Journal of Microelectromechanical Systems最新文献_第9页

Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry 用于量子光学磁力测量的单片集成三维原子芯片

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-05 DOI: 10.1109/JMEMS.2023.3337513

Ziji Wang;Junming Wu;Gong Sun;Jintang Shang

引用次数: 0

Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures 降低环境压力下的卷对卷压印 PDMS 微结构

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-05 DOI: 10.1109/JMEMS.2023.3336740

Olli-Heikki Huttunen;Johanna Hiitola-Keinänen;Jarno Petäjä;Eero Hietala;Hannu Lindström;Jussi Hiltunen

{"title":"Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures","authors":"Olli-Heikki Huttunen;Johanna Hiitola-Keinänen;Jarno Petäjä;Eero Hietala;Hannu Lindström;Jussi Hiltunen","doi":"10.1109/JMEMS.2023.3336740","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3336740","url":null,"abstract":"High-volume manufacturing of microstructures is essential for the uptake of the related scientific results for commercial use and also if hundreds or thousands of devices with repeatable performance are needed during the large-scale experimental research. Polydimethyl siloxane (PDMS) is one of the most widely used materials for academia to prepare microfluidic test devices. This has also motivated the development of roll-to-roll imprinting towards the fabrication of PDMS-based devices at high volumes. The gas bubble entrapping during the replication process has remained an issue resulting in defects in the microstructure. Performing imprinting in vacuum is a well-known method to avoid bubbles but it has not been applied in roll-to-roll processing. In this work we demonstrated a reduced ambient pressure roll to roll imprinting process using PDMS silicone elastomer as imprint resist. We observed the reduction in the number of bubble-originated defects in individual micro-features from 100 % to < 1 % when the ambient pressure was reduced from 1 atm to 1/8 atm. [2023-0063]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"95-101"},"PeriodicalIF":2.7,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10342677","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer 在纳米重力微机电系统加速度计中同时实现位移传导和力平衡的新型面积变化电容方法

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-01 DOI: 10.1109/JMEMS.2023.3334297

Fangzheng Li;Dandan Liu;Le Gao;Bingyang Cai;Lujia Yang;Yuan Wang;Chun Zhao;Wenjie Wu;Liangcheng Tu

{"title":"Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer","authors":"Fangzheng Li;Dandan Liu;Le Gao;Bingyang Cai;Lujia Yang;Yuan Wang;Chun Zhao;Wenjie Wu;Liangcheng Tu","doi":"10.1109/JMEMS.2023.3334297","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3334297","url":null,"abstract":"High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic actuator, which serves as an auxiliary component in nano-g MEMS accelerometers for improving the dynamic response, faces the challenges of process incompatibility, temperature sensitivity, and large form factor. Thereby, this paper proposes an area-changed capacitive method for both displacement transducing and force balance in a nano-g MEMS accelerometer, aiming to address those posed challenges and provide favourable performance. Thanks to the allowed large displacement range in the sensitive direction of the proposed device, the area-changed capacitive mechanism is able to be integrated with a highly-sensitive quasi-zero stiffness spring-mass structure. As a result, the fabricated force-balance MEMS accelerometer attains a calibrated self-noise of 1.3 ng/\u0000<inline-formula> <tex-math>$surd $ </tex-math></inline-formula>\u0000Hz, which is one of the most sensitive MEMS-based accelerometers reported to date. The settling time, on the other hand, is reduced to 0.5 s with the electrostatic closed-loop control featuring the proposed subject, compared to 15.7 s in the open-loop configuration. In addition, the critical acceleration input at the boundary of the “pull-in” is calculated as 5.4 g, which is adaptable to most geophysical applications. This work is of considerable potential in geophysical applications such as earthquake monitoring or gravity measurements, and promising a high-performance closed-loop MEMS accelerometer. [2023-0161]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"12-20"},"PeriodicalIF":2.7,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of PMUT-Based High Sensitivity Gas Flow Sensor 开发基于 PMUT 的高灵敏度气体流量传感器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-12-01 DOI: 10.1109/JMEMS.2023.3334497

Tapio Pernu;Teuvo Sillanpää;Cyril Baby Karuthedath;Abhilash Thanniyil Sebastian

引用次数: 0

Member ad suite 会员广告套件

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-30 DOI: 10.1109/JMEMS.2023.3334533

引用次数: 0

TechRxiv: Share Your Preprint Research with the World! techxiv:与世界分享你的预印本研究!

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-30 DOI: 10.1109/JMEMS.2023.3334529

引用次数: 0

37th Annual IEEE Conference on Micro Electro Mechanical Systems 第37届IEEE微机电系统年会

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-30 DOI: 10.1109/JMEMS.2023.3332162

引用次数: 0

Journal of Microelectromechanical Systems 微机电系统学报

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-30 DOI: 10.1109/JMEMS.2023.3327838

引用次数: 0

Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser 利用飞秒激光在熔融石英微半球谐振器的齿状齿上调频的方法

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-28 DOI: 10.1109/JMEMS.2023.3332669

Youwang Hu;Haoning Zheng;Yao Wang;Yalong Wang;Xiaoyan Sun;Ji’an Duan

{"title":"Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser","authors":"Youwang Hu;Haoning Zheng;Yao Wang;Yalong Wang;Xiaoyan Sun;Ji’an Duan","doi":"10.1109/JMEMS.2023.3332669","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3332669","url":null,"abstract":"The fused silica micro-hemispherical resonant gyroscope is a new type of solid-wave gyroscope and offers numerous benefits including high precision, low power consumption, small size, and long life. The core component of the gyroscope is the micro-hemispherical resonator (MHR). The inevitable frequency split of the MHR working modes will directly restrict the performance improvement of the gyroscope. Therefore, it is crucial to eliminate the frequency split by a tuning method. A femtosecond laser ablation method is reported for permanent frequency tuning of the wineglass modes in MHRs with teeth-like tines. Firstly, the influence of different positions and depths of the tuning ablation grooves on the eigenfrequencies and frequency split of the working modes is determined by theory and simulation. In the low-frequency rigid axis, the efficient tuning method is located at the outer edges of the tines, while closer to the middle of the tines can obtain a more accurate frequency split. In addition, the Laser Doppler Vibrometer (LDV) test system has been built to test the frequency split of the MHR. Femtosecond laser ablation experiments were then designed, and the experiments and simulations were in good consistency. Finally, combined with the test system and the tuning method, the frequency split of a MHR is reduced to one percent of the initial, which is helpful for the gyroscope’s performance. [2023-0130]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"78-87"},"PeriodicalIF":2.7,"publicationDate":"2023-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Response Speed Characterization of a Thermally Actuated Programmable Metamaterial 热致动可编程超材料的响应速度特性分析

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2023-11-22 DOI: 10.1109/JMEMS.2023.3332595

Chenyang Luo;Jonathan B. Hopkins;Michael A. Cullinan

{"title":"Response Speed Characterization of a Thermally Actuated Programmable Metamaterial","authors":"Chenyang Luo;Jonathan B. Hopkins;Michael A. Cullinan","doi":"10.1109/JMEMS.2023.3332595","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3332595","url":null,"abstract":"This work details the experimental characterization of a MEMS thermal actuator, which constitutes a three-dimensional meso-robotic metamaterial lattice that can achieve actively controlled mechanical properties such as tunable stiffness. To achieve a target stiffness value via closed-loop control in a timeframe that is practical for most metamaterial applications, it is necessary that such actuators can rapidly respond to the controller’s commands. In this letter, a fabricated thermal actuator experimentally demonstrates the ability to achieve desired stiffness values within 100s of milliseconds of receiving the command signal. The actuator can also maintain those stiffness values regardless of changing external loading conditions with acceptable accuracy. Thus, the results of this work prove that the metamaterial design can enable practical applications such as surgical tools that can change from compliant to stiff states as they perform their functions within the body and materials that can tune their natural frequencies to enable technologies that leverage resonant actuation such as steerable mirrors and optical switches. [2023-0150]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"6-8"},"PeriodicalIF":2.7,"publicationDate":"2023-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676275","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0