通过单音激励下的多级分岔实现宽调谐 MEMS 声频梳

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-03-29 DOI:10.1109/JMEMS.2024.3379195

Jiahao Wu;Penghui Song;Shuke Zang;Yan Qiao;Ronghua Huan;Wenming Zhang;Lei Shao

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引用次数: 0

摘要

本文报告了可形成一至三次内部共振的非线性模态耦合 MEMS 谐振器声频梳的产生和演化机制。通过适当扫频，首先在振幅-频率曲线上观察到频率锁定和内部共振现象。然后确认声频梳的产生区域正好位于最强的内部共振区域，并仔细介绍了其开启程序和条件。正向和反向频率扫描均用于演示声频梳的多级演化，显示出包括混沌、周期加倍分岔和循环-折叠分岔在内的全面非线性动力学。这些丰富的分岔使得梳齿间距具有广泛的可调性，从 25 Hz 演变到 200 Hz 以上，达到一个数量级。[2024-0013]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation

This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal resonance. Through proper frequency sweeping, phenomena of frequency locking and internal resonance are first observed on the amplitude-frequency curve. The phononic frequency combs’ generation region is then confirmed to locate exactly at the strongest internal resonance region, and its turn-on procedure and conditions are carefully presented. Both forward and reverse frequency sweeps are used to demonstrate the multistage evolution of phononic frequency combs, showing comprehensive nonlinear dynamics including chaos, period-doubling bifurcation, and cyclic-fold bifurcation. These rich bifurcations allow a wide tunability in comb tooth spacing, which evolves from 25 Hz to more than 200 Hz, reaching an order of magnitude. [2024-0013]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.