Microsystems & Nanoengineering最新文献

{"title":"Millimeter-thick microsupercapacitors with linear thickness-scaling of energy and power densities via multilayer electron highway architecture.","authors":"Yifeng Lu, Congming Li, Xiangming Li, Gangqiang Liu, Lifang Qiao, Hongmiao Tian, Chunhui Wang, Xiaoliang Chen, Jinyou Shao","doi":"10.1038/s41378-026-01266-5","DOIUrl":"10.1038/s41378-026-01266-5","url":null,"abstract":"<p><p>The relentless miniaturization of microelectronics demands energy storage systems with ultrahigh energy and power densities in ultracompact footprints. Microsupercapacitors (MSCs) are promising due to their rapid charge-discharge capabilities, but conventional electrode architectures suffer from a trade-off between energy and power density as thickness increases, exacerbated by electron transport resistance and mechanical instability. Here, we present a paradigm-shifting, truly millimeter-thick (up to 1.2 mm), high-aspect-ratio (7:1), three-dimensional microelectrode architecture that fundamentally decouples electron transport distance from electrode thickness. By roll-to-roll calendering of alternating multilayer current collectors and electrode films, we achieve precisely aligned multilayer structures with total thicknesses exceeding 1 mm, specifically demonstrating a 1.2 mm-thick, 9-layer device in an ultracompact footprint, followed by precision laser engraving to define interdigitated gaps below 180 µm, establishing a parallel electron transport network. Therefore, the architecture enables linear scaling of both energy and power density with thickness, delivering a peak energy density of 1733 µWh cm^-2, comparable to that of 3D micro-batteries, and a peak power density of 153 mW cm^-2, surpassing that of the state-of-the-art microsupercapacitors, alongside exceptional stability demonstrated by 95% capacitance retention after 10,000 cycles at 2000 mV s^-1. Roll-to-roll manufacturing combined with laser engraving enables large-area, industrial-scale production of microsupercapacitors, resolving the persistent trilemma among electrode thickness, microscale resolution, and mechanical stability. This advancement delivers a transformative solution for next-generation micro-energy systems achieving high energy density, high power density, and strong mechanical stability.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13478513/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148761467","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A tumor-on-a-chip model reveals and targets reciprocal macrophage-NK cell crosstalk to advance immunotherapy screening.","authors":"Xiahe Han, Qiurui Chen, Kangshuai Li, Jing Wu, Aoling Wang, Yunting Wang, Huajun Zhao, Wu Liu","doi":"10.1038/s41378-026-01401-2","DOIUrl":"10.1038/s41378-026-01401-2","url":null,"abstract":"<p><p>Effective cancer immunotherapy is hindered by immunosuppressive crosstalk within the tumor microenvironment. We engineered a tumor immune microenvironment-on-a-chip (TIMoC) that recapitulates the vascularized, hypoxic, and spatially organized niche of human solid liver tumors. We employed TIMoC to dissect the reciprocal interaction between macrophages and natural killer (NK) cells. Macrophages induced NK cell dysfunction, while dysfunctional NK cells promoted M2 macrophage polarization. This bidirectional impairment created a self-perpetuating immunosuppressive loop. TIMoC served as an in vitro screening tool, confirming the limited efficacy of TIGIT blockade in a multicellular context and revealing synergistic anti-tumor activity for combinations of a macrophage-reprogramming agent (resiquimod) with NK cell-targeting antibodies. By incorporating patient-derived organotypic tumor spheroids and autologous immune cells, the personalized TIMoC platform modeled patient-specific responses and evaluated effective drug combinations, demonstrating its potential to guide precision immunotherapy. This work elucidates a key immunosuppressive axis and introduces a versatile platform for rationally designing combination immunotherapies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13478628/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148765195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Concept and simulation of a MEMS cycloidal mass analyzer.","authors":"Haobin Wang, Han Wang, Chen Shen, Jie Sheng, Chunjing Xu, Youjiang Liu, Chilai Chen","doi":"10.1038/s41378-026-01409-8","DOIUrl":"https://doi.org/10.1038/s41378-026-01409-8","url":null,"abstract":"<p><p>This study investigates the miniaturization pathway of cycloidal mass spectrometry, a technique distinguished by its inherent perfect-focusing properties, and introduces a planar, stacked-layer MEMS-based cycloidal mass analyzer. A comprehensive numerical analysis was conducted to elucidate the effects of key design parameters, namely electric sector geometry, electrode geometry, and operating vacuum, on ion focusing and mass separation performance. The results indicate that appropriate optimization of geometric dimensions and electrode arrangement density effectively mitigates electric field distortion, thereby improving ion beam focusing and resolution. Configured with an electric sector size of 32.60 mm × 41.10 mm × 6.85 mm and 83 electrode pairs, and operated under a vacuum of 1 × 10^-3 Pa, the device achieves full width at half maximum (FWHM) values of approximately 0.03 Da for light ions (H₂⁺, He⁺) and about 0.40 Da for heavier ions (Ar⁺, CO₂⁺). Across the m/z range of 2-50 Da, the analyzer maintains a resolution greater than 99 and an ion detection efficiency exceeding 92%, demonstrating robust separation and transmission performance over a wide mass-to-charge range.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13476432/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148760396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nano-thick freestanding and reusable epidermal electronics via edge-supporting strategy.","authors":"Zehan Liu, Shengzhao Wang, Yina He, Chuchao Wang, Qihong Wu, Ran Yang, Xihan Wang, Weifeng Zhang, Weiqiang Hong, Yuan Gao, Yi Li, Mengxi Wu, Junshan Liu","doi":"10.1038/s41378-026-01422-x","DOIUrl":"https://doi.org/10.1038/s41378-026-01422-x","url":null,"abstract":"<p><p>Nano-thick epidermal electronics have extraordinary lightweight and conformability characteristics, thus enable high-quality signal acquisition and imperceptible wearing experience. However, reducing the device thickness to nanoscale makes the rigidity extremely low thus the device curls spontaneously, imposing unprecedented challenges to the device fabrication, handling and recycling. To resolve the dilemma of epidermal electronics, we propose an edge-supporting strategy that maintains the benefits of nano thickness, meanwhile obtains practicality and reusability via reinforced edge scaffold. The nano-thick (~500 nm thick) core area of the device provides perfect conformal, firm, and burdenless contact with human skin. On the other hand, the edge scaffold (~5 μm thick) plays an important role in protecting internal fragile film from external forces and providing rigid support during handling and recycling. In addition, the edge scaffold enables spontaneous release of nano-thick electronics from the substrate in water, getting rid of the use of sacrificial layers and etchants. We demonstrate the use of the edge-supporting strategy to develop a physiological electrode with low impedance less than 3.6 kΩ at 1 kHz, a resistance-type temperature sensor with fast response time less than 0.5 ms and a nanoengineering-based pressure sensor with high sensitivity of 62.9 kPa^-1. Our work provides an effective method to handle and release nano-thick electronics without using external stamps, thereby enabling truly practical applications of ultrathin flexible electronics in the fields of wearable technology, healthcare and so on.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13476273/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148758749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"All-optical strategy for high-speed and subcellular precision drug delivery using Airy beams.","authors":"Zhelin Qu, Kunpeng Wang, Yifei Chen, Shengyong Ding, Chao Feng, Tianli Wu, Jian Zhang, Yao Zhang, Xian Zhao, Jun-Lei Wang","doi":"10.1038/s41378-026-01395-x","DOIUrl":"https://doi.org/10.1038/s41378-026-01395-x","url":null,"abstract":"<p><p>Drug delivery strategies with excellent spatiotemporal controllability and biocompatibility hold exciting prospects in personalized medicine and biopharmaceuticals. Among them, all-optical delivery strategies have attracted significant attention due to their low invasiveness and high positioning accuracy. However, current all-optical schemes predominantly rely on conservative optical gradient force trapping or transient scattering forces propulsion, which cannot sustain stable driving and limit delivery speed. Here, we present an all-optical delivery strategy based on Airy beam, enabling high-speed and subcellular-precision delivery through the synergistic regulation of gradient-scattering forces. The dominant scattering force of Airy beams propels drug carriers at speeds exceeding 400 µm/s, while the gradient force ensures a subcellular delivery precision of ~1 µm during high-speed propulsion. Quantitative measurements using a custom axial imaging module reveal at least a 7-fold speed enhancement over conventional all-optical methods. When applied to anticancer drug delivery, the localized mechanical forces generated by high-speed propulsion enhance stable adhesion of carriers to the cell membrane, thereby promoting drug uptake and accelerating tumor cells apoptosis. This work establishes Airy beams as a powerful tool for drug delivery, opening a new avenue for high-performance all-optical delivery platforms.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13476249/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148765136","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation of area-dependent high-power failure of film bulk acoustic resonators.","authors":"Yiran Wei, Danyu Mu, Wei Wang, Feng Gao, Weipeng Xuan, Hao Jin, Jikui Luo, Shurong Dong","doi":"10.1038/s41378-026-01418-7","DOIUrl":"https://doi.org/10.1038/s41378-026-01418-7","url":null,"abstract":"<p><p>Film bulk acoustic resonators (FBARs) are widely used in radio frequency (RF) filters for wireless communication because of their high operating frequency and high quality factor. With the increase of high-power applications, ensuring device robustness has become a critical challenge. This study presents an investigation into the high-power failure behaviors and mechanisms of FBARs, specifically examining the role of active area, film thickness, and geometry. Experimental results demonstrate that small-area FBARs exhibit distinct failure characteristics compared to large-area devices. Small-area devices are governed by progressive spallation at electrode edges, which is induced by high-temperature oxidation and stress concentration, whereas large-area FBARs are prone to sudden structural fracture or short-circuiting caused by excessive thermal stress. Crucially, the study reveals a thickness-dependent transition in large-area devices, where short-circuiting and structural fracture correspond to distinct stress-severity regimes. Furthermore, dynamic evaluations demonstrate that these FBARs preserve strict electrical linearity right up to the point of catastrophic collapse. Based on these phenomenological findings, a thermo-mechanical coupling mechanism is proposed that goes beyond the conventional thermal-only model. Finally, we propose new design guidelines to enhance the power handling capability of FBAR devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13476231/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148761876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Noninvasive biophysical modulations of Piezo ion channels.","authors":"Yunfan Pan, Haosheng Chen, Luke P Lee","doi":"10.1038/s41378-026-01320-2","DOIUrl":"https://doi.org/10.1038/s41378-026-01320-2","url":null,"abstract":"<p><p>Piezo channels are integral to numerous physiological functions: Piezo 1 modulates blood pressure through shear stress sensing and plays a role in cellular development and epigenetic processes. Conversely, Piezo 2 is implicated in sensory perceptions, including tactile sensation, balance, and nociception. Piezo channels are biophysical mechanosensitive ion channels that convert mechanical forces into electrical signals within cells. In this review, we investigate the recent advancements in the application of noninvasive biophysical techniques to modulate Piezo ion channels, thereby affecting diverse physiological functions. We also explore different electromechanical modulation methods for Piezo channels and discuss their significance. Furthermore, we emphasize various optical and magnetic techniques for modulating Piezo channels. Finally, we examine the potential applications of Piezo channel modulation for the treatment of neurodegenerative diseases, an area with significant potential to impact healthcare. The noninvasive activation of Piezo ion channels through mechanobiology holds significant potential for advancements in healthcare and for understanding and addressing neurodegenerative and degenerative diseases.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13473602/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148764814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Thermally-modulated dissipation dilution in 2D NEMS resonators with explicit model and temperature-stable damping.","authors":"Pengcheng Zhang, Luming Wang, Jiankai Zhu, Yueyang Jia, Bo Xu, Zenghui Wang, Rui Yang","doi":"10.1038/s41378-026-01415-w","DOIUrl":"10.1038/s41378-026-01415-w","url":null,"abstract":"<p><p>Strain-diluted dissipation has emerged as a promising technique to modulate the quality (Q) factor of resonant nanoelectromechanical systems (NEMS). However, comprehensive understanding and precise control of this effect under varying temperatures have remained elusive. Here we investigate the temperature-modulated dissipation dilution mechanisms in two-dimensional (2D) NEMS resonators. We develop an explicit temperature-dependent dissipation dilution model highlighting the roles of thermally-induced strain and temperature fluctuations during vibration, which well captures experimental observations: with temperature increasing from 77 K to 355 K, Q factor in graphene resonators first decreases and then increases, while that in molybdenum disulfide (MoS₂) resonators monotonically decreases. Furthermore, based on the model, we design a graphene-MoS₂ heterostructure NEMS resonator with near-zero effective thermal expansion, which experimentally exhibits high temperature stability in both frequency and Q factor. Our results advance the understanding of dissipation dilution mechanisms and pave the way for developing thermally-stable resonant transducers and logic components.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13470205/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148726728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Amplification of computational power by the multiplication of bacteria exploring microfluidic networks encoding mathematical problems.","authors":"Ayyappasamy Sudalaiyadum Perumal, Falco C M J M van Delft, Giulia Ippoliti, Ondřej Kašpar, Viola Tokárová, Monalisha Nayak, Matthew Cho, Jessica Li, Anja van Langen-Suurling, Charles de Boer, Frank Dirne, Dan V Nicolau, Dan V Nicolau","doi":"10.1038/s41378-026-01341-x","DOIUrl":"10.1038/s41378-026-01341-x","url":null,"abstract":"<p><p>Computational resources required for solving NP-complete problems grow exponentially with a polynomial increase in problem size. This exponentially increasing computational resource is runtime for sequential electronic computers and space for massively parallel DNA computing. Here, we report the proof of concept of a computer, whose operation consists in the exploration by motile bacteria of a microfluidic network encoding an algorithm for solving the Subset Sum Problem (SSP)-a classic NP-complete problem. Significantly, this computer performs operations combinatorially, via natural multiplication of bacteria operating as biological CPUs, translating into the continuous amplification of computational power, which grows seamlessly to match the problem size. A scaling analysis identifies the point where biocomputing with multiplying bacteria is expected to outperform electronic computers. The combinatorial, design-driven low error operation, low energy requirement for computing, and exponentially growing computational resources suggest that bacterial-driven biocomputation using microfluidic networks holds the potential to scale up successfully.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13462130/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148713059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A flexible impedance-based microsystem for multi-parameter sensing in ionic solutions.","authors":"Haoxin Hu, Wenlin Xiao, Yubin Ma, Lifeng Huang, Ke Xiao, Wei Xu","doi":"10.1038/s41378-026-01404-z","DOIUrl":"10.1038/s41378-026-01404-z","url":null,"abstract":"<p><p>We present a flexible multi-sensor (FMS) microsystem for simultaneous measurement of flow, temperature, and ionic conductivity in liquid environments. The FMS is implemented on a 16 μm thick polyimide (PI) substrate and integrates electrochemical impedance (EI)-based thermal flow sensing, resistive temperature sensing, and impedance-based conductivity sensing with a designed analog-front-end (AFE) CMOS IC. The AFE enables precise constant-temperature control of the flow-sensor microheater and implements a high-SNR impedance readout based on a current-balanced instrumentation amplifier (CBIA) architecture, allowing sensitive detection of small impedance variations induced by flow and ionic conductivity. As a result, the EI-based thermal flow sensor achieves a measurement range up to 1200 μm/s, with a system sensitivity of 0.69 mV/(μm/s) and a detection limit of 3.36 μm/s. The integrated temperature sensor exhibits a linear response over 10-40 °C with an accuracy of ±0.13 °C, while thermal crosstalk from the flow-sensor microheater is suppressed below 0.1 °C at flow velocities above 150 μm/s. Ionic conductivity is measured over a range of 5-35 mS/cm using the same impedance readout circuitry, and temperature compensation maintains the conductivity measurement error below 3% across varying thermal conditions. By integrating flow, temperature, and conductivity sensing within a single flexible microsystem, this work demonstrates a compact, low-noise, and portable platform for multi-parameter sensing of ionic solutions, well suited for microfluidic and biomedical applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13434660/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148670012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}