Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging.

IF 9.9 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Younghwan Yang, Dohyun Kang, Junhwa Seong, Kyungtae Kim, Seokwoo Kim, Chunghwan Jung, Eunji Lee, Hyeonsu Heo, Hyunjung Kang, Nara Jeon, Jihae Lee, Youngsun Jeon, Yujin Park, Junsuk Rho
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Abstract

Metalenses-two-dimensionally arranged artificial nanostructures that focus light-have been extensively studied due to their great potential for applications in consumer goods and industrial products. However, when metalenses are exposed to harsh environments, they can suffer from mechanical shocks and damage, leading to degradation in optical performance. Here, we present mechanically robust and self-cleanable encapsulated metalenses using spin-on-glass coatings on structured hydrogenated amorphous silicon (a-Si:H), whose optical properties are optimized for effective waveguiding. The atomic structure of a-Si:H has been precisely engineered to achieve a high refractive index (3.23) with near-zero optical losses at the wavelength of 635 nm by adjusting deposition parameters. We develop an analytical model to determine how the refractive index of nanostructures influences light manipulation, highlighting the correlation between refractive indices of structures and metalens efficiencies. Using the high refractive index of the a-Si:H, our encapsulated metalenses achieved a calculated conversion efficiency of 97.2% at the wavelength of 635 nm. Additionally, we verify their mechanical robustness by sonicating encapsulated metalenses with sand for 120 min, demonstrating strong mechanical durability. Furthermore, with the capability of the encapsulated metalenses to perform self-cleaning, this work paves the way for practical applications of metalenses in diverse environments.

机械坚固和自清洁封装超构透镜通过旋转玻璃包装。
超透镜是一种聚焦光的二维排列的人造纳米结构,由于其在消费品和工业产品中的巨大应用潜力而得到了广泛的研究。然而,当超透镜暴露在恶劣环境中时,它们可能遭受机械冲击和损坏,导致光学性能下降。在这里,我们在结构氢化非晶硅(a-Si:H)上使用玻璃上自旋涂层,提出了机械坚固且可自清洁的封装超透镜,其光学特性被优化为有效波导。通过调整沉积参数,精确设计了a- si:H的原子结构,使其在635 nm波长处具有高折射率(3.23)和近零光学损耗。我们开发了一个分析模型来确定纳米结构的折射率如何影响光操纵,突出了结构折射率与超构透镜效率之间的相关性。利用a- si:H的高折射率,我们封装的超透镜在635 nm波长处的计算转换效率为97.2%。此外,我们还通过将封装的超透镜与砂土声波作用120分钟来验证其机械坚固性,证明其具有很强的机械耐久性。此外,由于封装的金属透镜具有自清洁的能力,这项工作为金属透镜在不同环境中的实际应用铺平了道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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