Microsystems & Nanoengineering最新文献_第2页

A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors. 利用磁弹性传感器对塑料胆道支架进行体内无线监测的微型系统。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-31 DOI: 10.1038/s41378-024-00772-8

Ramprasad M Nambisan, Scott R Green, Richard S Kwon, Grace H Elta, Yogesh B Gianchandani

{"title":"A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors.","authors":"Ramprasad M Nambisan, Scott R Green, Richard S Kwon, Grace H Elta, Yogesh B Gianchandani","doi":"10.1038/s41378-024-00772-8","DOIUrl":"10.1038/s41378-024-00772-8","url":null,"abstract":"With an interest in monitoring the patency of stents that are used to treat strictures in the bile duct, this paper reports the investigation of a wireless sensing system to interrogate a microsensor integrated into the stent. The microsensor is comprised of a 28-μm-thick magnetoelastic foil with 8.25-mm length and 1-mm width. Magnetic biasing is provided by permanent magnets attached to the foil. These elements are incorporated into a customized 3D polymeric package. The system electromagnetically excites the magnetoelastic resonant sensor and measures the resulting signal. Through shifts in resonant frequency and quality factor, the sensor is intended to provide an early indication of sludge accumulation in the stent. This work focuses on challenges associated with sensor miniaturization and placement, wireless range, drive signal feedthrough, and clinical use. A swine specimen in vivo experiment is described. Following endoscopic implantation of the sensor enabled plastic stent into the bile duct, at a range of approximately 17 cm, the signal-to-noise ratio of ~106 was observed with an interrogation time of 336 s. These are the first reported signals from a passive wireless magnetoelastic sensor implanted in a live animal.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"159"},"PeriodicalIF":7.3,"publicationDate":"2024-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11526028/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142546345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies. 机器学习驱动的高性能 MEMS 圆盘谐振器陀螺仪结构拓扑发现。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-30 DOI: 10.1038/s41378-024-00792-4

Chen Chen, Jinqiu Zhou, Hongyi Wang, Youyou Fan, Xinyue Song, Jianbing Xie, Thomas Bäck, Hao Wang

{"title":"Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies.","authors":"Chen Chen, Jinqiu Zhou, Hongyi Wang, Youyou Fan, Xinyue Song, Jianbing Xie, Thomas Bäck, Hao Wang","doi":"10.1038/s41378-024-00792-4","DOIUrl":"10.1038/s41378-024-00792-4","url":null,"abstract":"The design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance. However, creating novel high-performance MEMS DRGs has long been viewed as a formidable challenge owing to their enormous design space, the complexity of microscale physical effects, and time-consuming finite element analysis (FEA). Here, we introduce a new machine learning-driven approach to discover high-performance DRG topologies. We represent the DRG topology as pixelated binary matrices and formulate the design task as a path-planning problem. This path-planning problem is solved via deep reinforcement learning (DRL). In addition, we develop a convolutional neural network-based surrogate model to replace the expensive FEA to provide reward signals for DRL training. Benefiting from the computational efficiency of neural networks, our approach achieves a significant acceleration ratio of 4.03 × 105 compared with FEA, reducing each DRL training run to only 426.5 s. Through 8000 training runs, we discovered 7120 novel structural topologies that achieve navigation-grade precision. Many of these surpass traditional designs in performance by several orders of magnitude, revealing innovative solutions previously unconceived by humans.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"161"},"PeriodicalIF":7.3,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11522492/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142546347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability. 压电效应和静电效应的桥梁：具有低于 10°/h 偏置不稳定性的新型压电-MEMS俯仰/滚动陀螺仪。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-30 DOI: 10.1038/s41378-024-00773-7

Zhenxiang Qi, Bowen Wang, Zhaoyang Zhai, Zheng Wang, Xingyin Xiong, Wuhao Yang, Xiaorui Bie, Yao Wang, Xudong Zou

{"title":"Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability.","authors":"Zhenxiang Qi, Bowen Wang, Zhaoyang Zhai, Zheng Wang, Xingyin Xiong, Wuhao Yang, Xiaorui Bie, Yao Wang, Xudong Zou","doi":"10.1038/s41378-024-00773-7","DOIUrl":"10.1038/s41378-024-00773-7","url":null,"abstract":"This paper proposes a novel piezo-MEMS pitch/roll gyroscope that co-integrates piezoelectric and electrostatic effects, for the first time achieves electrostatic mode-matching operation for piezoelectric gyroscopes. Movement of operated out-of-plane (OOP) mode (n = 3) and in-plane (IP) mode (n = 2) are orthogonal, ensuring that the OOP amplitude is not significantly limited by parallel plates set at nodes of IP mode. Therefore, a large OOP driving amplitude actuated by piezoelectric and frequency tuning in the IP sense mode trimmed by electrostatic can be achieved together with a low risk of pull-in, hence releases the trade-off between the tuning range and the linear actuation range. At a tuning voltage of 66 V, the frequency split decreased from 171 Hz to 0.1 Hz, resulting in a 167x times improvement in sensitivity. The mode-matched gyroscope exhibits an angle random walk (ARW) of 0.41°/√h and a bias instability (BI) of 8.85°/h on a test board within a customized vacuum chamber, marking enhancements of 68x and 301x, respectively, compared to its performance under mode-mismatch conditions. The BI performance of the presented pitch/roll gyroscope is comparable to that of the highest-performing mechanically trimmed piezo-MEMS yaw gyroscopes known to date, while offering the unique advantage of lower cost, better mode-matching resolution, and the flexibility of real-time frequency control.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"160"},"PeriodicalIF":7.3,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11522469/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142546346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring. 与核磁共振成像和 CT 兼容的非对称双层水凝胶电极，用于基于脑电图的大脑活动监测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-29 DOI: 10.1038/s41378-024-00805-2

Guoqiang Ren, Mingxuan Zhang, Liping Zhuang, Lianhui Li, Shunying Zhao, Jinxiu Guo, Yinchao Zhao, Zhaoxiang Peng, Jiangfan Lian, Botao Liu, Jingyun Ma, Xiaodong Hu, Zhewei Zhang, Ting Zhang, Qifeng Lu, Mingming Hao

{"title":"MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring.","authors":"Guoqiang Ren, Mingxuan Zhang, Liping Zhuang, Lianhui Li, Shunying Zhao, Jinxiu Guo, Yinchao Zhao, Zhaoxiang Peng, Jiangfan Lian, Botao Liu, Jingyun Ma, Xiaodong Hu, Zhewei Zhang, Ting Zhang, Qifeng Lu, Mingming Hao","doi":"10.1038/s41378-024-00805-2","DOIUrl":"10.1038/s41378-024-00805-2","url":null,"abstract":"The exploration of multi-dimensional brain activity with high temporal and spatial resolution is of great significance in the diagnosis of neurological disease and the study of brain science. Although the integration of electroencephalogram (EEG) with magnetic resonance imaging (MRI) and computed tomography (CT) provides a potential solution to achieve a brain-functional image with high spatiotemporal resolution, the critical issues of interface stability and magnetic compatibility remain challenging. Therefore, in this research, we proposed a conductive hydrogel EEG electrode with an asymmetrical bilayer structure, which shows the potential to overcome the challenges. Benefiting from the bilayer structure with different moduli, the hydrogel electrode exhibits high biological and mechanical compatibility with the heterogeneous brain-electrode interface. As a result, the impedance can be reduced compared with conventional metal electrodes. In addition, the hydrogel-based ionic conductive electrodes, which are free from metal conductors, are compatible with MRI and CT. Therefore, they can obtain high spatiotemporal resolution multi-dimensional brain information in clinical settings. The research outcome provides a new approach for establishing a platform for early diagnosis of brain diseases and the study of brain science.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"156"},"PeriodicalIF":7.3,"publicationDate":"2024-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11519644/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking. 利用参数对称破缺提高非线性微机械传感器的灵敏度

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-29 DOI: 10.1038/s41378-024-00784-4

Yutao Xu, Qiqi Yang, Jiahao Song, Xueyong Wei

{"title":"Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking.","authors":"Yutao Xu, Qiqi Yang, Jiahao Song, Xueyong Wei","doi":"10.1038/s41378-024-00784-4","DOIUrl":"10.1038/s41378-024-00784-4","url":null,"abstract":"The working mechanism of resonant sensors is based on tracking the frequency shift in the linear vibration range. Contrary to the conventional paradigm, in this paper, we show that by tracking the dramatic frequency shift of the saddle-node bifurcation on the nonlinear parametric isolated branches in response to external forces, we can dramatically boost the sensitivity of MEMS force sensors. Specifically, we first theoretically and experimentally investigate the double hysteresis phenomena of a parametrically driven micromechanical resonator under the interaction of intrinsic nonlinearities and direct external drive. We demonstrate that the double hysteresis is caused by symmetry breaking in the phase states. The frequency response undergoes an additional amplitude jump from the symmetry-breaking-induced parametric isolated branch to the main branch, resulting in double hysteresis in the frequency domain. We further demonstrate that significant force sensitivity enhancement can be achieved by monitoring the dramatic frequency shift of the saddle-node bifurcations on the parametric isolated branches before the bifurcations annihilate. Based on the sensitivity enhancement effect, we propose a new sensing scheme which employs the frequency of the top saddle-node bifurcation in the parametric isolated branches as an output metric to quantify external forces. The concept is verified on a resonant MEMS charge sensor. A sensitivity of up to 39.5 ppm/fC is achieved, significantly surpassing the state-of-the-art resonant charge sensors. This work provides a new mechanism for developing force sensors of high sensitivity.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"158"},"PeriodicalIF":7.3,"publicationDate":"2024-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11519502/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation. 通过相位调制和空间调制提高光束分辨率的 4D 印刷智能反射表面。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-29 DOI: 10.1038/s41378-024-00795-1

Kyounghwan Kim, Ratanak Phon, Eiyong Park, Sungjoon Lim

{"title":"4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation.","authors":"Kyounghwan Kim, Ratanak Phon, Eiyong Park, Sungjoon Lim","doi":"10.1038/s41378-024-00795-1","DOIUrl":"10.1038/s41378-024-00795-1","url":null,"abstract":"Recently, intelligent reflecting surfaces (IRSs) have emerged as potential candidates for overcoming the line-of-sight issue in 5 G/6 G wireless communication. These IRSs can manipulate the direction of reflected beams, enabling efficient beam steering to enhance the performance of wireless communication. Each unit cell (or unit structure) of an IRS commonly consists of electrical elements for phase modulation. However, by employing phase modulation alone, an IRS can steer the reflected electromagnetic waves toward only discrete and specific angles, leaving a wide range of out-of-beam areas. In this work, an IRS that uses both phase modulation and space modulation is presented to improve the beam resolution and continuously cover out-of-beam areas that phase modulation alone cannot address. A positive-intrinsic-negative diode is mounted on a unit cell for phase modulation, and a 4D-printed reconfigured structure is fabricated to demonstrate space modulation. The beam-steering function is achieved by alternating the states of the diodes in the same columns, while the beam resolution is improved by controlling the gaps between the columns. The functions are first theoretically and numerically analyzed and then experimentally verified, demonstrating that additional angles of -46°/+50°, -22°/+14°, and -16°/+12° are achieved with space modulation and -60°/+62°, -30°/+22°, and ±16° are achieved by phase modulation alone. The proposed IRS offers the possibility of functional integration in a variety of indoor applications within the wireless communication field.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"157"},"PeriodicalIF":7.3,"publicationDate":"2024-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11519457/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522376","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments. 受果蝇启发的智能嗅觉生物仿生传感系统，用于在复杂环境中识别气体。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-28 DOI: 10.1038/s41378-024-00752-y

Xiawei Yue, Jiachuang Wang, Heng Yang, Zening Li, Fangyu Zhao, Wenyuan Liu, Pingping Zhang, Hong Chen, Hanjun Jiang, Nan Qin, Tiger H Tao

{"title":"A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments.","authors":"Xiawei Yue, Jiachuang Wang, Heng Yang, Zening Li, Fangyu Zhao, Wenyuan Liu, Pingping Zhang, Hong Chen, Hanjun Jiang, Nan Qin, Tiger H Tao","doi":"10.1038/s41378-024-00752-y","DOIUrl":"10.1038/s41378-024-00752-y","url":null,"abstract":"The olfactory sensory system of Drosophila has several advantages, including low power consumption, high rapidity and high accuracy. Here, we present a biomimetic intelligent olfactory sensing system based on the integration of an 18-channel microelectromechanical system (MEMS) sensor array (16 gas sensors, 1 humidity sensor and 1 temperature sensor), a complementary metal‒oxide‒semiconductor (CMOS) circuit and an olfactory lightweight machine-learning algorithm inspired by Drosophila. This system is an artificial version of the biological olfactory perception system with the capabilities of environmental sensing, multi-signal processing, and odor recognition. The olfactory data are processed and reconstructed by the combination of a shallow neural network and a residual neural network, with the aim to determine the noxious gas information in challenging environments such as high humidity scenarios and partially damaged sensor units. As a result, our electronic olfactory sensing system is capable of achieving comprehensive gas recognition by qualitatively identifying 7 types of gases with an accuracy of 98.5%, reducing the number of parameters and the difficulty of calculation, and quantitatively predicting each gas of 3-5 concentration gradients with an accuracy of 93.2%; thus, these results show superiority of our system in supporting alarm systems in emergency rescue scenarios.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"153"},"PeriodicalIF":7.3,"publicationDate":"2024-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11520895/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation. 可移动表面声波镊子：微操作的多功能工具箱。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-28 DOI: 10.1038/s41378-024-00777-3

Xianming Qin, Xianglian Liu, Shuo Liu, Chuanyu Zhang, Ningning Bai, Xue Li, Weidong Wang, Dan Liu, Qiqi Yang, Ruiguo Yang, Yajing Shen, Xueyong Wei

{"title":"Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation.","authors":"Xianming Qin, Xianglian Liu, Shuo Liu, Chuanyu Zhang, Ningning Bai, Xue Li, Weidong Wang, Dan Liu, Qiqi Yang, Ruiguo Yang, Yajing Shen, Xueyong Wei","doi":"10.1038/s41378-024-00777-3","DOIUrl":"10.1038/s41378-024-00777-3","url":null,"abstract":"Surface acoustic wave (SAW) tweezers are a promising multifunctional micromanipulation method that controls microscale targets via patterned acoustic fields. Owing to their device structure and bonding process, most SAW tweezers have limitations in terms of controlling the position and motion of the acoustic traps, as they generate an acoustic field with a fixed region and adjust the manipulation effects via signal modulation. To address this challenge, we propose movable SAW tweezers with a multilayer structure, achieving dynamic control of their wave field and acoustic trap positions; we demonstrate their precise manipulation functions, such as translation, in-plane rotation, out-of-plane rotation, and cluster formation, on a wide spectrum of samples, including particles, bubbles, droplets, cells, and microorganisms. Our method not only improves the degree of freedom and working range of SAW tweezers but also allows for precise and selective manipulation of microtargets via microtools and localized wavefields. Owing to their flexibility, versatility, and biocompatibility, the movable SAW tweezers can be a practical platform for achieving arbitrary manipulation of microscale targets and have the potential to play significant roles in biomedical microrobotics.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"155"},"PeriodicalIF":7.3,"publicationDate":"2024-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11519341/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522379","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Graphene MEMS and NEMS. 石墨烯 MEMS 和 NEMS。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-28 DOI: 10.1038/s41378-024-00791-5

Xuge Fan, Chang He, Jie Ding, Qiang Gao, Hongliang Ma, Max C Lemme, Wendong Zhang

引用次数: 0

Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting. 基于硅烷耦合 LTA/PDMS 的三电纳米发电机，用于生理监测和生物力学能量采集。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-25 DOI: 10.1038/s41378-024-00796-0

Muhammad Umair Khan, Deepa Dumbre, Yawar Abbas, Moh'd Rezeq, Anas Alazzam, Nahla Alamoodi, Maryam Khaleel, Baker Mohammad

{"title":"Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting.","authors":"Muhammad Umair Khan, Deepa Dumbre, Yawar Abbas, Moh'd Rezeq, Anas Alazzam, Nahla Alamoodi, Maryam Khaleel, Baker Mohammad","doi":"10.1038/s41378-024-00796-0","DOIUrl":"https://doi.org/10.1038/s41378-024-00796-0","url":null,"abstract":"Energy harvesting from ambient sources present in the environment is essential to replace traditional energy sources. These strategies can diversify the energy sources, reduce maintenance, lower costs, and provide near-perpetual operation of the devices. In this work, a triboelectric nanogenerator (TENG) based on silane-coupled Linde type A/polydimethylsiloxane (LTA/PDMS) is developed for harsh environmental conditions. The silane-coupled LTA/PDMS-based TENG can produce a high output power density of 42.6 µW/cm2 at a load resistance of 10 MΩ and operates at an open-circuit voltage of 120 V and a short-circuit current of 15 µA under a damping frequency of 14 Hz. Furthermore, the device shows ultra-robust and stable cyclic repeatability for more than 30 k cycles. The fabricated TENG is used for the physiological monitoring and charging of commercial capacitors to drive low-power electronic devices. Hence, these results suggest that the silane-coupled LTA/PDMS approach can be used to fabricate ultra-robust TENGs for harsh environmental conditions and also provides an effective path toward wearable self-powered microelectronic devices.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"152"},"PeriodicalIF":7.3,"publicationDate":"2024-10-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11502885/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0