Ruoyao Huang, Tingxuan Chen, Ling Zhu, Kwai Hei Li
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引用次数: 0
Abstract
Tactile sensors are crucial in robotics and medical diagnostics, requiring precise real-time detection. However, the development of a compact sensor that can measure force across a wide range, with high resolution and rapid response along three axes, remains extremely limited. Herein, an opto-electro-mechanical tactile sensor is reported, utilizing a monolithically integrated GaN-based optochip with a fingerprint-patterned polydimethylsiloxane (PDMS) film. The sensor exhibits a linear response over a broad measurement range of ±100 mN for shear force and 0-200 mN for normal force, with a detection resolution of 0.07 mN. It also demonstrates fast response and recovery times of 0.85 ms and 0.82 ms, respectively. Experimental verification of its application in surface topography scanning and organ lesion assessment highlights its potential for enhancing robotic perception and medical diagnosis.
期刊介绍：
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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