基于高钾单晶铌酸锂的超小型毫米波滤波芯片。

IF 9.9 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Qun Li, Junyan Zheng, Yansong Yang
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引用次数: 0

摘要

下一代通信系统需要大量部署集成多物理域的超小型高性能滤波器。然而,实现小型化、低插入损耗、高选择性和低成本之间的最佳平衡仍然是现有技术面临的挑战。在此,我们提出并演示了基于多功能铌酸锂(LN)的超小型毫米波滤波器,该滤波器具有出色的非线性光学、电光、压电、铁电和热电特性。作为一种具有低介电损耗和简单制造的高k材料,LN为集成光子,声学和电磁功能提供了理想的平台。值得注意的是,虽然LN已经被证明可以用于声学和光信号处理,但它在电磁信号处理方面的潜力仍未得到充分开发。在这项工作中,我们分别介绍了为窄带和宽带毫米波应用量身定制的二阶和四阶线性毫米波带通滤波器(bpf)。通过精心优化LN厚度,我们提高了高阶模式的截止频率,增强了频率选择性,同时保持了紧凑性。基于lnf的bpf表现出创纪录的性能指标,包括最小的插入损耗、高选择性和与微制造工艺的兼容性。基于lnf的bpf满足毫米波无线通信、传感、成像和新兴量子信息系统的关键需求,为可扩展的多物理集成电路铺平了道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate.

Next-generation communication systems require the mass deployment of ultra-small, high-performance filters that integrate multi-physical domains. However, achieving an optimal balance between miniaturization, low insertion loss, high selectivity, and low cost of millimeter-wave filters remains a challenge for existing technologies. Herein, we propose and demonstrate ultra-small millimeter-wave filters based on the multifunctional lithium niobate (LN) with outstanding nonlinear optical, electro-optic, piezoelectric, ferroelectric, and thermoelectric characteristics. As a high-K material with low dielectric loss and straightforward fabrication, LN provides an ideal platform for integrating photonic, acoustic, and electromagnetic functionalities. Notably, while LN is already proven for acoustic and optical signal processing, its potential for electromagnetic signal processing remains largely unexplored. In this work, we introduce second-order and fourth-order LN-based millimeter-wave bandpass filters (BPFs) tailored for narrowband and wideband millimeter-wave applications, respectively. Through careful optimization of the LN thickness, we elevate the cutoff frequencies of high-order modes, enhancing frequency selectivity while maintaining compactness. The LN-based BPFs exhibit record-breaking performance metrics, including minimal insertion loss, high selectivity, and compatibility with microfabrication processes. The LN-based BPFs fulfill the critical demands of millimeter-wave wireless communications, sensing, imaging, and emerging quantum information systems, paving the way for scalable, multi-physical integrated circuits.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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