Declan Winship, Weilin Liao, Hsueh-Tsung Lu, Irene Lara-Ibeas, Xiangyu Zhao, Qu Xu, Tao Qian, Robert Gordenker, Yutao Qin, Yogesh B Gianchandani
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引用次数: 0
Abstract
Many environmental, industrial, and security applications demand in-field analysis of chemical vapors. Whereas microscale gas chromatographs (µGCs) are promising candidates, reliable in-field chemical analysis particularly demands repeatability, humidity tolerance, and in-field reference. Using a µGC with substantial monolithic integration (of preconcentrators, separation columns, and capacitive and photoionization detectors), this paper reports chip-level and system-level advancements towards reliable chemical analysis. Thermal management is advanced using tailored heater designs to compensate for boundary conditions and cooling. Fence electrodes are incorporated into on-chip photoionization detectors, reducing responses due to humidity by >98%. The repeatability of retention time is advanced by introducing closed-loop flow control, reducing the relative standard deviation of retention time to only 0.29-0.43%, which represents a 4-5× improvement over open-loop flow control. A miniature reservoir for a chemical reference standard is also incorporated on board, providing the ability to correct for drifts in retention time and the ability to directly measure retention times relative to the reference chemical. A set of blind false alarm tests was performed for fixed target analytes in the presence of partially coeluting interferent species. A separate set of blind chemical recognition tests was also performed for various analytes of concealed identities. Overall, the results were largely successful and showed the promise of the reported µGC instrument and modules for broad chemical screening and long-term in-field deployment.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.