Microsystems & Nanoengineering最新文献

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High sensitivity acoustic flow sensing based on bio-inspired web-like structure for panoramic acoustic perception. 基于仿生网状结构的全景声感知高灵敏度声流传感。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-08 DOI: 10.1038/s41378-025-01001-6
Jianyang Hu, Bin Liu, Jianan Feng, Chen Chen, Lei Wang, Yiqun Wang, Jie Lin, Peng Jin
{"title":"High sensitivity acoustic flow sensing based on bio-inspired web-like structure for panoramic acoustic perception.","authors":"Jianyang Hu, Bin Liu, Jianan Feng, Chen Chen, Lei Wang, Yiqun Wang, Jie Lin, Peng Jin","doi":"10.1038/s41378-025-01001-6","DOIUrl":"10.1038/s41378-025-01001-6","url":null,"abstract":"<p><p>Panoramic perception, as a technology for comprehensive information acquisition, is a fascinating research topic across various disciplines. Acoustic, being one of the most familiar channels for human information conveyance, holds considerable potential for harnessing in panoramic perception. In nature, the spider is able to sense acoustic-induced air particle motion using a slender web. The unique acoustic response mechanism approaches maximum physical efficiency, which is much better than all previously known acoustic responsiveness of tympanic membranes. Herein, inspired by such unique structural and functional features of the spider auditory system, we propose a bio-inspired web-like structure that exhibits superior mechanical compliance (23.6 ~ 0.016 μm/Pa), high sensitivity (9.36 mm/s/Pa @100 Hz), excellent low-frequency response (10 Hz in experiment, 1 Hz in simulation), fine frequency resolution (0.05 Hz) and inherent directionality to acoustic. These excellent features demonstrate that the bio-inspired web-like structure is well-suited for high-performance acoustic detection and holds potential for panoramic acoustic perception. Meanwhile, the sensing system demonstrates promise in automatic driving, disaster monitoring and early warning, human-computer interaction, national defense security, etc.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"136"},"PeriodicalIF":7.3,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12238531/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144591769","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Alzheimer model chip with microglia BV2 cells. 小胶质细胞BV2的阿尔茨海默病模型芯片。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-08 DOI: 10.1038/s41378-024-00862-7
Ehsan Yazdanpanah Moghadam, Nahum Sonenberg, Muthukumaran Packirisamy
{"title":"Alzheimer model chip with microglia BV2 cells.","authors":"Ehsan Yazdanpanah Moghadam, Nahum Sonenberg, Muthukumaran Packirisamy","doi":"10.1038/s41378-024-00862-7","DOIUrl":"10.1038/s41378-024-00862-7","url":null,"abstract":"<p><p>Amyloid beta oligomers (AβO) are pivotal in Alzheimer's Disease (AD), cleared by microglia cells, as immune cells in the brain. Microglia cells exposed to AβO are involved with migration, apoptosis, phagocytosis, and activated microglial receptors through AβO, impacting cellular mechanobiological characteristics such as microglial adhesion strength to the underlying substrate. Herein, a label-free microfluidic device was used to detect advancing AD conditions with increasing AβO concentrations on microglia BV2 cells by quantitatively comparing the cell-substrate adhesion. The microfluidic device, acting as an AD model, comprises a single channel, which functions as a cell adhesion assay. To assess cell-substrate adhesion under different AβO concentrations of 1 µM, 2.5 µM, and 5 µM, the number of the cells attached to the substrate was counted by real-time microscopy when the cells were under the flow shear stress of 3 Pa and 7.5 Pa corresponding to Reynolds number (Re) of 10 and 25, respectively. The data showed that quantifying the cell-substrate adhesion using the microfluidic device could successfully identify conditions of advancing AβO concentrations. Our findings indicated that the increased incubation time with AβO caused reduced cell-substrate adhesion strength. Additionally, increased AβO concentration was another factor that weakened microglial interaction with the substrate. The quantification of cell-substrate adhesion using 3 Pa compared to 7.5 Pa clearly demonstrated advancing AβO in AD. This study using the chip provides an AD model for a deeper understanding mechanobiological behaviors of microglia exposed to AβO corresponding to diagnosed AD conditions under an in vitro microenvironment.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"135"},"PeriodicalIF":7.3,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12234782/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144584328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout. 非冷却的宽带太赫兹热辐射计,采用SOI MEMS光束谐振器,带有压阻式读出。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-07 DOI: 10.1038/s41378-025-00996-2
Ya Zhang, Kazuki Ebata, Mirai Iimori, Qian Liu, Zihao Zhao, Ryotaro Takeuchi, Hua Li, Kazusuke Maenaka, Kazuhiko Hirakawa
{"title":"Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout.","authors":"Ya Zhang, Kazuki Ebata, Mirai Iimori, Qian Liu, Zihao Zhao, Ryotaro Takeuchi, Hua Li, Kazusuke Maenaka, Kazuhiko Hirakawa","doi":"10.1038/s41378-025-00996-2","DOIUrl":"10.1038/s41378-025-00996-2","url":null,"abstract":"<p><p>Terahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability. For easy integration with CMOS circuits, silicon (Si) based MEMS detectors are highly desirable. Here we report an uncooled THz bolometer using doubly-clamped Si on insulator (SOI) MEMS beam resonator with piezoresistive readout. When external heat is applied to the MEMS beam, the resonance frequency shifts owing to the thermal strain in the beam, demonstrating a thermal responsivity up to 149 W<sup>-1</sup>. SOI MEMS resonators exhibit a thermal response time of about 88 μs, which is over 3 times faster than that of GaAs MEMS detectors. Furthermore, electrical readout of the MEMS vibrations is achieved by using the piezoresistive effect of Si, offering a low frequency noise density of 2.7 mHz/√Hz, and subsequently a noise equivalent power (NEP) of about 36 pW/√Hz for the current devices. Optical measurement using a FTIR spectrometer shows that SOI MEMS bolometers has a broadband THz response across 1-10 THz range. These results demonstrate that SOI MEMS bolometer features fast response and high sensitivity, while also being compact, broadband, and CMOS-compatible, highlighting its strong potential for advanced THz spectroscopy and imaging applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"132"},"PeriodicalIF":7.3,"publicationDate":"2025-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12234989/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144584331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of electrochemical nanoprobe for real-time intracellular measurements of Fe2+ during ferroptosis. 用于铁下垂过程中细胞内Fe2+实时测量的电化学纳米探针的研制。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-07 DOI: 10.1038/s41378-025-00930-6
Yanmei Ma, Xinhao Li, Weikang Hu, Muyang Ruan, Ming Yang, Lingqian Chang, Hongri Gu, Chengzhi Hu
{"title":"Development of electrochemical nanoprobe for real-time intracellular measurements of Fe<sup>2+</sup> during ferroptosis.","authors":"Yanmei Ma, Xinhao Li, Weikang Hu, Muyang Ruan, Ming Yang, Lingqian Chang, Hongri Gu, Chengzhi Hu","doi":"10.1038/s41378-025-00930-6","DOIUrl":"10.1038/s41378-025-00930-6","url":null,"abstract":"<p><p>Ferroptosis is an iron-dependent form of regulated cell death driven by phospholipid peroxidation and the accumulation of reactive oxygen species (ROS), holding significant importance for therapeutic applications via its induction or inhibition. Accurate detection of intracellular Fe<sup>2+</sup> and ROS is essential, as these molecules play essential roles in initiating and propagating ferroptosis. In this study, we present a novel electrochemical nanoprobe for real-time, highly selective detection of intracellular Fe<sup>2+</sup>. The nanoprobes are prepared by coating gold nanoparticles (AuNPs) and poly(3,4-ethylenedioxythiophene) (PEDOT) onto silicon carbide nanowires (SiC NWs), which are subsequently functionalized with ferrocenyl endoperoxide carboxylic acid (FDCA) and integrated with a liquid metal-filled glass nanopipette. FDCA is specifically synthesized to enable precise electrochemical detection of Fe<sup>2+</sup> with high selectivity (0.1 nM to 1 µM) and exceptional specificity. PEDOT and AuNPs can improve electrical conductivity and provide a versatile interface for further FDCA decoration. We use the nanoprobes to evaluate the intracellular change of Fe<sup>2+</sup> in MCF-7 breast cancer cells during erastin-induced ferroptosis. We observe a significant increase in intracellular Fe<sup>2+</sup> levels in MCF-7 cells undergoing ferroptosis, accompanied by a notable rise in ROS levels. These findings underscore the potential of this nanoprobe to enhance our understanding of the mechanism of ferroptosis in tumor development and as a potential treatment target.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"134"},"PeriodicalIF":7.3,"publicationDate":"2025-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12234944/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144584329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Intelligent single-cell manipulation: LLMs- and object detection-enhanced active-matrix digital microfluidics. 智能单细胞操作:llm和目标检测增强有源矩阵数字微流体。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-07 DOI: 10.1038/s41378-025-00962-y
Zhiqiang Jia, Chen Jiang, Jiahao Li, Yacine Belgaid, Mingfeng Ge, Li Li, Siyi Hu, Xing Huang, Tsung-Yi Ho, Wenfei Dong, Zhiwen Yu, Hanbin Ma
{"title":"Intelligent single-cell manipulation: LLMs- and object detection-enhanced active-matrix digital microfluidics.","authors":"Zhiqiang Jia, Chen Jiang, Jiahao Li, Yacine Belgaid, Mingfeng Ge, Li Li, Siyi Hu, Xing Huang, Tsung-Yi Ho, Wenfei Dong, Zhiwen Yu, Hanbin Ma","doi":"10.1038/s41378-025-00962-y","DOIUrl":"10.1038/s41378-025-00962-y","url":null,"abstract":"<p><p>Single-cell analysis is crucial for deciphering cellular heterogeneity and understanding complex biological systems. However, most existing single-cell sample manipulation (SCSM) systems suffer from various drawbacks such as high cost, low throughput, and heavy reliance on human interventions. Currently, large language models (LLMs) have been used in robotic platforms, but a limited number of studies have reported the application of LLMs in the field of lab-on-a-chip automation. Consequently, we have developed an active-matrix digital microfluidic (AM-DMF) platform that realizes fully automated biological procedures for intelligent SCSM. By combining this with a fully programmable lab-on-a-chip system, we present a breakthrough for SCSM by combining LLMs and object detection technologies. With the proposed platform, the single-cell sample generation rate and identification precision reach up to 25% and 98%, respectively, which are much higher than the existing platforms in terms of SCSM efficiency and performance. Furthermore, a three-class detection method considering droplet edges is implemented to realize the automatic identification of cells and oil bubbles. This method achieves a 1.0% improvement in cell recognition accuracy according to the <math> <msubsup><mrow><mi>AP</mi></mrow> <mrow><mn>75</mn></mrow> <mrow><mi>test</mi></mrow> </msubsup> </math> metric, while efficiently distinguishing obscured cells at droplet edges, where approximately 20% of all droplets contain cells at their edges. More importantly, as the first attempt, a ubiquitous tool for automatic SCSM workflow generation is developed based on the LLMs, thus advancing the development and progression of the field of single-cell analysis in the life sciences.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"133"},"PeriodicalIF":7.3,"publicationDate":"2025-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12234788/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144584330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Suspended lithium niobate acoustic resonators with Damascene electrodes for radiofrequency filtering. 带大马士革电极的悬浮铌酸锂声学谐振器,用于射频滤波。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-07-01 DOI: 10.1038/s41378-025-00980-w
Silvan Stettler, Luis Guillermo Villanueva
{"title":"Suspended lithium niobate acoustic resonators with Damascene electrodes for radiofrequency filtering.","authors":"Silvan Stettler, Luis Guillermo Villanueva","doi":"10.1038/s41378-025-00980-w","DOIUrl":"10.1038/s41378-025-00980-w","url":null,"abstract":"<p><p>Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless communication is advancing to higher frequencies and larger bandwidths enabling higher speeds and throughput. Current micro-acoustic resonator technology, a key component in radiofrequency front-end filters, is struggling to keep pace with these developments. This work presents an acoustic resonator architecture enabling multi-frequency, low-loss, and wideband filtering for the 5G and future 6G bands located above 3 GHz. Thanks to the exceptional performance of these resonators, filters for the 5G n77 and n79 bands are demonstrated, exhibiting fractional bandwidths of 25% and 13%, respectively, with low insertion loss of around 1 dB. With its unique frequency scalability and wideband capabilities, the reported architecture offers a promising option for filtering and multiplexing in future mobile devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"131"},"PeriodicalIF":7.3,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12209459/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144528732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A battery-free wireless sensor for encrypted signal transmission via Maxwell's displacement current. 一种无电池无线传感器,通过麦克斯韦位移电流进行加密信号传输。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-30 DOI: 10.1038/s41378-025-00987-3
Jixin Yi, Shuzhe Liu, Zhenqiu Gao, Shaokuan Wu, Haifeng Ji, Jiaxun Hou, Guyu Jiang, Xuhui Sun, Zhen Wen
{"title":"A battery-free wireless sensor for encrypted signal transmission via Maxwell's displacement current.","authors":"Jixin Yi, Shuzhe Liu, Zhenqiu Gao, Shaokuan Wu, Haifeng Ji, Jiaxun Hou, Guyu Jiang, Xuhui Sun, Zhen Wen","doi":"10.1038/s41378-025-00987-3","DOIUrl":"10.1038/s41378-025-00987-3","url":null,"abstract":"<p><p>Traditional wireless sensors still face challenges such as high power consumption and bulky signal transmission modules. In this work, we report a battery-free sensor via Maxwell's displacement current for encrypted signal transmission. The sensor employs an instantaneous discharge triboelectric nanogenerator (ID-TENG) featuring a dual-contact electrode structure. It enables rapid charge transfer and instantaneous current generation (~6 ms per cycle) and then high-frequency electromagnetic wave generation. The instantaneous discharge mechanism reduces the generated voltage to 100 V while maintaining μA-level current output, addressing critical safety concerns. By integrating a resistor‒inductor‒capacitor (RLC) equivalent circuit, the sensor achieves precise amplitude and frequency modulation of wireless signals. A series of inductors (0-50 μH) is used to achieve wide frequency-domain regulation (3.91-16.97 MHz), and capacitor parallel regulation (0-50 pF) to achieve accurate regulation in the narrow frequency domain (1.95-2.63 MHz). The sensor illustrates 22 m of wireless transmission distance and sustained stability over 16,000 cycles. By pre-setting the frequency sequence of the signal as a password, the specific password transmits the specific information to realize the encryption of the wireless signal transmission. Finally, it is demonstrated to be used as a smart wireless keyboard, an interactive dance carpet and an encrypted vehicle control system with passivity, adaptability, scalability, and resistance to signal interference.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"130"},"PeriodicalIF":7.3,"publicationDate":"2025-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12206917/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144528731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process. 基于新型SpacerX工艺的固态纳米孔阵列的晶圆级制造。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-25 DOI: 10.1038/s41378-025-00979-3
Lihuan Zhao, Jiajun Wang, Lin-Sheng Wu, Xin Zhao
{"title":"Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process.","authors":"Lihuan Zhao, Jiajun Wang, Lin-Sheng Wu, Xin Zhao","doi":"10.1038/s41378-025-00979-3","DOIUrl":"10.1038/s41378-025-00979-3","url":null,"abstract":"<p><p>Solid-state nanopores (SSNPs) have emerged as a transformative platform in nanotechnology and biotechnology, yet their application is limited by the lack of cost-effective, reproducible fabrication technology. Here, we introduce a novel SpacerX process for wafer-scale fabrication of well-ordered nanopore arrays inspired by spacer patterning used in the standard semiconductor manufacturing process. This technique is intrinsically scalable and features tunable nanopore dimensions, with an open-pore rate exceeding 99.9%, even in an academic cleanroom. We successfully demonstrated a silicon nitride (Si<sub>3</sub>N<sub>4</sub>) nanopore array with a diameter of ~30 nm, non-uniformity below 10%, and spacing of 10 μm. By further reducing the spacer size, the nanopore diameter can be minimized to 10 nm. We fabricated multi-pore devices and showed that dual-pore devices offer higher detection throughput for DNA molecules. The SpacerX process only involves two ultraviolet lithography steps with one mask, and can be readily adopted by commercial foundries, thus opening the possibility of mass-producing sub-10 nm SSNPs at extremely low cost.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"129"},"PeriodicalIF":7.3,"publicationDate":"2025-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12187910/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144485037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy. 电化学钝化蚀刻停止策略制备硅纳米孔的研究。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-23 DOI: 10.1038/s41378-025-00973-9
Hao Hong, Xin Lei, Jiangtao Wei, Wenjun Tang, Minjie Ye, Jianwen Sun, Guoqi Zhang, Pasqualina M Sarro, Zewen Liu
{"title":"Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.","authors":"Hao Hong, Xin Lei, Jiangtao Wei, Wenjun Tang, Minjie Ye, Jianwen Sun, Guoqi Zhang, Pasqualina M Sarro, Zewen Liu","doi":"10.1038/s41378-025-00973-9","DOIUrl":"10.1038/s41378-025-00973-9","url":null,"abstract":"<p><p>The three-step wet etching (TSWE) method has been proven to be a promising technique for fabricating silicon nanopores. Despite its potential, one of the bottlenecks of this method is the precise control of the silicon etching and etch-stop, which results in obtaining a well-defined nanopore size. Herein, we present a novel strategy leveraging electrochemical passivation to achieve accurate control over the silicon etching process. By dynamically controlling the oxide layer growth, rapid and reliable etch-stop was achieved in under 4 s, enabling the controllable fabrication of sub-10 nm silicon nanopores. The thickness of the oxide layer was precisely modulated by adjusting the passivation potential, achieving nanopore size shrinkage with a precision better than 2 nm, which can be further enhanced with more refined potential control. This scalable method significantly enhances the TSWE process, offering an efficient approach for producing small-size silicon nanopores with high precision. Importantly, the precise etching control facilitated by electrochemical passivation holds promise for the cost-effective production of high-density, air-insulated monolithic integrated circuits.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"128"},"PeriodicalIF":7.3,"publicationDate":"2025-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12183310/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144369064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration. PCR中的纳米材料:探索光热转换机制和微流控集成。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-19 DOI: 10.1038/s41378-025-00898-3
Samaneh Shamsian, Abu Bakar Siddique, Vahid Kordzadeh-Kermani, Luna de la Vega Tejuca, Francisco Falcone, Mallar Ray, Seyed Nezameddin Ashrafizadeh, Sergio Omar Martínez Chapa, Marc J Madou, Masoud Madadelahi
{"title":"Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration.","authors":"Samaneh Shamsian, Abu Bakar Siddique, Vahid Kordzadeh-Kermani, Luna de la Vega Tejuca, Francisco Falcone, Mallar Ray, Seyed Nezameddin Ashrafizadeh, Sergio Omar Martínez Chapa, Marc J Madou, Masoud Madadelahi","doi":"10.1038/s41378-025-00898-3","DOIUrl":"10.1038/s41378-025-00898-3","url":null,"abstract":"<p><p>As a popular process in molecular-based diagnostics, polymerase chain reaction (PCR) can be employed for amplifying small amounts of DNA/RNA from different sources such as tissue, cells, peripheral blood and so on. Thanks to the unique physicochemical characteristics of nanomaterials and their progress, researchers have been encouraged to employ them as suitable candidates to address the PCR optimization challenges for enhancing efficiency, yield, specificity, and sensitivity. In nanoparticle-assisted PCR (nanoPCR), different nanoparticles (NPs) such as carbon nanotubes (CNTs), graphene, quantum dots (QDs), and gold (Au) might be used. Among different nanoPCR assays, photothermal PCR has emerged as a technique leveraging the excellent light absorption and heat conversion capabilities of nanomaterials. In addition to presenting recent advances in nanoPCR, this review also delves into the specific use of nanomaterials for photothermal PCR, including their applications in microfluidics as one of the best platforms for miniaturization of diagnostic techniques. Different types of NPs used in PCR are comprehensively examined, and detailed charts and tables are provided that outline features such as optimal concentration and size. The appropriate choice of nanomaterials for enhancing light conversion to heat in PCR applications is discussed. Finally, the related challenges and future trends are explored.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"127"},"PeriodicalIF":7.3,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12177080/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144326237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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