Journal of Microelectromechanical Systems最新文献_第8页

High-Quality Light Field Microscope Imaging Based on Microlens Arrays 基于微透镜阵列的高质量光场显微成像技术

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-11 DOI: 10.1109/JMEMS.2023.3349299

Tongkai Gu;Sitong Yan;Lanlan Wang;Yasheng Chang;Hongzhong Liu

{"title":"High-Quality Light Field Microscope Imaging Based on Microlens Arrays","authors":"Tongkai Gu;Sitong Yan;Lanlan Wang;Yasheng Chang;Hongzhong Liu","doi":"10.1109/JMEMS.2023.3349299","DOIUrl":"10.1109/JMEMS.2023.3349299","url":null,"abstract":"High-quality optical observation through traditional microscopes faces significant challenges due to their low spatial sampling and the limited ability to respond only to the light intensity characteristics of optoelectronic devices. This limitation results in an inability to measure other critical optical information during imaging, such as phase, angle, polarization, and coherence. In response to these challenges, light field microscope (LFM) as a powerful imaging technique is capable of measuring samples with unprecedented depth and detail. LFM overcomes the limitations of conventional microscope methods by capturing both spatial and angular information of light rays. To further demonstrate these capabilities, the LFM based on microlens arrays is constructed here. These arrays are fabricated using advanced techniques such as laser lithography, microimprinting, and self-assembly technology. Using light field imaging, image segmentation methods, and deep learning fusion, the imaging quality is nearly doubled, significantly enhancing the quality of observations. LFM based on microlens arrays offers great promise for improving the quality of imaging observations in the field of microsope. [2023-0167]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2024-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology 基于 MEMS 技术的带定子齿的 PZT 薄膜行波微电机

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-09 DOI: 10.1109/JMEMS.2023.3348792

Tianyu Yang;Yu Chen;Binglei Zhang;Binlei Cao;Xiaoshi Li;Kaisheng Zhang;Jiangbo He;Wei Su

{"title":"A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology","authors":"Tianyu Yang;Yu Chen;Binglei Zhang;Binlei Cao;Xiaoshi Li;Kaisheng Zhang;Jiangbo He;Wei Su","doi":"10.1109/JMEMS.2023.3348792","DOIUrl":"10.1109/JMEMS.2023.3348792","url":null,"abstract":"The piezoelectric thin-film traveling-wave micro-motor based on the microelectromechanical systems (MEMS) process has the advantages of compact size, easy integration and batch production. However, the piezoelectric thin-film micro-motor still exits a serious shortcoming of very small output torque. This paper proposes a novel lead zirconate titanate (PZT) piezoelectric thin-film motor with stator teeth to improve the output torque. Firstly, theoretical analysis and finite element simulations were performed to determine the design parameters of the stator teeth. The device preparation is completed by combining with wafer-scale MEMS fabrication techniques, in which the base Si layer of PZT-SOI wafer is thinned and etched to form the stator tooth structure based on the deep reactive ion etching (DRIE) process. Finally, the performance testing results showed that the novel motor achieved a large output torque of \u0000<inline-formula> <tex-math>$39.4 mu text{N}cdot text{m}$ </tex-math></inline-formula>\u0000 under a low driving voltage of 4.5 Vpp. The large output torque is 2.65 times higher than that of the previously reported piezoelectric thin-film motor with a much higher driving voltage of 11 Vpp. [2023-0099]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2024-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N 使用 Al0.7Sc0.3N 的高可调谐压电谐振器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-29 DOI: 10.1109/JMEMS.2023.3344018

Izhar;Yang Deng;Merrilyn M. A. Fiagbenu;Abhay Kochhar;Ramakrishna Vetury;Roy H. Olsson

{"title":"Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N","authors":"Izhar;Yang Deng;Merrilyn M. A. Fiagbenu;Abhay Kochhar;Ramakrishna Vetury;Roy H. Olsson","doi":"10.1109/JMEMS.2023.3344018","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3344018","url":null,"abstract":"We report a frequency tunable Lamb wave piezoelectric resonator using an Al0.7Sc0.3 N thin film. The frequency tuning of the resonator is demonstrated by its stiffness manipulation which is achieved by terminating the tuning electrodes (TE) with a variable capacitor. Resonators with 2, 3, 4, and 5 TE were fabricated and characterized. The highest tuning range of 24,694 ppm was achieved for the resonator with 5 TE. Whereas the best insertion loss of approximately −6 dB was demonstrated by the resonator with 2 TE. The tunning range (17,783 \u0000<inline-formula> <tex-math>$sim $ </tex-math></inline-formula>\u0000 24,694 ppm) achieved by the Al0.7Sc0.3 N resonators is higher than zero power demonstrations in prior studies. The resonators are fabricated using a commercial XBAW\u0000<inline-formula> <tex-math>$^{mathrm {TM}}$ </tex-math></inline-formula>\u0000 process making it suitable for mass production without any needed exotic processing steps or materials. The resonators are promising for miniaturization of modern wireless communications system by providing a platform to process multi-channel frequencies with reduced components. [2023-0193]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351437","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss 具有微小百分比带宽和低插入损耗的机械耦合压电 MEMS 滤波器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-29 DOI: 10.1109/JMEMS.2023.3345286

Kewen Zhu;Yuhao Xiao;Jinzhao Han;Guoqiang Wu

引用次数: 0

A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network 由微型加热板和人工神经网络组成的 "智能 "气体传感系统

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-28 DOI: 10.1109/JMEMS.2023.3343815

Zong Liu;Yushen Hu;Fei Wang;Man Wong

引用次数: 0

Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors 与位移传感器集成的多自由度压电-静电混合 MEMS 执行器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-19 DOI: 10.1109/JMEMS.2023.3341039

Almur A. S. Rabih;Seyedfakhreddin Nabavi;Michaël Ménard;Frederic Nabki

{"title":"Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors","authors":"Almur A. S. Rabih;Seyedfakhreddin Nabavi;Michaël Ménard;Frederic Nabki","doi":"10.1109/JMEMS.2023.3341039","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3341039","url":null,"abstract":"This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to position a suspended optical waveguide for chip-to-chip alignment in photonic integrated circuits. In this context, the mechanical structures of the actuators with a suspended platform to carry the waveguide, are designed to house aluminum nitride (AlN) as the piezoelectric material for generating out-of-plane motion and a comb-drive, whose fixed and moveable fingers are positioned on the same layer for in-plane motion. Two distinct designs, i.e., a 2-DOF design with motions along the Z-and Y-axes and a 3-DOF design with motions along the Z-, Y-, and X-axes were fabricated and tested. Both designs include capacitive-based displacement sensors to track the motions in Z-and Y-axes. Experimental results at ±60 V indicate that 3 devices of each design give an average displacement of 3.16 ± \u0000<inline-formula> <tex-math>$0.34~mu text{m}$ </tex-math></inline-formula>\u0000 and 0.63 ± \u0000<inline-formula> <tex-math>$0.04~mu text{m}$ </tex-math></inline-formula>\u0000 in the Z-axis for the 2-DOF and 3-DOF designs, respectively. For the Y-axis at 120 V, the average results for the two designs respectively were found to be 3.06 ± \u0000<inline-formula> <tex-math>$0.17~mu text{m}$ </tex-math></inline-formula>\u0000 and 7.38 ± \u0000<inline-formula> <tex-math>$0.29~mu text{m}$ </tex-math></inline-formula>\u0000, with the ability to extended the later to \u0000<inline-formula> <tex-math>$10.69~mu text{m}$ </tex-math></inline-formula>\u0000 at 140 V. In the X-axis, the 3-DOF design can produce total of 300 nm of displacement at ±100 V. The capacitance measurements were found to correlate well with the tracked displacement. Furthermore, simultaneous activation of more than one actuator could mitigate misalignment and align the platform with a fixed surface. [2023-0148]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

3D Flexible Wind Sensor With its Optimization and Environmental Effect 三维柔性风传感器及其优化和环境效应

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-15 DOI: 10.1109/JMEMS.2023.3328590

Zhenxiang Yi;Yu Wan;Ming Qin;Qing-An Huang

{"title":"3D Flexible Wind Sensor With its Optimization and Environmental Effect","authors":"Zhenxiang Yi;Yu Wan;Ming Qin;Qing-An Huang","doi":"10.1109/JMEMS.2023.3328590","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3328590","url":null,"abstract":"This paper proposes a new three-dimensional (3D) flexible wind sensor by utilizing dual-layer differential capacitors. The deformation of the sensor caused by wind leads to eight capacitances variation, which can be applied to obtain the wind speed along the x, y, and z axes (vx, vy and vz). Consequently, the 3D wind speed and direction are calculated by the vector synthesis. The feasibility of this measurement principle was verified by simulation. Then, the sensor was fabricated consisting of two windward pillar, four electrode layers, and two supporting layers, which were produced by polydimethylsiloxane (PDMS) with different Young’s modulus. Experiments demonstrated that the sensor can measure 3D wind speed and direction with the dynamic range of 0-23.9m/s. The average errors of wind speed measurement in XY, XZ and YZ planes are close to 0.58 m/s, 0.42 m/s, and 0.53 m/s, respectively, while the average errors of wind direction measurement are about 6.63°, 4.03°, and 5.65° respectively. Furthermore, temperature effect, as well as humidity effect, of the sensor was also investigated. The initial capacitances of the sensor are positively correlated with the temperature and humidity, and the slope are on the order of 6.21fF\u0000<inline-formula> <tex-math>$cdot ^{circ }text{C}^{-1}$ </tex-math></inline-formula>\u0000, 3.21fF\u0000<inline-formula> <tex-math>$cdot $ </tex-math></inline-formula>\u0000%RH−1, respectively. Moreover, trenches were fabricated to optimize the sensor’s sensitivity, which has been verified by experiments. [2023-0075]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

2023 Index Journal of Microelectromechanical Systems Vol. 31 2023 索引《微机电系统杂志》第 31 卷

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-14 DOI: 10.1109/JMEMS.2023.3343158

引用次数: 0

Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode 用于后续制造和高阶模式的密封腔体声共振器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-12 DOI: 10.1109/JMEMS.2023.3338250

Jiashuai Xu;Zong Liu;Junyan Zheng;Fangsheng Qian;Man Wong;Yansong Yang

{"title":"Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode","authors":"Jiashuai Xu;Zong Liu;Junyan Zheng;Fangsheng Qian;Man Wong;Yansong Yang","doi":"10.1109/JMEMS.2023.3338250","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3338250","url":null,"abstract":"This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different from conventional BAW resonator fabrication methods, this work has simplified fabrication by using silicon migration technology: building freely predefined cavities with self-formed acoustic boundaries without patterning the piezoelectric layer in only two steps (etching and annealing). Additionally, the sealed cavity is sturdy enough to be compatible with subsequent hetero-integrating with other devices. For higher frequency and better electromechanical coupling (\u0000<inline-formula> <tex-math>$K^{2}$ </tex-math></inline-formula>\u0000), the proposed platform can excite the second-order asymmetric Lamb wave mode (A2) in scandium-doped aluminum nitride (Al1–xScxN) film with an optimized stress field. The fabricated devices demonstrate S1 and A2 resonant modes at 1.58 GHz and 3.52 GHz with electromechanical coupling coefficients of 1.47% and 5.12%, respectively. [2023-0185]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film 大冲程 3-DOF 微镜，采用基于洛伦兹力的新型致动器，利用金属玻璃薄膜

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-07 DOI: 10.1109/JMEMS.2023.3337333

Chuan-Hui Ou;Nguyen Van Toan;Yao-Chuan Tsai;Ioana Voiculescu;Masaya Toda;Takahito Ono

{"title":"A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film","authors":"Chuan-Hui Ou;Nguyen Van Toan;Yao-Chuan Tsai;Ioana Voiculescu;Masaya Toda;Takahito Ono","doi":"10.1109/JMEMS.2023.3337333","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3337333","url":null,"abstract":"An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring, made of metallic glass. With this novel actuator, the performance of stroke and angle controllability is remarkably improved. The fabricated device can achieve a \u0000<inline-formula> <tex-math>$418 ~mu text{m}$ </tex-math></inline-formula>\u0000 static stroke in upward direction. Furthermore, the tilting angles of the micromirror can be controlled with maximum accuracy of 0.05°/mA. The device is robust and has miniature dimensions, comparable or smaller, than existing electromagnetic micromirror dimensions published in literature. The displacement values of the micromirror are larger, compared to state-of-the–art electromagnetic micromirrors, which usually have strokes under \u0000<inline-formula> <tex-math>$300 ~mu text{m}$ </tex-math></inline-formula>\u0000 and do not have angle control mechanism. In spectrometer applications, the micromirror with a large stroke and controllable angle allows spectrometers to achieve higher resolution. These special qualities of the micromirror, will provide efficient, and reliable spatial light modulation required for interferometer applications. [2023-0104]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0