Microsystems & Nanoengineering最新文献

{"title":"An integrated monolithic photonic accelerometer with on-chip fringe-counting.","authors":"Yuqi Meng, Qiyun Hu, Ehsan Vatankhah, Zihuan Liu, Wei Wang, Neal A Hall","doi":"10.1038/s41378-026-01410-1","DOIUrl":"10.1038/s41378-026-01410-1","url":null,"abstract":"<p><p>Photonic integrated circuits have transformed optical communication and information processing, yet their potential for precision inertial sensing remains largely untapped. To date, photonic accelerometers have been constrained by readout complexity, limited dynamic range, and insufficient experimental validation. Here we present the design, modelling, and experimental characterization of an integrated photonic accelerometer that combines high sensitivity with substantially enhanced dynamic range via phase-unwrapping. The device achieves a measured noise floor of <math><mrow><mn>2.0</mn> <mi>µ</mi> <mi>g</mi> <mo>/</mo> <msqrt><mrow><mi>Hz</mi></mrow> </msqrt> </mrow> </math> , with a pathway towards <math><mrow><mo>~</mo> <mn>10</mn> <mi>ng</mi> <mo>/</mo> <msqrt><mrow><mi>Hz</mi></mrow> </msqrt> </mrow> </math> through simultaneous scaling of the input optical power and the number of waveguide loops on the cantilever - together projected to bring the input-referred shot-noise-limited sensitivity to the thermal-mechanical noise floor. By incorporating ellipse-fitting-based phase-unwrapping, the sensor enables accurate phase recovery over a substantially expanded measurement range, yielding a 39 dB improvement in dynamic range compared to a conventional Mach-Zehnder interferometer. To our knowledge, this is the first photonic integrated circuit accelerometer to incorporate fringe-counting functionality in a monolithic chip, and the first systematic study of such a strategy in integrated photonic inertial sensors. The photonic hardware enabling open-loop fringe counting - two Mach-Zehnder interferometers with a nominal quarter-wavelength inter-arm path-length offset, whose actual inter-interferometer phase difference is recovered from an in-situ ellipse fit - is monolithically integrated on the silicon-nitride chip, while the ellipse-fit phase-unwrapping algorithm runs in post-processing without active biasing or feedback control. These results establish integrated photonics as a promising platform for high-dynamic-range inertial sensing and a route to chip-scale accelerometers that could surpass existing chip-based technologies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13396487/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148579258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Embedded glass fan-out integration method for high-performance Ka-band RF microsystem.","authors":"Bohan Zhang, Lang Chen, Qi Wang, Wei Wang","doi":"10.1038/s41378-026-01399-7","DOIUrl":"10.1038/s41378-026-01399-7","url":null,"abstract":"<p><p>Heterogeneous radio-frequency (RF) microsystem integration is pivotal for overcoming the physical limitations of monolithic integration, enabling the low signal transmission loss and high operating frequencies demanded by next-generation communication networks. Glass interposers, characterized by inherently low dielectric loss, exceptional planarity, and highly tunable coefficient of thermal expansion, have emerged as an ideal platform for millimeter-wave (mmWave) RF microsystems. In this study, we propose a high-density, low-noise RF integration technology utilizing an embedded glass fan-out process. To address the challenges of glass micromachining, laser-induced deep etching (LIDE) was employed to fabricate high-precision cavities with superior verticality and minimal sidewall roughness for seamless die embedding. Subsequently, through an optimized chemical-mechanical polishing (CMP) process, the surface roughness of the redistribution layer (RDL) is reduced by 97%, successfully suppressing the transmission loss to below 0.25 dB/mm. A compact Ka-band microsystem integrating the low-noise amplifier and the antenna was designed and fabricated, featuring an optimized Chebyshev antenna array and a Klopfenstein taper transition for broadband impedance matching. Furthermore, we demonstrate a heterogeneously integrated Ka-band transceiver microsystem that combines high-performance GaN-based amplifiers with a cost-efficient silicon-based switch. The integrated transceiver exhibits a transmit gain of 26.08 dB and a receive noise figure of 2.73 dB at 28 GHz, within an ultra-compact footprint of 6 × 3 mm². This work provides a highly scalable and robust heterogeneous integration solution for high-performance, multi-functional mmWave microsystems in 5G-Advanced and future 6 G networks.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13392140/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148562547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On-chip integrated NDIR CO₂ gas sensor.","authors":"Wenbo Wang, Yi Wang, Zhongming Lu, Yanxiang Liu, Tie Li","doi":"10.1038/s41378-026-01388-w","DOIUrl":"10.1038/s41378-026-01388-w","url":null,"abstract":"<p><p>This work reports an on-chip integrated non-dispersive infrared CO₂ sensor, in which a microelectromechanical system infrared emitter and a thermopile detector are monolithically integrated on a silicon substrate. Portable CO₂ monitoring, including wearable respiratory monitoring and portable environmental sensing, imposes stringent requirements on sensor miniaturization and rapid response. Conventional non-dispersive infrared sensors, constrained by discrete optical chambers and board-level packaging, face inherent trade-offs among compact size, fast response, detection range, and stability. To address these challenges, the optical chamber and device layout are co-optimized based on radiative transfer and thermal coupling principles to enhance infrared utilization while suppressing thermal crosstalk. Simulations show that the compact chamber achieves an effective optical path length of 11 mm with an optical coupling efficiency of 91.8%. An orthogonal optical-gas path configuration is further adopted to shorten the gas diffusion distance. The packaged sensor module remains highly compact, with dimensions smaller than 21 mm × 10 mm × 5 mm. Under a driving voltage of 2.5 V and a modulation frequency of 5 Hz, the sensor exhibits a response time of ~3 s, power consumption of 31 mW at a duty cycle of 10%, and a detection limit of 146 ppm, while maintaining stable performance over a wide temperature and humidity range. The on-chip integrated approach enables significant footprint reduction without compromising sensing performance, providing a promising pathway for portable CO₂ monitoring.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13396463/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148579300","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ultra-broadband response and extreme low-light detection with a MoS₂/SnS₂ vertical heterostructure photodetector.","authors":"Pengfan Dong, Jiaying Jian, Honglong Chang, Yaxin Nan, Enfu Li, Zengyun Jian, Yanfeng Chen","doi":"10.1038/s41378-026-01380-4","DOIUrl":"10.1038/s41378-026-01380-4","url":null,"abstract":"<p><p>Low-light detection technology is of strategic significance in military reconnaissance and deep space exploration. However, existing photodetectors often struggle to achieve both broadband response and ultra-low-light detection capabilities simultaneously. In this work, a MoS₂/SnS₂ vertical heterostructure photodetector was fabricated using an in-situ two-step chemical vapor deposition (CVD) method. The device successfully realized a broadband coverage ranging from ultraviolet to infrared regions (250-1064 nm) and demonstrated high-sensitivity photodetection of low-light signals. Under illumination at the intensity of 0.0008 mW/cm² and the wavelength of 520 nm, the device showed a responsivity of 6.89 A/W. This enhancement is attributed to the type-II band alignment of the MoS₂/SnS₂ heterojunction, which promotes efficient charge separation and suppresses carrier recombination. Under 30 mW/cm² illumination at 385 nm, the response time was reduced to 0.082/0.074 s (rise/fall time). At the wavelengths of 385 and 520 nm, the limit of detection reached as low as 0.0008 mW/cm², indicating a low-light detection capability one order of magnitude superior to that of commercial black-Si detectors. Furthermore, based on the measured noise characteristics and responsivity, we estimate a minimum detectable radiance of 6.11×10⁻¹³ W/(cm² sr μm) at 450 nm when normalized to a standard detector area of 4.91 mm². This theoretical value approaches the radiance level of nighttime atmospheric glow, indicating the potential of our heterostructure for ultra-sensitive photodetection applications after appropriate scaling.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13389131/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148549642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A heat flux sensor with both fast response and high sensitivity.","authors":"Le Li, Bian Tian, Yanzhong Chen, Meng Wang, Shuai Yu, Nengchao Lu, Mingzhou He, Zhaojun Liu, Shuimin Li, Wu He, Zhongkai Zhang","doi":"10.1038/s41378-026-01361-7","DOIUrl":"10.1038/s41378-026-01361-7","url":null,"abstract":"<p><p>Heat flux sensors are of great significance for measuring heat transfer processes. However, due to the limitations of the thermal resistance thickness and the number of thermopile junctions, it is often difficult to combine the high sensitivity and fast response time in one heat flux sensor. In this work, we design the thermopile array based on the principle of hexagonal dense arrangement to increase the number of junctions in a limited area, and at the same time, we set up films with different functions at the hot and cold junctions to increase the temperature difference. Tests on multiple sensors show that in the range of 0-207 kW/m², the coefficient of determination R² of the quadratic fit between sensor output and heat flux is greater than 0.999. In the linear operating range from 114 to 201 kW/m², the sensor exhibits a maximum heat flux sensitivity of 91.13 μV/(kW/m²); the response times of the sensors are faster than 2.85 ms under different laser powers and durations. The sensor exhibits a good response to heat fluxes such as respiration, flame, and hot air, and is expected to be applied to the measurement of high-temperature and rapidly varying heat transfer.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13389392/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148549677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On-demand rotational manipulation of microparticles and zebrafish larvae via orthogonally phased BAW acoustofluidics.","authors":"Junjun Lei, Li Lin, Feng Cheng, Peter Glynne-Jones, Martyn Hill, Zhigang Huang, Zhen Yao, Maodan Yuan","doi":"10.1038/s41378-026-01398-8","DOIUrl":"10.1038/s41378-026-01398-8","url":null,"abstract":"<p><p>Rotational manipulation of microscale objects or living organisms is crucial for various applications in microsystems and biological engineering, especially in high-precision imaging. However, achieving precise rotation of individual biological samples at specific angles remains a challenge. This study introduces a novel and cost-effective acoustofluidic approach for on-demand rotation of microparticles and biological specimens, such as zebrafish larvae, to desired angles. The system consists of piezoelectric transducers arranged orthogonally on a structured glass capillary. By applying sinusoidal signals with a defined phase difference (φ) to these transducers, we can adjust the ultrasonic resonant field in the capillary's microchannel to rotate the acoustic pressure nodal plane at the cross-section. This rotation creates an acoustic radiation force that traps and aligns suspended objects along the rotated pressure node. Within a specific operational range, specimens are securely trapped along the channel axis and rotated at a controlled angle α relative to φ (following the relationship α ≈ φ/2), demonstrating stepwise rotational control. By dynamically adjusting the phase difference φ from 0 to 4π, we can achieve controlled full 360° rotation of a trapped object. Further parametric numerical studies are conducted to showcase the effectiveness of this technique at various operating parameters for the controlled rotational manipulation of objects suspended in a fluid. The use of a glass capillary and external piezoelectric transducers offers a smooth and biologically permissive environment, simplifying fabrication and showing significant potential for applications in micro-robotics, single-cell analysis, and organism-level studies in fields like developmental biology.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13381919/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148520663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic-optical integrated portable platform with handheld pump for wash-free plasmonic detection of thrombin and SARS-CoV-2 spike protein.","authors":"Da-In Kwon, Yeong-Eun Yoo, Jae-Ho Jin, Ji Hyo Park, Ga Eun Han, Kwanoh Kim, Jae Sung Yoon, Seong Min Kang, Do Hyun Kang","doi":"10.1038/s41378-026-01381-3","DOIUrl":"10.1038/s41378-026-01381-3","url":null,"abstract":"<p><p>Point-of-care testing (POCT) requires rapid, quantitative results without the complexity of laboratory instrumentation. Conventional assays like ELISA and PCR are often limited by long processing times, multiple washing procedures, and a dependence on bulky, external power-consuming pumps. To address these challenges, we developed a fully integrated, palm-sized platform validated with two high-impact biomarkers: thrombin, a critical regulator of blood coagulation for cardiovascular and renal diagnostics, and the SARS-CoV-2 spike protein, a primary antigen for rapid viral screening. The platform's innovation lies in its user-independent, electricity-free fluidic operation, featuring a manual suction pump with a compression spring that ensures high reproducibility (CV < 4.5%). Additionally, a serpentine microchannel design was incorporated to promote Dean flow-induced inertial mixing, accelerating aggregation kinetics for a true wash-free plasmonic assay. Our system provides real-time quantitative detection within 5 min, achieving sub-nanomolar limits of detection (LoD: 0.5 nM for thrombin and 0.4 nM for spike protein). Wireless connectivity allows for immediate data visualization on smartphones. By bridging the gap between sophisticated laboratory analysis and portable, manual operation, this platform offers a robust and scalable solution for decentralized clinical diagnostics.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13379383/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148471626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High speed biaxial piezoelectric MEMS micromirror with varifocal tunability.","authors":"Hunter Shillingburg, Daniel Lopez","doi":"10.1038/s41378-026-01356-4","DOIUrl":"10.1038/s41378-026-01356-4","url":null,"abstract":"<p><p>High-speed control of light in 3D space is a rapidly advancing field because it enables unique applications in neurobiology, communications, laser micromachining, and augmented/virtual reality. Several technologies have been demonstrated to advance this field, such as complex spatial light modulators (SLMs) and intricate optical systems that independently control in-plane and out-of-plane beam steering. These systems face significant limitations in speed, data handling, and power dissipation, and their bulky optical components hinder integration into other systems. Here, we present a tip-tilt-curvature micro-electro-mechanical systems (MEMS) scanner that overcomes these limitations by combining rapid lateral beam steering with ultra-fast axial focal tuning in a compact form factor of only a few millimeters. The device achieves lateral scan rates exceeding 10 kHz with axial focus modulation over tens of centimeters at operating frequencies exceeding 100 kHz. In benchmarking our device against other tip-tilt-curvature MEMS scanners, the one presented here demonstrates outstanding performance in combining lateral and axial scanning speeds. This performance, along with its compactness, establishes a new scalable architecture for dynamic three-dimensional control of light with high spatiotemporal resolution.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13379378/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148471631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An integrated nanophotonic SPRM microsystem for real-time, label-free quantification of single-cell adhesion dynamics.","authors":"Songfeng Huang, Yue Jiao, Yuye Wang, Xiaoqi Dai, Junkang Deng, Jiali Tai, Xiaorui Liu, Hailong Ni, Feiran Xie, Jiajie Chen, Junle Qu, Gaixia Xu, Yonghong Shao","doi":"10.1038/s41378-026-01403-0","DOIUrl":"10.1038/s41378-026-01403-0","url":null,"abstract":"<p><p>Quantitative characterization of dynamic cell-substrate interactions at high spatiotemporal resolution remains a key challenge for bio-integrated microsystems, particularly under rapid external perturbations. Existing approaches are limited by labeling requirements, low temporal resolution, or endpoint measurements, preventing real-time access to early cellular responses. Here, we develop an integrated nanophotonic surface plasmon resonance microscopy (SPRM) microsystem for real-time, label-free quantification of single-cell interfacial dynamics. The system establishes a multi-parameter sensing framework by jointly extracting SPR intensity, cell-substrate axial position, and adhesion area, enabling continuous and quantitative mapping of cell-interface coupling with high spatiotemporal resolution. After validating system performance under controlled perturbations, we apply the platform to monitor rapid cellular responses using photodynamic therapy (PDT) as a model system. The microsystem resolves an ultrafast weakening of cell-substrate adhesion within ~25 s of stimulation onset and enables quantitative discrimination of treatment efficacy across different conditions. Notably, these early biophysical changes precede alterations in adhesion-related biomarkers measured by conventional immunofluorescence and flow cytometry. This work establishes SPRM as an integrated sensing microsystem that converts nanophotonic signals into quantitative descriptors of cellular mechanics, providing a generalizable platform for real-time, non-invasive analysis of cellular responses. The proposed framework offers broad potential for drug screening, cell-material interaction studies, and bio-integrated sensing applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13376904/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148471557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel high-sensitivity triaxial accelerometer based on 3-D phononic crystals.","authors":"Xu Guo, Jiehe Wang, Jintao Ni, Ye Jiang, Yajiang Yin, Wenshuai Lu, Bo Ma, Zheng You","doi":"10.1038/s41378-026-01390-2","DOIUrl":"10.1038/s41378-026-01390-2","url":null,"abstract":"<p><p>High-sensitivity triaxial acceleration sensing is widely applied from consumer electronics to inertial navigation. However, Conventional triaxial accelerometers are mainly rely on assembling multiple single-axis transducers, which increases device size and complexity. The acceleration-sensing mechanism of phononic crystals (PnCs) has demonstrated significant potential for high-sensitivity detection, owing to the high-quality factor of their resonant cavities. In this paper, based on the theory of 2-D PnCs single-axis acceleration sensing, we propose a novel triaxial accelerometer based on 3-D PnCs. Specifically, a point defect is introduced along the x and y axis, while a line defect is created along the z axis. Defective PnCs create a resonant cavity that produces sharp transmission peaks within the band gap. Acceleration causes a frequency shift in these peaks. This study employs the finite element method (FEM) to calculate the band structure of the 3-D PnCs, as well as the transmission spectra along all three axes. Both numerical and experimental results indicate that this approach is suitable for high-sensitivity triaxial acceleration sensing. The experimentally measured sensitivities along the x, y, and z axes are 1.58 kHz/g, 0.62 kHz/g, and 0.43 kHz/g, respectively, with corresponding measurement bandwidths of 37.1 Hz, 15.9 Hz, and 37.4 Hz. This innovative design based on 3-D PnCs enables triaxial high-sensitivity acceleration sensing within a single structural configuration and holds promise for future integration with ultrasonic transducers to form a compact microsystem.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1,"publicationDate":"2026-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13369849/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148448102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}