Microsystems & Nanoengineering最新文献_第4页

Electrical feedthrough governs symmetry of phononic frequency combs in MEMS resonators. 电馈通控制着MEMS谐振器中声子频率梳的对称性。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-20 DOI: 10.1038/s41378-026-01394-y

Hongyu Chen, Yangyang Guan, Dongyang Chen, Zunhao Xiao, Ronghua Huan, Yuan Wang, Chen Wang, Jin Xie

{"title":"Electrical feedthrough governs symmetry of phononic frequency combs in MEMS resonators.","authors":"Hongyu Chen, Yangyang Guan, Dongyang Chen, Zunhao Xiao, Ronghua Huan, Yuan Wang, Chen Wang, Jin Xie","doi":"10.1038/s41378-026-01394-y","DOIUrl":"10.1038/s41378-026-01394-y","url":null,"abstract":"Understanding parasitic electrical feedthrough in microelectromechanical (MEMS) resonators is essential for controlling nonlinear spectral phenomena. Here, we demonstrate that electrical feedthrough fundamentally governs the symmetry of phononic frequency combs in a capacitively transduced MEMS resonator. Rather than acting as a mere measurement artifact, feedthrough forms a coherent electromechanical feedback pathway through direct AC coupling between drive and sense ports. This additional electrical channel modifies the effective electrostatic stiffness and damping, reshapes the intrinsic Duffing nonlinearity, and redistributes modal energy within the comb cavity. As a consequence, feedthrough breaks spectral symmetry, elevates the comb-generation threshold, compresses the spectral span, and reduces coherence across comb lines. To quantitatively evaluate spectral symmetry and repeatability, an Overlap Ratio (OR) metric is introduced to measure comb-line coincidence in both frequency and amplitude domains. By implementing real-time differential cancellation to null the feedthrough-induced feedback, the intrinsic nonlinear dynamics are restored. After suppression, the resonance frequency shifts upward, the effective quality factor increases, the comb threshold decreases, and the spectral bandwidth expands. The OR improves dramatically from 0.125 to 0.895, confirming recovery of highly symmetric and stable comb structures. These results establish a unified electromechanical framework linking electrical feedthrough to nonlinear comb formation and symmetry breaking, providing a practical route toward symmetric, low-threshold, and broadband phononic frequency comb generation for precision sensing and energy-efficient signal processing.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13590486/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149012555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-precision temperature-strain composite sensing based on a single resonator-type surface acoustic wave sensor using machine learning algorithms. 基于机器学习算法的单谐振式表面声波传感器的高精度温度应变复合传感。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-16 DOI: 10.1038/s41378-026-01344-8

Chunlong Cheng, Yanxin Liu, Jingwen Yang, Tianyao Luo, Tong Tong, Cai Luo, Xiaoru Li, Xudong Fang, Qingqing Ke

{"title":"High-precision temperature-strain composite sensing based on a single resonator-type surface acoustic wave sensor using machine learning algorithms.","authors":"Chunlong Cheng, Yanxin Liu, Jingwen Yang, Tianyao Luo, Tong Tong, Cai Luo, Xiaoru Li, Xudong Fang, Qingqing Ke","doi":"10.1038/s41378-026-01344-8","DOIUrl":"10.1038/s41378-026-01344-8","url":null,"abstract":"Surface acoustic wave (SAW) sensors are extensively employed for temperature/strain measurement. However, precise temperature/strain sensing remains challenging under complex conditions involving simultaneous mechanical strains and temperature fluctuations, due to the inherent cross-sensitivity between temperature and strain. To address this challenge, we developed a single resonator-type SAW sensor operable up to 600 °C and integrated machine learning techniques for temperature-strain multiphysics decoupling. Six machine learning models are implemented and evaluated using normalized root mean square error (NRMSE), root mean square error (RMSE), mean absolute error (MAE), coefficient of determination (R²), and execution time (ET) metrics. Results demonstrate that the extreme gradient boosting (XGBoost) model achieves optimal predictive performance from 22 to 160 °C and applied strains of 0 με to 800 με. For temperature/strain predictions respectively, R² values reach 99.97% and 99.23%, simultaneously enabling high-precision temperature and strain sensing. Our study presents an effective solution for simultaneous temperature and strain sensing using a single resonator-type SAW sensor operating in a single acoustic wave mode.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13582996/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148983057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A mechanically robust wearable sweat analysis platform with plug-and-play interconnects for continuous biomarker profiling. 一个机械坚固的可穿戴汗液分析平台，具有即插即用的互连，用于连续的生物标志物分析。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-16 DOI: 10.1038/s41378-026-01436-5

Tianhao Xue, Wanting Lin, Jiahui Zhou, Chaodan Luo, Bohua Li, Xiaofang Zhang, Ching-Jung Chen, Jen-Tsai Liu, Guixian Zhu

{"title":"A mechanically robust wearable sweat analysis platform with plug-and-play interconnects for continuous biomarker profiling.","authors":"Tianhao Xue, Wanting Lin, Jiahui Zhou, Chaodan Luo, Bohua Li, Xiaofang Zhang, Ching-Jung Chen, Jen-Tsai Liu, Guixian Zhu","doi":"10.1038/s41378-026-01436-5","DOIUrl":"10.1038/s41378-026-01436-5","url":null,"abstract":"Reliable electromechanical integration between disposable soft sensors and rigid hardware is crucial for wearable devices, yet physically fragile interfaces often cause severe motion artifacts and contact failures during exercise. To overcome this challenge, this study presents a mechanically robust sweat analysis platform featuring plug-and-play interconnects. Diverging from vulnerable printed inks, a scalable Flexible Printed Circuit Board (FPCB) was engineered with Electroless Nickel Immersion Gold (ENIG) terminals reinforced by a 0.1-mm Polyimide (PI) stiffener. This design ensures highly stable metal-to-metal contact under physical strain. To mitigate chloride corrosion while maintaining the high geometrical consistency of ENIG finishes, a hierarchical architecture was developed utilizing surface-modified carbon as the electrochemical transducer. The system enables accurate detection of lactate (5-80 mM, 0.04046 μA/mM), Na⁺ (12.5-200 mM, 119.59 mV/decade), and equivalent impedance-based sweat rate ( < 0.23 μL/min). Crucially, these robust interconnects facilitated 51 min of uninterrupted monitoring during vigorous aerobic and anaerobic exercises. Based on the acquired data, a proof-of-concept framework mapping sweat rate against lactate concentration was established for personalized exercise intensity zoning, offering a mass-manufacturable paradigm for precision sports physiology.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13582863/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148983068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Multiplexed catheter-integrated pressure sensing system for endoluminal interventions. 用于腔内干预的多路导管集成压力传感系统。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-15 DOI: 10.1038/s41378-026-01411-0

Xiaotong Guo, Qindong Zheng, Jinshi Zhao, Bing Li, Eric M Yeatman

{"title":"Multiplexed catheter-integrated pressure sensing system for endoluminal interventions.","authors":"Xiaotong Guo, Qindong Zheng, Jinshi Zhao, Bing Li, Eric M Yeatman","doi":"10.1038/s41378-026-01411-0","DOIUrl":"10.1038/s41378-026-01411-0","url":null,"abstract":"Advances in flexible catheters pave the way for minimally invasive diagnosis and treatment of luminal organs and tubular structures through endoluminal interventions. A key challenge is in establishing non-constraining pressure monitoring at the interfaces between medical catheters and intraluminal anatomy, where catheter-tissue interactions may be influenced by lumen curvature, structural variability, and physiological motion. In this work, we present a scalable and multi-purpose pressure sensing system for multidirectional monitoring of tissue interactions, establishing a robust solution for deploying diagnostic and therapeutic instruments in various types of endoluminal interventions. This approach provides an integrated pressure sensing platform that combines a thin-film piezoelectric sensor array with a bespoke multi-lumen catheter and a custom signal acquisition circuit. The sensor array is fabricated from an ultrathin poly (vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)) film using a multilayer sandwich architecture with patterned gold electrodes, resulting in a flexible device with a total thickness of approximately 20 µm and sensing units as small as 2.25 mm2. The multi-lumen catheter is fabricated with a cost-effective and highly scalable fiber drawing technology, establishing a means of fast prototyping catheters with bespoke microstructures for sensor integration and medical instrument deployment. Supported by a custom high-impedance acquisition circuit, the system achieves a sensitivity of 16 mV per kPa, which is approximately 25 times higher than state-of-the-art catheter-integrated sensors, while maintaining a sensing range from 0 to 80 kPa. Through in-vitro phantom studies, the system performs precise multi-directional sensing within various clinical endoluminal scenarios, showing its potential in digitalizing tissue interactions during endoluminal interventions.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13578360/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148977238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Engineering copper ferrite (CuFe₂O₄) nanosystems for medicine: a comprehensive review from design to biomedical applications. 工程铁氧体铜（CuFe2O4）纳米医学系统：从设计到生物医学应用的全面回顾。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-14 DOI: 10.1038/s41378-026-01383-1

Maryam Malekpour, Milad Mohkam, Zeynab Karimi, Aydin Berenjian, Alireza Ebrahiminezhad

{"title":"Engineering copper ferrite (CuFe2O4) nanosystems for medicine: a comprehensive review from design to biomedical applications.","authors":"Maryam Malekpour, Milad Mohkam, Zeynab Karimi, Aydin Berenjian, Alireza Ebrahiminezhad","doi":"10.1038/s41378-026-01383-1","DOIUrl":"10.1038/s41378-026-01383-1","url":null,"abstract":"Biomedical micro/nanosystems are rapidly advancing toward integration of therapeutic and diagnostic nanoscale agents into unified platforms. Engineers still struggle to precisely control multiple functions in biocompatible designs. Copper ferrite (CuFe2O4) nanoparticles represent a compelling material solution, combining structural versatility, magnetic responsiveness, and inherent catalytic activity within a single spinel ferrite framework. This review moves beyond a conventional materials catalog to critically analyze the engineering levers-synthesis techniques, ion doping, surface modification, and hybrid nanostructure design-that govern key physicochemical parameters and, in turn, downstream system performance. Through a comprehensive survey of the literature, we establish an engineering-property-application framework that links core characteristics (e.g., crystal structure, magnetic behavior, toxicity) to specific biomedical outcomes, including anticancer therapy, magnetic hyperthermia, targeted drug delivery, biosensing, magnetic resonance imaging (MRI) contrast enhancement, and antibacterial effects. This analysis positions CuFe2O4 nanoparticles as multifunctional components for integrable theranostic micro/nanosystems and delineates critical research gaps in long‑term in vivo safety, scalable synthesis, and clinical translation, thereby providing a foundational resource for advancing nanomedicine.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13572506/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148963641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A chip-level MEMS short-period seismometer for distributed planetary seismic networks. 一种用于分布式行星地震台网的芯片级微机电系统短周期地震仪。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-11 DOI: 10.1038/s41378-026-01440-9

Xingyu Wei, Chenhao Du, Shaolin Zhang, Qi Wang, Shimin Jiao, Qiu Wang, Hao Ouyang, Huafeng Liu

{"title":"A chip-level MEMS short-period seismometer for distributed planetary seismic networks.","authors":"Xingyu Wei, Chenhao Du, Shaolin Zhang, Qi Wang, Shimin Jiao, Qiu Wang, Hao Ouyang, Huafeng Liu","doi":"10.1038/s41378-026-01440-9","DOIUrl":"10.1038/s41378-026-01440-9","url":null,"abstract":"Precise measurement of seismic activity is fundamental to planetary seismology. However, existing planetary microelectromechanical system (MEMS) seismometers encounter a critical bottleneck in balancing compact chip footprint, a low noise floor, and a wide measurement range. This paper presents a miniaturized MEMS seismometer, which has a compact chip footprint of only 5.2 mm × 6.5 mm. The device utilizes corrugated-gap capacitive sensing comb fingers, which significantly reduce sensing nonlinearity while maintaining high displacement sensitivity, effectively extending the linear measurement range and elevating the pull-in acceleration threshold. Furthermore, the system's effective resonant frequency is reduced by exploiting the electrostatic negative stiffness mechanism, which aims to suppress the seismometer's noise floor. Experimental results validate the seismometer's comprehensive performance, demonstrating a noise floor of 5.5 ng/Hz1/2 (closely approaching the mechanical thermal noise limit), a measurement range of ±34 mg, and a bandwidth of 70 Hz. Under continuous operation, the instrument successfully captured natural seismic signals from a magnitude 7.0 earthquake 3682 km away and a magnitude 5.5 event 1240 km away, achieving a 99.1% waveform correlation coefficient when compared against a commercial reference seismometer. Ultimately, this work presents a novel chip-level MEMS seismometer for distributed seismic networks and planetary seismic observation.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13562733/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148930477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Parallel reservoir computing exploiting a single MEMS device via blue sideband excitation. 利用蓝边带激励的单一MEMS器件的并行储层计算。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-08 DOI: 10.1038/s41378-026-01427-6

Yueyang Li, Yu Qian, Fangzhou Chen, Yancheng Lian, Xudong Zou, Kunfeng Wang, Zheng Wang, Junbo Wang, Xueyong Wei, Chengxin Li, Ka Meng Lei, Wei-Han Yu, Ruiqi Guo, Jiawei Xu, R P Martins, Yuan Wang, Pui-In Mak

{"title":"Parallel reservoir computing exploiting a single MEMS device via blue sideband excitation.","authors":"Yueyang Li, Yu Qian, Fangzhou Chen, Yancheng Lian, Xudong Zou, Kunfeng Wang, Zheng Wang, Junbo Wang, Xueyong Wei, Chengxin Li, Ka Meng Lei, Wei-Han Yu, Ruiqi Guo, Jiawei Xu, R P Martins, Yuan Wang, Pui-In Mak","doi":"10.1038/s41378-026-01427-6","DOIUrl":"10.1038/s41378-026-01427-6","url":null,"abstract":"Physical reservoir computing (PRC) offers a promising pathway for energy-efficient edge intelligence; however, existing micro-electromechanical systems (MEMS) implementations struggle to balance computational dimensionality with hardware complexity. Here, we introduce a parallel reservoir architecture realized within a single MEMS resonator via Blue Sideband Excitation (BSE). Unlike traditional approaches that rely on physical arrays or time-multiplexing, which often compromise structural complexity or processing speed-we utilize a unique combined-frequency driving scheme to simultaneously activate two distinct modes into their nonlinear regimes. This strategy enables two distinct but coupled modal responses to be simultaneously accessed as parallel reservoir readout channels within a single device footprint, doubling the state-space dimensionality without increasing fabrication overhead. Built upon such a mechanism, it is demonstrated that fusing features from these co-existing modes can significantly enhance the reservoir computing ability of the proposed system for complex classification tasks. Therefore, the results suggest that exploiting the inherent multi-modal dynamics of continuous mechanical structures suggests a compact route toward multimodal MEMS reservoir computing within a single-device footprint in next-generation computing hardware.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13554059/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148912722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Biologically motivated magnetic microfluidic rheostats for precise and scalable flow control. 生物驱动的磁微流控变阻器用于精确和可扩展的流量控制。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-04 DOI: 10.1038/s41378-026-01430-x

Jiaqi Miao, Chenglin Jiang, Jingxuan Li, Alan C H Tsang

{"title":"Biologically motivated magnetic microfluidic rheostats for precise and scalable flow control.","authors":"Jiaqi Miao, Chenglin Jiang, Jingxuan Li, Alan C H Tsang","doi":"10.1038/s41378-026-01430-x","DOIUrl":"10.1038/s41378-026-01430-x","url":null,"abstract":"Precise regulation of hydraulic resistance is essential for controlling flow distribution, particle transport, and chemical synthesis in microfluidics. Despite frequent comparisons between microfluidic networks and electronic circuits, components analogous to electronic rheostats for high-precision continuous resistance tuning remain absent, with flow regulation typically relying on microvalves with discrete open/closed states and external flow-control hardware. Inspired by geometry-modulated flow resistance in heart valves, we introduce magnetic microfluidic rheostats composed of soft magnetic cantilever arrays, whose field-controlled bending modulates the hydraulic diameter to achieve stable and continuous resistance tuning with a minimum measured increment of ~1.7%. Using external permanent magnets instead of complex actuation systems, the rheostat enables low-cost, energy-efficient operation while maintaining high precision. Incorporating the rheostat into a Wheatstone fluidic bridge allows sub-10 µm/s flow balancing and precise microparticle manipulation. Moreover, rheostats with tailored magnetic responses enable one-to-many control under a single magnetic field, allowing multiple channels to be regulated synchronously or asynchronously. This approach simplifies system architecture compared with conventional one-to-one actuation, while maintaining 1-2% composition accuracy across multi-component streams. These results establish microfluidic rheostats as dedicated resistance regulators that expand the functional toolkit of microfluidics for scalable, high-precision manipulation and synthesis.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13545209/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148891994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

In vivo magnetic recording of neuronal action potentials using a differential TMR magnetrode. 用差分TMR磁极对神经元动作电位的体内磁记录。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-04 DOI: 10.1038/s41378-026-01421-y

Yi Wang, Jin Shan, Chenglong Zhang, Zhenhu Jin, Yilin Song, Xinxia Cai, Jiamin Chen

{"title":"In vivo magnetic recording of neuronal action potentials using a differential TMR magnetrode.","authors":"Yi Wang, Jin Shan, Chenglong Zhang, Zhenhu Jin, Yilin Song, Xinxia Cai, Jiamin Chen","doi":"10.1038/s41378-026-01421-y","DOIUrl":"10.1038/s41378-026-01421-y","url":null,"abstract":"Neuronal magnetic signal recording intrinsically provides vector information and tissue transparency, offering a potential route to overcome the spatial resolution limitations of conventional electrophysiological recordings. However, in situ detection of neuronal magnetic signals at the cellular level remains highly challenging due to the limited sensitivity of microscale magnetic sensors and the presence of background noise. Here, we report a high-sensitivity implantable differential magnetrode based on a dual-pinned magnetic tunnel junction (TMR). By implementing a spatially decoupled differential architecture with a long baseline (5 mm), together with a sensitivity dynamically matched interface circuit, the device effectively suppresses environmental common-mode noise and achieves an ultralow detection limit of 68 pT/√Hz at 1 kHz. Benefiting from an optimized bidirectional SiO₂/Si₃N₄ protective interface, the device exhibits good biocompatibility and stability. Using this magnetrode, we detected action potential-related magnetic signals in the CA1 region of the rat hippocampus. Crucially, we experimentally observed polarity reversals in spike waveforms that correlate with neuronal spatial orientation, demonstrating the potential of magnetic recording to distinguish neural current directionality based on vector information. This work provides a novel sensing tool for microscale neuroscience research and offers a new technical pathway for resolving the spatial topology of complex neural circuits.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13545272/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148892024","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-precision hyperdimensional computing enabled by in-memory computing using high-polarization ferroelectric Hf_0.5Zr_0.5O₂ capacitors. 采用高极化铁电Hf0.5Zr0.5O2电容实现内存计算高精度超维计算。

IF 11.1 1区工程技术

Microsystems & Nanoengineering Pub Date : 2026-09-04 DOI: 10.1038/s41378-026-01429-4

Ella Paasio, Simon Thomann, Anika Anu, Xinye Li, Rikhard Ranta, Padma Srivari, Safdar Muhammad, Soumen Mazumder, Jahra Mariam, Andrea Padovani, Hussam Amrouch, Gaurav Thareja, Sayani Majumdar

{"title":"High-precision hyperdimensional computing enabled by in-memory computing using high-polarization ferroelectric Hf0.5Zr0.5O2 capacitors.","authors":"Ella Paasio, Simon Thomann, Anika Anu, Xinye Li, Rikhard Ranta, Padma Srivari, Safdar Muhammad, Soumen Mazumder, Jahra Mariam, Andrea Padovani, Hussam Amrouch, Gaurav Thareja, Sayani Majumdar","doi":"10.1038/s41378-026-01429-4","DOIUrl":"10.1038/s41378-026-01429-4","url":null,"abstract":"We demonstrate high-precision hyperdimensional computing using an in-memory computing (IMC) architecture based on ferroelectric Hf0.5Zr0.5O2 (HZO) capacitors. By exploiting the high polarization charge density of CMOS back-end-compatible HZO, we achieved 32 well-separated and linearly programmable intermediate states in 10-nm-thick capacitors making them suitable as capacitive IMC elements. In recent times, capacitive IMC emerged as a promising energy- and latency-efficient route for data-intensive computing tasks. However, compute-in-memory elements require non-volatile, reproducible, and multi-bit operation. In this work, we show that through optimized device fabrication without vacuum break between oxide and nitride depositions and tailored thermal engineering, the HZO capacitors can exhibit high remanent polarization (2Pr = 75 µC/cm²). Structural studies highlight a high orthorhombic phase fraction and clean HZO/TiN interface. The intermediate polarization states exhibit controllable, linear, and reproducible capacitance modulation via voltage-driven polarization switching, enabling reliable multi-bit device operation and non-destructive readout. Leveraging these 5-bit ferroelectric capacitors, it is possible to store 15-bit numerical values using only three capacitors to implement high-precision capacitive IMC in a hyperdimensional computing task, achieving improved inference accuracy of 92.3% and 2.3x reduced areal footprint compared to binary encoding. These results highlight the importance of advanced materials engineering to achieve high bit-precision and state linearity in ferroelectric capacitors for scalable capacitive in-memory computing.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13545243/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148892002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0