使用Zygo光学轮廓仪的动态CMUTs光学特性：激光多普勒振动仪的替代方案

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-01-10 DOI:10.1109/JMEMS.2024.3524004

Ahmad Elshenety;Merve Mintas Kucuk;Mehmet Yilmaz

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引用次数: 0

摘要

激光多普勒测振仪（LDVs）是cmut最常用的光学表征设备，因为LDVs分别从静态偏转和共振频率方面表征静态和动态cmut。然而，对于超声换能器的研究人员来说，LDVs并不总是可用的。Zygo光学轮廓仪也被用作cmut的光学表征设备，但仅用于静态cmut。在这项研究中，我们证明了Zygo光学轮廓仪也可以用来表征动态cmut。该研究表明，Zygo光学轮廓仪可以替代ldv进行cmut的静态和动态分析。利用Zygo光学轮廓仪对圆片键合技术制备的CMUT细胞进行了表征。Zygo光学轮廓仪得到的前三个谐振频率与阻抗分析仪和ANSYS模态分析得到的谐振频率相匹配。该设备也可用于表征其他超声波换能器，如pmut和压电换能器。

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Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers

Laser Doppler Vibrometers (LDVs) are the most common optical characterization equipment for CMUTs since LDVs characterize both static and dynamic CMUTs in terms of static deflection and resonance frequency, respectively. However, LDVs are not always available for the researchers of ultrasonic transducers. Zygo optical profilometer is also used as an optical characterization equipment for CMUTs but only for static CMUTs. In this study, we show that Zygo optical profilometers could be used to characterize dynamic CMUTs as well. The study shows that Zygo optical profilometers could be an alternative to LDVs performing both static and dynamic analyses of CMUTs. A circular CMUT cell fabricated by wafer bonding technique is characterized using Zygo optical profilometer. The first three resonance frequencies obtained by Zygo optical profilometer match the resonance frequencies obtained by impedance analyzer and ANSYS modal analysis. The equipment could also be used to characterize other ultrasonic transducers such as PMUTs and piezoelectric transducers.[2024-0171]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.