Microsystems & Nanoengineering最新文献

{"title":"Graphene MEMS and NEMS.","authors":"Xuge Fan, Chang He, Jie Ding, Qiang Gao, Hongliang Ma, Max C Lemme, Wendong Zhang","doi":"10.1038/s41378-024-00791-5","DOIUrl":"10.1038/s41378-024-00791-5","url":null,"abstract":"<p><p>Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"154"},"PeriodicalIF":7.3,"publicationDate":"2024-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11519522/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522378","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting.","authors":"Muhammad Umair Khan, Deepa Dumbre, Yawar Abbas, Moh'd Rezeq, Anas Alazzam, Nahla Alamoodi, Maryam Khaleel, Baker Mohammad","doi":"10.1038/s41378-024-00796-0","DOIUrl":"https://doi.org/10.1038/s41378-024-00796-0","url":null,"abstract":"<p><p>Energy harvesting from ambient sources present in the environment is essential to replace traditional energy sources. These strategies can diversify the energy sources, reduce maintenance, lower costs, and provide near-perpetual operation of the devices. In this work, a triboelectric nanogenerator (TENG) based on silane-coupled Linde type A/polydimethylsiloxane (LTA/PDMS) is developed for harsh environmental conditions. The silane-coupled LTA/PDMS-based TENG can produce a high output power density of 42.6 µW/cm² at a load resistance of 10 MΩ and operates at an open-circuit voltage of 120 V and a short-circuit current of 15 µA under a damping frequency of 14 Hz. Furthermore, the device shows ultra-robust and stable cyclic repeatability for more than 30 k cycles. The fabricated TENG is used for the physiological monitoring and charging of commercial capacitors to drive low-power electronic devices. Hence, these results suggest that the silane-coupled LTA/PDMS approach can be used to fabricate ultra-robust TENGs for harsh environmental conditions and also provides an effective path toward wearable self-powered microelectronic devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"152"},"PeriodicalIF":7.3,"publicationDate":"2024-10-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11502885/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A high-sensitivity flexible bionic tentacle sensor for multidimensional force sensing and autonomous obstacle avoidance applications.","authors":"Xinyu Liu, Kunru Li, Shuo Qian, Lixin Niu, Wei Chen, Hui Wu, Xiaoguang Song, Jie Zhang, Xiaoxue Bi, Junbin Yu, Xiaojuan Hou, Jian He, Xiujian Chou","doi":"10.1038/s41378-024-00749-7","DOIUrl":"10.1038/s41378-024-00749-7","url":null,"abstract":"<p><p>Bionic tentacle sensors are important in various fields, including obstacle avoidance, human‒machine interfaces, and soft robotics. However, most traditional tentacle sensors are based on rigid substrates, resulting in difficulty in detecting multidirectional forces originating from the external environment, which limits their application in complex environments. Herein, we proposed a high-sensitivity flexible bionic tentacle sensors (FBTSs). Specifically, the FBTS featured an ultrahigh sensitivity of 37.6 N^-1 and an ultralow detection limit of 2.4 mN, which benefited from the design of a whisker-like signal amplifier and crossbeam architecture. Moreover, the FBTS exhibited favorable linearity (R² = 0.98) and remarkable durability (more than 5000 cycles). This was determined according to the improvement in the uniformity of the sensing layer through a high-shear dispersion process. In addition, the FBTS could accurately distinguish the direction of external stimuli, resulting in the FBTS achieving roughness recognition, wind speed detection and autonomous obstacle avoidance. In particular, the ability of autonomous obstacle avoidance was suitably demonstrated by leading a bionic rat through a maze with the FBTS. Notably, the proposed FBTS could be widely applied in tactile sensing, orientation perception, and obstacle avoidance.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"149"},"PeriodicalIF":7.3,"publicationDate":"2024-10-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11491448/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Four ribbons of double-layer graphene suspending masses for NEMS applications.","authors":"Xuge Fan, Chang He, Jie Ding, Sayedeh Shirin Afyouni Akbari, Wendong Zhang","doi":"10.1038/s41378-024-00799-x","DOIUrl":"10.1038/s41378-024-00799-x","url":null,"abstract":"<p><p>Graphene ribbons with a suspended proof mass for nanomechanical systems have been rarely studied. Here, we report three types of nanomechanical devices consisting of graphene ribbons (two ribbons, four ribbons-cross and four ribbons-parallel) with suspended Si proof masses and studied their mechanical properties. The resonance frequencies and built-in stresses of three types of devices ranged from tens of kHz to hundreds of kHz, and from 82.61 MPa to 545.73 MPa, respectively, both of which decrease with the increase of the size of proof mass. The devices with four graphene ribbons featured higher resonance frequencies and spring constants, but lower built-in stresses than two ribbon devices under otherwise identical conditions. The Young's modulus and fracture strain of double-layer graphene were measured to be 0.34 TPa and 1.13% respectively, by using the experimental data and finite element analysis (FEA) simulations. Our studies would lay the foundation for understanding of mechanical properties of graphene ribbons with a suspended proof mass and their potential applications in nanoelectromechanical systems.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"150"},"PeriodicalIF":7.3,"publicationDate":"2024-10-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11493961/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ultra-compact dual-channel integrated CO₂ infrared gas sensor.","authors":"Liyang Feng, Yanxiang Liu, Yi Wang, Hong Zhou, Zhongming Lu, Tie Li","doi":"10.1038/s41378-024-00782-6","DOIUrl":"10.1038/s41378-024-00782-6","url":null,"abstract":"<p><p>Expiratory CO₂ concentrations can directly reflect human physiological conditions, and their detection is highly important in the treatment and rehabilitation of critically ill patients. Existing respiratory gas analyzers suffer from large sizes and high power consumption due to the limitations of the internal CO₂ sensors, which prevent them from being wearable to track active people. The internal and external interference and sensitivity limitations must be overcome to realize wearable respiratory monitoring applications for CO₂ sensors. In this work, an ultra-compact CO₂ sensor was developed by integrating a microelectromechanical system emitter and thermopile detectors with an optical gas chamber; the power consumption of the light source and ambient temperature of the thermally sensitive devices were reduced by heat transfer control; the time to reach stabilization of the sensor was shortened; the humidity resistance of the sensor was improved by a dual-channel design; the light loss of the sensor was compensated by improving the optical coupling efficiency, which was combined with the amplitude trimming network to equivalently improve the sensitivity of the sensor. The minimum size of the developed sensor was 12 mm × 6 mm × 4 mm, and the reading error was <4% of the reading from -20 °C to 50 °C. The minimum power consumption of the sensor was ~33 mW, and the response time and recovery time were 10 s (@1 Hz), and the sensor had good humidity resistance, stability, and repeatability. These results indicate that the CO₂ sensor developed using this strategy has great potential for wearable respiratory monitoring applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"151"},"PeriodicalIF":7.3,"publicationDate":"2024-10-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11494088/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanomechanical thermometry for probing sub-nW thermal transport.","authors":"Sangmin Oh, Nehpal Singh Shekhawat, Osama Jameel, Amit Lal, Chung Hoon Lee","doi":"10.1038/s41378-024-00770-w","DOIUrl":"https://doi.org/10.1038/s41378-024-00770-w","url":null,"abstract":"<p><p>Accurate local temperature measurement at micro and nanoscales requires thermometry with high resolution because of ultra-low thermal transport. Among the various methods for measuring temperature, optical techniques have shown the most precise temperature detection, with resolutions reaching (~10^-9 K). In this work, we present a nanomechanical device with nano-Kelvin resolution (~10^-9 K) at room temperature and 1 atm. The device uses a 20 nm thick silicon nitride (SiN) membrane, forming an air chamber as the sensing area. The presented device has a temperature sensing area >1 mm² for micro/nanoscale objects with reduced target placement constraints as the target can be placed anywhere on the >1 mm² sensing area. The temperature resolution of the SiN membrane device is determined by deflection at the center of the membrane. The temperature resolution is inversely proportional to the membrane's stiffness, as detailed through analysis and measurements of stiffness and noise equivalent temperature (NET) in the pre-stressed SiN membrane. The achievable heat flow resolution of the membrane device is 100 pW, making it suitable for examining thermal transport on micro and nanoscales.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"148"},"PeriodicalIF":7.3,"publicationDate":"2024-10-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11486945/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Tight focusing of fractional-order topological charge vector beams by cascading metamaterials and metalens.","authors":"Lan Ke, Yunyun Yang, Mingmin Zhu, Haomiao Zhou, Yi Chen, Ying Tian, Chenxia Li, Bo Fang, Zhi Hong, Xufeng Jing","doi":"10.1038/s41378-024-00781-7","DOIUrl":"https://doi.org/10.1038/s41378-024-00781-7","url":null,"abstract":"<p><p>Vector beams have attracted widespread attention because of their unique optical properties; in particular, their combination with tight focusing can produce many interesting phenomena. The rise of 3D printing technology provides more possibilities for exploration. In this work, a cascading method involving a metamaterial and a metalens is used to generate a tightly focused field of vector beams in the terahertz band, which is prepared via 3D printing. As a proof-of-concept demonstration, a series of metamaterial modules capable of generating states of different orbital angular momentum are proposed by cascading with a metalens. The experimental results are in good agreement with the simulation results, fully verifying the feasibility of the scheme. The proposed design and fabrication strategy provides a new idea for the tight focusing of terahertz vector beams.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"146"},"PeriodicalIF":7.3,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11484866/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On the design and fabrication of nanoliter-volume hanging drop networks.","authors":"Matthew Wester, Jongwon Lim, Liliana Khaertdinova, Sriya Darsi, Neel Donthamsetti, Glennys Mensing, George Vasmatzis, Panos Anastasiadis, Enrique Valera, Rashid Bashir","doi":"10.1038/s41378-024-00788-0","DOIUrl":"https://doi.org/10.1038/s41378-024-00788-0","url":null,"abstract":"<p><p>Hanging drop cultures provide a favorable environment for the gentle, gel-free formation of highly uniform three-dimensional cell cultures often used in drug screening applications. Initial cell numbers can be limited, as with primary cells provided by minimally invasive biopsies. Therefore, it can be beneficial to divide cells into miniaturized arrays of hanging drops to supply a larger number of samples. Here, we present a framework for the miniaturization of hanging drop networks to nanoliter volumes. The principles of a single hanging drop are described and used to construct the fundamental equations for a microfluidic system composed of multiple connected drops. Constitutive equations for the hanging drop as a nonlinear capacitive element are derived for application in the electronic-hydraulic analogy, forming the basis for more complex, time-dependent numerical modeling of hanging drop networks. This is supplemented by traditional computational fluid dynamics simulation to provide further information about flow conditions within the wells. A fabrication protocol is presented and demonstrated for creating transparent, microscale arrays of pinned hanging drops. A custom interface, pressure-based fluidic system, and environmental chamber have been developed to support the device. Finally, fluid flow on the chip is demonstrated to align with expected behavior based on the principles derived for hanging drop networks. Challenges with the system and potential areas for improvement are discussed. This paper expands on the limited body of hanging drop network literature and provides a framework for designing, fabricating, and operating these systems at the microscale.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"147"},"PeriodicalIF":7.3,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11484691/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Neuronal activity in the ventral tegmental area during goal-directed navigation recorded by low-curvature microelectrode arrays.","authors":"Wei Xu, Mixia Wang, Gucheng Yang, Fan Mo, Yaoyao Liu, Jin Shan, Luyi Jing, Ming Li, Juntao Liu, Shiya Lv, Yiming Duan, Meiqi Han, Zhaojie Xu, Yilin Song, Xinxia Cai","doi":"10.1038/s41378-024-00778-2","DOIUrl":"https://doi.org/10.1038/s41378-024-00778-2","url":null,"abstract":"<p><p>Navigating toward destinations with rewards is a common behavior among animals. The ventral tegmental area (VTA) has been shown to be responsible for reward coding and reward cue learning, and its response to other variables, such as kinematics, has also been increasingly studied. These findings suggest a potential relationship between animal navigation behavior and VTA activity. However, the deep location and small volume of the VTA pose significant challenges to the precision of electrode implantation, increasing the uncertainty of measurement results during animal navigation and thus limiting research on the role of the VTA in goal-directed navigation. To address this gap, we innovatively designed and fabricated low-curvature microelectrode arrays (MEAs) via a novel backside dry etching technique to release residual stress. Histological verification confirmed that low-curvature MEAs indeed improved electrode implantation precision. These low-curvature MEAs were subsequently implanted into the VTA of the rats to observe their electrophysiological activity in a freely chosen modified T-maze. The results of the behavioral experiments revealed that the rats could quickly learn the reward probability corresponding to the left and right paths and that VTA neurons were deeply involved in goal-directed navigation. Compared with those in no-reward trials, VTA neurons in reward trials presented a significantly greater firing rate and larger local field potential (LFP) amplitude during the reward-consuming period. Notably, we discovered place fields mapped by VTA neurons, which disappeared or were reconstructed with changes in the path-outcome relationship. These results provide new insights into the VTA and its role in goal-directed navigation. Our designed and fabricated low-curvature microelectrode arrays can serve as a new device for precise deep brain implantation in the future.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"145"},"PeriodicalIF":7.3,"publicationDate":"2024-10-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11471829/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142469853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Acoustic black hole effect enhanced micro-manipulator.","authors":"Qiu Yin, Haoyong Song, Zhaolong Wang, Zhichao Ma, Wenming Zhang","doi":"10.1038/s41378-024-00789-z","DOIUrl":"10.1038/s41378-024-00789-z","url":null,"abstract":"<p><p>Microparticle manipulation is a critical concern across various fields including microfabrication, flexible electronics and tissue engineering. Acoustic-activated sharp structures have been designed as simple and flexible tools to manipulate microparticles with their good compatibility, fast response, and broad tunability. However, there still lacks rational acoustic-structure design for effective energy concentration at the acoustic-activated sharp structures for microparticle manipulation. Here, we present the acoustic black hole (ABH) effect as enhancement for the acoustic micro-manipulator. It provides great reliability, simplicity and ease of use, supporting custom design of high-throughput patterning modes. Moreover, compared to commonly used configurations, such as cylindrical or conical microneedles, those microneedles with ABH profile exhibit superior acoustic energy focusing at the tip and induce stronger acoustofluidic effects. The average acoustic flow velocity induced by the ABH microneedle is 154 times greater than that of the conical one and 45 times greater than that of the cylindrical microneedle. Besides, the average acoustic radiation force (ARF) produced by the ABH microneedle against acrylic microparticles is about 319 times greater than that of the cylindrical one and 16 times greater than that of the conical one. These results indicate that ABH design significantly enhances microparticle manipulation. We demonstrate this concept with ABH effect enhanced microparticle manipulation and study the parameters influencing its performance including operating frequency, operating voltage and particle diameter. Furthermore, considering the flexibility of this system, we employ it for various patterning and high-throughput microparticle manipulation. This work paves the way for controllable microparticle manipulation, holding great potential for applications in microfabrication and biomedicine.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"144"},"PeriodicalIF":7.3,"publicationDate":"2024-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11470035/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142406545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}