Microsystems & Nanoengineering最新文献_第4页

0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming. 通过超精密机械修整实现无调谐电极微壳谐振陀螺仪的0.32 mHz频率失配。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-22 DOI: 10.1038/s41378-025-00872-z

Sheng Yu, Xianfeng Huang, Jiangkun Sun, Peng Xie, Kun Lu, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao

{"title":"0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming.","authors":"Sheng Yu, Xianfeng Huang, Jiangkun Sun, Peng Xie, Kun Lu, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao","doi":"10.1038/s41378-025-00872-z","DOIUrl":"10.1038/s41378-025-00872-z","url":null,"abstract":"The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the frequency mismatch of MSRG can fundamentally be reduced by mechanical trimming. However, it is challenged by the precise characterization. Previous studies about the characterization of frequency mismatch are almost based on frequency spectrum analysis and sweeping, which can only meet the requirement of trimming efficiency of over 100 mHz, limited by the signal noise and temperature drift. In this paper, a novel characterization method of frequency mismatch based on the quadrature-control force under the self-precession mode is proposed to meet the requirement of high-precision mechanical trimming. Furthermore, the phase errors which affect the accuracy of characterization is analyzed, and methods for the correction of phase errors are proposed. Based on this characterization method, 0.32 mHz frequency mismatch of micro-shell resonator is achieved by mechanical trimming, which is the best-reported performance for mechanical trimming of MEMS gyroscopes so far. More importantly, this novel characterization method can be applied for other kinds of resonators which can be mechanical trimmed.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"102"},"PeriodicalIF":7.3,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12098733/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144128100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Engineering in vitro vascular microsystems. 体外血管微系统工程。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-22 DOI: 10.1038/s41378-025-00956-w

Qiao Liu, Guoliang Ying, Chenyan Hu, Lingyu Du, Huaiyi Zhang, Zhenye Wang, Hongyan Yue, Ali K Yetisen, Guixue Wang, Yang Shen, Nan Jiang

{"title":"Engineering in vitro vascular microsystems.","authors":"Qiao Liu, Guoliang Ying, Chenyan Hu, Lingyu Du, Huaiyi Zhang, Zhenye Wang, Hongyan Yue, Ali K Yetisen, Guixue Wang, Yang Shen, Nan Jiang","doi":"10.1038/s41378-025-00956-w","DOIUrl":"10.1038/s41378-025-00956-w","url":null,"abstract":"Blood vessels are hierarchical microchannels that transport nutrients and oxygen to different tissues and organs, while also eliminating metabolic waste from the body. Disorders of the vascular system impact both physiological and pathological processes. Conventional animal vascular models are complex, high-cost, time-consuming, and low-validity, which have limited the exploration of effective in vitro vascular microsystems. The morphologies of micro-scaled tubular structures and physiological properties of vascular tissues, including mechanical strength, thrombogenicity, and immunogenicity, can be mimicked in vitro by engineering strategies. This review highlights the state-of-the-art and advanced engineering strategies for in vitro vascular microsystems, covering the domains related to rational designs, manufacturing approaches, supporting materials, and organ-specific cell types. A broad range of biomedical applications of in vitro vascular microsystems are also summarized, including the recent advances in engineered vascularized tissues and organs for physiological and pathological study, drug screening, and personalized medicine. Moreover, the commercialization of in vitro vascular microsystems, the feasibility and limitations of current strategies and commercially available products, as well as perspectives on future directions for exploration, are elaborated. The in vitro modeling of vascular microsystems will facilitate rapid, robust, and efficient analysis in tissue engineering and broader regenerative medicine towards the development of personalized treatment approaches.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"100"},"PeriodicalIF":7.3,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12095634/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144120262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator. 一种基于弱耦合谐振腔的新型高性能宽量程真空传感器。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-21 DOI: 10.1038/s41378-025-00937-z

Jiaxin Qin, Wenliang Xia, Junbo Wang, Deyong Chen, Yulan Lu, Xiaoye Huo, Bo Xie, Jian Chen

{"title":"A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator.","authors":"Jiaxin Qin, Wenliang Xia, Junbo Wang, Deyong Chen, Yulan Lu, Xiaoye Huo, Bo Xie, Jian Chen","doi":"10.1038/s41378-025-00937-z","DOIUrl":"10.1038/s41378-025-00937-z","url":null,"abstract":"Wide-range vacuum sensors (0.1-105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 103 Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 103 Pa to 105 Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"98"},"PeriodicalIF":7.3,"publicationDate":"2025-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12092574/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144111367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators. 奇偶时间对称硅微机械谐振器中非互易传输的非线性畸变。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-21 DOI: 10.1038/s41378-025-00952-0

Rui Wang, Lei Han, Man-Na Zhang, Li-Feng Wang, Qing-An Huang

引用次数: 0

On-demand droplet formation at a T-junction: modelling and validation. 按需液滴形成在t型路口：建模和验证。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-19 DOI: 10.1038/s41378-025-00950-2

Hongyu Zhao, William Mills, Andrew Glidle, Peng Liang, Bei Li, Jonathan M Cooper, Huabing Yin

{"title":"On-demand droplet formation at a T-junction: modelling and validation.","authors":"Hongyu Zhao, William Mills, Andrew Glidle, Peng Liang, Bei Li, Jonathan M Cooper, Huabing Yin","doi":"10.1038/s41378-025-00950-2","DOIUrl":"10.1038/s41378-025-00950-2","url":null,"abstract":"Droplet microfluidics have found increasing applications across many fields. While droplet generation at a T-junction is a common method, its reliance on trial-and-error operation imposes undesirable constraints on its performance and applicability. In this study, we demonstrate a simple method for on-demand droplet formation at a T-junction with precise temporal control over individual droplet formation. Based on experimental observations, we also develop a physical model to describe the relationships among pressures, droplet generation, device geometry, and interfacial properties. Experimental validation demonstrates excellent performance of the model in predicting the pressure thresholds for switching droplet generation on and off. To address parameter uncertainties arising from real-world complexities, we show that monitoring droplet generation frequency provides a rapid, in situ approach for optimising experimental conditions. Our findings offer valuable guidelines for the design and automation of robust droplet-on-demand microfluidic systems, which can be readily implemented in conventional laboratories for a broad range of applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"94"},"PeriodicalIF":7.3,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12086211/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144094195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Patterning silver nanowire network via the Gibbs-Thomson effect. 利用吉布斯-汤姆逊效应绘制银纳米线网络。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-19 DOI: 10.1038/s41378-025-00945-z

Hongteng Wang, Haichuan Li, Yijia Xin, Weizhen Chen, Haogeng Liu, Ying Chen, Yaofei Chen, Lei Chen, Yunhan Luo, Zhe Chen, Gui-Shi Liu

{"title":"Patterning silver nanowire network via the Gibbs-Thomson effect.","authors":"Hongteng Wang, Haichuan Li, Yijia Xin, Weizhen Chen, Haogeng Liu, Ying Chen, Yaofei Chen, Lei Chen, Yunhan Luo, Zhe Chen, Gui-Shi Liu","doi":"10.1038/s41378-025-00945-z","DOIUrl":"10.1038/s41378-025-00945-z","url":null,"abstract":"As transparent electrodes, patterned silver nanowire (AgNW) networks suffer from noticeable pattern visibility, which is an unsettled issue for practical applications such as display. Here, we introduce a Gibbs-Thomson effect (GTE)-based patterning method to effectively reduce pattern visibility. Unlike conventional top-down and bottom-up strategies that rely on selective etching, removal, or deposition of AgNWs, our approach focuses on fragmenting nanowires primarily at the junctions through the GTE. This is realized by modifying AgNWs with a compound of diphenyliodonium nitrate and silver nitrate, which aggregates into nanoparticles at the junctions of AgNWs. These nanoparticles can boost the fragmentation of nanowires at the junctions under an ultralow temperature (75 °C), allow pattern transfer through a photolithographic masking operation, and enhance plasmonic welding during UV exposure. The resultant patterned electrodes have trivial differences in transmittance (ΔT = 1.4%) and haze (ΔH = 0.3%) between conductive and insulative regions, with high-resolution patterning size down to 10 μm. To demonstrate the practicality of this novel method, we constructed a highly transparent, optoelectrical interactive tactile e-skin using the patterned AgNW electrodes.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"96"},"PeriodicalIF":7.3,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12089369/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144102157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate. 基于高钾单晶铌酸锂的超小型毫米波滤波芯片。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-19 DOI: 10.1038/s41378-025-00947-x

Qun Li, Junyan Zheng, Yansong Yang

{"title":"Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate.","authors":"Qun Li, Junyan Zheng, Yansong Yang","doi":"10.1038/s41378-025-00947-x","DOIUrl":"10.1038/s41378-025-00947-x","url":null,"abstract":"Next-generation communication systems require the mass deployment of ultra-small, high-performance filters that integrate multi-physical domains. However, achieving an optimal balance between miniaturization, low insertion loss, high selectivity, and low cost of millimeter-wave filters remains a challenge for existing technologies. Herein, we propose and demonstrate ultra-small millimeter-wave filters based on the multifunctional lithium niobate (LN) with outstanding nonlinear optical, electro-optic, piezoelectric, ferroelectric, and thermoelectric characteristics. As a high-K material with low dielectric loss and straightforward fabrication, LN provides an ideal platform for integrating photonic, acoustic, and electromagnetic functionalities. Notably, while LN is already proven for acoustic and optical signal processing, its potential for electromagnetic signal processing remains largely unexplored. In this work, we introduce second-order and fourth-order LN-based millimeter-wave bandpass filters (BPFs) tailored for narrowband and wideband millimeter-wave applications, respectively. Through careful optimization of the LN thickness, we elevate the cutoff frequencies of high-order modes, enhancing frequency selectivity while maintaining compactness. The LN-based BPFs exhibit record-breaking performance metrics, including minimal insertion loss, high selectivity, and compatibility with microfabrication processes. The LN-based BPFs fulfill the critical demands of millimeter-wave wireless communications, sensing, imaging, and emerging quantum information systems, paving the way for scalable, multi-physical integrated circuits.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"95"},"PeriodicalIF":7.3,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12089415/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144102162","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Cantilever beam-based piezoelectric micromachined ultrasonic transducer with post processing soft interconnecting strategy for in-air rangefinding. 基于悬臂梁的压电微机械超声换能器及其后处理软互连策略的空中测距。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-19 DOI: 10.1038/s41378-025-00939-x

Yan Wang, Peng Chen, Junning Zhang, Zihan Li, Hongbin Yu

{"title":"Cantilever beam-based piezoelectric micromachined ultrasonic transducer with post processing soft interconnecting strategy for in-air rangefinding.","authors":"Yan Wang, Peng Chen, Junning Zhang, Zihan Li, Hongbin Yu","doi":"10.1038/s41378-025-00939-x","DOIUrl":"10.1038/s41378-025-00939-x","url":null,"abstract":"Despite of good performance immunity to stress and high transmitting/receiving sensitivity advantages, the fabrication imperfection induced asynchronous vibration and the resultant prolonged ring-down tail severely limit the potential of the cantilever beam-based piezoelectric micromachined ultrasonic transducer (PMUT) in pulse-echo applications as transceiver. To address this issue, a novel post processing soft interconnecting strategy is presented. In this case, specific reservoir structure is intentionally integrated into the cantilever-beam based PMUT design, under the assistance of which the liquid PDMS can be accurately applied and spontaneously driven to seal the air gaps between the already released cantilever beams via the capillary effect. After curing, the PDMS will be transformed from liquid to solid and serve as soft interconnecting spring between adjacent cantilever beams so as to force them to vibrate in synchronous mode. At the same time, this treatment does not change the existing fabrication process and has little effect on the original PMUT performance. From both of the mechanical and acoustic response measurement results, effective suppression for the asynchronous vibration and significant reduction of the ring-down tail have been successfully demonstrated for the treated PMUT device. In the subsequent pulse-echo rangefinding experiment, a distance detection range covering from 270.8 mm to 3.8 m with a divergence angle close to 170° has been achieved when it is driven at resonant frequency of 69.2 kHz with 40 Vpp, 40-cycles sinusoidal signal. Given the simple yet effective treatment, the proposed strategy shows great prospective in developing high performance PMUT for in-air rangefinding applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"97"},"PeriodicalIF":7.3,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12089283/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144102153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A wearable self-aid microneedle chip based on actively transdermal delivery of epinephrine. 一种基于肾上腺素主动透皮输送的可穿戴自助微针芯片。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-16 DOI: 10.1038/s41378-025-00941-3

Chenxi Jin, Peng Guo, Wenjun Li, Wangwang Zhu, Chengcheng Li, Jing Ma, Jun Li, Dachao Li, Jing He, Zhihua Pu

{"title":"A wearable self-aid microneedle chip based on actively transdermal delivery of epinephrine.","authors":"Chenxi Jin, Peng Guo, Wenjun Li, Wangwang Zhu, Chengcheng Li, Jing Ma, Jun Li, Dachao Li, Jing He, Zhihua Pu","doi":"10.1038/s41378-025-00941-3","DOIUrl":"10.1038/s41378-025-00941-3","url":null,"abstract":"Epinephrine is important for first aid and usually applied via injection, which is painful and problematic in operation, thereby making it difficult to self-delivery. In this study, a method to actively transdermal delivery of epinephrine is proposed based on incorporating microneedles with iontophoresis, and then a wearable device is fabricated for rapid and controllable self-delivery of epinephrine. The device consists of a hydrogel microneedle array, a conductive drug delivery hydrogel, iontophoresis electrodes, and an encapsulated cartridge with a spring and self-locking micro-mechanism. The microneedles create subcutaneous microchannels, allowing the epinephrine contained in the hydrogel to enter the body under the control of iontophoretic currents. The dosage and rate can be adjusted at different levels by pressing the button so that it can be used by different groups of people for rapid self-aid and recovery from fatigue. The device can be worn in advance if required. In-vitro tests showed that the transdermal delivery rate of the device was between 0.02642 and 0.1059 mg/h cm². As a proof-of-concept application, in-vivo experiments showed that the device could reverse life-threatening shock reactions in a piglet model of hemorrhagic shock through the delivery of epinephrine.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"92"},"PeriodicalIF":7.3,"publicationDate":"2025-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12084290/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144086447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Direct extraction of respiratory information from pulse waves using a finger-inspired flexible pressure sensor system. 直接提取呼吸信息从脉搏波使用手指启发柔性压力传感器系统。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-16 DOI: 10.1038/s41378-025-00924-4

Xikuan Zhang, Jin Chai, Lingxiao Xu, Shixuan Mei, Xin Wang, Yunlong Zhao, Chenyang Xue, Yongjun Wang, Danfeng Cui, Zengxing Zhang, Haiyan Zhang, Libo Gao

{"title":"Direct extraction of respiratory information from pulse waves using a finger-inspired flexible pressure sensor system.","authors":"Xikuan Zhang, Jin Chai, Lingxiao Xu, Shixuan Mei, Xin Wang, Yunlong Zhao, Chenyang Xue, Yongjun Wang, Danfeng Cui, Zengxing Zhang, Haiyan Zhang, Libo Gao","doi":"10.1038/s41378-025-00924-4","DOIUrl":"10.1038/s41378-025-00924-4","url":null,"abstract":"The long-term monitoring of respiratory status is crucial for the prevention and diagnosis of respiratory diseases. However, existing continuous respiratory monitoring devices are typically bulky and require either chest strapping or proximity to the nasal area, which compromises user comfort and may disrupt the monitoring process. To overcome these challenges, we have developed a flexible, attachable, lightweight, and miniaturized system designed for extended wear on the wrist. This system incorporates signal acquisition circuitry, a mobile client, and a deep neural network, facilitating long-term respiratory monitoring. Specifically, we fabricated a highly sensitive (11,847.24 kPa-1) flexible pressure sensor using a screen printing process, which is capable of functioning beyond 70,000 cycles. Additionally, we engineered a bidirectional long short-term memory (BiLSTM) neural network, enhanced with a residual module, to classify various respiratory states including slow, normal, fast, and simulated breathing. The system achieved a dataset classification accuracy exceeding 99.5%. We have successfully demonstrated a stable, cost-effective, and durable respiratory sensor system that can quantitatively collect and store respiratory data for individuals and groups. This system holds potential for everyday monitoring of physiological signals and healthcare applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"90"},"PeriodicalIF":7.3,"publicationDate":"2025-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12084401/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144086462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0