Microsystems & Nanoengineering最新文献_第4页

Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator. 基于嵌入式微通道体声波谐振器的超灵敏液体传感器。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-11 DOI: 10.1038/s41378-024-00790-6

Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun

{"title":"Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.","authors":"Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun","doi":"10.1038/s41378-024-00790-6","DOIUrl":"10.1038/s41378-024-00790-6","url":null,"abstract":"The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies. In this work, a fluidic sensor based on a BAW resonator structure is fabricated and investigated. Embedded microchannels are formed beneath the active area of the BAW device without the need for external processes. As liquid flows through the microchannel, pressure is exerted on the upper wall (piezoelectric film) of the microchannel, which causes a shift in the resonant frequency. Using density functional theory, we revealed the intrinsic mechanism by which piezoelectric film deformation influences BAW resonator performance. Theoretically, the upwardly convex piezoelectric film caused by liquid flow can increase the resonant frequency. The experimental results obtained with ethanol solutions of different concentrations reveal that the sensor, which operates at a high resonant frequency of 2.225 GHz, achieves a remarkable sensitivity of 5.1 MHz/% (221 ppm/%), with an ultrahigh linearity of 0.995. This study reveals the intrinsic mechanism of liquid sensing based on BAW resonators, highlights the potential of AlN/Al0.8Sc0.2N composite film BAW resonators in liquid sensing applications and offers insights for future research and development in this field.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"143"},"PeriodicalIF":7.3,"publicationDate":"2024-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11467206/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142400711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Quantitative and spatially resolved detection of multiplexed microRNA from plant tissue via hybridization to hydrogel-bound DNA probes in nanoliter well arrays. 通过与纳升孔阵列中的水凝胶结合 DNA 探针杂交，对植物组织中的多重 microRNA 进行定量和空间分辨检测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-10-08 DOI: 10.1038/s41378-024-00785-3

Jennifer Fang, Patrick S Doyle

{"title":"Quantitative and spatially resolved detection of multiplexed microRNA from plant tissue via hybridization to hydrogel-bound DNA probes in nanoliter well arrays.","authors":"Jennifer Fang, Patrick S Doyle","doi":"10.1038/s41378-024-00785-3","DOIUrl":"https://doi.org/10.1038/s41378-024-00785-3","url":null,"abstract":"Understanding complex regulatory networks in plant systems requires elucidating the roles of various gene regulators under a spatial landscape. MicroRNA are key regulators that impart high information value through their tissue specificity and stability when using expression patterns for evaluating network outcomes. However, current techniques that utilize spatial multiplexing and quantitation of microRNA are limited to primarily mammalian systems. Here, we present a method to spatially resolve and quantify multiple endogenous microRNA in situ using ethanol fixed, paraffin embedded model plant species. This method utilizes target-specific microRNA capture along with universal ligating and labelling, all within functionalized hydrogel posts containing DNA probes in nanoliter well arrays. We demonstrate the platform's multiplexing capabilities through analyzing three endogenous microRNA in Arabidopsis thaliana rosettes which provide useful answers to fundamental plant growth and development from the unique expression patterns. The spatial tissue technique is also validated using non-spatial small RNA assays to demonstrate the versatility of the well array platform. Our new platform expands the toolkit of spatial omics technologies for plants.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"142"},"PeriodicalIF":7.3,"publicationDate":"2024-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11458878/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142391747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery. 用于胃肠道内窥镜微创手术的基于压阻的三轴 MEMS 触觉传感器和集成手术钳。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00774-6

Cheng Hou, Huxin Gao, Xiaoxiao Yang, Guangming Xue, Xiuli Zuo, Yanqing Li, Dongsheng Li, Bo Lu, Hongliang Ren, Huicong Liu, Lining Sun

{"title":"A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery.","authors":"Cheng Hou, Huxin Gao, Xiaoxiao Yang, Guangming Xue, Xiuli Zuo, Yanqing Li, Dongsheng Li, Bo Lu, Hongliang Ren, Huicong Liu, Lining Sun","doi":"10.1038/s41378-024-00774-6","DOIUrl":"https://doi.org/10.1038/s41378-024-00774-6","url":null,"abstract":"In robotic-assisted surgery (RAS), traditional surgical instruments without sensing capability cannot perceive accurate operational forces during the task, and such drawbacks can be largely intensified when sophisticated tasks involving flexible and slender arms with small end-effectors, such as in gastrointestinal endoscopic surgery (GES). In this study, we propose a microelectromechanical system (MEMS) piezoresistive 3-axial tactile sensor for GES forceps, which can intuitively provide surgeons with online force feedback during robotic surgery. The MEMS fabrication process facilitates sensor chips with miniaturized dimensions. The fully encapsulated tactile sensors can be effortlessly integrated into miniature GES forceps, which feature a slender diameter of just 3.5 mm and undergo meticulous calibration procedures via the least squares method. Through experiments, the sensor's ability to accurately measure directional forces up to 1.2 N in the Z axis was validated, demonstrating an average relative error of only 1.18% compared with the full-scale output. The results indicate that this tactile sensor can provide effective 3-axial force sensing during surgical operations, such as grasping and pulling, and in ex vivo testing with a porcine stomach. The compact size, high precision, and integrability of the sensor establish solid foundations for clinical application in the operating theater.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"141"},"PeriodicalIF":7.3,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427553/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ultra-sensitive nitrate-ion detection via transconductance-enhanced graphene ion-sensitive field-effect transistors. 通过跨导增强型石墨烯离子敏感场效应晶体管实现超灵敏硝酸根离子检测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00768-4

Yingming Xu, Peng Zhou, Terrence Simon, Tianhong Cui

{"title":"Ultra-sensitive nitrate-ion detection via transconductance-enhanced graphene ion-sensitive field-effect transistors.","authors":"Yingming Xu, Peng Zhou, Terrence Simon, Tianhong Cui","doi":"10.1038/s41378-024-00768-4","DOIUrl":"https://doi.org/10.1038/s41378-024-00768-4","url":null,"abstract":"Current potentiometric sensing methods are limited to detecting nitrate at parts-per-billion (sub-micromolar) concentrations, and there are no existing potentiometric chemical sensors with ultralow detection limits below the parts-per-trillion (picomolar) level. To address these challenges, we integrate interdigital graphene ion-sensitive field-effect transistors (ISFETs) with a nitrate ion-sensitive membrane (ISM). The work aims to maximize nitrate ion transport through the nitrate ISM, while achieving high device transconductance by evaluating graphene layer thickness, optimizing channel width-to-length ratio (RWL), and enlarging total sensing area. The captured nitrate ions by the nitrate ISM induce surface potential changes that are transduced into electrical signals by graphene, manifested as the Dirac point shifts. The device exhibits Nernst response behavior under ultralow concentrations, achieving a sensitivity of 28 mV/decade and establishing a record low limit of detection of 0.041 ppt (4.8 × 10-13 M). Additionally, the sensor showed a wide linear detection range from 0.1 ppt (1.2 × 10-12 M) to 100 ppm (1.2 × 10-3 M). Furthermore, successful detection of nitrate in tap and snow water was demonstrated with high accuracy, indicating promising applications to drinking water safety and environmental water quality control.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"137"},"PeriodicalIF":7.3,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427685/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

An artificial intelligence-assisted digital microfluidic system for multistate droplet control. 用于多态液滴控制的人工智能辅助数字微流体系统。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00775-5

Kunlun Guo, Zerui Song, Jiale Zhou, Bin Shen, Bingyong Yan, Zhen Gu, Huifeng Wang

{"title":"An artificial intelligence-assisted digital microfluidic system for multistate droplet control.","authors":"Kunlun Guo, Zerui Song, Jiale Zhou, Bin Shen, Bingyong Yan, Zhen Gu, Huifeng Wang","doi":"10.1038/s41378-024-00775-5","DOIUrl":"https://doi.org/10.1038/s41378-024-00775-5","url":null,"abstract":"Digital microfluidics (DMF) is a versatile technique for parallel and field-programmable control of individual droplets. Given the high level of variability in droplet manipulation, it is essential to establish self-adaptive and intelligent control methods for DMF systems that are informed by the transient state of droplets and their interactions. However, most related studies focus on droplet localization and shape recognition. In this study, we develop the AI-assisted DMF framework μDropAI for multistate droplet control on the basis of droplet morphology. The semantic segmentation model is integrated into our custom-designed DMF system to recognize the droplet states and their interactions for feedback control with a state machine. The proposed model has strong flexibility and can recognize droplets of different colors and shapes with an error rate of less than 0.63%; it enables control of droplets without user intervention. The coefficient of variation (CV) of the volumes of split droplets can be limited to 2.74%, which is lower than the CV of traditional dispensed droplets, contributing to an improvement in the precision of volume control for droplet splitting. The proposed system inspires the development of semantic-driven DMF systems that can interface with multimodal large language models (MLLMs) for fully automatic control.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"138"},"PeriodicalIF":7.3,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427450/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Unveiling the tradeoff between device scale and surface nonidealities for an optimized quality factor at room temperature in 2D MoS₂ nanomechanical resonators. 揭示二维 MoS2 纳米机械谐振器在室温下优化品质因数时器件尺度与表面非理想性之间的权衡。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00763-9

Pengcheng Zhang, Yueyang Jia, Shuai Yuan, Maosong Xie, Zuheng Liu, Hao Jia, Rui Yang

{"title":"Unveiling the tradeoff between device scale and surface nonidealities for an optimized quality factor at room temperature in 2D MoS2 nanomechanical resonators.","authors":"Pengcheng Zhang, Yueyang Jia, Shuai Yuan, Maosong Xie, Zuheng Liu, Hao Jia, Rui Yang","doi":"10.1038/s41378-024-00763-9","DOIUrl":"https://doi.org/10.1038/s41378-024-00763-9","url":null,"abstract":"A high quality (Q) factor is essential for enhancing the performance of resonant nanoelectromechanical systems (NEMS). NEMS resonators based on two-dimensional (2D) materials such as molybdenum disulfide (MoS2) have high frequency tunability, large dynamic range, and high sensitivity, yet room-temperature Q factors are typically less than 1000. Here, we systematically investigate the effects of device size and surface nonidealities on Q factor by measuring 52 dry-transferred fully clamped circular MoS2 NEMS resonators with diameters ranging from 1 μm to 8 μm, and optimize the Q factor by combining these effects with the strain-modulated dissipation model. We find that Q factor first increases and then decreases with diameter, with an optimized room-temperature Q factor up to 3315 ± 115 for a 2-μm-diameter device. Through extensive characterization and analysis using Raman spectroscopy, atomic force microscopy, and scanning electron microscopy, we demonstrate that surface nonidealities such as wrinkles, residues, and bubbles are especially significant for decreasing Q factor, especially for larger suspended membranes, while resonators with flat and smooth surfaces typically have larger Q factors. To further optimize Q factors, we measure and model Q factor dependence on the gate voltage, showing that smaller DC and radio-frequency (RF) driving voltages always lead to a higher Q factor, consistent with the strain-modulated dissipation model. This optimization of the Q factor delineates a straightforward and promising pathway for designing high-Q 2D NEMS resonators for ultrasensitive transducers, efficient RF communications, and low-power memory and computing.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"140"},"PeriodicalIF":7.3,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427663/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349956","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Artificial intelligence-enabled multipurpose smart detection in active-matrix electrowetting-on-dielectric digital microfluidics. 主动矩阵电介质数字微流体中的人工智能多用途智能检测。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00765-7

Zhiqiang Jia, Chunyu Chang, Siyi Hu, Jiahao Li, Mingfeng Ge, Wenfei Dong, Hanbin Ma

{"title":"Artificial intelligence-enabled multipurpose smart detection in active-matrix electrowetting-on-dielectric digital microfluidics.","authors":"Zhiqiang Jia, Chunyu Chang, Siyi Hu, Jiahao Li, Mingfeng Ge, Wenfei Dong, Hanbin Ma","doi":"10.1038/s41378-024-00765-7","DOIUrl":"https://doi.org/10.1038/s41378-024-00765-7","url":null,"abstract":"An active-matrix electrowetting-on-dielectric (AM-EWOD) system integrates hundreds of thousands of active electrodes for sample droplet manipulation, which can enable simultaneous, automatic, and parallel on-chip biochemical reactions. A smart detection system is essential for ensuring a fully automatic workflow and online programming for the subsequent experimental steps. In this work, we demonstrated an artificial intelligence (AI)-enabled multipurpose smart detection method in an AM-EWOD system for different tasks. We employed the U-Net model to quantitatively evaluate the uniformity of the applied droplet-splitting methods. We used the YOLOv8 model to monitor the droplet-splitting process online. A 97.76% splitting success rate was observed with 18 different AM-EWOD chips. A 99.982% model precision rate and a 99.980% model recall rate were manually verified. We employed an improved YOLOv8 model to detect single-cell samples in nanolitre droplets. Compared with manual verification, the model achieved 99.260% and 99.193% precision and recall rates, respectively. In addition, single-cell droplet sorting and routing experiments were demonstrated. With an AI-based smart detection system, AM-EWOD has shown great potential for use as a ubiquitous platform for implementing true lab-on-a-chip applications.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"139"},"PeriodicalIF":7.3,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427566/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Overcoming bubble formation in polydimethylsiloxane-made PCR chips: mechanism and elimination with a high-pressure liquid seal. 克服聚二甲基硅氧烷 PCR 芯片中气泡的形成：高压液体密封的机理与消除。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-27 DOI: 10.1038/s41378-024-00725-1

Shiyuan Gao, Tiegang Xu, Lei Wu, Xiaoyue Zhu, Xuefeng Wang, Xiaohong Jian, Xinxin Li

引用次数: 0

Atomic Nb-doping of WS₂ for high-performance synaptic transistors in neuromorphic computing. 用于神经形态计算中高性能突触晶体管的 WS2 原子掺铌。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-26 DOI: 10.1038/s41378-024-00779-1

Kejie Guan, Yinxiao Li, Lin Liu, Fuqin Sun, Yingyi Wang, Zhuo Zheng, Weifan Zhou, Cheng Zhang, Zhengyang Cai, Xiaowei Wang, Simin Feng, Ting Zhang

{"title":"Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing.","authors":"Kejie Guan, Yinxiao Li, Lin Liu, Fuqin Sun, Yingyi Wang, Zhuo Zheng, Weifan Zhou, Cheng Zhang, Zhengyang Cai, Xiaowei Wang, Simin Feng, Ting Zhang","doi":"10.1038/s41378-024-00779-1","DOIUrl":"https://doi.org/10.1038/s41378-024-00779-1","url":null,"abstract":"Owing to the controllable growth and large-area synthesis for high-density integration, interest in employing atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDCs) for synaptic transistors is increasing. In particular, substitutional doping of 2D materials allows flexible modulation of material physical properties, facilitating precise control in defect engineering for eventual synaptic plasticity. In this study, to increase the switch ratio of synaptic transistors, we selectively performed experiments on WS2 and introduced niobium (Nb) atoms to serve as the channel material. The Nb atoms were substitutionally doped at the W sites, forming a uniform distribution across the entire flakes. The synaptic transistor devices exhibited an improved switch ratio of 103, 100 times larger than that of devices prepared with undoped WS2. The Nb atoms in WS2 play crucial roles in trapping and detrapping electrons. The modulation of channel conductivity achieved through the gate effectively simulates synaptic potentiation, inhibition, and repetitive learning processes. The Nb-WS2 synaptic transistor achieves 92.30% recognition accuracy on the Modified National Institute of Standards and Technology (MNIST) handwritten digit dataset after 125 training iterations. This study's contribution extends to a pragmatic and accessible atomic doping methodology, elucidating the strategies underlying doping techniques for channel materials in synaptic transistors.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"132"},"PeriodicalIF":7.3,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427458/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142336469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors. 具有稳定接口的铂薄膜电阻温度探测器，有望集成到碳化硅高温压力传感器中。

IF 7.3 1区工程技术

Microsystems & Nanoengineering Pub Date : 2024-09-26 DOI: 10.1038/s41378-024-00746-w

Ziyan Fang, Xiaoyu Wu, Hu Zhao, Xudong Fang, Chen Wu, Dong Zhang, Zhongkai Zhang, Bian Tian, Libo Zhao, Tiefu Li, Prateek Verma, Ryutaro Maeda, Zhuangde Jiang

{"title":"Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors.","authors":"Ziyan Fang, Xiaoyu Wu, Hu Zhao, Xudong Fang, Chen Wu, Dong Zhang, Zhongkai Zhang, Bian Tian, Libo Zhao, Tiefu Li, Prateek Verma, Ryutaro Maeda, Zhuangde Jiang","doi":"10.1038/s41378-024-00746-w","DOIUrl":"https://doi.org/10.1038/s41378-024-00746-w","url":null,"abstract":"Due to the excellent mechanical, chemical, and electrical properties of third-generation semiconductor silicon carbide (SiC), pressure sensors utilizing this material might be able to operate in extreme environments with temperatures exceeding 300 °C. However, the significant output drift at elevated temperatures challenges the precision and stability of measurements. Real-time in situ temperature monitoring of the pressure sensor chip is highly important for the accurate compensation of the pressure sensor. In this study, we fabricate platinum (Pt) thin-film resistance temperature detectors (RTDs) on a SiC substrate by incorporating aluminum oxide (Al2O3) as the transition layer and utilizing aluminum nitride (AlN) grooves for alignment through microfabrication techniques. The composite layers strongly adhere to the substrate at temperatures reaching 950 °C, and the interface of the Al2O3/Pt bilayer remains stable at elevated temperatures of approximately 950 °C. This stability contributes to the excellent high-temperature electrical performance of the Pt RTD, enabling it to endure temperatures exceeding 850 °C with good linearity. These characteristics establish a basis for the future integration of Pt RTD in SiC pressure sensors. Furthermore, tests and analyses are conducted on the interfacial diffusion, surface morphological, microstructural, and electrical properties of the Pt films at various annealing temperatures. It can be inferred that the tensile stress and self-diffusion of Pt films lead to the formation of hillocks, ultimately reducing the electrical performance of the Pt thin-film RTD. To increase the upper temperature threshold, steps should be taken to prevent the agglomeration of Pt films.","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"133"},"PeriodicalIF":7.3,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11427678/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142349952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0