Microsystems & Nanoengineering最新文献

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Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality. 石墨烯支持的硅基MEMS/NEMS:一种具有大可调性和功能的方案。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-09 DOI: 10.1038/s41378-025-00960-0
Mengqi Fu, Zhan Shi, Bojan Bošnjak, Robert H Blick, Elke Scheer, Fan Yang
{"title":"Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality.","authors":"Mengqi Fu, Zhan Shi, Bojan Bošnjak, Robert H Blick, Elke Scheer, Fan Yang","doi":"10.1038/s41378-025-00960-0","DOIUrl":"10.1038/s41378-025-00960-0","url":null,"abstract":"<p><p>Integration of graphene in silicon-based micro-/nanoelectromechanical systems (MEMS/NEMS) marries the robustness of silicon-based materials with the exceptional physical properties of graphene, drastically enhancing the system's regulation performance which now is key for many advanced applications in nanotechnology. Here, we experimentally demonstrate and theoretically analyze a powerful on-chip integration principle consisting of a hybrid graphene/silicon nitride membrane with metallic leads on top that enables an extremely large static and dynamic parameter regulation. When a static voltage is applied to the leads of the integrated structure, a spatially confined localized electrothermomechanical (ETM) effect results in ultra-wide frequency tuning, deformation (buckling transition) and regulation of the mechanical properties. Moreover, by injecting an alternating voltage to the leads, we can excite the resonator vibrating even far beyond its linear regime without a complex and space consuming actuation system. Our results prove that the scheme provides a compact integrated system possessing mechanical robustness, high controllability, and fast response. It not only expands the limit of the application range of MEMS/NEMS devices, but also enables the further miniaturization of the device. The graphene integrated MEMS/NEMS empowered by graphene: a scheme for strong enhancements of tunability and functionality of silicon based device device consists of a hybrid graphene/silicon-nitride membrane with metallic leads that enables ultra-wide frequency tuning, spatial deflection, mechanical properties tuning and on-surface actuation.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"116"},"PeriodicalIF":7.3,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12149320/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144258475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
pH-Inhibited Fenton etching of gold nanobipyramids: a multicolor approach for enhanced urea detection. ph抑制Fenton蚀刻金纳米金字塔:一种增强尿素检测的多色方法。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-05 DOI: 10.1038/s41378-025-00931-5
Ahmed Y Elbalaawy, Min-Jae Kim, Samy M Shaban, Eslam Hafez, Mohamed R Elmasry, Dong-Hwan Kim
{"title":"pH-Inhibited Fenton etching of gold nanobipyramids: a multicolor approach for enhanced urea detection.","authors":"Ahmed Y Elbalaawy, Min-Jae Kim, Samy M Shaban, Eslam Hafez, Mohamed R Elmasry, Dong-Hwan Kim","doi":"10.1038/s41378-025-00931-5","DOIUrl":"10.1038/s41378-025-00931-5","url":null,"abstract":"<p><p>This study presents an innovative urea detection method utilizing pH-controlled Fenton etching of gold nanobipyramids (AuNBPs), offering a multicolor visual response. By leveraging the urease-catalyzed hydrolysis of urea, which releases ammonia and raises pH, the Fenton reaction is inhibited, reducing the etching of AuNBPs. This approach enables a highly sensitive and distinct multichromatic response across a wide range of urea concentrations, particularly at low target levels. The solution-based sensor achieved an exceptionally low detection limit of 0.098 μM, surpassing existing colorimetric urea biosensors. Furthermore, embedding the sensor in an agarose hydrogel matrix to create a solid-state format resulted in a detection limit of 0.2 μM. Real-world validation demonstrated high recovery rates in urine samples, further affirming the sensor's reliability. This multicolor biosensing platform offers a robust tool for point-of-care diagnostics, facilitating accurate and user-friendly urea detection.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"114"},"PeriodicalIF":7.3,"publicationDate":"2025-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12141652/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144234533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-order near-field imaging of low-dimensional materials at infrared wavelengths. 红外波长下低维材料的高阶近场成像。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-06-05 DOI: 10.1038/s41378-025-00953-z
Shuhao Zhao, Peirui Ji, Fei Wang, Shaobo Li, Guofeng Zhang, Tao Liu, Shuming Yang
{"title":"High-order near-field imaging of low-dimensional materials at infrared wavelengths.","authors":"Shuhao Zhao, Peirui Ji, Fei Wang, Shaobo Li, Guofeng Zhang, Tao Liu, Shuming Yang","doi":"10.1038/s41378-025-00953-z","DOIUrl":"10.1038/s41378-025-00953-z","url":null,"abstract":"<p><p>Near-field imaging provides insight into the fundamental light-matter interactions on a nanometer scale. Scattering-type scanning near-field optical microscopy (s-SNOM) is a powerful technique capable of overcoming the diffraction limit and achieving spatial resolutions below 10 nm (sub-10 nm). However, constrained by the working mechanisms, the signal-to-noise ratio of the imaging is highly affected by undesired background scattering light, which is found to be associated with the optical mode and excitation wavelength, especially for samples with a large specific surface area. Here, we propose a high-resolution method with high-order near-field modes at the infrared range to measure low-dimensional materials. With this technique, we reveal the excitation and propagation of the surface plasmon polaritons in graphene and carbon nanotubes, which was impossible with the low-order imaging approach. Besides, the imaging quality for gold nanoparticles on gold thin film is much better than the AFM results. This paper offers an advanced approach for high-resolution measurement of low-dimensional materials with s-SNOM, owning great potential for sensitive nanoscale imaging.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"115"},"PeriodicalIF":7.3,"publicationDate":"2025-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12141435/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144234532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Compact Hydraulic Head Auto-Regulating Module (CHARM) for long-term constant gravity-driven flow microfluidics. 一个紧凑的液压头自动调节模块(CHARM),用于长期恒定的重力驱动流微流体。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-29 DOI: 10.1038/s41378-025-00968-6
Fan Xue, Ulri N Lee, Joel Voldman
{"title":"A Compact Hydraulic Head Auto-Regulating Module (CHARM) for long-term constant gravity-driven flow microfluidics.","authors":"Fan Xue, Ulri N Lee, Joel Voldman","doi":"10.1038/s41378-025-00968-6","DOIUrl":"10.1038/s41378-025-00968-6","url":null,"abstract":"<p><p>Fluid flow is a ubiquitous aspect of microfluidic systems. Gravity-driven flow is one microfluidic flow initiation and maintenance mechanism that is appealing because it is simple, requires no external power source, and is easy to use. However, the driving forces created by hydraulic head differences gradually decrease during operation, resulting in decreasing flow rates that are undesirable in many microfluidic applications such as perfusion culture, droplet microfluidics, etc. Existing methods to maintain a constant gravity-driven flow either require additional control equipment, involve complex fabrication or operation, are incompatible with miniaturization, or introduce interfaces that lack robustness. Here we tackled those problems by introducing a 3D-printed compact hydraulic head auto-regulating module that automatically maintains a constant fluid level at the microfluidic inlet port without human intervention. Our module successfully maintained a constant hydraulic head for more than 24 h, with the operation time solely limited by the reservoir capacity. A comparison with the conventional gravity-driven flow demonstrated our device's capability to produce a more stable flow over the perfusion period. Overall, our module creates a simple, robust solution to produce a stable flow rate in gravity-driven flow systems. The compactness of the design allows easy parallelization and compatibility with high-throughput applications, and the biocompatibility of the materials enables the device's use with life science applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"113"},"PeriodicalIF":7.3,"publicationDate":"2025-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12122956/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144182858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Onboard visual micro-servoing on robotic surgery tools. 机器人手术工具的机载视觉微伺服。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-29 DOI: 10.1038/s41378-025-00955-x
Xu Chen, Michail E Kiziroglou, Eric M Yeatman
{"title":"Onboard visual micro-servoing on robotic surgery tools.","authors":"Xu Chen, Michail E Kiziroglou, Eric M Yeatman","doi":"10.1038/s41378-025-00955-x","DOIUrl":"10.1038/s41378-025-00955-x","url":null,"abstract":"<p><p>Precision motion actuation is a key technology for miniature medical robotics in a variety of applications, such as optical fibre-based diagnosis and intervention tools. Conventional inductive actuation mechanisms are challenging to scale down. Piezoelectric materials offer a scalable, precise, fast and high-force method but at a limited displacement range. In previous work, the combination of piezoelectric beams (benders) with compliant motion translation structures has been shown to be promising for robotic micro-actuation. In this paper, this approach is employed to implement a three degrees of freedom delta robot, suitable for catheter, diagnostic optical fibre and microsurgery tool manipulation. The fabrication process combines additive manufacturing, origami structuring and piezoelectric beam assembly. Closed-loop control is implemented using a new, on-board visual feedback concept. In contrast to typical optical motion systems, the fully internal visual feedback offers system compactness with precise and reliable camera-to-marker geometry definition. By employment of this method, a delta robot with motion accuracy of 7.5 μm, resolution of 10 μm and 8.1 μm precision is demonstrated. The robot is shown to follow a range of programmable trajectories under these specifications, and to compensate for externally applied forces typically expected during microsurgery manipulations. This is the first, to our knowledge, demonstration of micromotion control using internal visual feedback, and it opens up the way for high-resolution compact microrobots.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"112"},"PeriodicalIF":7.3,"publicationDate":"2025-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12122923/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144181115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Suspended graphene-based NEMS accelerometers with direct electrical readout. 悬挂式石墨烯NEMS加速度计,具有直接电子读数。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-28 DOI: 10.1038/s41378-025-00969-5
Jie Ding, Chang He, Hongliang Ma, Wendong Zhang, Xuge Fan
{"title":"Suspended graphene-based NEMS accelerometers with direct electrical readout.","authors":"Jie Ding, Chang He, Hongliang Ma, Wendong Zhang, Xuge Fan","doi":"10.1038/s41378-025-00969-5","DOIUrl":"10.1038/s41378-025-00969-5","url":null,"abstract":"<p><p>Atomically thin suspended graphene can be used as NEMS transducers for ultra-small and high-performance sensors due to its excellent mechanical and electrical properties. Most applications of suspended graphene in NEMS devices are limited to pressure sensors, resonators, switches, etc. Graphene-based NEMS accelerometers have rarely been reported, with limitations such as mechanical robustness, life span and device yield, thereby limiting their practical applications. Here, we reported piezoresistive graphene-based NEMS accelerometers with high manufacturing yield, excellent mechanical robustness and stability, and long life span, in which the width of trenches for suspending graphene membranes was only 1 µm and fully-clamped suspended double-layer graphene membranes with an attached SiO<sub>2</sub>/Si proof mass was used as acceleration transducer. The impact of geometrical sizes of the proof mass attached to the suspended graphene membranes on the output signal of devices has been studied. These findings would contribute to rapid developments and practical applications of ultra-small and high-performance graphene-based NEMS accelerometers and related devices.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"111"},"PeriodicalIF":7.3,"publicationDate":"2025-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12119843/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144174220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Rapid antimicrobial susceptibility tests performed by self-diluting microfluidic chips for drug resistance studies and point-of-care diagnostics. 通过自稀释微流控芯片进行耐药性研究和即时诊断的快速抗菌药物敏感性试验。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-28 DOI: 10.1038/s41378-025-00938-y
Jenny Ka-Hei Wat, Miao Xu, Lang Nan, Haisong Lin, Kelvin Kai-Wang To, Ho Cheung Shum, Sammer Uɩ Hassan
{"title":"Rapid antimicrobial susceptibility tests performed by self-diluting microfluidic chips for drug resistance studies and point-of-care diagnostics.","authors":"Jenny Ka-Hei Wat, Miao Xu, Lang Nan, Haisong Lin, Kelvin Kai-Wang To, Ho Cheung Shum, Sammer Uɩ Hassan","doi":"10.1038/s41378-025-00938-y","DOIUrl":"10.1038/s41378-025-00938-y","url":null,"abstract":"<p><p>Antimicrobial resistance (AMR) is a global public health issue. Rapid and accurate antimicrobial susceptibility tests (AST) on bacteria isolates would facilitate appropriate choice of antibiotics, in which patients receive appropriate treatment and the emergence of multidrug-resistant organisms could be prevented simultaneously. In this study, we have developed a microfluidic device named Self Dilution for Faster Antimicrobial Susceptibility Testing (SDFAST). This SlipChip-based device consists of two layers of microchips, allowing injection of bacterial suspension and antibiotics by simply connecting the two chips. By slipping one microchip against another in a single press of the microchip, the antibiotics can be diluted within seconds and be well mixed with bacterial samples. By combining SDFAST with a water-soluble tetrazolium salt-8 (WST-8) assay, a range of clinically prevalent bacteria, including Acinetobacter baumannii, Escherichia coli, Klebsiella pneumoniae, and Staphylococci species, were tested under various antibiotics. Color analysis after 4-6 h of incubation showed an abrupt change in the WST-8 color of certain wells with diluted antibiotics, proving that instrument-free and immediate identification of minimum inhibitory concentration (MIC) could be achieved. The testing on 51 clinical isolates had an agreement of 92%, proving the accuracy of our method. These results validated its advantages of simple operation, rapid testing, and low sample consumption comparing to conventional methods, which require 16-24 h of incubation. Therefore, our method shows great potential to be further developed into a medical instrument for automated medical testing and point-of-care diagnosis.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"110"},"PeriodicalIF":7.3,"publicationDate":"2025-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12117033/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy. 基于化学和机械协同作用的BEOL金属连接件抛光机理研究。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-27 DOI: 10.1038/s41378-025-00883-w
Zhiqiang Tian, Shizhao Wang, Rui Li, Xiang Sun, Wei Shen, Sheng Liu
{"title":"Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy.","authors":"Zhiqiang Tian, Shizhao Wang, Rui Li, Xiang Sun, Wei Shen, Sheng Liu","doi":"10.1038/s41378-025-00883-w","DOIUrl":"10.1038/s41378-025-00883-w","url":null,"abstract":"<p><p>Chemical mechanical polishing (CMP) is the sole process capable of achieving the required flatness and surface roughness for photolithography without any obvious distortion in the multilevel metal interconnects. As semiconductor manufacturing advances to the next process node, the introduction of new materials and structures has proposed higher performance standards for polishing slurries, resulting in the slurry composition becoming increasingly critical to the overall polishing process. In this work, ReaxFF-based molecular dynamics (MD) is employed to investigate the copper (Cu) CMP process in various slurries, aiming to uncover the chemical interactions of different components and the atomistic mechanisms involved in Cu atom removal. The results demonstrate that the presence of H<sub>2</sub>O<sub>2</sub> cannot only directly oxidize the Cu atoms on the substrate surface, but also inhibit the adsorption of H<sub>2</sub>O on the Cu surface and promote the dissociation of the adsorbed H<sub>2</sub>O to indirectly oxidize the Cu atoms. The Cu complexes Cu-C<sub>2</sub>H<sub>5</sub>O<sub>2</sub>N and Cu-H<sub>2</sub>C<sub>2</sub>O<sub>4</sub> are generated during the reaction due to the addition of glycine and oxalic acid, respectively. The oxidation of H<sub>2</sub>O<sub>2</sub> and the complexation of glycine and oxalic acid significantly enhance the Cu removal. Furthermore, Cu atoms tend to be removed in the form of clusters, and the removal rate is the highest in the mixed solution of H<sub>2</sub>O<sub>2</sub> and glycine. The surface roughness after polishing is 0.082 nm, which closely aligns with the atomic force microscopy (AFM) experimental data of 0.104 nm. This work sheds light on the role of different components in the polishing slurry, which is of great significance to the design of the CMP slurry components for more advanced process nodes.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"109"},"PeriodicalIF":7.3,"publicationDate":"2025-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12116732/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration. 一种用于射频集成的晶圆级密封硅腔微声平台。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-27 DOI: 10.1038/s41378-025-00958-8
Jiashuai Xu, Zijun Ren, Fangsheng Qian, Junyan Zheng, Yansong Yang
{"title":"A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration.","authors":"Jiashuai Xu, Zijun Ren, Fangsheng Qian, Junyan Zheng, Yansong Yang","doi":"10.1038/s41378-025-00958-8","DOIUrl":"10.1038/s41378-025-00958-8","url":null,"abstract":"<p><p>This study presents a wafer-level sealed silicon cavity (SSC) microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator (C-SOI) wafers for the 5G/6G wireless communication system. The proposed SSC platform features an extremely smooth suspended membrane with adjustable thickness, flexible cavity shapes with high density, self-formed acoustic wave confinement steps, stable temperature coefficient of frequency (TCF), and highly integrated compatibility with complementary metal-oxide semiconductor (CMOS). A surface smoothing method based on wet oxidation for SSC wafers is presented, which achieves a root mean square (RMS) roughness on the cavity surface of 1.5 nm for the first time. Based on the presented SSC platform, an Al<sub>0.75</sub>Sc<sub>0.25</sub>N sealed cavity bulk acoustic wave resonator (S-BAR) is designed, fabricated, and characterized. The experimental results show that the asymmetric second-order (A2) Lamb mode of S-BAR is enhanced for higher frequency with a maximum piezoelectric coupling coefficient ( <math> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> </math> ) of 9.53%, a maximum quality factor (Q) of 439, and a TCF of -11.44 ppm/K. Different designs' piezoelectric coupling coefficient distribution is consistent with the theoretical prediction. The proposed smoothing process increases the S-BARs' quality factor by ~400%. The frequency shift caused by the temperature (absolute value of TCF) is reduced by 62% compared with the traditional Al<sub>0.75</sub>Sc<sub>0.25</sub>N thin film bulk acoustic wave resonator (without temperature compensation). The enhanced performances demonstrated the potential of SSC in the next-generation highly integrated RF communication systems.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"107"},"PeriodicalIF":7.3,"publicationDate":"2025-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12106694/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144151096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tetrahedral-modified magnetic nanorobotic probe for enhanced imaging of cancer-related miRNA. 四面体修饰磁性纳米机器人探针增强癌症相关miRNA的成像。
IF 7.3 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-05-27 DOI: 10.1038/s41378-025-00927-1
Xue Wu, Huijie Bai, Lingfeng Jiang, Cuiping Mao, Yi Li, Diangeng Li, Yong Wang, Shan Liu, Jinhong Guo
{"title":"Tetrahedral-modified magnetic nanorobotic probe for enhanced imaging of cancer-related miRNA.","authors":"Xue Wu, Huijie Bai, Lingfeng Jiang, Cuiping Mao, Yi Li, Diangeng Li, Yong Wang, Shan Liu, Jinhong Guo","doi":"10.1038/s41378-025-00927-1","DOIUrl":"10.1038/s41378-025-00927-1","url":null,"abstract":"<p><p>Sensitive and rapid imaging of intracellular cancer-related miRNA holds great potential for early diagnosis and treatment monitoring of cancer. However, most imaging probes are constructed on nanoparticles that rely on passive diffusion to interact and bind with the target substance, resulting a long response time and a low target recognition capability due to the solution viscous resistance. Herein, we reported a DNA tetrahedral-modified magnetic nanorobotic probe (MNP) that performed framework nucleic acid-located catalytic hairpin assembly (CHA) reaction on the surface of magnetically driven nanorobot. The tetrahedral structure not only endowed the MNP with extremely high structural stability and perfect cell-uptake performance, but its spatial confinement effect made the signal amplification of the hairpin cascade more rapid and efficient. Additionally, the active movement of MNPs enhanced the micro-mixing of fluids and accelerated target capture, significantly reducing reaction time and improving reaction kinetics. This strategy exhibited the enhanced fluorescence signal and can accurately distinguish between miR-21 and various other miRNA sequences. Moreover, the feasibility and versatility of MNPs were also successfully verified in normal and various cancer cells imaging. Therefore, the proposed MNPs are promising candidates for the detection of intracellular biomarkers and extend the design space of self-propelled micro/nanorobots in the field of cancer diagnosis and therapy.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"108"},"PeriodicalIF":7.3,"publicationDate":"2025-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12116904/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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