authors":"Yuchen Li, Zemei Cao, Yibin Xu, Caiming Li, Shun Ye, Xiaolin Wu, Zerui Wang, Haipeng Chen, Hengchang Liu, Xiyue Hu, Teng Wang, Wanqiu Zeng, Qiong Wang, Lei Guo, Wenbin Du","doi":"10.1038/s41378-026-01244-x","DOIUrl":"https://doi.org/10.1038/s41378-026-01244-x","url":null,"abstract":"<p><p>The translation of 3D multicellular systems into clinical applications has been constrained by the need to balance physiological relevance and scalability. Current biofabrication methods primarily depend on passive cell aggregation or capillary- and viscosity-limited segmentation, resulting in stochastic heterogeneity that limits high-throughput screening (HTS). Here, we present OsciSphere, a chip-free droplet microfluidic platform that utilizes Weber-number-driven inertial forces to enable deterministic bioassembly of uniform 3D multicellular systems. Through programmable oscillatory acceleration, OsciSphere achieves precise, high-frequency droplet generation in standard well plates, eliminating the requirement for complex microfabrication. We demonstrate the versatility of this platform by generating miniaturized multicellular tumor spheroids (µMCTs) for drug screening, tissue-derived organoids (µTDOs) for pharmacological studies, and patient-derived organoids (µPDOs) that support tumor-immune co-cultures. In comparison to conventional Matrigel domes, OsciSphere-assembled 3D multicellular systems display improved uniformity, viability, and chemosensitivity. The platform's scalability enabled the screening of 49 commensal gut bacterial secretomes, leading to the identification of Eubacterium species that modulate cancer apoptotic pathways. Furthermore, µPDOs generated with OsciSphere support efficient infiltration of autologous PBMCs, enabling quantitative assessment of PD-1 blockade. This platform provides a robust, accessible approach to bridging the gap between complex tissue modeling and large-scale functional screening in precision oncology.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13109402/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic device to study spatial and temporal response of astrocyte networks in response to changes in the biochemical milieu.","authors":"Catherine A Reed-McBain, Annika S Anchan, Janmesh D Patel, Ella P Peterson, Ismael Gómez García, Jeremiah Riendeau, Cristian Chavira, Natalie W Hua, Ayoung Choi, Jessica R Saperstein, Trista J Drew, Matthew I Banks, Melissa Skala, Jose M Ayuso","doi":"10.1038/s41378-026-01213-4","DOIUrl":"https://doi.org/10.1038/s41378-026-01213-4","url":null,"abstract":"<p><p>Astrocytes are the most abundant cell type in the central nervous system and are major players in brain homeostasis and inflammation. Astrocytes form a syncytial three-dimensional (3D) network across the brain tissue. Establishing a 3D network allows astrocytes to communicate with each other by a variety of mechanisms, including Ca²⁺ transients. Conversely, spatial and temporal disruption of the astrocyte network can have detrimental effects on brain biology. However, traditional in vitro models have struggled to generate astrocyte networks that can be spatially and temporally perturbed, which limits our capacity to understand astrocyte group dynamics. To address this, we developed a microphysiological platform to investigate both the ways in which 3D astrocyte networks form over time and how they are affected by localized perturbations in the biochemical milieu. We observed that extracellular matrix composition played a critical role in the development of astrocyte network structure, leading to fully interconnected networks within 48 h in optimal conditions. Furthermore, we observed that transient exposure to reactive oxygen species led to long-term disruption of the astrocyte network. This network collapse was accompanied by a decrease in astrocyte redox potential and loss of mitochondrial architecture, which transitioned from an organized filamentous pattern to small and fragmented mitochondria. Additionally, exposure to reactive oxygen species immediately led to disruption of Ca²⁺ transients. Interestingly, even following transient exposure, astrocytes exhibited persistent disruption of the network architecture, with individual cells still exhibiting fragmented mitochondria and Ca²⁺ signaling impairment. These findings highlight how temporary perturbations of the biochemical milieu can result in long-term changes in astrocyte behavior.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13106794/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ion-electron synergy-enhanced flexible highly sensitive wireless sensing system with wide strain range.","authors":"Jin Chai, Guirong Wu, Zekai Huang, Shunqiang Huang, Mengran Liu, Jinwei Zhao, Qingfei Wu, Lei Nie, Xiewen Wen, Meng Li, Mengju Zhu, Jiancheng Dai, Xin Wang, Yanzi Guo, Xiajing Zhang, Chenyang Xue, Libo Gao","doi":"10.1038/s41378-026-01261-w","DOIUrl":"https://doi.org/10.1038/s41378-026-01261-w","url":null,"abstract":"<p><p>Flexible strain sensors require a wide strain range and high sensitivity for applications from human joint monitoring to robotic motion detection. Conventional wired systems limit motion, especially in underwater and wearable scenarios. Here, we present an ion-electron synergy-enhanced flexible highly sensitive wireless sensing system (IESS) with wide strain range, in which ionic and electronic conduction synergistically amplify strain-induced resistance changes. By combining multi-walled carbon nanotubes (MWCNTs), ionic liquid, and a gold layer, a three-dimensional porous conductive network forms. Applied strain induces microcracks that interrupt electron pathways while reconfiguring ionic transport channels, enabling high sensitivity over a wide strain range (gauge factor, GF = 1.985 × 10⁴, 100%). The system integrates sensing, power, and wireless communication in a compact platform for multimodal applications. With machine learning, it achieves 93.3% accuracy in phonation recognition and distinguishes diving, ascending, and forward swimming of bionic shark robots, as well as monitors buoy strain underwater. These results demonstrate the advantage of ion-electron synergy in enhancing sensing performance and highlight the system's versatility for bioinspired robotics and wearable health monitoring.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13106786/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Modifiable PEDOT:PSS-based flexible diagnostic and therapeutic dressings for personalized wound management.","authors":"Leyan Wang, Guang Yao, Siyuan Cai, Xingyi Gan, Yuxin Gan, Xuhan Ren, Chenzheng Zhou, Taisong Pan, Min Gao, Binbin Jiang, Zongkai Yan, Jia Zhu, Zhenlong Huang, Yuan Lin","doi":"10.1038/s41378-026-01200-9","DOIUrl":"https://doi.org/10.1038/s41378-026-01200-9","url":null,"abstract":"<p><p>Intelligent wound management necessitates flexible and personalized wound dressings capable of real-time physiological monitoring and targeted therapeutic interventions. A significant challenge lies in integrating diverse sensing and stimulation components into an all-in-one dressing while maintaining material compatibility and structural interoperability. Here, we present a sophisticated and scalable flexible diagnostic and therapeutic dressing (FDTD) based on modifiable poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS). By tuning the electrical conductivity of the PEDOT:PSS film (1 S/cm to 6.4 kS/cm) while maintaining a low Young's modulus, we enable the versatile integration of temperature, impedance, and pH sensors alongside electrical and optical stimulators into a single, flexible dressing. Biosensing assays demonstrate high sensitivity (1 Ω/°C, -2 mV/10% volumetric water content, and -30 mV/pH), excellent linearity (R² > 0.99), and robust reproducibility. In vivo therapeutic efficacy, rigorously assessed using circular and square wound models in Sprague-Dawley rats, reveals that FDTD-mediated electro-optical synergistic therapy achieves greater than 98% wound closure within 8 days, significantly outperforming the control group (<65%) and other reported physical therapies (≤90%). Mechanistically, accelerated regeneration is attributed to improved cellular proliferation, collagen organization, and neovascularization facilitated by electro-optical synergistic treatment. Furthermore, the integration of wireless power transfer and Bluetooth modules enables real-time data acquisition and remote therapeutic modulation, positioning FDTD as a promising platform for transformative wound management.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13106678/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity.","authors":"Ji Young Park, Byungkwon Jang, Jun Young Kim, Nosang Vincent Myung, Yong-Ho Choa","doi":"10.1038/s41378-026-01265-6","DOIUrl":"https://doi.org/10.1038/s41378-026-01265-6","url":null,"abstract":"<p><p>This paper introduces a glass-based MEMS hydrogen sensor that leverages single glass wafer cavity engineering along with a melamine-formaldehyde-derived nitrogen-doped carbon sphere (NCS) support bearing a Pt catalyst. A Laser induced selective wet etch process monolithically forms high-aspect-ratio vias and double cavities in a single glass wafer. The suspended sensing membrane integrates Pt interdigital electrodes and patterned Pt/NCS catalyst islands, where pyridinic/pyrrolic nitrogen sites promote H₂ dissociation and spillover, enabling chemiresistive transduction at room temperature. Finite-element simulations and infrared thermography show that under identical electrical drive, the low-thermal-conductivity glass and double-cavity architecture suppress heat loss and maintain the sensing region ~10 °C higher than planar counterparts. This thermal advantage translates directly into an order-of-magnitude (~10 times) increase in sensitivity at room temperature. By integrating a simplified, bonding-free single glass wafer process with a Pt/NCS-functionalized suspended membrane, this work establishes a scalable, economical, and reliable platform for high-performance, room-temperature hydrogen sensing in microsystem applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13100208/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A bell-bloom atomic magnetic-videorecorder with global shutter and differential readout.","authors":"Xinxin He, Haifeng Dong, Zeyu Hua, Hangfei Ye, Chenlu Xu, Xin Li, Hao Guo, Zhonghao Li, Huanfei Wen, Jun Tang, Zongmin Ma, Jun Liu","doi":"10.1038/s41378-026-01282-5","DOIUrl":"https://doi.org/10.1038/s41378-026-01282-5","url":null,"abstract":"<p><p>Weak magnetic video recording with warm atomic ensembles constitutes a non-cryogenic and non-contact methodology for the magnetic source identification and failure reproduction. However, the spatial resolution, imaging speed, and shooting mode from traditional optical-pumping systems have constrained the real recording for ever-changing magnetic phenomena. This work reports a 684-pixel Bell-Bloom atomic magnetic-videorecorder with the global shutter and two-dimensional differential readout, for the real recording of changing gradient fields, which implements the free Larmor precession of Cs atoms to infer local magnetic information, employs a high-speed dual-quadrant Complementary Metal Oxide Semiconductor (CMOS) sensor with the global shutter and the extra microlens focusing to simultaneously detect differential optical rotations on all pixels. Also, a digital micro-mirror device (DMD) is employed to weigh the pixel crosstalk and the spatial resolution, and to facilitate the one-to-one pairing of the profiles for each differential probe beam pair projected onto the two CMOS quadrants. Furthermore, the average sensitivity is demonstrated to be 194 pT/ <math> <msqrt><mrow><mi>Hz</mi></mrow> </msqrt> </math> @0.5-178 Hz, with a high spatial resolution of 137 μm² and a frame rate of 205 fps in a field of view up to 5 × 2.6 mm². Finally, the magnetic distributions from a moving source have been experimentally measured and found to be in good agreement with the simulation results.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13102908/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Electrohydrodynamic printed ultra-high performance liquid metal strain sensor.","authors":"Xu Chen, Yiwen Feng, Kaiwen Chen, Zefei Li, Chang Liu, Xiangji Chen, Zhenya Wang, Xiaopeng Zhang, Ran Zhang, Shuaiwu Liu, Xiaoxia Gao, Weiwei Li, Tiesheng Wang, Dazhi Wang","doi":"10.1038/s41378-026-01237-w","DOIUrl":"https://doi.org/10.1038/s41378-026-01237-w","url":null,"abstract":"<p><p>Liquid metals exhibit excellent fluidity and strain adaptability, offering promising applications in flexible electronics, human-machine interaction, and soft robotics. However, due to the low viscosity and high surface tension of liquid metals, achieving ultraprecise patterning remains challenging, thereby limiting device integration and electrical response. This study proposes an electrohydrodynamic printing method for large-length, ultra-fine, customized manufacturing of liquid-metal microwires, thereby regulating their electrical response. A simple liquid-metal wire structure was used to fabricate a strain sensor, achieving ultra-sensitive strain detection with a weak strain sensing capability of 0.008% and withstanding thousands of tensile cycles at 80% strain. This sensor demonstrated excellent performance in applications such as gesture recognition and pulse measurement. This research demonstrates that electrohydrodynamic printing offers a practical method for precisely processing liquid metals, thereby expanding the potential applications of liquid metal devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13102910/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Calorimetric differential pressure sensor with high sensitivity for hydrodynamic perception.","authors":"Yudong Cao, Zhiqiang Ma, Hui Kang, Weitai Zhou, Xiaochang Yang, Hong Ye, Xingxu Zhang, Jun Cai, Yonggang Jiang","doi":"10.1038/s41378-026-01270-9","DOIUrl":"https://doi.org/10.1038/s41378-026-01270-9","url":null,"abstract":"<p><p>Accurate perception of hydrodynamic information is crucial for intelligent navigation and control of underwater robotics in challenging underwater environments. Current diaphragm-based differential pressure sensors are generally constrained by limited resolution for hydrodynamic perception. Here, we present a high-sensitivity calorimetric differential pressure sensor featured with precisely designed calorimetric components located on cantilever beams. The proposed sensor achieves an impressive underwater differential pressure resolution of 18.9 mPa and a repeatability standard deviation of 0.38%. By integrating a sensor array consisting of three such sensors into an underwater robotic model, the velocity and yaw angle were estimated simultaneously with average solution errors of 2.9 mm·s^-1 and 0.94°, respectively. Underwater obstacles can be recognized with an accuracy of 97.5% by perceiving hydrodynamic variations in the Kármán vortex street due to its high sensitivity. Overall, the proposed sensor shows many potential applications in underwater flow sensing and the control of underwater robotics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":9.9,"publicationDate":"2026-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13103352/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147775837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}