Microsystems & Nanoengineering最新文献

{"title":"MIML: multiplex image machine learning for high precision cell classification via mechanical traits within microfluidic systems.","authors":"Khayrul Islam, Ratul Paul, Shen Wang, Yuwen Zhao, Partho Adhikary, Qiying Li, Xiaochen Qin, Yaling Liu","doi":"10.1038/s41378-025-00874-x","DOIUrl":"10.1038/s41378-025-00874-x","url":null,"abstract":"<p><p>Label-free cell classification is advantageous for supplying pristine cells for further use or examination, yet existing techniques frequently fall short in terms of specificity and speed. In this study, we address these limitations through the development of a novel machine learning framework, Multiplex Image Machine Learning (MIML). This architecture uniquely combines label-free cell images with biomechanical property data, harnessing the vast, often underutilized biophysical information intrinsic to each cell. By integrating both types of data, our model offers a holistic understanding of cellular properties, utilizing cell biomechanical information typically discarded in traditional machine learning models. This approach has led to a remarkable 98.3% accuracy in cell classification, a substantial improvement over models that rely solely on image data. MIML has been proven effective in classifying white blood cells and tumor cells, with potential for broader application due to its inherent flexibility and transfer learning capability. It is particularly effective for cells with similar morphology but distinct biomechanical properties. This innovative approach has significant implications across various fields, from advancing disease diagnostics to understanding cellular behavior.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"43"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11885814/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143573478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A tip-tilt-piston electrothermal micromirror array with integrated position sensors.","authors":"Anrun Ren, Yingtao Ding, Hengzhang Yang, Qiangqiang Liu, Teng Pan, Ziyue Zhang, Huikai Xie","doi":"10.1038/s41378-024-00835-w","DOIUrl":"10.1038/s41378-024-00835-w","url":null,"abstract":"<p><p>A tip-tilt-piston 3 × 3 electrothermal micromirror array (MMA) integrated with temperature field-based position sensors is designed and fabricated in this work. The size of the individual octagonal mirror plates is as large as 1.6 mm × 1.6 mm. Thermal isolation structures are embedded to reduce the thermal coupling among the micromirror units. Results show that each micromirror unit has a piston scan range of 218 μm and a tip-tilt optical scan angle of 21° at only 5 V_dc. The micromirrors also exhibit good dynamic performance with a rise time of 51.2 ms and a fall time of 53.6 ms. Moreover, the on-chip position sensors are proven to be capable for covering the full-range movement of the mirror plate, with the measured sensitivities of 1.5 mV/μm and 8.8 mV/° in piston sensing and tip-tilt sensing, respectively. Furthermore, the thermal crosstalk in an operating MMA has been experimentally studied. The measured results are promising thanks to the embedded thermal isolation structures.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"45"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11889227/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143586295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing.","authors":"Xingyu Lu, Yang Yuan, Fa Chen, Xiaoxiao Hou, Yanlong Guo, Leonhard Reindl, Yongqing Fu, Wei Luo, Degang Zhao","doi":"10.1038/s41378-024-00864-5","DOIUrl":"10.1038/s41378-024-00864-5","url":null,"abstract":"<p><p>Exceptional point (EP) is referred to degeneracies in a non-Hermitian system where two or more eigenvalues and their corresponding eigenvectors coalesce. Recently there have been significantly increased interests in harnessing EPs to enhance responsivities and achieve ultrasensitive detections in optics, electronics and acoustics, although there are few similar studies focused on using surface acoustic wave (SAW) sensing technologies, probably due to its great technical challenges. Herein, we proposed a scheme for accessing EPs in an on-chip architecture consisted of coupled-SAW-resonators system, forming a passive parity-time (PT) symmetric system. We demonstrated that by tuning additional losses in one of resonators and regulating the system in the proximity of the EP, the sensor exhibited significantly enhanced responses. As an example, we present an EP-based SAW gas sensor, which showed a much-improved sensitivity compared to that of a conventional delay-line SAW sensor. The fundamental mechanisms behind this excellent sensing performance have been elucidated.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"44"},"PeriodicalIF":7.3,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11889215/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143586297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.","authors":"Ruihong Xiong, Xuankai Xu, Yushuai Liu, Shihao Du, Lihui Jin, Fang Chen, Tao Wu","doi":"10.1038/s41378-024-00826-x","DOIUrl":"10.1038/s41378-024-00826-x","url":null,"abstract":"<p><p>Anti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias force and displacement for achieving stiffness softening, leading to large device dimensions. Here, we propose a novel anti-spring mechanism composed of two pre-shaped curved beams connected in a parallel configuration, which can achieve stiffness softening without requiring large bias force and displacement. The stiffness softening effect of the mechanism is verified through theoretical modeling and finite element method (FEM) simulation. After that, the mechanism is implemented in a 4.2 mm × 4.9 mm MEMS capacitive accelerometer prototype. The experimental results reveal that the sensitivity of the accelerometer increases by 10.4% compared to the initial sensitivity; at the same time, the noise floor and bias instability decrease by 10.5% and 4.2%. The sensitivity, nonlinearity, bias instability, and noise floor after biasing are 51.1 mV/g, 0.99%, 0.24 mg, and 21.3 <math><mrow><mi>μ</mi> <mi>g</mi> <mo>/</mo> <msqrt><mrow><mi>Hz</mi></mrow> </msqrt> </mrow> </math> , respectively. Thus, the proposed mechanism can enhance the performance of the accelerometer. This work provides an innovative approach for improving the performance of MEMS accelerometers while enabling miniaturization.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"42"},"PeriodicalIF":7.3,"publicationDate":"2025-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11883025/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143567756","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics.","authors":"Yexi Zhou, Yu Zhao, Dazhe Zhao, Xiao Guan, Kaijun Zhang, Yucong Pi, Junwen Zhong","doi":"10.1038/s41378-025-00884-9","DOIUrl":"10.1038/s41378-025-00884-9","url":null,"abstract":"<p><p>Achieving autonomously responding to external stimuli and providing real-time feedback on their motion state are key challenges in soft robotics. Herein, we propose an asymmetric three-layer hydrogel muscle with integrated sensing and actuating performances. The actuating layer, made of p(NIPAm-HEMA), features an open pore structure, enabling it to achieve 58% volume shrinkage in just 8 s. The customizable heater allows for efficient programmable deformation of the actuating layer. A strain-responsive hydrogel layer, with a linear response of up to 50% strain, is designed to sense the deformation process. Leveraging these actuating and sensing capabilities, we develop an integrated hydrogel muscle that can recognize lifted objects with various weights or grasped objects of different sizes. Furthermore, we demonstrate a self-crawling robot to showcase the application potential of the hydrogel muscle for soft robots working in aquatic environments. This robot, featuring a modular distributed sensing and actuating layer, can autonomously move forward under closed-loop control based on self-detected resistance signals. The strategy of modular distributed stimuli-responsive sensing and actuating materials offers unprecedented capabilities for creating smart and multifunctional soft robotics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"40"},"PeriodicalIF":7.3,"publicationDate":"2025-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11876583/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143541829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Global alignment reference strategy for laser interference lithography pattern arrays.","authors":"Xiang Gao, Jingwen Li, Zijian Zhong, Xinghui Li","doi":"10.1038/s41378-025-00889-4","DOIUrl":"10.1038/s41378-025-00889-4","url":null,"abstract":"<p><p>Large-area gratings play a crucial role in various engineering fields. However, traditional interference lithography is limited by the size of optical component apertures, making large-area fabrication a challenging task. Here, a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed. This approach enables alignment of each area of the laser interference lithography pattern arrays, including phase, period, and tilt angle. Two reference gratings are utilized: one is detached from the substrate, while the other remains fixed to it. To achieve global alignment, the exposure area is adjusted by alternating between moving the beam and the substrate. In our experiment, a 3 × 3 regions grating array was fabricated, and the -1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity. This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates. It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"41"},"PeriodicalIF":7.3,"publicationDate":"2025-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11880522/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143557331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures.","authors":"Datai Hui, Dongpeng Li, Binbin Wang, Yongqian Li, Jiaqian Ding, Laixian Zhang, Dayong Qiao","doi":"10.1038/s41378-025-00894-7","DOIUrl":"10.1038/s41378-025-00894-7","url":null,"abstract":"<p><p>Microelectromechanical system (MEMS) grating modulators enable versatile beam steering functions through the electrostatic actuation of movable ribbons. These modulators operate at ultrahigh frequencies in the hundred kHz range, and their micromirror-free configuration simplifies the fabrication process and reduces costs compared to micromirror-based modulators. However, these modulators are limited in their optical efficiency and aperture. Here, we present a MEMS grating modulator with a notably extendable aperture and a high optical efficiency that benefits from the adoption of a tunable sinusoidal grating. Instead of end-constrained movable ribbons, we constrain the MEMS grating modulator through broadside-constrained continuous ribbons. The end-free grating enables improved scalability along the ribbons, and the continuous sinusoidal surface of the grating allows an increased fill factor. As an example, we experimentally demonstrate a MEMS grating modulator with a large-scale aperture of 30 × 30 mm and an optical efficiency of up to 90%. The modulation depth enables intensity modulation across a broad wavelength range from 635 to 1700 nm. The experimental results demonstrate that the reported modulator has a mechanical settling time of 1.1 μs and an extinction ratio of over 20 dB. Furthermore, it offers a dynamic modulation contrast of over 95% within a 250 kHz operating frequency and achieves full modulation within a field of view (FOV) of ±30°. The reported MEMS grating modulator holds promise for application in high-speed light attenuation and modulating retroreflector free-space optical (MRR-FSO) communication systems. Our device also paves new ways for future high-speed, energy-efficient, and cost-effective communication networks.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"39"},"PeriodicalIF":7.3,"publicationDate":"2025-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11873166/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143537344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanoplasmonic SERS on fidget spinner for digital bacterial identification.","authors":"Mamata Karmacharya, Issac Michael, Jiyun Han, Elizabeth Maria Clarissa, Oleksandra Gulenko, Sumit Kumar, Yoon-Kyoung Cho","doi":"10.1038/s41378-025-00870-1","DOIUrl":"10.1038/s41378-025-00870-1","url":null,"abstract":"<p><p>Raman spectroscopy offers non-destructive and highly sensitive molecular insights into bacterial species, making it a valuable tool for detection, identification, and antibiotic susceptibility testing. However, achieving clinically relevant accuracy, quantitative data, and reproducibility remains challenging due to the dominance of bulk signals and the uncontrollable heterogeneity of analytes. In this study, we introduce an innovative diagnostic tool: a plasmonic fidget spinner (P-FS) incorporating a nitrocellulose membrane integrated with a metallic feature, referred to as a nanoplasmonic-enhanced matrix, designed for simultaneous bacterial filtration and detection. We developed a method to fabricate a plasmonic array patterned nitrocellulose membrane using photolithography, which is then integrated with a customized fidget spinner. Testing the P-FS device with various bacterial species (E. coli 25922, S. aureus 25923, E. coli MG1655, Lactobacillus brevis, and S. mutans 3065) demonstrated successful identification based on their unique Raman fingerprints. The bacterial interface with regions within the plasmonic array, where the electromagnetic field is most intensely concentrated-called nanoplasmonic hotspots-on the P-FS significantly enhances sensitivity, enabling more precise detection. SERS intensity mappings from the Raman spectrometer are transformed into digital signals using a threshold-based approach to identify and quantify bacterial distribution. Given the P-FS's ability to enhance vibrational signatures and its scalable fabrication under routine conditions, we anticipate that nanoplasmonic-enhanced Raman spectroscopy-utilizing nanostructures made from metals (specifically gold and silver) deposited onto a nitrocellulose membrane to amplify Raman scattering signals-will become the preferred technology for reliable and ultrasensitive detection of various analytes, including those crucial to human health, with strong potential for transitioning from laboratory research to clinical applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"38"},"PeriodicalIF":7.3,"publicationDate":"2025-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11873259/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143537345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Brain inspired iontronic fluidic memristive and memcapacitive device for self-powered electronics.","authors":"Muhammad Umair Khan, Bilal Hassan, Anas Alazzam, Shimaa Eissa, Baker Mohammad","doi":"10.1038/s41378-025-00882-x","DOIUrl":"10.1038/s41378-025-00882-x","url":null,"abstract":"<p><p>Ionic fluidic devices are gaining interest due to their role in enabling self-powered neuromorphic computing systems. In this study, we present an approach that integrates an iontronic fluidic memristive (IFM) device with low input impedance and a triboelectric nanogenerator (TENG) based on ferrofluid (FF), which has high input impedance. By incorporating contact separation electromagnetic (EMG) signals with low input impedance into our FF TENG device, we enhance the FF TENG's performance by increasing energy harvesting, thereby enabling the autonomous powering of IFM devices for self-powered computing. Further, replicating neuronal activities using artificial iontronic fluidic systems is key to advancing neuromorphic computing. These fluidic devices, composed of soft-matter materials, dynamically adjust their conductance by altering the solution interface. We developed voltage-controlled memristor and memcapacitor memory in polydimethylsiloxane (PDMS) structures, utilising a fluidic interface of FF and polyacrylic acid partial sodium salt (PAA Na⁺). The confined ion interactions in this system induce hysteresis in ion transport across various frequencies, resulting in significant ion memory effects. Our IFM successfully replicates diverse electric pulse patterns, making it highly suitable for neuromorphic computing. Furthermore, our system demonstrates synapse-like learning functions, storing and retrieving short-term (STM) and long-term memory (LTM). The fluidic memristor exhibits dynamic synapse-like features, making it a promising candidate for the hardware implementation of neural networks. FF TENG/EMG device adaptability and seamless integration with biological systems enable the development of advanced neuromorphic devices using iontronic fluidic materials, further enhanced by intricate chemical designs for self-powered electronics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"37"},"PeriodicalIF":7.3,"publicationDate":"2025-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11871289/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143531561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Artificial intelligence-enabled microfluidic cytometer using gravity-driven slug flow for rapid CD4⁺ T cell quantification in whole blood.","authors":"Desh Deepak Dixit, Tyler P Graf, Kevin J McHugh, Peter B Lillehoj","doi":"10.1038/s41378-025-00881-y","DOIUrl":"10.1038/s41378-025-00881-y","url":null,"abstract":"<p><p>The quantification of immune cell subpopulations in blood is important for the diagnosis, prognosis and management of various diseases and medical conditions. Flow cytometry is currently the gold standard technique for cell quantification; however, it is laborious, time-consuming and relies on bulky/expensive instrumentation, limiting its use to laboratories in high-resource settings. Microfluidic cytometers offering enhanced portability have been developed that are capable of rapid cell quantification; however, these platforms involve tedious sample preparation and processing protocols and/or require the use of specialized/expensive instrumentation for flow control and cell detection. Here, we report an artificial intelligence-enabled microfluidic cytometer for rapid CD4⁺ T cell quantification in whole blood requiring minimal sample preparation and instrumentation. CD4⁺ T cells in blood are labeled with anti-CD4 antibody-coated microbeads, which are driven through a microfluidic chip via gravity-driven slug flow, enabling pump-free operation. A video of the sample flowing in the chip is recorded using a microscope camera, which is analyzed using a convolutional neural network-based model that is trained to detect bead-labeled cells in the blood flow. The functionality of this platform was evaluated by analyzing fingerprick blood samples obtained from healthy donors, which revealed its ability to quantify CD4⁺ T cells with similar accuracy as flow cytometry (<10% deviation between both methods) while being at least 4× faster, less expensive, and simpler to operate. We envision that this platform can be readily modified to quantify other cell subpopulations in blood by using beads coated with different antibodies, making it a promising tool for performing cell count measurements outside of laboratories and in low-resource settings.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"36"},"PeriodicalIF":7.3,"publicationDate":"2025-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11868388/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143523971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}