Microsystems & Nanoengineering最新文献

{"title":"Theoretical and experimental investigations of the CMOS compatible Pirani gauges with a temperature compensation model.","authors":"Shizhen Xu, Gai Yang, Junfu Chen, Rui Jiao, Ruoqin Wang, Hongyu Yu, Huikai Xie, Xiaoyi Wang","doi":"10.1038/s41378-024-00832-z","DOIUrl":"10.1038/s41378-024-00832-z","url":null,"abstract":"<p><p>In this article, a CMOS-compatible Pirani vacuum gauge was proposed featuring enhanced sensitivity, lower detection limit, and high-temperature stability, achieved through the implementation of a surface micromachining method coupled with a temperature compensation strategy. To improve performance, a T-type device with a 1 µm gap was fabricated resulting in an average sensitivity of 1.10 V/lgPa, which was 2.89 times larger than that (0.38 V/lgPa) of a L-type device with a 100 µm gap. Additionally, FEA simulations were conducted, analyzing the influence of heater temperature on sensitivity and the attenuation of sensitivity across varying ambient temperatures. A semi-empirical theoretical mode was derived for performance prediction, demonstrating strong alignment with experimental results, underscoring its effectiveness in compensating for sensitivity attenuation. Building on the foundation, the device's performance under different ambient temperatures was characterized and effectively compensated in two distinct operational modes: constant temperature mode and constant temperature difference mode (the whole range temperature compensation error can be controlled within 2.5%). Finally, the short-time stability (variation level is approximately 1 mV), noise floor (Vrms=384 μV) and detection limit (0.07 Pa @1 Hz) of the device were characterized, confirming its suitability for practical implementation.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"21"},"PeriodicalIF":7.3,"publicationDate":"2025-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11754640/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143024004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An intelligent humidity sensing system for human behavior recognition.","authors":"Huabin Yang, Qiming Guo, Guidong Chen, Yuefang Zhao, Meng Shi, Na Zhou, Chengjun Huang, Haiyang Mao","doi":"10.1038/s41378-024-00863-6","DOIUrl":"10.1038/s41378-024-00863-6","url":null,"abstract":"<p><p>An intelligent humidity sensing system has been developed for real-time monitoring of human behaviors through respiration detection. The key component of this system is a humidity sensor that integrates a thermistor and a micro-heater. This sensor employs porous nanoforests as its sensing material, achieving a sensitivity of 0.56 pF/%RH within a range of 60-90% RH, along with excellent long-term stability and superior gas selectivity. The micro-heater in the device provides a high operating temperature, enhancing sensitivity by 5.8 times. This significant improvement enables the capture of weak humidity variations in exhaled gases, while the thermistor continuously monitors the sensor's temperature during use and provides crucial temperature information related to respiration. With the assistance of a machine learning algorithm, a behavior recognition system based on the humidity sensor has been constructed, enabling behavior states to be classified and identified with an accuracy of up to 96.2%. This simple yet intelligent method holds great potential for widespread applications in medical assistance analysis and daily health monitoring.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"17"},"PeriodicalIF":7.3,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11751383/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era.","authors":"Izhar, M M A Fiagbenu, S Yao, X Du, P Musavigharavi, Y Deng, J Leathersich, C Moe, A Kochhar, E A Stach, R Vetury, R H Olsson","doi":"10.1038/s41378-024-00857-4","DOIUrl":"10.1038/s41378-024-00857-4","url":null,"abstract":"<p><p>Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G (potential 6G) era, high-frequency bands (>8 GHz) are expected to require resonators with high-quality factor (Q) and electromechanical coupling ( <math> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> </math> ) to form filters with low insertion loss and high selectivity. However, both the Q and <math> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> </math> of resonator devices formed in traditional uniform polarization piezoelectric films of aluminum nitride (AlN) and aluminum scandium nitride (AlScN) decrease when scaled beyond 8 GHz. In this work, we utilized 4-layer AlScN periodically poled piezoelectric films (P3F) to construct high-frequency (~17-18 GHz) resonators and filters. The resonator performance is studied over a range of device geometries, with the best resonator achieving a <math> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> </math> of 11.8% and a <math> <msub><mrow><mi>Q</mi></mrow> <mrow><mi>p</mi></mrow> </msub> </math> of 236.6 at the parallel resonance frequency ( <math> <msub><mrow><mi>f</mi></mrow> <mrow><mi>p</mi></mrow> </msub> </math> ) of 17.9 GHz. These resulting figures-of-merit are ( <math> <mrow> <msub><mrow><mi>FoM</mi></mrow> <mrow><mn>1</mn></mrow> </msub> <mo>=</mo> <msub> <mrow> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> <mi>Q</mi></mrow> <mrow><mi>p</mi></mrow> </msub> </mrow> </math> and <math> <mrow> <msub><mrow><mi>FoM</mi></mrow> <mrow><mn>2</mn></mrow> </msub> <mo>=</mo> <msub><mrow><mi>f</mi></mrow> <mrow><mi>p</mi></mrow> </msub> <msub><mrow><mi>FoM</mi></mrow> <mrow><mn>1</mn></mrow> </msub> <mo>×</mo> <msup><mrow><mn>10</mn></mrow> <mrow><mo>-</mo> <mn>9</mn></mrow> </msup> </mrow> </math> ) 27.9 and 500, respectively. These and the <math> <msubsup><mrow><mi>k</mi></mrow> <mrow><mi>t</mi></mrow> <mrow><mn>2</mn></mrow> </msubsup> </math> are significantly higher than previously reported AlN/AlScN-based resonators operating at similar frequencies. Fabricated 3-element and 6-element filters formed from these resonators demonstrated low insertion losses (IL) of 1.86 and 3.25 dB, and -3 dB bandwidths (BW) of 680 MHz (fractional BW of 3.9%) and 590 MHz (fractional BW of 3.3%) at a ~17.4 GHz center frequency. The 3-element and 6-element filters achieved excellent linearity with in-band input third-order intercept point (IIP3) values of +36 and +40 dBm, respectively, which are significantly higher than previously reported acoustic filters operating at similar frequencies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"19"},"PeriodicalIF":7.3,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11754792/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143023999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe₂ membranes.","authors":"Bo Xu, Zejuan Zhang, Jiaze Qin, Jiaqi Wu, Luming Wang, Jiankai Zhu, Chenyin Jiao, Wanli Zhang, Juan Xia, Zenghui Wang","doi":"10.1038/s41378-024-00827-w","DOIUrl":"10.1038/s41378-024-00827-w","url":null,"abstract":"<p><p>Nanoelectromechanical systems (NEMS) based on atomically-thin tungsten diselenide (WSe₂), benefiting from the excellent material properties and the mechanical degree of freedom, offer an ideal platform for studying and exploiting dynamic strain engineering and cross-scale vibration coupling in two-dimensional (2D) crystals. However, such opportunity has remained largely unexplored for WSe₂ NEMS, impeding exploration of exquisite physical processes and realization of novel device functions. Here, we demonstrate dynamic coupling between atomic lattice vibration and nanomechanical resonances in few-layer WSe₂ NEMS. Using a custom-built setup capable of simultaneously detecting Raman and motional signals, we accomplish cross-scale mode coupling between the THz crystal phonon and MHz structural vibration, achieving GHz frequency tuning in the atomic lattice modes with a dynamic gauge factor of 61.9, the best among all 2D crystals reported to date. Our findings show that such 2D NEMS offer great promises for exploring cross-scale physics in atomically-thin semiconductors.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"18"},"PeriodicalIF":7.3,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11754608/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143023983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Finite element-based nonlinear dynamic optimization of nanomechanical resonators.","authors":"Zichao Li, Farbod Alijani, Ali Sarafraz, Minxing Xu, Richard A Norte, Alejandro M Aragón, Peter G Steeneken","doi":"10.1038/s41378-024-00854-7","DOIUrl":"10.1038/s41378-024-00854-7","url":null,"abstract":"<p><p>Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si₃N₄ string resonators, in the presence of conflicting objectives such as simultaneous enhancement of Q-factor and nonlinear Duffing constant. To that end, we generate Pareto frontiers that highlight the trade-offs between optimization objectives and validate the results both numerically and experimentally. To further demonstrate the capability of multi-objective optimization for practical design challenges, we simultaneously optimize the design of nanoresonators for three key figure-of-merits in resonant sensing: power consumption, sensitivity and response time. The presented methodology can facilitate and accelerate designing (nano) mechanical resonators with optimized performance for a wide variety of applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"16"},"PeriodicalIF":7.3,"publicationDate":"2025-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11746933/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control.","authors":"Jinxin Lai, Longya Xiao, Beichen Zhu, Longhan Xie, Hongjie Jiang","doi":"10.1038/s41378-024-00825-y","DOIUrl":"10.1038/s41378-024-00825-y","url":null,"abstract":"<p><p>Surface electromyogram (sEMG) serves as a means to discern human movement intentions, achieved by applying epidermal electrodes to specific body regions. However, it is difficult to obtain high-fidelity sEMG recordings in areas with intricate curved surfaces, such as the body, because regular sEMG electrodes have stiff structures. In this study, we developed myoelectrically sensitive hydrogels via 3D printing and integrated them into a stretchable, flexible, and high-density sEMG electrodes array. This electrode array offered a series of excellent human-machine interface (HMI) features, including conformal adherence to the skin, high electron-to-ion conductivity (and thus lower contact impedance), and sustained stability over extended periods. These attributes render our electrodes more conducive than commercial electrodes for long-term wearing and high-fidelity sEMG recording at complicated skin interfaces. Systematic in vivo studies were used to investigate its efficacy to control a prosthetic hand by decoding sEMG signals from the human hand via a multiple-channel readout circuit and a sophisticated artificial intelligence algorithm. Our findings demonstrate that the 3D printed gel myoelectric sensing system enables real-time and highly precise control of a prosthetic hand.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"15"},"PeriodicalIF":7.3,"publicationDate":"2025-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11747008/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication and modulation of flexible electromagnetic metamaterials.","authors":"Yanshuo Feng, Misheng Liang, Xiaoguang Zhao, Rui You","doi":"10.1038/s41378-024-00806-1","DOIUrl":"10.1038/s41378-024-00806-1","url":null,"abstract":"<p><p>Flexible electromagnetic metamaterials are a potential candidate for the ideal material for electromagnetic control due to their unique physical properties and structure. Flexible electromagnetic metamaterials can be designed to exhibit specific responses to electromagnetic waves within a particular frequency range. Research shows that flexible electromagnetic metamaterials exhibit significant electromagnetic control characteristics in microwave, terahertz, infrared and other frequency bands. It has a wide range of applications in the fields of electromagnetic wave absorption and stealth, antennas and microwave devices, communication information and other fields. In this review, the currently popular fabrication methods of flexible electromagnetic metamaterials are first summarized, highlighting the electromagnetic modulation capability in different frequency bands. Then, the applications of flexible electromagnetic metamaterials in four aspects, namely electromagnetic stealth, temperature modulation, electromagnetic shielding, and wearable sensors, are elaborated and summarized in detail. In addition, this review also discusses the shortcomings and limitations of flexible electromagnetic metamaterials for electromagnetic control. Finally, the conclusion and perspective of the electromagnetic properties of flexible electromagnetic metamaterials are presented.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"14"},"PeriodicalIF":7.3,"publicationDate":"2025-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11747097/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC.","authors":"Linze Hong, Ke Xiao, Xiangyu Song, Liwei Lin, Wei Xu","doi":"10.1038/s41378-024-00853-8","DOIUrl":"10.1038/s41378-024-00853-8","url":null,"abstract":"<p><p>We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA platform. The compensation strategy is implemented on-chip with a variable temperature difference heating circuit. Results show that the linear programming for the low-temperature drift in the SoC output is characterized by a compensation resistor R_c with a resistance value of 748.21 Ω and a temperature coefficient of resistance of 3.037 × 10^-3 °C^-1 at 25 °C. Experimental validation demonstrates that within an ambient temperature range of 0-50 °C and a flow range of 0-10 m/s, the temperature drift of the sensor is reduced to ±1.6%, as compared to ±8.9% observed in a counterpart with the constant temperature difference circuit. Therefore, this on-chip temperature-compensated CMOS-MEMS flow sensing SoC is promising for low-cost sensing applications such as respiratory monitoring and smart energy-efficient buildings.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"13"},"PeriodicalIF":7.3,"publicationDate":"2025-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11743593/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008300","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Acoustic frequency comb generation on a composite diamond/silicon microcantilever in ambient air.","authors":"Zhixin Zhao, Yanyan Li, Wangyang Zhang, Wenyao Luo, Duo Liu","doi":"10.1038/s41378-025-00866-x","DOIUrl":"https://doi.org/10.1038/s41378-025-00866-x","url":null,"abstract":"<p><p>Acoustic frequency combs (AFCs) contain equidistant coherent signals with unconventional possibilities on metrology. Previously, implementation of AFCs on mechanical microresonators with large air damping loss is difficult, which restricted their atmospheric applications. In this work, we explore the potentials of a composite diamond/silicon microcantilever for parametric generation of AFCs in ambient air. We discover that the diamond layer provides a viable route to reduce the linewidth of the primary flexural mode, yielding a 7.1-times increase of the quality factor. We develop a parametric driving scheme that enables generation of AFCs through injection locking and sequential nonlinear dynamic transitions involving subharmonic synchronization (Arnold tongue), and chaotic dynamics. Ultimately, we realize AFCs with a frequency range extending 800 kHz in the air. This work advances the understanding of AFCs and provides a viable route towards their applications in ambient air for high precision metrology.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"12"},"PeriodicalIF":7.3,"publicationDate":"2025-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11739415/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008287","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Flexible micromachined ultrasound transducers (MUTs) for biomedical applications.","authors":"Sanjog Vilas Joshi, Sina Sadeghpour, Nadezda Kuznetsova, Chen Wang, Michael Kraft","doi":"10.1038/s41378-024-00783-5","DOIUrl":"10.1038/s41378-024-00783-5","url":null,"abstract":"<p><p>The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric micromachined ultrasound transducer (PMUT) and capacitive micromachined ultrasound transducer (CMUT). These devices operate in flexural mode using piezoelectric thin films and electrostatic forces, respectively. In addition, the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications, including biomedical imaging, sensing, and stimulation. This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers (MUTs) and potential applications, their specifications, materials, fabrication, and electronics integration. Specifically, the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs, including resonance frequency, sensitivity, flexibility, and other relevant factors. Finally, the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"9"},"PeriodicalIF":7.3,"publicationDate":"2025-01-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11736036/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143008295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}