Microsystems & Nanoengineering最新文献

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Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots. 基于压电微机械超声换能器阵列的局部超声刺激用于磁细胞机器人的选择性神经分化。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-20 DOI: 10.1038/s41378-025-00900-y
Seonhyoung Kim, Dong-In Kim, Hong Goo Yeo, Gyudong Lee, Jin-Young Kim, Hongsoo Choi
{"title":"Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots.","authors":"Seonhyoung Kim, Dong-In Kim, Hong Goo Yeo, Gyudong Lee, Jin-Young Kim, Hongsoo Choi","doi":"10.1038/s41378-025-00900-y","DOIUrl":"10.1038/s41378-025-00900-y","url":null,"abstract":"<p><p>Targeted stem cell delivery utilizing a magnetic actuation system is an emerging technology in stem cell engineering that efficiently targets stem cells in specific areas in vitro. However, integrating precise magnetic control systems with selective neural differentiation has not yet been widely considered for building successful neural networks. Challenges arise in creating targeted functional neuronal networks, largely due to difficulties in simultaneously controlling the positions of stem cells and selectively stimulating their differentiation. These challenges often result in suboptimal differentiation rates and abnormalities in transplanted neural stem cells. In contrast, ultrasound stimulation has superior tissue penetration and focusing capability, and represents a promising noninvasive neural stimulation technique capable of modulating neural activity and promoting selective differentiation into neuronal stem cells. In this study, we introduce a method for targeted neural differentiation using localized ultrasonic stimulation with a piezoelectric micromachined ultrasound transducer (pMUT) array. Differentiation was assessed quantitatively by monitoring neurite outgrowth as the ultrasound intensity was increased. The neurite length of cells ultrasonically stimulated for 40 min was found to have increased, compared to the non-stimulated group (119.9 ± 34.3 μm vs. 63.2 ± 17.3 μm, respectively). Targeted differentiation was confirmed by measuring neurite lengths, where selective ultrasound stimulation induced differentiation in cells that were precisely delivered via an electromagnetic system. Magnetic cell-based robots reaching the area of localized ultrasound stimulation were confirmed to have enhanced differentiation. This research demonstrated the potential of the combination of precise stem cell delivery with selective neural differentiation to establish functional neural networks.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"52"},"PeriodicalIF":7.3,"publicationDate":"2025-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11926166/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143670401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices. 数字光处理3D打印柔性装置:执行器、传感器和能源装置。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-19 DOI: 10.1038/s41378-025-00885-8
Jiuhong Yi, Shuqi Yang, Liang Yue, Iek Man Lei
{"title":"Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices.","authors":"Jiuhong Yi, Shuqi Yang, Liang Yue, Iek Man Lei","doi":"10.1038/s41378-025-00885-8","DOIUrl":"10.1038/s41378-025-00885-8","url":null,"abstract":"<p><p>Flexible devices are increasingly crucial in various aspects of our lives, including healthcare devices and human-machine interface systems, revolutionizing human life. As technology evolves rapidly, there is a high demand for innovative manufacturing methods that enable rapid prototyping of custom and multifunctional flexible devices with high quality. Recently, digital light processing (DLP) 3D printing has emerged as a promising manufacturing approach due to its capabilities of creating intricate customized structures, high fabrication speed, low-cost technology and widespread adoption. This review provides a state-of-the-art overview of the recent advances in the creation of flexible devices using DLP printing, with a focus on soft actuators, flexible sensors and flexible energy devices. We emphasize how DLP printing and the development of DLP printable materials enhance the structural design, sensitivity, mechanical performance, and overall functionality of these devices. Finally, we discuss the challenges and perspectives associated with DLP-printed flexible devices. We anticipate that the continued advancements in DLP printing will foster the development of smarter flexible devices, shortening the design-to-manufacturing cycles.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"51"},"PeriodicalIF":7.3,"publicationDate":"2025-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11923083/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143663667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Superior sensitive graphene fiber sensor enabled by constructing multiple nanoembossments for glucose detection. 通过构建多个纳米压包实现葡萄糖检测的高灵敏度石墨烯纤维传感器。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-17 DOI: 10.1038/s41378-025-00903-9
Feng Han, Yangguang Wu, Yifan Zhao, Weixuan Jing, Kun Zheng, Chenying Wang, Song Wang, Yaxin Zhang, Tao Dong, Zhuangde Jiang
{"title":"Superior sensitive graphene fiber sensor enabled by constructing multiple nanoembossments for glucose detection.","authors":"Feng Han, Yangguang Wu, Yifan Zhao, Weixuan Jing, Kun Zheng, Chenying Wang, Song Wang, Yaxin Zhang, Tao Dong, Zhuangde Jiang","doi":"10.1038/s41378-025-00903-9","DOIUrl":"10.1038/s41378-025-00903-9","url":null,"abstract":"<p><p>Metal oxides have been extensively investigated in non-enzymatic biosensors for detecting diabetes owing to their electrochemical catalytic properties and excellent stability. However, lower conductivity and catalytic activity are major obstacles to the commercialization of metal oxide-based non-enzymatic glucose sensors. Herein, we present a novel flexible nonenzymatic glucose sensor utilizing graphene fiber (GF)/Au/Ni(OH)<sub>2</sub> composite fiber. The integration of GFs enables a significant uptake of sensing molecules due to its expansive surface area and high electron mobility, ultimately resulting in a decrease in the detection limit. Consequently, the incorporation of Ni(OH)<sub>2</sub> provides abundant attachment sites by introducing Au atoms, thereby promoting electron migration and enhancing sensitivity and detection limits. An impressive sensitivity (1095.63 µA mM<sup>-1</sup> cm<sup>-2</sup>) within the detection range (5 µM-2.2 mM) of the integrated GF/Au/Ni(OH)<sub>2</sub> fiber is achieved, leading to an incredibly low detection limit (0.294 µM). Additionally, the outstanding repeatability, anti-interference properties, and flexibility of the GF/Au/Ni(OH)<sub>2</sub> sensors are obtained as well. Our findings offer a novel method for constructing nano embossments on GFs to achieve superior glucose detection capabilities in the field of wearable electronics in the future.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"48"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914602/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Automated and collision-free navigation of multiple micro-objects in obstacle-dense microenvironments using optoelectronic tweezers. 利用光电镊子实现障碍物密集微环境中多微物体的自动无碰撞导航。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-17 DOI: 10.1038/s41378-025-00892-9
Lixiang Zheng, Gong Li, Henan Du, Zonghao Li, Bingrui Xu, Fan Yang, Yanan Mao, Jing Wei, Hainan Xie, Wei Xie, Rongxin Fu, Na Liu, Shuailong Zhang, Lianqing Liu, Wen Jung Li, Yu Sun
{"title":"Automated and collision-free navigation of multiple micro-objects in obstacle-dense microenvironments using optoelectronic tweezers.","authors":"Lixiang Zheng, Gong Li, Henan Du, Zonghao Li, Bingrui Xu, Fan Yang, Yanan Mao, Jing Wei, Hainan Xie, Wei Xie, Rongxin Fu, Na Liu, Shuailong Zhang, Lianqing Liu, Wen Jung Li, Yu Sun","doi":"10.1038/s41378-025-00892-9","DOIUrl":"10.1038/s41378-025-00892-9","url":null,"abstract":"<p><p>Automated parallel manipulation of multiple micro-objects with optoelectronic tweezers (OET) has brought significant research interests recently. However, the parallel manipulation of multiple objects in complex obstacle-dense microenvironment using OET technology based on negative dielectrophoresis (nDEP) remain a big technical challenge. In this work, we proposed an adaptive light pattern design strategy to achieve automated parallel OET manipulation of multiple micro-objects and navigate them through obstacles to target positions with high precision and no collision. We first developed a multi-micro-object parallel manipulation OET system, capable of simultaneous image processing and microparticles path planning. To overcome microparticle collisions caused by overlapping light patterns, we employed a novel adaptive light pattern design that can dynamically adjust the layout of overlapping light patterns according to surrounding environment, ensuring enough space for each microparticle and preventing unintended escapes from the OET trap. The efficacy of this approach has been verified through systematic simulations and experiments. Utilizing this strategy, multiple polystyrene microparticles were autonomously navigated through obstacles and microchannels to their intended destinations, demonstrating the strategy's effectiveness and potential for automated parallel micromanipulation of multiple microparticles in complex and confined microenvironments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"49"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914063/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Advanced passive 3D bioelectronics: powerful tool for the cardiac electrophysiology investigation. 先进的被动三维生物电子学:心脏电生理研究的有力工具。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-17 DOI: 10.1038/s41378-025-00891-w
Keda Shi, Chengwen He, Hui Pan, Dong Liu, Ji Zhang, Weili Han, Yuting Xiang, Ning Hu
{"title":"Advanced passive 3D bioelectronics: powerful tool for the cardiac electrophysiology investigation.","authors":"Keda Shi, Chengwen He, Hui Pan, Dong Liu, Ji Zhang, Weili Han, Yuting Xiang, Ning Hu","doi":"10.1038/s41378-025-00891-w","DOIUrl":"10.1038/s41378-025-00891-w","url":null,"abstract":"<p><p>Cardiovascular diseases (CVDs) are the first cause of death globally, posing a significant threat to human health. Cardiac electrophysiology is pivotal for the understanding and management of CVDs, particularly for addressing arrhythmias. A significant proliferation of micro-nano bioelectric devices and systems has occurred in the field of cardiomyocyte electrophysiology. These bioelectronic platforms feature distinctive electrode geometries that improve the fidelity of native electrophysiological signals. Despite the prevalence of planar microelectrode arrays (MEAs) for simultaneous multichannel recording of cellular electrophysiological signals, extracellular recordings often yield suboptimal signal quality. In contrast, three-dimensional (3D) MEAs and advanced penetration strategies allow high-fidelity intracellular signal detection. 3D nanodevices are categorized into the active and the passive. Active devices rely on external power sources to work, while passive devices operate without external power. Passive devices possess simplicity, biocompatibility, stability, and lower power consumption compared to active ones, making them ideal for sensors and implantable applications. This review comprehensively discusses the fabrication, geometric configuration, and penetration strategies of passive 3D micro/nanodevices, emphasizing their application in drug screening and disease modeling. Moreover, we summarize existing challenges and future opportunities to develop passive micro/nanobioelectronic devices from cardiac electrophysiological research to cardiovascular clinical practice.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"50"},"PeriodicalIF":7.3,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11914486/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143649382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution. 分辨率低于10 μm的深沟槽微三维雕刻元结构。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-12 DOI: 10.1038/s41378-025-00888-5
Anıl Çağrı Atak, Emre Ünal, Hilmi Volkan Demir
{"title":"Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution.","authors":"Anıl Çağrı Atak, Emre Ünal, Hilmi Volkan Demir","doi":"10.1038/s41378-025-00888-5","DOIUrl":"10.1038/s41378-025-00888-5","url":null,"abstract":"<p><p>Three-dimensional (3D) printing allows for the construction of complex structures. However, 3D-printing vertical structures with a high aspect ratio remains a pending challenge, especially when a high lateral resolution is required. Here, to address this challenge, we propose and demonstrate micro-3D sculptured metastructures with deep trenches of 1:4 (width:height) aspect ratio for sub-10 µm resolution. Our construction relies on two-photon polymerization for a 3D-pattern with its trenches, followed by electroplating of a thick metal film and its dry etching to remove the seed layer. To test the proposed fabrication process, we built up three-dimensional RF metastructures showcasing the depth effect as the third dimension. Using the numerical solutions, we custom-tailored these metastructure resonators to fall within a specific resonance frequency range of 4-6 GHz while undertaking comparative analyses regarding overall footprint, quality factor, and resonance frequency shift as a function of their cross-sectional aspect ratio. The proposed process flow is shown to miniaturize metal footprint and tune the resonance frequency of these thick 3D-metastructures while increasing their quality factor. These experimental findings indicate that this method of producing trenches via 3D-printing provides rich opportunities to implement high-aspect-ratio, complex structures.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"47"},"PeriodicalIF":7.3,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11897358/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143605675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment. 用于治疗增生性疤痕的纸电池离子导入微针贴片。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-10 DOI: 10.1038/s41378-024-00823-0
Jie Gao, Fuqian Chen, Chen Wang, Jingbo Yang, Ying Zheng, Bin Liu, Gang Nie, Linyu Zhu, Shuo Wu, Xi Xie, Lelun Jiang
{"title":"Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment.","authors":"Jie Gao, Fuqian Chen, Chen Wang, Jingbo Yang, Ying Zheng, Bin Liu, Gang Nie, Linyu Zhu, Shuo Wu, Xi Xie, Lelun Jiang","doi":"10.1038/s41378-024-00823-0","DOIUrl":"10.1038/s41378-024-00823-0","url":null,"abstract":"<p><p>Hypertrophic scar (HS) is a plaque fibrous and indurated dermal lesion that may cause physical, psychological, and cosmetic challenges for patients. Intralesional injection of triamcinolone acetonide (TA) is commonly used in clinical practice, which cause unbearable pain and uneven drug delivery within HS tissue. Herein, we developed a paper battery powered iontophoresis-driven microneedles patch (PBIMNP) for self-management of HS. The high integration of PBIMNP was achieved by incorporating a paper battery as the power source for iontophoresis. The transdermal drug delivery strategy of PBIMNP combined microneedles and iontophoresis techniques, involving \"pressing and poking, phase transformation, and diffusion and iontophoresis\", which can actively deliver 90.19% drug into the HS tissue with excellent in vitro drug permeation performance. PBIMNP administration effectively reduced the mRNA and protein levels, leading to a decrease in the expression of TGF-β1 and Col I associated with HS formation, demonstrating its efficacy in HS treatment. The microneedles and wearable design endow the PBIMNP as a highly promising platform for self-administration on HS treatment.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"46"},"PeriodicalIF":7.3,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11894194/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143597380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MIML: multiplex image machine learning for high precision cell classification via mechanical traits within microfluidic systems. MIML:通过微流体系统内的机械特征进行高精度细胞分类的多重图像机器学习。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-07 DOI: 10.1038/s41378-025-00874-x
Khayrul Islam, Ratul Paul, Shen Wang, Yuwen Zhao, Partho Adhikary, Qiying Li, Xiaochen Qin, Yaling Liu
{"title":"MIML: multiplex image machine learning for high precision cell classification via mechanical traits within microfluidic systems.","authors":"Khayrul Islam, Ratul Paul, Shen Wang, Yuwen Zhao, Partho Adhikary, Qiying Li, Xiaochen Qin, Yaling Liu","doi":"10.1038/s41378-025-00874-x","DOIUrl":"10.1038/s41378-025-00874-x","url":null,"abstract":"<p><p>Label-free cell classification is advantageous for supplying pristine cells for further use or examination, yet existing techniques frequently fall short in terms of specificity and speed. In this study, we address these limitations through the development of a novel machine learning framework, Multiplex Image Machine Learning (MIML). This architecture uniquely combines label-free cell images with biomechanical property data, harnessing the vast, often underutilized biophysical information intrinsic to each cell. By integrating both types of data, our model offers a holistic understanding of cellular properties, utilizing cell biomechanical information typically discarded in traditional machine learning models. This approach has led to a remarkable 98.3% accuracy in cell classification, a substantial improvement over models that rely solely on image data. MIML has been proven effective in classifying white blood cells and tumor cells, with potential for broader application due to its inherent flexibility and transfer learning capability. It is particularly effective for cells with similar morphology but distinct biomechanical properties. This innovative approach has significant implications across various fields, from advancing disease diagnostics to understanding cellular behavior.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"43"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11885814/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143573478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A tip-tilt-piston electrothermal micromirror array with integrated position sensors. 一种集成位置传感器的倾斜活塞式电热微镜阵列。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-07 DOI: 10.1038/s41378-024-00835-w
Anrun Ren, Yingtao Ding, Hengzhang Yang, Qiangqiang Liu, Teng Pan, Ziyue Zhang, Huikai Xie
{"title":"A tip-tilt-piston electrothermal micromirror array with integrated position sensors.","authors":"Anrun Ren, Yingtao Ding, Hengzhang Yang, Qiangqiang Liu, Teng Pan, Ziyue Zhang, Huikai Xie","doi":"10.1038/s41378-024-00835-w","DOIUrl":"10.1038/s41378-024-00835-w","url":null,"abstract":"<p><p>A tip-tilt-piston 3 × 3 electrothermal micromirror array (MMA) integrated with temperature field-based position sensors is designed and fabricated in this work. The size of the individual octagonal mirror plates is as large as 1.6 mm × 1.6 mm. Thermal isolation structures are embedded to reduce the thermal coupling among the micromirror units. Results show that each micromirror unit has a piston scan range of 218 μm and a tip-tilt optical scan angle of 21° at only 5 V<sub>dc</sub>. The micromirrors also exhibit good dynamic performance with a rise time of 51.2 ms and a fall time of 53.6 ms. Moreover, the on-chip position sensors are proven to be capable for covering the full-range movement of the mirror plate, with the measured sensitivities of 1.5 mV/μm and 8.8 mV/° in piston sensing and tip-tilt sensing, respectively. Furthermore, the thermal crosstalk in an operating MMA has been experimentally studied. The measured results are promising thanks to the embedded thermal isolation structures.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"45"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11889227/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143586295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing. 利用超高灵敏度声波传感的特殊点。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-03-07 DOI: 10.1038/s41378-024-00864-5
Xingyu Lu, Yang Yuan, Fa Chen, Xiaoxiao Hou, Yanlong Guo, Leonhard Reindl, Yongqing Fu, Wei Luo, Degang Zhao
{"title":"Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing.","authors":"Xingyu Lu, Yang Yuan, Fa Chen, Xiaoxiao Hou, Yanlong Guo, Leonhard Reindl, Yongqing Fu, Wei Luo, Degang Zhao","doi":"10.1038/s41378-024-00864-5","DOIUrl":"10.1038/s41378-024-00864-5","url":null,"abstract":"<p><p>Exceptional point (EP) is referred to degeneracies in a non-Hermitian system where two or more eigenvalues and their corresponding eigenvectors coalesce. Recently there have been significantly increased interests in harnessing EPs to enhance responsivities and achieve ultrasensitive detections in optics, electronics and acoustics, although there are few similar studies focused on using surface acoustic wave (SAW) sensing technologies, probably due to its great technical challenges. Herein, we proposed a scheme for accessing EPs in an on-chip architecture consisted of coupled-SAW-resonators system, forming a passive parity-time (PT) symmetric system. We demonstrated that by tuning additional losses in one of resonators and regulating the system in the proximity of the EP, the sensor exhibited significantly enhanced responses. As an example, we present an EP-based SAW gas sensor, which showed a much-improved sensitivity compared to that of a conventional delay-line SAW sensor. The fundamental mechanisms behind this excellent sensing performance have been elucidated.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"44"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11889215/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143586297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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