Microsystems & Nanoengineering最新文献

{"title":"MXene/graphene composite flexible impedance glove with wide linear range for cross-subject gesture recognition.","authors":"Zhaoqun Wang, Dan Yang, Yongqi Zhang, Nan Sun, Bin Xu, Xinghan Lv, Jiliang Zhang, Zhongbo Sun","doi":"10.1038/s41378-026-01446-3","DOIUrl":"10.1038/s41378-026-01446-3","url":null,"abstract":"<p><p>With the continuous evolution of human-machine interaction (HMI) technologies, natural and intuitive gesture recognition has emerged as a pivotal interaction modality. However, constrained by inter-individual differences in hand dimensions and wearing habits, existing gesture recognition techniques still suffer from limited generalization performance in cross-subject recognition. This paper proposes a flexible impedance glove based on MXene/graphene composites with wide linear response range, which enables lightweight and zero-shot cross-subject gesture recognition. The sensing layer of the glove is fabricated using MXene/graphene/spandex composites, delivering a wide linear tensile range of 0-90% (R² = 0.995), and exceptional dual-modal sensing capability, effectively suppressing baseline fluctuations induced by individual differences. To enable high-precision gesture signal acquisition and intelligent classification, a self-designed miniaturized, low-cost impedance measurement module and the Random Forest (RF) algorithm were integrated. The customized hardware module achieves a high signal-to-noise ratio (SNR) of 61.6 dB and an average measurement accuracy of 99.79%. By employing a computationally lightweight Random Forest (RF) algorithm, the integrated system delivers an intra-subject recognition accuracy of 99.43% in classifying 12 complex gestures. Remarkably, it achieves a zero-shot cross-subject recognition accuracy of 91.04%, which further improved to 97.85% with the introduction of merely 5% individual calibration data. Furthermore, the successfully developed applications in intelligent sign language translation and low-latency game control demonstrate the promising application potential of the proposed system in barrier-free communication, HMI and other related fields.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13619573/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149075241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multi-mode droplet splitting on active-matrix digital microfluidics: quantitative boundaries and optimal sequential generation.","authors":"Chenxuan Hu, Hanbin Ma","doi":"10.1038/s41378-026-01433-8","DOIUrl":"10.1038/s41378-026-01433-8","url":null,"abstract":"<p><p>Precise generation of microdroplets at picoliters to microliters scale is critical for advancing microfluidics technologies and precision life sciences research. Digital microfluidics enables programable individual droplet, however, there still lacks comprehensive characterization and analysis on optimal splitting modes, hindering its further application requiring extreme volume accuracy and splitting. Here, we report a systematic quantitative investigation of four droplet splitting strategies: symmetric splitting, asymmetric splitting, deformative splitting, squeezing, leveraging the high programmability advantage of large-scale active-matrix digital microfluidics. Droplet splitting is experimentally tested across varying droplet sizes, shapes, ratios and sub-droplet motion modes. Based on extensive experimental results, quantitative analysis is conducted to comprehensively characterize the splitting accuracy and effective ratio ranges. From these statistical results and optimal splitting modes, we establish an optimal sequential splitting decision framework. Aiming at precise generation for ultra-low-ratio sub-droplet through sequential splitting, the proposed framework can efficiently screen reasonable splitting paths from the combinatorial solution space. Ultra-low-ratio droplet generation at 0.78125% is realized, which is unattainable by any single-step method, with a cumulative accuracy of 1.05868 upon a target droplet of 12 nL. This work clarifies the quantitative performance boundaries of multi-mode droplet splitting strategies and demonstrates the capability of standardized optimal splitting sequence generation. These findings provide a theoretical and technical basis for customized multi-step droplet preparation and high-stability microfluidic manipulation.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13620153/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149075206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Battery-free, fully wireless neurostimulation via radiative RF power transfer in freely behaving mice.","authors":"Kyungbin Yoo, Sehwan Park, Jimin Yang, Minseok Kim, Seungjun Lee, Giheon Kim, Namsun Chou, Hyogeun Shin, Sehoon Park","doi":"10.1038/s41378-026-01439-2","DOIUrl":"10.1038/s41378-026-01439-2","url":null,"abstract":"<p><p>Wireless neurostimulators are essential for investigating causal relationships between neural circuit activity and behavior in freely behaving animals. However, most existing systems rely on onboard batteries, while near-field magnetic wireless power transfer (WPT) requires specialized environments such as large transmission coils. Radiative radio-frequency (RF) WPT enables longer transmission distances but has been considered unsuitable for freely moving conditions due to alignment sensitivity and output instability. Here, we present a battery-free, fully wireless transcranial direct current stimulation (tDCS) system based on radiative RF WPT that operates reliably in freely behaving mice. The system integrates a quasi-omnidirectional flexible printed circuit board-based monopole antenna with an RF-to-DC rectifier and a DC-DC converter, enabling robust power management despite continuous changes in position and orientation. Experiments in freely behaving mice showed that the neurostimulator maintained the regulated output voltage (~9.7 V) for the majority of the experimental period across a cage-scale environment, while transient voltage reductions occasionally occurred during abrupt posture and orientation changes. Furthermore, targeted tDCS of the M2 cortical region consistently induces circling behavior, demonstrating functional neurostimulation at the behavioral level. This work establishes the feasibility of radiative RF WPT-enabled fully wireless neurostimulation in freely behaving in vivo environments and demonstrates stable extended-duration electrical operation under continuous radiative RF powering conditions. The proposed platform provides a practical foundation for battery-free wireless neurostimulation without tethered connections or coil-embedded behavioral environments.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13620167/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149074735","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A quasi-zero stiffness triboelectric vibration sensor for high-fidelity vibration characterization.","authors":"Zhengyu Li, Xingyu Chen, Liye Zhao, Jiawen Xu","doi":"10.1038/s41378-026-01453-4","DOIUrl":"10.1038/s41378-026-01453-4","url":null,"abstract":"<p><p>Triboelectric nanogenerator-based vibration sensors offer a promising solution for large-scale, distributed vibration monitoring in mechanical equipment and civil infrastructure. However, their performance is often compromised by inherent structural resonance, which introduces frequency-dependent sensitivity and distorts broadband vibration waveforms. In this work, we present a quasi-zero stiffness triboelectric vibration sensor (QZS-TEVS) that extends the post-resonance operational region towards ultralow frequencies, facilitating high-fidelity broadband vibration characterization. Specifically, an ultralow resonant frequency is realized via the QZS characteristic of the tailored harmonic curved beam. This strategic resonance shift broadens the flat-response bandwidth, thereby effectively suppressing resonance-induced distortion. The QZS-TEVS exhibits a nearly constant displacement sensitivity of 0.31 V/μm over 10-300 Hz, with a frequency measurement accuracy of 99.98%. Furthermore, the QZS-TEVS achieves precise reconstruction of arbitrary vibration waveforms. This work shifts the design paradigm from resonance-driven energy maximization to high-fidelity characterization and provides a high-precision scheme for self-powered, multidimensional condition monitoring within the Industrial Internet of Things (IIoT).</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13601612/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149031018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Unraveling the dielectric heterogeneity response of cell lines under electroporation: a microfluidic single-cell on-chip system.","authors":"Lisheng Zhao, Yiran Shu, Yancheng Wang, Benhao Zhao, Sizhe Xiang, Yajun Zhao, Hongmei Liu, Chenguo Yao, Shoulong Dong","doi":"10.1038/s41378-026-01369-z","DOIUrl":"10.1038/s41378-026-01369-z","url":null,"abstract":"<p><p>In the clinical application of irreversible electroporation for tumor therapy, individual differences in cellular electrical responses often lead to the reliance on empirically selected treatment parameters, which easily cause over/under-treatment in patients and hinder the development of precision tumor therapy. To clarify the response mechanism induced by single-cell individual differences, this study developed an experimental platform integrating microfluidic chip technology, dielectrophoresis (DEP), electrorotation (EROT), and electroporation (PEF) technologies, enabling the full process of single-cell \"capture-rotation-electroporation-re-rotation\" on one chip. By extracting four core dielectric parameters (conductivity and permittivity of membrane and cytoplasm) via rotation spectrum analysis and the size effect of cell, we proposed a semi-quantitative Electroporation Sensitivity Index (EPI). The EPI is grounded in the cumulative contribution of static intrinsic sensitivity and dynamic promotion to quantify cellular responses. This study used four cell lines (A549, HUH-7, U251, B16F10) for validation. The results showed that: the platform stably captured cells at the center of the electrodes and induced rotation, with the coefficient of determination (R²) of the rotation spectrum fitting curves all greater than 0.97, confirming the strong robustness of the method. The EPI ranking of the four cell lines (B16F10: 3.628 > A549: 2.678 > U251: 2.364 > HUH-7: 1.974) was completely consistent with the actual ranking of maximum instantaneous mortality (IR) (B16F10: 82.28% > A549: 81.87% > U251: 78.81% > HUH-7: 60.61%), verifying the effectiveness of EPI in analyzing cell electroporation responses. This study provides a quantitative framework for decoding tumor heterogeneity, laying a theoretical foundation for precision electroporation therapy.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13601525/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149030990","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Antimony-contact MoS₂ FET gas sensors for reinforcement-learning-driven hazard perception at room temperature.","authors":"Youngchan Cho, Jinhyeok Pyo, Yeonseop Shin, Min Wook Kang, Yebin Oh, Se-Hyun Hwang, Sohyeon Park, David Radermacher, Saeroonter Oh, Daewoong Kwon, Sung-Tae Lee, Junho Choi, Jangsaeng Kim, Wonjun Shin, Sangyeon Pak","doi":"10.1038/s41378-026-01431-w","DOIUrl":"10.1038/s41378-026-01431-w","url":null,"abstract":"<p><p>Two-dimensional van der Waals semiconductors promise low-power chemical perception at room temperature, yet contact-limited on-currents and slow recovery impede closed-loop decision making in hazardous environments. Here we propose antimony (Sb)-contact two-dimensional (2D) monolayer MoS₂ field-effect transistors (FETs) that leverage contact engineering to boost on-current and charge-transfer gas response for room temperature detection and enable electrically programmable recovery via pre-bias pulses that actively accelerate desorption and baseline restoration. The Sb-contact MoS₂ FETs show unprecedented ppb gas response (363,600% at 500 ppb NO₂) and rapid, repeatable room temperature recovery with ultra-low energy consumption (42 pJ, representing the intrinsic energy efficiency of the sensing front-end), serving as a proof-of-concept for the front-end of a safety-constrained reinforcement-learning (RL) stack that detects leak sources and plans low-risk escape path in turbulent interiors. We cast joint seek-and-escape as a single constrained Markov decision process informed by real-time transduction features fused with thermal-flow cues; the learned policy achieves earlier detection, lower cumulative exposure, and shorter safe-egress paths than heuristic baselines in computational fluid dynamics (CFD)-validated simulations and chamber trials. By uniting contact-engineered 2D transducers with risk-aware RL, this work advances room temperature chemical sensing from passive monitoring to closed-loop action.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13594226/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149017131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A scalable skin-friendly antibacterial radiative cooling textile against extreme heatwaves.","authors":"Xueke Wu, Ramya Barathy Thamilselvan, Saichao Dang, Yingkun Zhu, Shakeel Ahmad, Kai Xu, Qiong Li, Sanjay Rastogi, Hussam Qasem, Po-Chun Hsu, Qiaoqiang Gan","doi":"10.1038/s41378-026-01375-1","DOIUrl":"10.1038/s41378-026-01375-1","url":null,"abstract":"<p><p>Radiative cooling is an emerging zero-energy personal thermal management technology for mitigating extreme outdoor heatwaves. However, inevitable sweating under such conditions accelerates bacterial growth and degrades cooling performance, causing discomfort and health risks. The absence of reliable textiles to address these challenges limits their practicality. Here, we design a scalable, skin-friendly antibacterial RC textile (Anti-B) for such scenarios, based on hierarchically structured micro-nanofibers formed through hydrogen bonding between chitosan and polyoxymethylene. The amine groups in biologically-derived chitosan impart skin-friendly antibacterial properties without health risks, while the carbon-oxygen bonds in both polymers, combined with micro-nanostructure engineering, ensure sweat resistance, high selective emissivity (80.4%) within the atmospheric window (8-13 μm), and strong solar reflectance (95.6%). As a result, Anti-B exhibits strong antibacterial performance against Escherichia coli, Staphylococcus aureus, Bacillus subtilis, and Pseudomonas aeruginosa, while providing superior cooling compared to commercial cotton and protective clothing (2.0-12.3 °C cooler) under both sunny and cloudy hot scenarios. Moreover, when tailored into a T-shirt, Anti-B demonstrates excellent wearability, including breathability, sweat evaporation rate, and durability, while providing ~5 °C better cooling than commercial cooling counterparts. This work offers a promising pathway for sustainable personal thermal and health management.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13598137/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149025304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Bio-inspired functional recursion enables multi-mode locomotion in a 140-mg morphing microrobot.","authors":"Yunfei Wang, Zhonglai Wang, Zequn Wang, Yichuan Wu, Shan Lu, Wei Zhang, Yi Guan, Pengpeng Zhi, Zhibo Geng, Huanwei Xu, Junfu Zhang, Yaoming Fu","doi":"10.1038/s41378-026-01449-0","DOIUrl":"10.1038/s41378-026-01449-0","url":null,"abstract":"<p><p>Insects traverse diverse environments by reusing body structures and appendages through adaptable mechanics, an ability that remains a grand challenge for insect-scale robotics under strict mass constraints. Here we present an insect‑scale robot that integrates aerial takeoff and open-loop attitude modulation, terrestrial crawling, water-surface gliding, and electrowetting-triggered controlled immersion within a 140-mg platform, with these capabilities demonstrated as representative open-loop functional tests rather than a single continuous autonomous mission. Moving beyond actuator‑heavy designs, the robot encodes structural intelligence in a single multifunctional morphing frame driven by shape-memory alloy artificial muscles. This morphing body reconfigures to take on distinct roles across diverse environments: it acts as a steering transmission for asymmetric flapping-wing kinematics, a linear oscillator for terrestrial crawling through anisotropic friction, and a deformation actuator that tunes kirigami-inspired footpad gaps for interfacial support and immersion control. Footpad modulation enables active electrowetting, rupturing the water surface at 225 V to achieve controlled immersion and increasing load capacity to 1.7 × body weight. By integrating soft actuation, structural mechanics, and interfacial control into one reconfigurable structure, this work establishes a paradigm of functional recursion, where a minimal physical platform repeatedly reassigns form and function, addressing the fundamental trade-off between operational diversity and extreme miniaturization.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13590654/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149012587","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Code-multiplexed multi-frequency impedance cytometry with a unified deep-unfolding network.","authors":"Wonjun Lee, Sindy K Y Tang","doi":"10.1038/s41378-026-01420-z","DOIUrl":"10.1038/s41378-026-01420-z","url":null,"abstract":"<p><p>Impedance flow cytometry (IFC) is a label-free, single-cell measurement technique that captures biophysical properties beyond traditional biochemical markers. Code-multiplexing allows parallelization of IFC with simple hardware but requires advanced signal processing algorithms to resolve overlaps in signals originating from different channels. Existing methods, however, rely on multiple task-specific networks with template-based linear fitting, which loses accuracy under nonlinear or unstable conditions common in microfluidic experiments. Prior studies have also been restricted to demultiplexing single-frequency impedance measurements. To this end, we develop a unified deep-unfolding network for analyzing code-multiplexed, multi-frequency IFC data. We unfold the successive-interference cancellation (SIC) algorithm into a deep-learning network, where repeated stages of a single multitask network implement iterative signal estimation and interference cancellation that reflect the structural prior of SIC. To mitigate nonlinear signal stretching and amplification, our network recognizes events by predicting bit-level intensity and duration. For multi-frequency impedance profiling, we apply least-squares fitting to the predicted single-frequency real-impedance trace to map the real and imaginary impedance traces at other frequencies. On the cell-bead mixture evaluation dataset, our pipeline resolves overlaps from singlets to triplets reliably, reconstructs impedance-intensity distributions accurately, and enables multi-frequency impedance profiling. As a demonstration of principle, we use our pipeline to perform label-free quantification of basophil activation from code-multiplexed, multi-frequency IFC measurements. Consistent with our previous study, impedance opacity correlates well with activation levels measured by fluorescence flow cytometry. In summary, our study demonstrates the feasibility and utility of a deep-unfolding network that extends code-multiplexed, multi-frequency IFC to label-free single-cell functional assays.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13590582/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149012570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microsecond-pulsed nanocalorimetry: a scalable approach for ultrasensitive heat capacity measurements.","authors":"Hugo Gómez-Torres, Manel Molina-Ruiz, Simone Privitera, Enric Menéndez, Llibertat Abad, Jordi Sort, Olivier Bourgeois, Javier Rodriguez-Viejo, Aitor Lopeandia","doi":"10.1038/s41378-026-01426-7","DOIUrl":"10.1038/s41378-026-01426-7","url":null,"abstract":"<p><p>We introduce a nanocalorimetric technique based on microsecond-pulsed heating (µs-PHnC) that enables high-sensitivity, quasi-isothermal heat capacity measurements on nanoscale samples. Such resolution is critical for exploring thermodynamic signatures in low-dimensional materials, where conventional techniques fall short. By confining thermal excitation to microsecond timescales, this approach minimizes lateral heat diffusion, reduces heat capacity addenda to below 10⁻⁹ J K^-1, and achieves noise densities as low as 75 pJ K⁻¹ √Hz mm⁻², unlocking precise thermodynamic characterization of subnanogram samples in areas as small as 30 × 30 µm². The method delivers exceptional temperature homogeneity, as demonstrated by resolving sharp phase transitions, such as the antiferromagnetic transition in ultrathin CoO films, with unprecedented clarity. Its quasi-static operation is inherently compatible with external stimuli, including magnetic and electric fields, thereby expanding its utility for in-operando thermodynamic studies. The method is scalable in lateral dimension because the microsecond excitation window confines the thermal diffusion length, allowing the effective calorimetric volume to shrink with the device footprint. This advancement establishes a robust and scalable platform for probing thermal phenomena in nanostructured and low-dimensional materials, significantly broadening the scope of nanocalorimetry.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13590478/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149012595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}