Microsystems & Nanoengineering最新文献_第4页

Fluid drawing printing 3D conductive structures for flexible circuit manufacturing. 用于柔性电路制造的流体拉伸打印3D导电结构。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-12 DOI: 10.1038/s41378-025-00936-0

Yikang Li, Dazhi Wang, Yiwen Feng, Xiangji Chen, Xu Chen, Chang Liu, Yanteng Li, Liujia Suo, Ran Zhang, Xiaopeng Zhang, Ben Liu, Fengshu Wang, Shiwen Liang, Lingjie Kong, Qiang Fu, Tongqun Ren, Tiesheng Wang

{"title":"Fluid drawing printing 3D conductive structures for flexible circuit manufacturing.","authors":"Yikang Li, Dazhi Wang, Yiwen Feng, Xiangji Chen, Xu Chen, Chang Liu, Yanteng Li, Liujia Suo, Ran Zhang, Xiaopeng Zhang, Ben Liu, Fengshu Wang, Shiwen Liang, Lingjie Kong, Qiang Fu, Tongqun Ren, Tiesheng Wang","doi":"10.1038/s41378-025-00936-0","DOIUrl":"10.1038/s41378-025-00936-0","url":null,"abstract":"Three-dimensional (3D) conductive structures significantly reduce flexible circuit complexity and enhance circuit integration. Direct extrusion printing technology offers the advantages of various material applicability and high flexibility for fabricating filamentary interconnects. The printing resolution is, however, highly dependent on the needle size. A micro-printing method was proposed based on fluid drawing to fabricate freestanding 3D conductive structures. The delicate structure is drawn out under the tension when printing. The printing material is a high-viscosity ink composed of silver nanoparticles (AgNPs) and polyvinylpyrrolidone (PVP). The viscosity is controlled by evaporating the ink's solvent for drawing prints. This unique printing method utilizes a single needle, controlled by precise air pressure and speed, to construct 3D filamentary structures with varied wire widths. The 3D conductive structures exhibit superior structural retention and enhanced conductivity by thermal treatment. The drawing printing method has been successfully implemented on flexible circuits, including light-emitting diode (LED) arrays, thermal imaging displays, and multivibrator circuits. This work establishes a novel paradigm for flexible electronics manufacturing through fluid-drawing printing, achieving unprecedented customization and compatibility in fabricating 3D interconnects.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"81"},"PeriodicalIF":7.3,"publicationDate":"2025-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12069710/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144002826","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A programmable magnetic digital microfluidic platform integrated with electrochemical detection system. 一种集成电化学检测系统的可编程磁数字微流控平台。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-12 DOI: 10.1038/s41378-025-00914-6

Yong Zhao, Shuyue Jiang, Gaozhe Cai, Lihua Wang, Jianlong Zhao, Shilun Feng

{"title":"A programmable magnetic digital microfluidic platform integrated with electrochemical detection system.","authors":"Yong Zhao, Shuyue Jiang, Gaozhe Cai, Lihua Wang, Jianlong Zhao, Shilun Feng","doi":"10.1038/s41378-025-00914-6","DOIUrl":"10.1038/s41378-025-00914-6","url":null,"abstract":"Digital microfluidic (DMF) technology is widely used in bioanalysis and chemical reactions due to its accuracy and flexibility in manipulating droplets. However, most DMF systems usually rely on complex electrode fabrication and high driving voltages. Sensor integration in DMF systems is also quite rare. In this study, a programmable magnetic digital microfluidic (PMDMF) platform integrated with electrochemical detection system was proposed. It enables non-contact, flexible droplet manipulation without complex processes and high voltages, meeting the requirements of automated electrochemical detection. The platform includes a magnetic control system, a microfluidic chip, and an electrochemical detection system. The magnetic control system consists of a microcoil array circuit board, a N52 permanent magnet, and an Arduino control module. N52 magnets generate localized magnetic fields to drive droplet movement, while the Arduino module enables programmable control for precise manipulation. The maximum average velocity of the droplet is about 3.9 cm/s. The microfluidic chip was fabricated using 3D printing and the superhydrophobic surface of chip was fabricated by spray coating. The electrochemical detection system consists of the MoS2@CeO2/PVA working electrode, Ag/AgCl reference electrode, and carbon counter electrode. To evaluate the practical value of the integrated platform, glucose in sweat was automatically and accurately detected. The proposed platform has a wide linear detection range (0.01-0.25 mM), a lower LOD (6.5 μM), a superior sensitivity (7833.54 μA·mM-1·cm-2), and excellent recovery rate (88.1-113.5%). It has an extensive potential for future application in the fields of medical diagnostics and point-of-care testing.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"82"},"PeriodicalIF":7.3,"publicationDate":"2025-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12069685/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144035462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Closed-eye intraocular pressure and eye movement monitoring via a stretchable bimodal contact lens. 利用可伸缩双峰隐形眼镜监测闭眼眼内压和眼动。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-12 DOI: 10.1038/s41378-025-00946-y

Xingyi Gan, Guang Yao, Cunbo Li, Yufeng Mu, Maowen Xie, Chenzheng Zhou, Peisi Li, Qiwei Dong, Ke Chen, Kangning Zhao, Min Gao, Taisong Pan, Fang Lu, Dezhong Yao, Peng Xu, Yuan Lin

{"title":"Closed-eye intraocular pressure and eye movement monitoring via a stretchable bimodal contact lens.","authors":"Xingyi Gan, Guang Yao, Cunbo Li, Yufeng Mu, Maowen Xie, Chenzheng Zhou, Peisi Li, Qiwei Dong, Ke Chen, Kangning Zhao, Min Gao, Taisong Pan, Fang Lu, Dezhong Yao, Peng Xu, Yuan Lin","doi":"10.1038/s41378-025-00946-y","DOIUrl":"10.1038/s41378-025-00946-y","url":null,"abstract":"Chronic ophthalmic diseases are multivariate, time-varying, and degenerative. Smart contact lenses have emerged as a scalable platform for noninvasive ocular signal detection and disease diagnosis. However, real-time monitoring and decoupling of multiple ocular parameters, particularly when the eyes are closed, remain challenging in clinical medicine. In this work, we propose a stretchable bimodal contact lens (BCL) amalgamating self-decoupled electromagnetic capacitive intraocular pressure (CIOP) and magnetic eye movement (MEM) monitoring components. The sandwich-integrated BCL can be intimately attached to the eyeball, enabling closed-eye, wireless, and precise signal acquisition without interference. During the eye open and closed, the serpentine-geometry CIOP unit was validated on a rabbit model, achieving supered resolution (1 mmHg) and sensitivity (≥0.22 MHz mmHg-1) for reversible hypo- to hyper-IOP fluctuations. Ex vivo and in vivo MEM monitoring, based on composition-optimized magnetic interlayer film, demonstrated exceptional accuracy (≥97.25%) with eyes open and closed, surpassing existing methods. The collected CIOP and MEM data could be wirelessly aggregated and transmitted to portable devices via integrated acquisition modules within frame glasses for real-time eye healthcare. Emerging noninvasive and bimodal modalities reconcile the trade-off between minimal discomfort, eye status, and reliable measurement, spurring the widespread adoption of the integrated monitoring system for continuous ocular health monitoring.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"83"},"PeriodicalIF":7.3,"publicationDate":"2025-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12069572/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144027564","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators. 基于弱耦合谐振腔恒驱动技术的双信号同步检测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-09 DOI: 10.1038/s41378-025-00954-y

Han Li, Zhao Zhang, PeiYuan Zhu, GuoHua Zhang, Yongcun Hao, Honglong Chang

{"title":"Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators.","authors":"Han Li, Zhao Zhang, PeiYuan Zhu, GuoHua Zhang, Yongcun Hao, Honglong Chang","doi":"10.1038/s41378-025-00954-y","DOIUrl":"https://doi.org/10.1038/s41378-025-00954-y","url":null,"abstract":"The demand for highly sensitive and accurate sensors has grown significantly, particularly in the field of Micro-Electro-Mechanical Systems technology. Mode-localized sensors based on weakly coupled resonators have garnered attention for their high sensitivity through amplitude ratio outputs. However, when measuring multiple signals by weakly coupled resonators, different signals can interfere with each other, causing high cross-sensitivity. This cross-sensitivity greatly complicates signal separation and makes accurate measurement extremely difficult, impacting system performance. To address this issue, the study proposes an innovative constant-drive technique of weakly coupled resonators. This technique significantly reduces crosstalk between signals while maintaining high sensitivity of amplitude ratio output. The method is theoretically validated by analyzing amplitude ratios under signal perturbations in non-damped conditions, demonstrating perfect elimination of cross-interference. Finite element analysis under damping conditions further validated the constant-drive technique, showing a cross-sensitivity of 0.054%, nearly three orders of magnitude lower than that of mode-localized sensors. Experimental validation confirmed the effectiveness of the proposed technique, with the cross-sensitivity of the mode-localized method measured at 26.3% and 28.7%, respectively, while the constant-frequency drive achieved significantly lower values of 3.1% and 1.1%. This demonstrates a successful reduction in cross-sensitivity by an order of magnitude, meeting the performance requirements for typical MEMS biaxial sensor applications. This method is highly significant for mode-localized sensors, offering potential for developing multi-signal measurement devices like multi-axis accelerometers, force sensor, electric field sensor and mass sensor.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"80"},"PeriodicalIF":7.3,"publicationDate":"2025-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12062247/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144028124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

SV-SAW RF filters based on low-cost 128°Y LiNbO₃/SiO₂/poly-Si/Si substrate for 6G cmWave wireless communications. 基于低成本128°Y LiNbO3/SiO2/poly-Si/Si衬底的SV-SAW射频滤波器用于6G毫米波无线通信。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-08 DOI: 10.1038/s41378-025-00949-9

Kai Yang, Jie Chen, Juan Wang, Fuhong Lin, Jiming Fang, Meijuan Li, JunYan Zheng, Zijun Ren, Fangsheng Qian, Haiding Sun, Yansong Yang, Chengjie Zuo

{"title":"SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications.","authors":"Kai Yang, Jie Chen, Juan Wang, Fuhong Lin, Jiming Fang, Meijuan Li, JunYan Zheng, Zijun Ren, Fangsheng Qian, Haiding Sun, Yansong Yang, Chengjie Zuo","doi":"10.1038/s41378-025-00949-9","DOIUrl":"https://doi.org/10.1038/s41378-025-00949-9","url":null,"abstract":"Recent advancements in mobile communication have escalated the demand for faster data rates, requiring higher carrier frequencies and compact, high-performance, and low-cost radio frequency (RF) filters. Micro-acoustic resonators offer significant advantages in mobile phone filtering due to their low loss and compact size. Addressing the need for low-cost filter solutions for higher frequencies, this study presents a silicon-substrate-based surface acoustic wave (SAW) technology platform to enable high-performance resonators and filters for 6G X-band (7-12 GHz) centimeter-wave (cmWave) wireless communications. Based on a silicon (Si) substrate, we propose a novel design scheme to excite shear vertical surface acoustic waves (SV-SAW) on a 128°Y LiNbO3/SiO2/poly-Si/Si layer stack and realize high-frequency resonators above 6 GHz with high-performance: electromechanical coupling coefficient (k2) of 7.6% ~ 8.9% and high-quality factor (Q) ranging from 193-679. The synthesized filters based on those high-performance resonators show low insertion loss (1.47 to 2.20 dB) and 3-dB bandwidth from 308 to 373 MHz. Especially, the demonstrated filter with a center frequency (fc) at 8.63 GHz exhibits a low insertion loss of only 1.5 dB, which is the best when compared to all other LiNbO3 acoustic filters in this frequency range, 3-dB bandwidth of 373 MHz, and decent out-of-band rejection across the entire 1-15 GHz range. These results mark a significant step forward for the microwave acoustics field and pave the way for enabling solidly-mounted, low-cost, and miniature-size SAW filters for emerging 6G cmWave wireless communications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"79"},"PeriodicalIF":7.3,"publicationDate":"2025-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12062503/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144021840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Streaming-based Tweezers for Routing, Engineering, and Manipulation of multiparticles: STREAM. 基于流的镊子用于多粒子的路由、工程和操作：流。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-08 DOI: 10.1038/s41378-025-00907-5

Haodong Zhu, Wenjun Yu, Neil Upreti, Tony Jun Huang

{"title":"Streaming-based Tweezers for Routing, Engineering, and Manipulation of multiparticles: STREAM.","authors":"Haodong Zhu, Wenjun Yu, Neil Upreti, Tony Jun Huang","doi":"10.1038/s41378-025-00907-5","DOIUrl":"https://doi.org/10.1038/s41378-025-00907-5","url":null,"abstract":"Contactless manipulation of samples, particularly the ability to dynamically handle multiple fragile specimens while maintaining their integrity and viability, is crucial for various applications in biology, medicine, engineering, and physics. While hydrodynamic tweezers have emerged as a promising approach for gentle, label-free manipulation of a wide range of sample types and sizes, they typically have limited flexibility in terms of dynamic control, making it challenging to realize high-resolution and programmable manipulation of multiple samples. Here, we introduce the Streaming-based Tweezers for Routing, Engineering, And Manipulation of multiparticles (STREAM) with sub-wavelength resolution. The platform employs an array of piezoelectric plates arranged in a space-reciprocal pattern to generate acoustic streaming, creating localized trapping points. The mechanism of particle trapping and the improvement of routing resolution via multiunit activation were investigated. Subsequently, a convolutional neural network (CNN) with arbitrary voltage combination as the input and predicted trapping position as the output was integrated into the system. The CNN calibration is vital to the system as it enhances the platform's performance, enabling precise control of the trapping positions beyond traditional physical unit size limitations. We demonstrated the STREAM platform's capabilities through single particle routing with sub-wavelength precision, simultaneous manipulation of multiple particles, and on-demand assembly of samples. The STREAM platform opens new possibilities for applications requiring precise and dynamic control of particles and samples, with the potential to advance fields including biology, chemistry, and materials science.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"77"},"PeriodicalIF":7.3,"publicationDate":"2025-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12058972/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144003982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Recent advances in bio-microsystem integration and Lab-on-PCB technology. 生物微系统集成和pcb上实验室技术的最新进展。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-08 DOI: 10.1038/s41378-025-00940-4

Sotirios Papamatthaiou, Pavlos Menelaou, Bilal El Achab Oussallam, Despina Moschou

{"title":"Recent advances in bio-microsystem integration and Lab-on-PCB technology.","authors":"Sotirios Papamatthaiou, Pavlos Menelaou, Bilal El Achab Oussallam, Despina Moschou","doi":"10.1038/s41378-025-00940-4","DOIUrl":"https://doi.org/10.1038/s41378-025-00940-4","url":null,"abstract":"The concept of micro-total analysis systems (µTAS) introduced in the early 1990s revolutionized the development of lab-on-a-chip (LoC) technologies by miniaturizing and automating complex laboratory processes. Despite their potential in diagnostics, drug development, and environmental monitoring, the widespread adoption of LoC systems has been hindered by challenges in scalability, integration, and cost-effective mass production. Traditional substrates like silicon, glass, and polymers struggle to meet the multifunctional requirements of practical applications. Lab-on-Printed Circuit Board (Lab-on-PCB) technology has emerged as a transformative solution, leveraging the cost-efficiency, scalability, and precision of PCB fabrication techniques. This platform facilitates the seamless integration of microfluidics, sensors, and actuators within a single device, enabling complex, multifunctional systems suitable for real-world deployment. Recent advancements have demonstrated Lab-on-PCB's versatility across biomedical applications, such as point-of-care diagnostics, electrochemical biosensing, and molecular detection, as well as drug development and environmental monitoring. This review examines the evolution of Lab-on-PCB technology over the past eight years, focusing on its applications and impact within the research community. By analyzing recent progress in PCB-based microfluidics and biosensing, this work highlights how Lab-on-PCB systems address key technical barriers, paving the way for scalable and practical lab-on-chip solutions. The growing academic and industrial interest in Lab-on-PCB is underscored by a notable increase in publications and patents, signaling its potential for commercialization and broader adoption.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"78"},"PeriodicalIF":7.3,"publicationDate":"2025-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12059025/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144032262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Foldable 3D opto-electro array for optogenetic neuromodulation and physiology recording. 用于光遗传神经调节和生理记录的可折叠3D光电阵列。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-05-06 DOI: 10.1038/s41378-024-00842-x

Yan Gong, Xiang Liu, Zebin Jiang, Arthur Weber, Wen Li

引用次数: 0

A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links. 用于激光星间链路的集成压阻式角度传感器的高性能10 mm直径MEMS快速转向镜。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-29 DOI: 10.1038/s41378-025-00935-1

Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu

{"title":"A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links.","authors":"Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu","doi":"10.1038/s41378-025-00935-1","DOIUrl":"https://doi.org/10.1038/s41378-025-00935-1","url":null,"abstract":"This paper presents a compact and high-performance piezoelectric micro-electro-mechanical system (MEMS) fast steering mirror (FSM) designed for use in laser inter-satellite links (ISLs). The FSM features a large optical aperture of 10 mm and is batch fabricated using an 8-inch wafer-level eutectic bonding process, packaged into a volume of 26 × 22 × 3 mm3. Notably, the piezoresistive (PZR) sensor is integrated on the spring of the FSM to facilitate precise beam control. Furthermore, an intermediate directional defect structure is novelly designed to create a Stress Concentration Region (SCR), effectively improving PZR sensitivity from 3.3 mV/(V∙mrad) to 5.4 mV/(V∙mrad). In this article, various performance metrics of the FSM are tested, including the mechanical characteristics, PZR sensor properties, and mirror optical quality, which all meet the requirements for laser ISLs. Results indicate that the FSM achieves a high resonant frequency (>1 kHz) and a low nonlinearity of 0.05%@ ± 2.1 mrad. A remarkable minimum angular resolution of 0.3 μrad and a repeated positioning accuracy of 1.11 μrad ensure exceptional pointing precision. The open-loop control is driven by the double-step algorithm, resulting in a step response time of 0.41 ms and achieving a control bandwidth over 2 kHz. Additionally, the integrated angular sensor demonstrates a nonlinearity of 0.09%@ ± 1.05 mrad, a sensitivity of 5.1 mV/(V∙mrad), and a minimum angular resolution of 0.3 μrad. Under quasi-static driven conditions (500 Hz @ ± 2 mrad), the maximum dynamic deformation of the mirror surface is merely 2 nm.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"75"},"PeriodicalIF":7.3,"publicationDate":"2025-04-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12038044/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143990212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments. 用于恶劣环境的无引线封装重掺杂n型4H-SiC压力传感器系列的开发。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2025-04-28 DOI: 10.1038/s41378-025-00929-z

Lukang Wang, Nuo Wan, Yu Yang, Yabing Wang, You Zhao, Jiaoyang Zhu, Minye Yang, Yi Lyu, Ming Liu, Yulong Zhao

{"title":"Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments.","authors":"Lukang Wang, Nuo Wan, Yu Yang, Yabing Wang, You Zhao, Jiaoyang Zhu, Minye Yang, Yi Lyu, Ming Liu, Yulong Zhao","doi":"10.1038/s41378-025-00929-z","DOIUrl":"https://doi.org/10.1038/s41378-025-00929-z","url":null,"abstract":"In many industries, there is a growing demand for semiconductor pressure sensors capable of operating in harsh environments with extremely high and low temperatures and high vibrations. Utilizing the piezoresistive effect of heavily doped N-type 4H-SiC, we proposed a family design of eight pressure sensor chip structures featuring different diaphragm shapes of circles and squares, along with different piezoresistor configurations. The 4H-SiC piezoresistive pressure sensor was developed using micro-electromechanical systems (MEMS) technology and encapsulated in a leadless package structure via low-stress connection achieved by glass frit sintering. The 4H-SiC pressure sensor demonstrates impressive performance, exhibiting an accuracy of 0.18% FSO and a temperature tolerance range from -50 to 600 °C, with a temperature coefficient of zero output as low as 0.08%/°C at 600 °C. Furthermore, the developed sensor shows remarkable stability under conditions of high-temperature vibration coupling. The advancement of this family of 4H-SiC pressure sensors provides a promising solution for pressure measurement in harsh industrial environments.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"74"},"PeriodicalIF":7.3,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12037772/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143978131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0