Microsystems & Nanoengineering最新文献_第2页

Near-zero nonlinear error pressure sensor based on piezoresistor sensitivity matching for wind tunnel pressure test. 基于压阻灵敏度匹配的近零非线性误差风洞压力传感器。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-12 DOI: 10.1038/s41378-025-00959-7

Yuanying Zhang, Fengyun Liu, Zechen Zhou, Xiubing Liang, Riming Sun, Jinjun Deng, Xiaoliang Luo, Jian Lin, Xing Chen, Xingxu Zhang, Jian Luo, Xiaojing Wang, Binghe Ma

{"title":"Near-zero nonlinear error pressure sensor based on piezoresistor sensitivity matching for wind tunnel pressure test.","authors":"Yuanying Zhang, Fengyun Liu, Zechen Zhou, Xiubing Liang, Riming Sun, Jinjun Deng, Xiaoliang Luo, Jian Lin, Xing Chen, Xingxu Zhang, Jian Luo, Xiaojing Wang, Binghe Ma","doi":"10.1038/s41378-025-00959-7","DOIUrl":"10.1038/s41378-025-00959-7","url":null,"abstract":"High-precision piezoresistive pressure sensors play a significant role in aerospace, automotive, and other fields. Nonlinear error is the key factor that restricts the improvement of the sensor precision. A mathematical model for evaluating the sensor's nonlinear error is established, based on which a piezoresistor sensitivity matching method is proposed to suppress the nonlinear error. By adjusting the piezoresistors' structure and position on the sensing membrane, four piezoresistors with equal sensitivity are obtained, and theoretical quasi-zero nonlinear error is achieved. To verify the design, sensor prototypes are fabricated utilizing the MEMS technology. After sensor packaging, a cylindrical absolute pressure sensor featuring a 4 mm diameter with a range from 0 to 100 kPa is acquired. The experimental results demonstrate the excellent performance of the proposed sensor, which indicates a nonlinear error as low as ±0.004%FS. Besides, the proposed sensor has a sensitivity of 1.6810 mV/kPa, a hysteresis of 0.025%, a repeatability of 0.015%, a zero drift of 0.03%FS, and a 3 dB frequency from 0 to 121.82 kHz. Moreover, the prototype is tested in the Mach 4 wind tunnel, and the measurement error between the proposed sensor and the true pressure is ±0.98%. This paper provides key sensing technology for high-precision surface pressure analysis of aircraft.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"122"},"PeriodicalIF":7.3,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12163088/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144285481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Long-term culture and morphological maturation of taste organoids enhance taste discrimination in a biomimetic biosensor. 味觉类器官的长期培养和形态成熟增强了仿生生物传感器的味觉识别能力。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-11 DOI: 10.1038/s41378-025-00978-4

Shuge Liu, Yating Chen, Yuqi Chen, Yuxuan Yuan, Minggao Liu, Zhiyao Wang, Wei Chen, Liping Du, Chunsheng Wu

{"title":"Long-term culture and morphological maturation of taste organoids enhance taste discrimination in a biomimetic biosensor.","authors":"Shuge Liu, Yating Chen, Yuqi Chen, Yuxuan Yuan, Minggao Liu, Zhiyao Wang, Wei Chen, Liping Du, Chunsheng Wu","doi":"10.1038/s41378-025-00978-4","DOIUrl":"10.1038/s41378-025-00978-4","url":null,"abstract":"Taste is a multifaceted sensory experience that involves various human senses related to food and is a key indicator of food quality. A biomimetic taste-based biosensor, which utilizes taste bud organoids as sensitive elements, is able to simulate the real responses of taste transduction in vitro. Taste bud organoids are three-dimensional structures created from taste stem/progenitor cells, integrated with transducers to develop the biosensor. In this research, organoids derived from mouse taste epithelium were employed as the sensitive element, while a microelectrode array (MEA) device served as the transduction element to create the biosensor. Following exposure to sour, sweet, bitter, and salty stimuli, one specific channel was chosen, and the average discharge rates were calculated as 6.5 ± 2.29 Hz, 7.25 ± 3.77 Hz, 3.33 ± 2.62 Hz, and 4.6 ± 2.42 Hz, respectively. Statistical analysis indicated that, apart from the sour taste, the frequency and amplitude of the other three taste stimuli showed significant increases. Principal component analysis (PCA) demonstrated the ability to identify and differentiate various tastes during taste conduction monitoring. Additionally, it was observed that on day 14, the taste bud organoids exhibited aggregation and fusion, leading to the formation of typical taste bud structures, indicating their maturation. This research offers a theoretical foundation and a valuable tool for effective and objective taste detection in vitro.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"120"},"PeriodicalIF":7.3,"publicationDate":"2025-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12152158/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144266645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging. 机械坚固和自清洁封装超构透镜通过旋转玻璃包装。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-10 DOI: 10.1038/s41378-025-00925-3

Younghwan Yang, Dohyun Kang, Junhwa Seong, Kyungtae Kim, Seokwoo Kim, Chunghwan Jung, Eunji Lee, Hyeonsu Heo, Hyunjung Kang, Nara Jeon, Jihae Lee, Youngsun Jeon, Yujin Park, Junsuk Rho

{"title":"Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging.","authors":"Younghwan Yang, Dohyun Kang, Junhwa Seong, Kyungtae Kim, Seokwoo Kim, Chunghwan Jung, Eunji Lee, Hyeonsu Heo, Hyunjung Kang, Nara Jeon, Jihae Lee, Youngsun Jeon, Yujin Park, Junsuk Rho","doi":"10.1038/s41378-025-00925-3","DOIUrl":"10.1038/s41378-025-00925-3","url":null,"abstract":"Metalenses-two-dimensionally arranged artificial nanostructures that focus light-have been extensively studied due to their great potential for applications in consumer goods and industrial products. However, when metalenses are exposed to harsh environments, they can suffer from mechanical shocks and damage, leading to degradation in optical performance. Here, we present mechanically robust and self-cleanable encapsulated metalenses using spin-on-glass coatings on structured hydrogenated amorphous silicon (a-Si:H), whose optical properties are optimized for effective waveguiding. The atomic structure of a-Si:H has been precisely engineered to achieve a high refractive index (3.23) with near-zero optical losses at the wavelength of 635 nm by adjusting deposition parameters. We develop an analytical model to determine how the refractive index of nanostructures influences light manipulation, highlighting the correlation between refractive indices of structures and metalens efficiencies. Using the high refractive index of the a-Si:H, our encapsulated metalenses achieved a calculated conversion efficiency of 97.2% at the wavelength of 635 nm. Additionally, we verify their mechanical robustness by sonicating encapsulated metalenses with sand for 120 min, demonstrating strong mechanical durability. Furthermore, with the capability of the encapsulated metalenses to perform self-cleaning, this work paves the way for practical applications of metalenses in diverse environments.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"118"},"PeriodicalIF":7.3,"publicationDate":"2025-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12152127/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144266646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays. 基于微电极阵列的不同浓度异氟醚麻醉小鼠多脑区神经信息高精度检测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-10 DOI: 10.1038/s41378-025-00944-0

Yiming Duan, Qianli Jia, Jinping Luo, Yu Wang, Qi Li, Shiya Lv, Luyi Jing, Wei Xu, Xiaoying Zhang, Yulong Ma, Weidong Mi, Xinxia Cai

{"title":"High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays.","authors":"Yiming Duan, Qianli Jia, Jinping Luo, Yu Wang, Qi Li, Shiya Lv, Luyi Jing, Wei Xu, Xiaoying Zhang, Yulong Ma, Weidong Mi, Xinxia Cai","doi":"10.1038/s41378-025-00944-0","DOIUrl":"10.1038/s41378-025-00944-0","url":null,"abstract":"The precise neural mechanisms by which general anesthetics induce unconsciousness remain undetermined, with ongoing debate over whether they primarily affect the cortex directly or act predominantly on the sleep-wake brain regions. There is an urgent need for high-precision methodologies to detect and analyze neural information across cortical and subcortical regions. In this study, we designed and fabricated the microelectrode arrays to detect electrophysiological signals from nine brain regions, ranging from the secondary motor cortex to the preoptic area in mice under different concentrations of isoflurane anesthesia. The results demonstrate that isoflurane induces a synchronous inhibitory effect on neural activity in both cortical and subcortical regions of mice during the maintenance phase of anesthesia, which intensifies with increasing anesthesia concentration. Moreover, cortical neurons exhibit a more pronounced inhibitory response to isoflurane, as reflected by significant reductions in local field potential power and spike firing rates compared to subcortical neurons during the suppression phase. These findings suggest that isoflurane during the maintenance phase of anesthesia is more likely to align with the \"top-down\" paradigm by directly inhibiting cortical regions to maintain unconsciousness. In summary, these discoveries could further refine the study of the neural mechanisms of isoflurane-induced unconsciousness.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"119"},"PeriodicalIF":7.3,"publicationDate":"2025-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12152167/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144266644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Application of pulse width modulation control in EHD waveform to optimize printing performance. 脉冲宽度调制控制在EHD波形中的应用，优化打印性能。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-09 DOI: 10.1038/s41378-025-00901-x

Dongqiao Bai, Jin Huang, Hongxiao Gong, Jianjun Wang, Mengyang Su, Pengbing Zhao, Chaoyu Liang

{"title":"Application of pulse width modulation control in EHD waveform to optimize printing performance.","authors":"Dongqiao Bai, Jin Huang, Hongxiao Gong, Jianjun Wang, Mengyang Su, Pengbing Zhao, Chaoyu Liang","doi":"10.1038/s41378-025-00901-x","DOIUrl":"10.1038/s41378-025-00901-x","url":null,"abstract":"High-resolution 3D printing, particularly electrohydrodynamic (EHD) printing, represents a transformative approach for advanced manufacturing applications, including wearable electronics, bioelectronics, and soft robotics. Despite its potential, EHD printing faces challenges such as complex waveform control, limited material compatibility, satellite droplet formation, and continuous charge accumulation. To address these issues, the use of pulse-width modulation (PWM) control is proposed to enhance EHD printing performance. The influence of duty cycles and pulse subdivisions on EHD printing was systematically investigated through experiments and simulations, analyzing their effects on jetting dynamics, droplet formation, charge accumulation, and line quality. The results demonstrate that PWM modulation significantly improves jetting stability, reduces droplet diameter by up to 25%, minimizes satellite droplet formation, and effectively mitigates charge accumulation. Furthermore, PWM control was shown to facilitate the production of high-quality patterns. Notably, the proposed PWM approach is compatible with existing waveform control setups, offering enhanced precision and stability without requiring substantial modifications. These findings underscore the potential of PWM-controlled EHD printing for achieving high-resolution, versatile manufacturing in electronics and functional device production.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"117"},"PeriodicalIF":7.3,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12149310/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144258474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality. 石墨烯支持的硅基MEMS/NEMS：一种具有大可调性和功能的方案。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-09 DOI: 10.1038/s41378-025-00960-0

Mengqi Fu, Zhan Shi, Bojan Bošnjak, Robert H Blick, Elke Scheer, Fan Yang

{"title":"Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality.","authors":"Mengqi Fu, Zhan Shi, Bojan Bošnjak, Robert H Blick, Elke Scheer, Fan Yang","doi":"10.1038/s41378-025-00960-0","DOIUrl":"10.1038/s41378-025-00960-0","url":null,"abstract":"Integration of graphene in silicon-based micro-/nanoelectromechanical systems (MEMS/NEMS) marries the robustness of silicon-based materials with the exceptional physical properties of graphene, drastically enhancing the system's regulation performance which now is key for many advanced applications in nanotechnology. Here, we experimentally demonstrate and theoretically analyze a powerful on-chip integration principle consisting of a hybrid graphene/silicon nitride membrane with metallic leads on top that enables an extremely large static and dynamic parameter regulation. When a static voltage is applied to the leads of the integrated structure, a spatially confined localized electrothermomechanical (ETM) effect results in ultra-wide frequency tuning, deformation (buckling transition) and regulation of the mechanical properties. Moreover, by injecting an alternating voltage to the leads, we can excite the resonator vibrating even far beyond its linear regime without a complex and space consuming actuation system. Our results prove that the scheme provides a compact integrated system possessing mechanical robustness, high controllability, and fast response. It not only expands the limit of the application range of MEMS/NEMS devices, but also enables the further miniaturization of the device. The graphene integrated MEMS/NEMS empowered by graphene: a scheme for strong enhancements of tunability and functionality of silicon based device device consists of a hybrid graphene/silicon-nitride membrane with metallic leads that enables ultra-wide frequency tuning, spatial deflection, mechanical properties tuning and on-surface actuation.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"116"},"PeriodicalIF":7.3,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12149320/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144258475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

pH-Inhibited Fenton etching of gold nanobipyramids: a multicolor approach for enhanced urea detection. ph抑制Fenton蚀刻金纳米金字塔：一种增强尿素检测的多色方法。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-05 DOI: 10.1038/s41378-025-00931-5

Ahmed Y Elbalaawy, Min-Jae Kim, Samy M Shaban, Eslam Hafez, Mohamed R Elmasry, Dong-Hwan Kim

{"title":"pH-Inhibited Fenton etching of gold nanobipyramids: a multicolor approach for enhanced urea detection.","authors":"Ahmed Y Elbalaawy, Min-Jae Kim, Samy M Shaban, Eslam Hafez, Mohamed R Elmasry, Dong-Hwan Kim","doi":"10.1038/s41378-025-00931-5","DOIUrl":"10.1038/s41378-025-00931-5","url":null,"abstract":"This study presents an innovative urea detection method utilizing pH-controlled Fenton etching of gold nanobipyramids (AuNBPs), offering a multicolor visual response. By leveraging the urease-catalyzed hydrolysis of urea, which releases ammonia and raises pH, the Fenton reaction is inhibited, reducing the etching of AuNBPs. This approach enables a highly sensitive and distinct multichromatic response across a wide range of urea concentrations, particularly at low target levels. The solution-based sensor achieved an exceptionally low detection limit of 0.098 μM, surpassing existing colorimetric urea biosensors. Furthermore, embedding the sensor in an agarose hydrogel matrix to create a solid-state format resulted in a detection limit of 0.2 μM. Real-world validation demonstrated high recovery rates in urine samples, further affirming the sensor's reliability. This multicolor biosensing platform offers a robust tool for point-of-care diagnostics, facilitating accurate and user-friendly urea detection.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"114"},"PeriodicalIF":7.3,"publicationDate":"2025-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12141652/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144234533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-order near-field imaging of low-dimensional materials at infrared wavelengths. 红外波长下低维材料的高阶近场成像。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-06-05 DOI: 10.1038/s41378-025-00953-z

Shuhao Zhao, Peirui Ji, Fei Wang, Shaobo Li, Guofeng Zhang, Tao Liu, Shuming Yang

{"title":"High-order near-field imaging of low-dimensional materials at infrared wavelengths.","authors":"Shuhao Zhao, Peirui Ji, Fei Wang, Shaobo Li, Guofeng Zhang, Tao Liu, Shuming Yang","doi":"10.1038/s41378-025-00953-z","DOIUrl":"10.1038/s41378-025-00953-z","url":null,"abstract":"Near-field imaging provides insight into the fundamental light-matter interactions on a nanometer scale. Scattering-type scanning near-field optical microscopy (s-SNOM) is a powerful technique capable of overcoming the diffraction limit and achieving spatial resolutions below 10 nm (sub-10 nm). However, constrained by the working mechanisms, the signal-to-noise ratio of the imaging is highly affected by undesired background scattering light, which is found to be associated with the optical mode and excitation wavelength, especially for samples with a large specific surface area. Here, we propose a high-resolution method with high-order near-field modes at the infrared range to measure low-dimensional materials. With this technique, we reveal the excitation and propagation of the surface plasmon polaritons in graphene and carbon nanotubes, which was impossible with the low-order imaging approach. Besides, the imaging quality for gold nanoparticles on gold thin film is much better than the AFM results. This paper offers an advanced approach for high-resolution measurement of low-dimensional materials with s-SNOM, owning great potential for sensitive nanoscale imaging.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"115"},"PeriodicalIF":7.3,"publicationDate":"2025-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12141435/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144234532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Compact Hydraulic Head Auto-Regulating Module (CHARM) for long-term constant gravity-driven flow microfluidics. 一个紧凑的液压头自动调节模块（CHARM），用于长期恒定的重力驱动流微流体。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-29 DOI: 10.1038/s41378-025-00968-6

Fan Xue, Ulri N Lee, Joel Voldman

{"title":"A Compact Hydraulic Head Auto-Regulating Module (CHARM) for long-term constant gravity-driven flow microfluidics.","authors":"Fan Xue, Ulri N Lee, Joel Voldman","doi":"10.1038/s41378-025-00968-6","DOIUrl":"10.1038/s41378-025-00968-6","url":null,"abstract":"Fluid flow is a ubiquitous aspect of microfluidic systems. Gravity-driven flow is one microfluidic flow initiation and maintenance mechanism that is appealing because it is simple, requires no external power source, and is easy to use. However, the driving forces created by hydraulic head differences gradually decrease during operation, resulting in decreasing flow rates that are undesirable in many microfluidic applications such as perfusion culture, droplet microfluidics, etc. Existing methods to maintain a constant gravity-driven flow either require additional control equipment, involve complex fabrication or operation, are incompatible with miniaturization, or introduce interfaces that lack robustness. Here we tackled those problems by introducing a 3D-printed compact hydraulic head auto-regulating module that automatically maintains a constant fluid level at the microfluidic inlet port without human intervention. Our module successfully maintained a constant hydraulic head for more than 24 h, with the operation time solely limited by the reservoir capacity. A comparison with the conventional gravity-driven flow demonstrated our device's capability to produce a more stable flow over the perfusion period. Overall, our module creates a simple, robust solution to produce a stable flow rate in gravity-driven flow systems. The compactness of the design allows easy parallelization and compatibility with high-throughput applications, and the biocompatibility of the materials enables the device's use with life science applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"113"},"PeriodicalIF":7.3,"publicationDate":"2025-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12122956/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144182858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Onboard visual micro-servoing on robotic surgery tools. 机器人手术工具的机载视觉微伺服。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-29 DOI: 10.1038/s41378-025-00955-x

Xu Chen, Michail E Kiziroglou, Eric M Yeatman

{"title":"Onboard visual micro-servoing on robotic surgery tools.","authors":"Xu Chen, Michail E Kiziroglou, Eric M Yeatman","doi":"10.1038/s41378-025-00955-x","DOIUrl":"10.1038/s41378-025-00955-x","url":null,"abstract":"Precision motion actuation is a key technology for miniature medical robotics in a variety of applications, such as optical fibre-based diagnosis and intervention tools. Conventional inductive actuation mechanisms are challenging to scale down. Piezoelectric materials offer a scalable, precise, fast and high-force method but at a limited displacement range. In previous work, the combination of piezoelectric beams (benders) with compliant motion translation structures has been shown to be promising for robotic micro-actuation. In this paper, this approach is employed to implement a three degrees of freedom delta robot, suitable for catheter, diagnostic optical fibre and microsurgery tool manipulation. The fabrication process combines additive manufacturing, origami structuring and piezoelectric beam assembly. Closed-loop control is implemented using a new, on-board visual feedback concept. In contrast to typical optical motion systems, the fully internal visual feedback offers system compactness with precise and reliable camera-to-marker geometry definition. By employment of this method, a delta robot with motion accuracy of 7.5 μm, resolution of 10 μm and 8.1 μm precision is demonstrated. The robot is shown to follow a range of programmable trajectories under these specifications, and to compensate for externally applied forces typically expected during microsurgery manipulations. This is the first, to our knowledge, demonstration of micromotion control using internal visual feedback, and it opens up the way for high-resolution compact microrobots.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"112"},"PeriodicalIF":7.3,"publicationDate":"2025-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12122923/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144181115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0