Microsystems & Nanoengineering最新文献

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A self-powered hydration-monitoring and drug-delivery skin patch for closed-loop treatment of atopic dermatitis. 一种用于特应性皮炎闭环治疗的自供电水化监测和给药皮肤贴片。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-18 DOI: 10.1038/s41378-025-01000-7
Shan Liang, Shiwei Liu, Zhihe Long, Xiaojiao Li, Qian Han, Xianhao Wei, Lili Xing, Xinyu Xue, Meihua Chen
{"title":"A self-powered hydration-monitoring and drug-delivery skin patch for closed-loop treatment of atopic dermatitis.","authors":"Shan Liang, Shiwei Liu, Zhihe Long, Xiaojiao Li, Qian Han, Xianhao Wei, Lili Xing, Xinyu Xue, Meihua Chen","doi":"10.1038/s41378-025-01000-7","DOIUrl":"10.1038/s41378-025-01000-7","url":null,"abstract":"<p><p>Atopic dermatitis is a chronic inflammatory skin condition that typically manifests in infancy and is characterized by dry, irritated skin. Here, we propose a self-powered hydration-monitoring and drug-delivery skin patch for closed-loop treatment of atopic dermatitis. The patch is composed of piezoelectric generator, hydration sensing unit, microneedle treatment module and flexible circuit. The piezoelectric PZT generator can achieve self-powering by harvesting mechanical energy from patient activities, allowing for long-term work of the system without external power sources. The hydration sensing unit can rapidly and accurately detect changes in skin hydration by estimating the thermal conductivity. Upon detecting abnormal skin hydration levels for 65 s, the treatment module is automatically activated, heating hyaluronic acid-based microneedles (~42 °C) to release dexamethasone sodium phosphate (DEX), thereby providing timely targeted therapy and moisturization to the affected area within minutes. Therapeutic results in mice model of atopic dermatitis demonstrate that our patch can effectively treat this skin disease, improving the epidermal thickness, IL-4, spleen size and mass. The system achieves closed-loop detection and treatment of atopic dermatitis without external intervention, offering a novel approach to managing skin disease and expanding the scope of self-powered biomedical engineering systems. A self-powered hydration-monitoring and drug-delivery skin patch is designed for closed-loop treatment of atopic dermatitis. The patch composes of piezoelectric generator, hydration sensing unit, microneedle treatment module, and flexible circuit. This integrated system achieves closed-loop detection and treatment of atopic dermatitis without external intervention, offering a novel approach to managing skin disease and expanding the scope of self-powered biomedical engineering systems.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"156"},"PeriodicalIF":9.9,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12361490/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144874081","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics. 数字微流体中的核酸扩增测试:下一代即时诊断的前景。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-18 DOI: 10.1038/s41378-025-00977-5
Duc Anh Thai, Yuguang Liu
{"title":"Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics.","authors":"Duc Anh Thai, Yuguang Liu","doi":"10.1038/s41378-025-00977-5","DOIUrl":"10.1038/s41378-025-00977-5","url":null,"abstract":"<p><p>Nucleic acid amplification tests (NAAT) have long been used in laboratory facilities and recently revolutionized the field of molecular diagnostics in point-of-care testing. Digital microfluidics (DMF) has emerged as a promising tool to complete the entire NAAT workflow in a miniaturized format with minimum human intervention. Based on electric fields to manipulate independent reaction droplets, the compact DMF system could perform multiple processes simultaneously and automatically in a programmable fashion. This combination is beginning to establish powerful sample-to-answer platforms in remote or resource-limited settings. Herein, we provide a comprehensive overview of the state-of-the-art DMF technology for point-of-care NAAT. This review focused on key principles of DMF platforms and the latest trends in system integration for automated processes of nucleic acid extraction, amplification, and detection. Also, this article discusses current challenges, including control systems, scalability and throughput, as well as future prospects of DMF-based NAAT strategy for the next generation of point-of-care diagnostics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"155"},"PeriodicalIF":9.9,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12361400/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144874083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer. 基于超快激光焊接的单束磁强计MEMS碱金属蒸气电池的制备。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-14 DOI: 10.1038/s41378-025-00976-6
Yanbin Wang, Mingzhi Yu, Yao Chen, Yintao Ma, Xiangguang Han, Yong Xia, Ju Guo, Ping Yang, Qijing Lin, Shujiang Ding, Libo Zhao
{"title":"The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer.","authors":"Yanbin Wang, Mingzhi Yu, Yao Chen, Yintao Ma, Xiangguang Han, Yong Xia, Ju Guo, Ping Yang, Qijing Lin, Shujiang Ding, Libo Zhao","doi":"10.1038/s41378-025-00976-6","DOIUrl":"10.1038/s41378-025-00976-6","url":null,"abstract":"<p><p>The development of micro-electro-mechanical system (MEMS) alkali metal vapor cells offers the potential for the batch fabrication of micro-quantum sensors for atomic clocks, atomic magnetometers and atomic gyroscopes. The sealing of MEMS vapor cells is traditionally achieved by anodic bonding. However, high-temperature and high direct-voltage conditions during anodic bonding adversely affect the performance of the vapor cell. In this study, a fabrication method based on ultrafast laser welding integrated with a microfabrication process was developed for MEMS alkali metal vapor cells, and the energy-coupling mechanism of welding was analyzed. This method confined high temperatures to a localized area during laser welding. The cross-sections of the welding samples were analyzed, the element distribution was characterized, and the results showed that this method achieved high-strength sealing. Additionally, a platform for alkali metal injection and buffer gas charging was developed to enable the fabrication of MEMS vapor cells with ultrafast laser welding. The MEMS vapor cells were tested using absorption spectra, and the leakage rate under high-temperature vacuum conditions proved that high hermeticity could be achieved by ultrafast laser welding. Finally, MEMS vapor cells were used to fabricate a single-beam magnetometer, and its measurement sensitivity was determined experimentally. This process provides a new method for the efficient fabrication of MEMS vapor cells.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"153"},"PeriodicalIF":9.9,"publicationDate":"2025-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12354740/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144855767","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells. 纳米复合生物传感器跟踪三维水凝胶培养肺癌细胞中厚朴醇诱导的氧化应激动力学。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-14 DOI: 10.1038/s41378-025-01016-z
Yuxuan Zhu, Zhichao Huang, Shichao Tian, Qi Wang, Fan Wu, Jingwen Liu, Ping Wang, Hao Wan, Liujing Zhuang, Deming Jiang
{"title":"Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells.","authors":"Yuxuan Zhu, Zhichao Huang, Shichao Tian, Qi Wang, Fan Wu, Jingwen Liu, Ping Wang, Hao Wan, Liujing Zhuang, Deming Jiang","doi":"10.1038/s41378-025-01016-z","DOIUrl":"10.1038/s41378-025-01016-z","url":null,"abstract":"<p><p>In cancer cells, higher reactive oxygen species (ROS) than normal cells were observed due to hypermetabolism. The redox balance in cancer cells relies on accordingly upregulated antioxidant capacity. By manipulating oxidation and antioxidant systems, chemotherapeutic drugs can selectively kill cancer cells without hurting normal cells. As three-dimensional (3D) in vitro models, such as spheroids and organoids, have become widely used in cancer research, traditional detection methods (e.g., absorption tests or titration) are inadequate for detecting in 3D environments. Thus, it is crucial to find a new method to detect oxidative stress of 3D in vitro cancer models. Here, a nanocomposite electrochemical biosensor was exploited to evaluate oxidative stress of cancer cells cultured in the 3D environment. The oxidation-regulatory capacity of honokiol, a Magnolia genus-derived anti-cancer molecule, was evaluated. A screen-printed electrode (SPCE) was modified with reduced graphene oxide (RGO) and platinum nanoparticles (Pt NPs) to get Pt NPs/RGO/SPCE. Then the gelatin methacrylate/reduced graphene oxide (GelMA/RGO) hydrogel was applied to immobilized NCI-H1975 in a 3D bionic environment to get NCI-H1975/GelMA/RGO/Pt NPs/RGO/SPCE. After optimizing the experiment condition, the Pt NPs/RGO/SPCE showed a detection threshold of 0.65 μM and a linear field from 1 to 10 μM for H<sub>2</sub>O<sub>2</sub> detection while the NCI-H1975/GelMA/RGO/Pt NPs/RGO/SPCE sensitively responded to H<sub>2</sub>O<sub>2</sub>-induced oxidative stress. By utilizing the NCI-H1975/GelMA/RGO/Pt NPs/RGO/SPCE we found honokiol (a natural polyphenol constituent) inhibits NCI-H1975 by inducing oxidative stress. This simple cell-based electrochemical biosensor can in situ evaluate oxidative stress of 3D cancer models conveniently. It can also be easily extended to the study of the mechanism of action of other drugs and holds broad application prospects in the fields of new drug development and drug repurposing.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"154"},"PeriodicalIF":9.9,"publicationDate":"2025-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12354761/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144855766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes. 为有效的基于事件的环境交互优化MEMS惯性开关:动机,方法和目的。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-12 DOI: 10.1038/s41378-025-00997-1
Lyuyan Wang, Jiahao Zhao, Zheng You
{"title":"Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes.","authors":"Lyuyan Wang, Jiahao Zhao, Zheng You","doi":"10.1038/s41378-025-00997-1","DOIUrl":"10.1038/s41378-025-00997-1","url":null,"abstract":"<p><p>The rapid growth of the Internet of Things (IoT) and embodied intelligence has increased the demand for sensor nodes that conserve energy and reduce data transmission, especially in resource-limited applications that rely heavily on sensors. Event-based sensors have emerged to meet this demand by reducing data redundancy and lowering power consumption. Within this domain, MEMS (Micro-Electro-Mechanical Systems) inertial switches stand out as promising alternatives to traditional commercial accelerometers and gyroscopes, catering to the widespread need for inertial sensing. This review categorizes the key aspects for optimizing the performance of MEMS inertial switches, with a focus on threshold sensitivity, directional responsiveness, and contact performance. It explores the technological pathways for achieving these objectives and highlights the wide-ranging applications of MEMS inertial switches, especially in scenarios characterized by energy constraints, large-scale deployments, and harsh environments. Additionally, the current challenges faced in the field are analyzed, and future research directions are proposed to enhance the versatility and integration of MEMS inertial switches, thereby promoting their broader adoption and utility.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"150"},"PeriodicalIF":9.9,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12339684/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144822036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Numerical and Mechanical Analysis of Direct Wafer Bonding Considering Non-Uniform Impurity Particle Distributions. 考虑非均匀杂质颗粒分布的晶圆直接键合的数值和力学分析。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-12 DOI: 10.1038/s41378-025-00994-4
Feixiang Tang, Siyu He, Yuhan Li, Wenjin Liu, Fang Dong, Sheng Liu
{"title":"Numerical and Mechanical Analysis of Direct Wafer Bonding Considering Non-Uniform Impurity Particle Distributions.","authors":"Feixiang Tang, Siyu He, Yuhan Li, Wenjin Liu, Fang Dong, Sheng Liu","doi":"10.1038/s41378-025-00994-4","DOIUrl":"10.1038/s41378-025-00994-4","url":null,"abstract":"<p><p>Direct wafer bonding allows polished semiconductor wafers to be joined together without the use of a binder. It has a wide range of applications in integrated circuit fabrication, micro-electro-mechanical systems (MEMS) packaging and multifunctional chip integration. Chip deflection and strain energy can be used to assess the bonding quality, and impurities have an important effect on the bonding quality. In this paper, a mathematical model and a finite element model of wafer bonding are established. The effects of different impurity distributions (Cluster, Complex, Face, Line) on the bonding quality of wafers are investigated, and the results show that the curvature and thickness of the wafer as well as the distribution of the impurity particles jointly determine the strain energy of the wafer under a certain pressure. Among them, the impurity particle surface distribution has the greatest influence on the wafer bonding quality. Finite element simulations verified the correctness of the proposed model. This work provides a theoretical basis for studying the effect of impurity distribution on wafer bonding performance.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"151"},"PeriodicalIF":9.9,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12343963/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144835649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method. 采用模式反转联合模式偏转控制方法实现了蜂窝盘谐振陀螺仪0.003°/h的偏置不稳定性。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-12 DOI: 10.1038/s41378-025-01011-4
Liangqian Chen, Qingsong Li, Tongqiao Miao, Peng Wang, Xuhui Zhang, Yang Zhang, Xuezhong Wu, Dingbang Xiao
{"title":"0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method.","authors":"Liangqian Chen, Qingsong Li, Tongqiao Miao, Peng Wang, Xuhui Zhang, Yang Zhang, Xuezhong Wu, Dingbang Xiao","doi":"10.1038/s41378-025-01011-4","DOIUrl":"10.1038/s41378-025-01011-4","url":null,"abstract":"<p><p>Microelectromechanical systems (MEMS) gyroscopes with higher precision have always been a focal point of research. Due to limitations in resonant structure, fabrication processes, and measurement and control techniques, MEMS gyroscopes with bias instability better than 0.01°/h are still rare and expensive. This paper incorporates electrode machining error and capacitance detection nonlinear error into the gyroscope model, resulting in a more comprehensive bias output model. Based on this, a mode reversal combined mode deflection control method is proposed to eliminate the thermal drift and decrease the bias instability of the gyroscope. Experimental results demonstrate that compared with the traditional force-to-rebalance mode, the new method achieves a 595 times reduction in bias variation during -40 °C to +60 °C temperature cycles and a 6.3 times reduction in bias instability at room temperature. The average bias instability of honeycomb disk resonator gyroscopes can reach 0.003°/h at integration times of 8500 s after applying the new method across three prototypes, which is the best reported performance of the MEMS gyroscope thus far. This paper provides a new paradigm for achieving higher precision MEMS gyroscopes.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"152"},"PeriodicalIF":9.9,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12343875/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144835648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization. 采用双光子聚合法制备的导电光敏树脂微弹簧力传感器。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-12 DOI: 10.1038/s41378-025-00975-7
Ningning Hu, Yucheng Deng, Lujia Ding, Lijun Men, Wenjun Zhang, Ruixue Yin
{"title":"Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization.","authors":"Ningning Hu, Yucheng Deng, Lujia Ding, Lijun Men, Wenjun Zhang, Ruixue Yin","doi":"10.1038/s41378-025-00975-7","DOIUrl":"10.1038/s41378-025-00975-7","url":null,"abstract":"<p><p>The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible, high-performance sensors across fields ranging from medical devices to robotics. Despite advances in fabrication techniques, the development of micro- and nano-scale flexible force sensors with superior sensitivity, stability, and biocompatibility remains a formidable challenge. In this study, we developed a novel conductive photosensitive resin specifically designed for two-photon polymerization, systematically optimized its printing parameters, and improved its structural design, thereby enabling the fabrication of high-precision micro-spring force sensors (MSFS). The proposed photosensitive resin, doped with MXene nanomaterials, combines exceptional mechanical strength and conductivity, overcoming limitations of traditional materials. Using a support vector machine model in machine learning techniques, we optimized the polymerizability of the resin under varied laser parameters, achieving a predictive accuracy of 92.66%. This model significantly reduced trial-and-error in the TPP process, accelerating the discovery of ideal fabrication conditions. Finite element analysis was employed to design and simulate the performance of the MSFS, guiding structural optimization to achieve high sensitivity and mechanical stability. The fabricated MSFS demonstrated outstanding electromechanical performance, with a sensitivity coefficient of 5.65 and a fabrication accuracy within ±50 nm, setting a new standard for MSFS precision. This work not only pushes the boundaries of sensor miniaturization but also introduces a scalable, efficient pathway for the rapid design and fabrication of high-performance flexible sensors. The development of flexible, high-performance microscale force sensors remains a critical challenge for next-generation biomedical and wearable electronics. Here, we report a novel micro-spring force sensor fabricated via two-photon polymerization using a custom-designed conductive photosensitive resin doped with MXene nanosheets. The resin formulation was optimized to balance mechanical strength and electrical conductivity while ensuring high-resolution printability. To accelerate parameter optimization, a support vector machine model was trained to predict polymerization outcomes based on laser conditions and material compositions, achieving a prediction accuracy of 92.66%. Finite element analysis guided the design of the MSFS structure, enabling tunable electromechanical performance. The fabricated MSFS exhibited excellent sensitivity high fabrication precision and long-term stability. These results demonstrate the potential of integrating machine learning, functional nanomaterials, and TPP microfabrication to enable scalable, high-precision production of intelligent microsensors for biomedical and soft robotic applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"149"},"PeriodicalIF":9.9,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12339963/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144822035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Scaling LLSAW filters on engineered LiNbO3-on-SiC wafer for 5G and Wi-Fi 6 wideband applications. 用于5G和Wi-Fi 6宽带应用的工程LiNbO3-on-SiC晶圆上缩放LLSAW滤波器。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-11 DOI: 10.1038/s41378-025-01007-0
Peisen Liu, Sulei Fu, Boyuan Xiao, Xinchen Zhou, Qiufeng Xu, Jiajun Gao, Shuai Zhang, Rui Wang, Cheng Song, Fei Zeng, Weibiao Wang, Feng Pan
{"title":"Scaling LLSAW filters on engineered LiNbO<sub>3</sub>-on-SiC wafer for 5G and Wi-Fi 6 wideband applications.","authors":"Peisen Liu, Sulei Fu, Boyuan Xiao, Xinchen Zhou, Qiufeng Xu, Jiajun Gao, Shuai Zhang, Rui Wang, Cheng Song, Fei Zeng, Weibiao Wang, Feng Pan","doi":"10.1038/s41378-025-01007-0","DOIUrl":"10.1038/s41378-025-01007-0","url":null,"abstract":"<p><p>With the surge in fifth-generation (5G) wireless systems and escalating growth of data traffic, the push for higher carrier frequencies with wider bandwidths intensifies. This work reveals the outstanding capabilities of wafer-level longitudinal leaky surface acoustic wave (LLSAW) devices on the lithium niobate on insulator (LNOI) platform in scaling SAW technology beyond 4 GHz by mass-produced lithography. Leveraging SiC-based LNOI, the fabricated LLSAW resonators showcase remarkable quality factor (Q), scalable electromechanical factor <math> <mrow> <mfenced> <mrow> <msubsup><mrow><mi>k</mi></mrow> <mrow><mtext>eff</mtext></mrow> <mrow><mn>2</mn></mrow> </msubsup> </mrow> </mfenced> </mrow> </math> from 14% to 28%, and record high figure-of-merit (FoM) of 166 to 222 at 5-6 GHz. Targeted for diverse bands, LLSAW filters with adaptable bandwidths have been realized on specific LN-on-SiC platforms. The filters covering the n79 full band with a minimum insertion loss (IL<sub>min</sub>) of 0.85 dB and the 5 GHz Wi-Fi full band with an IL<sub>min</sub> of 1.62 dB, have been demonstrated for the first time. These findings position LLSAW on LN-on-SiC platform as a promising commercial-grade candidate for pushing the SAW paradigm towards high frequency and wideband filtering.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"148"},"PeriodicalIF":9.9,"publicationDate":"2025-08-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12336300/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144817108","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Planar-electroporated cell biosensor for investigating potential therapeutic effects of ectopic bitter receptors. 用于研究异位苦味受体潜在治疗作用的平面电穿孔细胞生物传感器。
IF 9.9 1区 工程技术
Microsystems & Nanoengineering Pub Date : 2025-08-04 DOI: 10.1038/s41378-025-00985-5
Changming Chen, Jianguo Wu, Chunlian Qin, Yong Qiu, Nan Jiang, Qifei Wang, Mengxue Liu, Deming Jiang, Qunchen Yuan, Xinwei Wei, Liujing Zhuang, Ping Wang
{"title":"Planar-electroporated cell biosensor for investigating potential therapeutic effects of ectopic bitter receptors.","authors":"Changming Chen, Jianguo Wu, Chunlian Qin, Yong Qiu, Nan Jiang, Qifei Wang, Mengxue Liu, Deming Jiang, Qunchen Yuan, Xinwei Wei, Liujing Zhuang, Ping Wang","doi":"10.1038/s41378-025-00985-5","DOIUrl":"10.1038/s41378-025-00985-5","url":null,"abstract":"<p><p>Bitter receptors were initially identified within the gustatory system. In recent years, bitter receptors have been found in various non-gustatory tissues, including the cardiovascular system, where they participate in diverse physiological processes. To investigate the electrophysiological and potential therapeutic implications of bitter receptors, we have developed a highly sensitive, multifunctional planar-electroporated cell biosensor (PECB) for high-throughput evaluation of the effects of bitter substances on cardiomyocytes. The PECB demonstrated the capability for high-throughput, stable, and reproducible detection of intracellular action potentials (IAPs). In comparison to conventional biosensors that utilize extracellular action potentials (EAPs) for data analysis, the IAPs recorded by the PECB provided high-resolution insights into action potentials, characterized by increased amplitudes and an enhanced signal-to-noise ratio (SNR). The PECB successfully monitored IAPs induced by the activation of bitter receptors by using three bitter substances: diphenidol, denatonium benzoate, and arbutin in cardiomyocytes. To further assess the drug development ability of our PECB, we established an in vitro long QT syndrome (LQTS) model to investigate the potential therapeutic effects of arbutin. The results indicated that arbutin altered the electrophysiological properties of cardiomyocytes and significantly shortened the repolarization time in the LQTS model. Moreover, it demonstrated its potential mechanistic pathway by activating bitter receptors to modulate cardiac ion channel activities. The developed PECB provides an effective platform for high-throughput screening of substrates of bitter receptors for the treatment of heart disease, presenting new opportunities for the development of antiarrhythmic therapies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"147"},"PeriodicalIF":9.9,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12322262/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144784763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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