Microsystems & Nanoengineering最新文献

{"title":"Dual-doped all-graphene fiber for flexible, high-performance thermoelectric temperature sensing.","authors":"Feng Han, Qianqian Zhong, Jiacheng Du, Jiajun Hu, Peng An, Yifan Zhao, Kun Zheng, Song Wang, Yaxin Zhang, Dejiang Lu, Chenying Wang, Binbin Jiao, Zhuangde Jiang","doi":"10.1038/s41378-026-01412-z","DOIUrl":"10.1038/s41378-026-01412-z","url":null,"abstract":"<p><p>High-performance temperature sensors are critical components for emerging Internet-of-Things and biomedical-electronics platforms. However, simultaneously achieving high sensitivity, mechanical compliance, and user-defined integrability remains a formidable materials-and-device challenge. Here, we report a continuous graphene fiber (GF) thermocouple technology where multiple p-n thermocouples are created in situ along a single, unbroken fiber while preserving its structural integrity. By periodically modulating surface charge-transfer doping with polyethyleneimine (PEI) and FeCl₃, we formed an array of ten p-n pairs that delivered an exceptional thermocouple sensitivity of 452.32 µV K^-1. The device retained ~97.8% of its initial sensitivity after 10,000 bending cycles at a 5-mm radius, confirming robustness under repeated mechanical deformation. When deployed on skin, the sensor tracked dynamic body temperature variations with a measurement error of 0.64%, validating its practical value for real-time, non-invasive health monitoring. These results establish all-carbon GF thermocouples as a high-precision and mechanically adaptable temperature-sensing platform for next-generation wearable electronics and personalized healthcare systems.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13503711/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148813542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Spin-based in-sensor computing magnetic tactile sensor for rapid identification of underwater targets.","authors":"Wei Gao, Yue Qin, Jinyu Tai, Ting Feng, Shuchen Song, Zhiqiang Xiang, Yunbo Shi, Xin Li, Huanfei Wen, Zhonghao Li, Zongmin Ma, Hao Guo, Jun Tang, Jun Liu","doi":"10.1038/s41378-026-01423-w","DOIUrl":"10.1038/s41378-026-01423-w","url":null,"abstract":"<p><p>Reliable underwater tactile sensing technology can promote the effective exploitation of marine resources, which is of significant importance for sustainable human development. Such technology typically requires a combination of waterproofing, intelligence, and high efficiency. Herein, we leverage the in-sensor computing (ISC) neuromorphic device architecture as an innovative platform to construct a diamond nitrogen-vacancy (NV) center-based wireless magnetic tactile sensor (ISC-NVTS). This sensor achieves highly linear force-to-magnetic signal conversion through an array of NdFeB magnetized flexible films and accomplishes ultra-fast magnetic signal detection using diamond NV center magnetic sensing unit arrays operating in a fixed-frequency mode. This wireless connection approach effectively solves the waterproofing issue for tactile electronic devices. Furthermore, we enable adjustable pressure responsivity of the sensing unit array through a microwave multi-parameter NV center electron spin resonance control method, endowing it with the advanced intelligence to execute ISC architecture-based artificial neural network algorithms. Finally, the ISC-NVTS achieved a recognition rate of 95.1% (Random noise 0.1, offline simulation) in a classification task involving five types of marine debris and organisms, with a recognition time of only 6.45 ms. We anticipate that this work will advance the further development of tactile sensors and provide support for the sustainable exploitation and utilization of marine resources.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13503795/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148813641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Portable microwave sensor system for real-time detection of microplastics in seawater.","authors":"Yuxuan Hou, Qingzhou Wang, Qilong Zhang, Jiaxu Liu, Eun-Seong Kim, Nam-Young Kim, Guanlin Li, Yuanyue Li, Xiaocui Wang, Zhao Yao","doi":"10.1038/s41378-026-01413-y","DOIUrl":"10.1038/s41378-026-01413-y","url":null,"abstract":"<p><p>With the rapid development of the global plastic industry, microplastic pollution has become an increasingly serious environmental concern. However, standardized technologies for convenient, accurate, and real-time microplastic detection are limited. To address this challenge, a microwave resonant sensor with a complete microplastic detection system equipped with a Bluetooth module for remote real-time monitoring of microplastic concentrations was developed. Microplastic concentrations were measured in deionized water containing polyvinyl chloride powder (particle size: 6.5 ± 1 μm), simulated artificial seawater, and real seawater samples. The integration of the microfluidic system mitigated the interference caused by the complex seawater matrix, thereby ensuring stable and reliable microwave-based detection of microplastic concentrations. The system demonstrated high repeatability for predicting the concentration of microplastics in seawater samples. The proposed method demonstrated a recognition rate of over 96% with a tolerance of ±0.01 mg/mL, while maintaining a minimum detection limit of 48.72 ng/mL. To improve the prediction accuracy, a convolutional neural network algorithm was employed to predict microplastic concentrations based on the test results, with the predicted and actual concentrations being highly consistent. Finally, a compact and portable seawater microplastic monitoring system was developed by integrating the microwave sensor with Bluetooth and embedded systems, enabling real-time microplastic concentration monitoring in marine environments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13503796/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148813652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Platinum-nanostructured silicon microneedles with scalable fabrication for EEG biosensing.","authors":"Momina Amir, Ruochen Ding, Nurul Izni Rusli, Nadalan Vercooren, Frederik Ceyssens, Nadezda Kuznetsova, Chen Wang, Alexander Bertrand, Michael Kraft, Irene Taurino","doi":"10.1038/s41378-026-01373-3","DOIUrl":"10.1038/s41378-026-01373-3","url":null,"abstract":"<p><p>This study details the development and characterization of a silicon microneedle electrode array for enhanced biopotential recording. Fabricated using a streamlined two-step process, the device design was guided by mechanical analysis to ensure structural stability and minimize skin-electrode impedance. Structural analysis identified needle lengths of 500-700 µm as mechanically favorable for high buckling resistance, with needle spacing selected to reduce inter-needle interference and support effective skin penetration. The microneedles were subsequently modified through platinum electrodeposition to produce a nanostructured porous surface, which increased the electroactive area by approximately 15-fold compared to bare platinum microneedles, as determined from electrochemical measurements. Electrochemical characterization and proof-of-concept EEG experiments demonstrated improved signal acquisition performance, with the nanostructured electrodes yielding higher signal-to-noise ratios than bare microneedles in both SSVEP and ASSR recordings. Compared to conventional gel-based Ag/AgCl wet electrodes, the proposed device eliminates the need for conductive gel application, reduces preparation time, and improves user comfort. The work establishes a scalable, cleanroom-compatible method for fabricating nanostructured platinum-coated silicon microneedles, highlighting their potential as a user-friendly platform for next-generation wearable electrophysiological monitoring.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13500664/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148808938","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Selective photoacoustic handling of microparticles via annular laser beams.","authors":"Guojie Luo, Yi He, Wanglinhan Zhang, David J Collins, Yi Liu, Mo Yang, Feiyang Pan, Zhongqing Su","doi":"10.1038/s41378-026-01428-5","DOIUrl":"10.1038/s41378-026-01428-5","url":null,"abstract":"<p><p>Precise manipulation of bioparticles in micro- and nano-fluidic environments is crucial for applications in cancer diagnostics, drug delivery, and single‑cell analysis. Despite the optical and acoustic tweezers provide high accuracy and stability, their flexibility and selectivity are often constrained by factors such as laser‑induced heating, reliance on the optical properties of target particles, and the labor‑ and time‑intensive fabrication of interdigital transducers (IDTs). In this study, we develop an annular beam-driven photoacoustic tweezer (PAT) to implement high-precision, selective handling of microparticles via annular beam-generated transient photoacoustic waves (T-PAWs). Realized via an axicon-enabled optical setup, a nanosecond laser beam is shaped into a ring pattern and focused on a polycrystalline silicon substrate coated with chromium and aurum layers, which supports a confined liquid layer. The annular laser beam photoacoustically generates water-borne T-PAWs and establishes an annular acoustic potential well (APW), which in turn establishes a radially inward acoustic radiation force (ARF), to continuously guide target microparticles, and simultaneously a concurrent outward‑propagating pressure along the ring periphery to exclude non-target microparticles. To elucidate the mechanism of laser‑induced T-AWs, we develop a multiphysical finite element model integrating photo‑thermo‑acoustic coupling, and experimentally validate the capability of the developed PAT in selectively capturing, assembling, and isolating single and multiple silicon microparticles and hydrogel microspheres. This annular PAT bridges selective, label-free trapping with fabrication simplicity by eliminating the need for IDTs, offering a rapidly reconfigurable method and non-contact approach for versatile bioparticle manipulation.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13500671/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148808922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Balancing surface chemistry and biocompatibility: an analysis of poly(dimethylsiloxane) and polyethylene terephthalate membrane bonding methods in Lab-on-a-Chip systems for cell culture.","authors":"Oliwia Tadko, Magdalena Flont, Oliwia Lewińska, Jakub Trzciński, Krzysztof Mrozik, Agnieszka Gnyszka, Elżbieta Jastrzębska","doi":"10.1038/s41378-026-01402-1","DOIUrl":"10.1038/s41378-026-01402-1","url":null,"abstract":"<p><p>Next to the poly(dimethylsiloxane) (PDMS), polyethylene terephthalate (PET) is the material increasingly used in the fabrication of Lab-on-a-Chip (LoC) systems. It results from their excellent biocompatibility and straightforward fabrication of microstructures. The integration of PDMS and PET requires chemical modification of surfaces, such as the use of silane-based coupling agents (3-aminopropyltriethoxysilane (APTES) and 3-glycidyloxypropyltrimethoxysilane (GPTMS). However, this method is often ineffective in achieving stable, leak-proof bonding, with the potential for high cytotoxicity. In response to these challenges, we tested whether polydopamine (PDA) could be a promising alternative method for PDMS and PET bonding. We compared two PDMS-PET surface bonding methods, such as APTES/GPTMS and PDA, and we proved that PDA coatings created strong, stable bonds between PDMS and PET, providing a biocompatible surface that supports cell adhesion and culture without cytotoxic effects. The results highlight the significant advantages of PDA in developing PDMS-PET-based LoC systems, allowing for more reliable and complex in vitro models for drug testing and disease research.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13500500/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148808979","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Correction: Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential.","authors":"Xingyuan Xu, Zhengjie Liu, Jing Liu, Chuanjie Yao, Xi Chen, Xinshuo Huang, Shuang Huang, Peng Shi, Mingqiang Li, Li Wang, Yu Tao, Hui-Jiuan Chen, Xi Xie","doi":"10.1038/s41378-026-01416-9","DOIUrl":"10.1038/s41378-026-01416-9","url":null,"abstract":"","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13503818/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148813557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Theoretical modeling and optimization design of T-shape cavity CMUTs for enhanced acoustic performances and lowered bias voltage.","authors":"Jiawei Yuan, Tong Wang, Zhikang Li, Jie Li, Shaohui Qin, Shiwang Zhang, Zixuan Li, Yihe Zhao, Ping Yang, Ruiyan Luo, Hongqiang Tan, Min Li, Xiaozhang Wang, Libo Zhao","doi":"10.1038/s41378-026-01318-w","DOIUrl":"https://doi.org/10.1038/s41378-026-01318-w","url":null,"abstract":"<p><p>Capacitive micromachined ultrasonic transducers (CMUTs) are key components of ultrasonic technology, which have broad applications in medical, industrial, and military fields. The theoretical model enables rapid analysis of their electromechanical performances, which in turn guides the iterative design of CMUTs arrays. The parallel-plate capacitive devices with variable cavity height, such as T-shape cavity CMUTs, utilize the electrostatic softening effect to induce piston-like deflection in the membrane and have been demonstrated to significantly decrease the collapse voltage while improving the acoustic performance. However, the theoretical model is lacking for CMUTs with T-shape cavities, limiting their optimization design. This paper introduces theoretical models for CMUTs with T-shape cavities actuated by electrostatic force. The model integrates the Galerkin method, a partial expansion method of nonlinear electrostatic force, and an energy equivalence method, thus facilitating the derivation of theoretical expressions for key mechanical behaviors, such as static deflection, collapse voltage, and resonant frequency. The finite element model and experimental verification are used to demonstrate the theoretical results, showcasing generality and high analytical accuracy (error less than 5%) over a large range of bias voltages (up to 90% of the collapse voltage), membrane dimensions (diameter-to-thickness ratio of 30 to 110), and cavity heights (cavity height-to-membrane thickness ratio of 0.2 to 1.0). Meanwhile, theoretical models are used in the optimization analysis, which demonstrates that the CMUTs with T-shape cavities can achieve a 12% increase in average membrane displacement and 47% decrease in collapse voltage compared to conventional CMUTs. The theoretical expressions can serve as a basis for the design of a series of parallel-plate capacitive devices with variable cavity height.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13493773/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148795256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic Cytotongue system enables early, label-free detection of CAR-T-induced mechanical softening in tumor spheroids.","authors":"Sein Kim, Gwang Myeong Seo, Jinseung Bae, Danny van Noort, Sungsu Park","doi":"10.1038/s41378-026-01387-x","DOIUrl":"https://doi.org/10.1038/s41378-026-01387-x","url":null,"abstract":"<p><p>Quantitative assessment of chimeric antigen receptor T (CAR-T) activity in solid tumors remains challenging, as immune engagement can induce early mechanical softening of tumor spheroids before overt cell death becomes detectable. To address this limitation, we developed Cytotongue, a three-dimensional (3D)-printed microfluidic aspiration system for real-time, treatment-integrated aspiration-response phenotyping of live tumor spheroids. Using human epidermal growth factor receptor 2 (HER2)-positive BT-474 breast cancer spheroids exposed to CAR-T cells, the Cytotongue system quantified aspiration-induced elongation dynamics and assay-specific deformation indices derived from an empirical biphasic deformation framework. This approach enabled detection of CAR-T-induced mechanical softening at low effector-to-target ratios (1:1-2:1) within 24 h, conditions under which conventional propidium iodide (PI) staining showed minimal response. System-level validation demonstrated robust performance, with high Z' factors (0.74-0.93), large effect sizes, and low coefficients of variation. Moreover, Cytotongue distinguished CAR-T-associated mechanical softening accompanied by apoptosis from doxorubicin-induced deformation responses despite comparable PI readouts. Collectively, this work introduces a treatment-integrated microfluidic aspiration system that enables real-time mechanical phenotyping of tumor spheroids, providing a new physical dimension for evaluating immunotherapeutic and drug responses.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13482357/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148795320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An integrated nanopore-microfluidic platform for low-voltage electroporation of delivering self-amplifying RNA into dendritic cells.","authors":"Bowen Zhang, Yijing Cai, Caiguanxi Deng, Xinshuo Huang, Chuanjie Yao, Xiaotong Li, Lukang Gao, Yujuan Wu, Jinkun Chen, Juan Jiang, Liru Shang, Xi Xie, Ji Wang, Hui-Jiuan Chen, Yuxiang Wu, Jing Liu","doi":"10.1038/s41378-026-01359-1","DOIUrl":"https://doi.org/10.1038/s41378-026-01359-1","url":null,"abstract":"<p><p>Efficient delivery of large, negatively charged self-amplifying RNA (saRNA) into dendritic cells (DCs) is critical for next-generation cancer vaccines. However, this remains challenging due to the high sensitivity of DCs to chemical carriers and high-voltage electroporation. In this study, an integrated nanopore-electroporation (NEP) microdevice was developed by combining 200 nm track-etched polycarbonate membrane, bidirectional PDMS microfluidic channels, and Pt/ITO electrodes to localize the electric field and induce membrane permeabilization at low voltage (≤30 V). Multiphysics simulations revealed that 200 nm nanopores concentrated the electric field at the cell-membrane interface, generating transmembrane potentials exceeding 3 V. Using DC2.4, the NEP system achieved 75% propidium iodide (PI) uptake at 25 V with 90% viability, confirming controllable nanoscale perforation. Direct delivery of GFP-encoding saRNA achieved approximately 50% transfection efficiency with sustained protein expression for more than 96 h, significantly outperforming mRNA at an equal dose. Long-term viability (>85% at 96 h) and negligible cytotoxicity demonstrated the excellent biocompatibility of the device. This reagent-minimal, modular NEP platform thus provided a high-efficiency, low-toxicity route for saRNA delivery into hard-to-transfect immune cells, offering a versatile engineering framework for DC-based cancer immunotherapy, RNA vaccine development, and broader cell gene-modification applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13482594/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148795308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}