Journal of Microelectromechanical Systems最新文献

{"title":"Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion","authors":"Tianjiao Gong;Muhammad Jehanzeb Khan;Yukio Suzuki;Takashiro Tsukamoto;Shuji Tanaka","doi":"10.1109/JMEMS.2024.3382768","DOIUrl":"10.1109/JMEMS.2024.3382768","url":null,"abstract":"In this study, we introduce an innovative approach to vacuum-encapsulation of MEMS resonators using Silicon Migration Seal (SMS) technology, a novel wafer-level vacuum packaging method. SMS utilizes silicon reflow phenomena under high-temperature (>1000°C) hydrogen environments to seal release holes effectively. We successfully demonstrated this technique on a MEMS resonator made on a standard SOI wafer, commonly used in inertial sensors and timing devices. After the encapsulation, hydrogen diffusion from the sealed cavity was performed through annealing at 430°C for 27 hours in a nitrogen environment. Further analysis using focused ion beam (FIB) penetration outside the resonating element confirmed an impressive vacuum level improvement in the sealed cavity, estimated at ~60 Pa. Notably, after additional air-baking at 145°C, the maintained high Q factor suggests a potential vacuum level below 10 Pa. These findings not only illustrate the efficiency of SMS in wafer-level vacuum packaging but also open up possibilities for optimizing sealing pressure in MEMS packaging. [2024-0014]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"369-375"},"PeriodicalIF":2.7,"publicationDate":"2024-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10497109","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Journal of Microelectromechanical Systems Publication Information","authors":"","doi":"10.1109/JMEMS.2024.3380331","DOIUrl":"https://doi.org/10.1109/JMEMS.2024.3380331","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 2","pages":"C2-C2"},"PeriodicalIF":2.7,"publicationDate":"2024-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10494226","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351461","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Parallel in-Plane Electrothermal Actuators","authors":"Yen Nee Ho;Aron Michael;Chee Yee Kwok;Cibby Pulikkaseril","doi":"10.1109/JMEMS.2024.3381836","DOIUrl":"10.1109/JMEMS.2024.3381836","url":null,"abstract":"This letter reports a novel electrothermal actuator with large in-plane displacement designed for MEMS-based pitch-tunable diffraction grating (MPDG) for beam steering applications. The actuator consists of two sets of parallel electrothermal beams that pull and push a lever to produce large in-plane displacement. The actuator has been simulated, fabricated and tested. The results show that the actuator generates a large in-plane displacement of \u0000<inline-formula> <tex-math>$mathrm {177 ~mu text {m} }$ </tex-math></inline-formula>\u0000 at a driving voltage of \u0000<inline-formula> <tex-math>$mathrm {6 text {V}}$ </tex-math></inline-formula>\u0000 consuming \u0000<inline-formula> <tex-math>$mathrm {115.32 text {m} text {W} }$ </tex-math></inline-formula>\u0000 with minimal out-of-plane movement. By doubling the number of parallel electrothermal beams, the actuator uniquely reduces power consumption while increasing force generated, resulting in large in-plane displacement. [2024-0001]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"305-307"},"PeriodicalIF":2.7,"publicationDate":"2024-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field","authors":"Yuki Okamoto;Rihachiro Nakashima;Ryo Oda;Thanh-Vinh Nguyen;Yusuke Takei;Masaaki Ichiki;Hironao Okada","doi":"10.1109/JMEMS.2024.3402211","DOIUrl":"10.1109/JMEMS.2024.3402211","url":null,"abstract":"Conventional electromagnetic microelectromechanical system scanners require a biaxial (two-axis) external magnetic field to obtain a biaxial torque, which increases the number of bulky external permanent magnets and the packaging size caused by 45°-orientated placement of permanent magnets. Thus, this study developed a two-axis resonant electromagnetic scanner with an asymmetric gimbal frame that generates two-axis torque via a one-axis lateral external magnetic field. As external permanent magnets can be placed parallel to the device die, the proposed method reduced the packaging size. Two driving forces were generated by two independent electromagnetic actuators placed on both sides of the asymmetric gimbal frame, which converted the unidirectional forces into two-axis torque. As the two driving actuators were independent of the connecting beams, gimbal frame, and mirror and were connected to the thick outer Si handle frame, the temperature increase of torsion beams and the asymmetric gimbal frame, which affects the resonant performance, were reduced. Additionally, as the current paths were not multiturn coil shapes, the paths can be formed with a via-less single metal layer. Also, the drive circuit can be simplified since drive signals for two-axis rotation can be applied to individual actuators. We demonstrated biaxial scanning using the proposed structure with a 4-mm mirror. The optical scanning angle was 4.84° for the 1.308 kHz X-axis scan and 16.1° for the 2.568 kHz Y-axis scan when a current of 300 mA was applied independently to the X- and Y-axes driving actuators. We obtained the large displacement at the resonant frequency using the asymmetric gimbal frame under a lateral magnetic field.[2024-0050]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"495-502"},"PeriodicalIF":2.5,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10541112","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141189295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation","authors":"Jiahao Wu;Penghui Song;Shuke Zang;Yan Qiao;Ronghua Huan;Wenming Zhang;Lei Shao","doi":"10.1109/JMEMS.2024.3379195","DOIUrl":"10.1109/JMEMS.2024.3379195","url":null,"abstract":"This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal resonance. Through proper frequency sweeping, phenomena of frequency locking and internal resonance are first observed on the amplitude-frequency curve. The phononic frequency combs’ generation region is then confirmed to locate exactly at the strongest internal resonance region, and its turn-on procedure and conditions are carefully presented. Both forward and reverse frequency sweeps are used to demonstrate the multistage evolution of phononic frequency combs, showing comprehensive nonlinear dynamics including chaos, period-doubling bifurcation, and cyclic-fold bifurcation. These rich bifurcations allow a wide tunability in comb tooth spacing, which evolves from 25 Hz to more than 200 Hz, reaching an order of magnitude. [2024-0013]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"384-394"},"PeriodicalIF":2.7,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles","authors":"Jorge Manrique Castro;Nilab Azim;Nicholas Castaneda;Ellen Kang;Swaminathan Rajaraman","doi":"10.1109/JMEMS.2024.3376238","DOIUrl":"10.1109/JMEMS.2024.3376238","url":null,"abstract":"The essential cytoskeletal protein actin and its functions are paramount for motility, communication, and locomotive processes in eukaryotic cells. Detection and quantification of actin protein is of great interest for in vitro studies potentially elucidating unknown cellular mechanisms affecting drug responses with an extension to the study of disease states (e.g., study of neurodegenerative disorders). To this end, development of biomedical platforms and biosensors plays an important role in providing reliable and sensitive devices to study such intracellular constructs. Here, we present for the first time the microfabrication, characterization, testing, and electrical/interfacial modeling of a microfluidic biosensor for actin protein characterization. The device allows for the interaction and characterization of actin bundles using electrochemical impedance spectroscopy (EIS). The device was tested with \u0000<inline-formula> <tex-math>$1 mu text{M}$ </tex-math></inline-formula>\u0000 and \u0000<inline-formula> <tex-math>$8 mu text{M}$ </tex-math></inline-formula>\u0000 actin bundles concentrations producing shifts in impedance response in the significant biological frequency of 1 kHz from 17 to 30 kOhm (\u0000<inline-formula> <tex-math>$text{k}Omega $ </tex-math></inline-formula>\u0000). Interfacial capacitance and electrical modeling showed that at increasing actin bundles concentrations, the distance from the electrode to the diffusion region (Debye length) was reduced from 386 to 136, and from 1526 to 539 Å. Interfacial capacitance was evaluated for \u0000<inline-formula> <tex-math>$1 mu text{M}$ </tex-math></inline-formula>\u0000 concentration at two dielectric constants (\u0000<inline-formula> <tex-math>$boldsymbol {varepsilon }_{mathbf {r}}$ </tex-math></inline-formula>\u0000 = 5 and 78) resulting in 3.8 and 15.6 mF/m2 respectively. Similarly, for \u0000<inline-formula> <tex-math>$8 mu text{M}$ </tex-math></inline-formula>\u0000 concentration, interfacial capacitance resulted in 10.1 and 43.3 mF/m2 for the same values of \u0000<inline-formula> <tex-math>$boldsymbol {varepsilon }_{mathbf {r}}$ </tex-math></inline-formula>\u0000. Based on these theoretical calculations, the interface model could accurately predict the quantification of the actin bundles previously elucidated by the experimental EIS method. [2023-0180]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"350-361"},"PeriodicalIF":2.7,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140302789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch","authors":"Rusong He;Lyuyan Wang;Zhenci Sun;Jiahao Zhao","doi":"10.1109/JMEMS.2024.3377279","DOIUrl":"10.1109/JMEMS.2024.3377279","url":null,"abstract":"This paper reports a novel bi-stable structure for a radio frequency micro-electro-mechanical system (RF MEMS) switch. The structure is activated by an in-plane electrostatic actuator and adopts the Inertial Generated Timing Sequence (IGTS) method to latch, allowing the switch to turn on and off with a simple pulse signal. This design eliminates the need for a complex external control circuit and enables the switch to maintain the ON state at zero power consumption. Furthermore, the electrode shape is designed to reduce the driving voltage, thereby lowering the power consumption of the boost circuit. To test and verify the functionality of the bi-stable mechanism, a coplanar waveguide (CPW), which is separated from the actuation structure to reduce interference between the DC drive signal and the RF transmitted signal, is employed. Fabricated using a silicon-on-glass process with two lithographic masks, the RF MEMS switch achieves bi-stability with a single pulse signal of 18V for latching and 14V for unlatching. The measured insertion loss and isolation at 6 GHz are −0.28 dB and −36.68 dB, respectively. This switch exhibits low pull-in voltage, low power consumption, and simple control, holding potential for future RF systems tailored to wireless applications with an emphasis on low power consumption and system simplicity. [2024-0008]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"322-332"},"PeriodicalIF":2.7,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140302795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition","authors":"Bartosz Pruchnik;Tomasz Piasecki;Ewelina Gacka;Mateus G. Masteghin;David C. Cox;Teodor Gotszalk","doi":"10.1109/JMEMS.2024.3377595","DOIUrl":"10.1109/JMEMS.2024.3377595","url":null,"abstract":"In this article, we present a focused ion beam-induced deposition (FIBID) technique to improve the MEMS thermomechanical actuation efficiency by up to 3 orders of magnitude. During experiments, we investigated the thermomechanical actuation performance of silicon on insulator (SOI) cantilevers integrated in 4-sensors based array. The FIBID process was employed to add an extra layer with a different (and homogeneous) thermal expansion coefficient. The FIBID structures were deterministically deposited with the aid of a xenon-plasma focused ion beam (i.e., no stray species in the amorphous carbon pads). This approach enabled the enhancement of actuation efficiency without any changes in structure stiffness. In this way, an increase in the actuation deflection of 2 orders of magnitude was obtained, which was connected with reduction in the structure stiffness pointing to the enhanced force sensitivity.","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"362-368"},"PeriodicalIF":2.7,"publicationDate":"2024-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140200592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"CMOS-Compatible Hollow Nanoneedles With Fluidic Connection","authors":"Noah Brechmann;Marvin Michel;Leon Doman;Andreas Albert;Karsten Seidl","doi":"10.1109/JMEMS.2024.3376991","DOIUrl":"10.1109/JMEMS.2024.3376991","url":null,"abstract":"Nanoneedles are used for a variety of different biomedical applications such as intracellular injection/extraction and electrical recording. Combining these two capabilities in one device, however, remains challenging. We propose a novel method for fabricating fluidically connected arrays of hollow nanoneedles and characterize the resulting devices regarding their fluidic and electrochemical functionalities. The fabrication process relies solely on complementary metal-oxide-semiconductor (CMOS) compatible and scalable microsystems technology methods. Fluorescence microscopy is used to prove the successful transport of molecules through the passive nanoneedle chips. Electrochemical measurements of ion flows through these devices further confirm both the fluidic contact and the validity of an analytical model used to estimate the electrical resistance of the chips. In total, the presented work paves the way for monolithic integration of fluidic and electrical functionalities for intracellular contacting in a single device. This, in turn, can enable controlled, continuous drug delivery with simultaneous electrical recording on a highly scalable platform. [2023-0171]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"342-349"},"PeriodicalIF":2.7,"publicationDate":"2024-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10477994","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140200727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications","authors":"Zhong-Wei Lin;Cheng-Yen Wu;Sheng-Shian Li","doi":"10.1109/JMEMS.2024.3375363","DOIUrl":"10.1109/JMEMS.2024.3375363","url":null,"abstract":"Operating micro-nanoscale sensors in conductive liquids faces challenges due to liquid damping and high feedthrough floor, leading to low signal-to-feedthrough ratio. This work presents an innovative feedthrough engineering technique for resonant sensors immersed in ionic liquids, eliminating the need of isolation layers or additional processing for the sensing device. By leveraging the feedthrough path through substrate, the proposed technique counteracts the feedthrough induced by the ionic liquid, and successfully resumes the desired motional signal of the sensor. A thin-film piezoelectric-on-silicon (TPoS) resonator and oscillator operated in ionic environment are introduced to demonstrate that this technique not only enables the measurement of resonant signals in conductive liquids but also offers suitable options regarding the mode shape and resonant frequency of the sensor in different ion concentration environments. Additionally, the cancellation phenomenon shows potential as a concentration detector for ionic liquids. The fundamental (5MHz) and higher (15MHz) frequency modes of the PZT-based resonator are thoroughly investigated. Measurements show that regardless of the frequency where it operates, the resonator features decent stopband rejection (SBR) of around 18~20dB using the cancellation approach, which is even better than operating in deionized water. When employed as an oscillator, the results indicate a remarkable frequency resolution of approximately 1.8 Hz for both fundamental and higher mode frequencies. These measurements highlight the improved resonant behavior and real-time sensing capability offered by the proposed technique in conductive liquids. Such MEMS resonant transducers using this engineered feedthrough cancellation mechanism would serve as crucial building blocks for chemical and biosensing applications. [2023-0194]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"333-341"},"PeriodicalIF":2.7,"publicationDate":"2024-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140200584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}