Journal of Microelectromechanical Systems最新文献_第7页

Journal of Microelectromechanical Systems 微机电系统杂志

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-02-02 DOI: 10.1109/JMEMS.2023.3348604

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IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-02-02 DOI: 10.1109/JMEMS.2023.3348649

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TechRxiv: Share Your Preprint Research with the World! TechRxiv：与世界分享您的预印本研究成果！

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-02-02 DOI: 10.1109/JMEMS.2023.3348628

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A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length JMEMS Letters.1pt 采用不同单位长度的高阶宽度扩展模式 MEMS 谐振器的 Q 因子提升策略

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-30 DOI: 10.1109/JMEMS.2024.3355400

Liangliang Lv;Qingrui Yang;Haolin Li;Zhaoxun Wang;Quanning Li;Xuejiao Chen;Menglun Zhang;Wei Pang

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A Review on MEMS Silicon Resonant Accelerometers MEMS 硅谐振加速度计综述

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-26 DOI: 10.1109/JMEMS.2024.3354235

Zhao Zhang;Hemin Zhang;Yongcun Hao;Honglong Chang

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Experimental and Simulative Correlations of the Influence of Solder Volume and Receptor Size on the Capillary Self-Alignment of Micro Solar Cells 焊接体积和受体尺寸对微型太阳能电池毛细管自对准影响的实验和模拟相关性

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-23 DOI: 10.1109/JMEMS.2024.3352396

Victor Vareilles;Elisa Kaiser;Philippe Voarino;Maike Wiesenfarth;Romain Cariou;Frank Dimroth;Yannick Veschetti;Mohamed Amara;Henning Helmers

{"title":"Experimental and Simulative Correlations of the Influence of Solder Volume and Receptor Size on the Capillary Self-Alignment of Micro Solar Cells","authors":"Victor Vareilles;Elisa Kaiser;Philippe Voarino;Maike Wiesenfarth;Romain Cariou;Frank Dimroth;Yannick Veschetti;Mohamed Amara;Henning Helmers","doi":"10.1109/JMEMS.2024.3352396","DOIUrl":"10.1109/JMEMS.2024.3352396","url":null,"abstract":"Surface tension-driven self-alignment is a promising technique to align millimeter-scale components with a high accuracy of a few microns. It is based on liquid capillary forces moving and aligning a solid component on its receiving pad. Using molten solders as the liquid is a promising way to bond, connect and align a chip with its substrate. Micro-solar cells soldering experiments for micro-concentrator photovoltaics have been carried out. It has been found experimentally that the solder volume, the receiving pad size and the initial placement of the chip have an impact on the placement accuracy. In this work, an analytical and a numerical model of the capillary forces during self-alignment are built to improve the understanding of the experimental results. Guidelines to reach a high placement accuracy are presented. In practice, low solder volumes, receiving pads smaller than the chip and an initial chip displacement of about 10% of the chip size yield a higher placement accuracy. [2023-0153]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 2","pages":"290-295"},"PeriodicalIF":2.7,"publicationDate":"2024-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

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Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems 提高低频三电纳米发电机系统的能量性能

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-23 DOI: 10.1109/JMEMS.2023.3348872

Gaëtan Vauche;Christophe Corbier

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Silicon-Based Suspended Microchannel Resonator Developed Using Au Thermal Diffusion Bonding for Mass Sensing of Biomaterials 利用金热扩散键合技术开发的硅基悬浮微通道谐振器用于生物材料的质量传感

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-22 DOI: 10.1109/JMEMS.2024.3352835

Keita Funayama;Atsushi Miura;Fumihito Arai;Hiroya Tanaka

{"title":"Silicon-Based Suspended Microchannel Resonator Developed Using Au Thermal Diffusion Bonding for Mass Sensing of Biomaterials","authors":"Keita Funayama;Atsushi Miura;Fumihito Arai;Hiroya Tanaka","doi":"10.1109/JMEMS.2024.3352835","DOIUrl":"10.1109/JMEMS.2024.3352835","url":null,"abstract":"Suspended microchannels are of great interest in applications such as physical and chemical sensor systems. In this study, we developed a suspended microchannel resonator (SMR) by bonding two separate Au-coated silicon–insulator–silicon substrates via thermal diffusion bonding. To obtain a secure bond between Au films, we investigated different bonding temperatures and Au film thicknesses. As a result, we successfully fabricated an SMR. We show that the developed resonator has a resonance frequency of 229.55 kHz and a quality factor of 171 for the empty channel. The response of the channel to absolute mass was 18.7 pg/Hz. The measurement results were in good agreement with the results of numerical simulations. In addition, we estimated the practical mass detectability of the developed SMR via statistical analysis. The developed SMR enabled mass detection with a resolution of 710.6 pg. Our SMR can be produced via typical semiconductor fabrication technology, which is advantageous in terms of mass production. [2023-0164]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 2","pages":"282-289"},"PeriodicalIF":2.7,"publicationDate":"2024-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10411500","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

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Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes 用于蚀刻和沉积工艺的 JMEMS Letters.1pt 合形叠加铁磁阴影掩膜

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-17 DOI: 10.1109/JMEMS.2024.3350132

Minwoo Choi;Taeyeong Kim;Bong Jae Lee;Jaeman Song;Jungchul Lee

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Electrowetting Ionic Liquid Flow Controller 电喷雾离子液体流量控制器

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-01-17 DOI: 10.1109/JMEMS.2024.3351470

Jonathan MacArthur;Paulo Lozano

{"title":"Electrowetting Ionic Liquid Flow Controller","authors":"Jonathan MacArthur;Paulo Lozano","doi":"10.1109/JMEMS.2024.3351470","DOIUrl":"10.1109/JMEMS.2024.3351470","url":null,"abstract":"Ionic liquids are used in a variety of chemical, microfluidic, aerospace, and other diverse applications. Microfluidic applications often require a small footprint and manage small volumes of fluid in their channels on the order of microliters or less. Many microfluidic devices utilize external pressure systems or mechanical pumping mechanisms to control the flow of fluids through the device, inherently limiting the footprint of the device. Open microchannel microfluidics have at least one fluid boundary open to the environment instead of a channel wall surface confining liquid completely. A promising micro-scale fluid system for spacecraft propulsion applications is the electrospray thruster. Electrospray thrusters utilizes ionic liquids for propellant whereby ions are accelerated via electric field for thrust. These propulsion systems currently have few suitably sized active propellant management options, leaving the overall system less robust than desired. For use as a micro-scale ionic liquid propellant management device in these small electrospray spacecraft propulsion systems, a solid-state flow controller is proposed. By including an electrowetting region within an open microchannel fluid path, a change in liquid pressure can be achieved via electrowetting effect so long as contact angle is free to change within the electrowetting channel region. Various open microchannels are fabricated in silicon and tested, showing that rounding of the open microchannel ledges prevents liquid pinning along the channel, allowing for contact angle changes via electrowetting to manifest a change in pressure within the liquid in the channel, demonstrating a solid-state ionic liquid flow controller for use in electrospray propulsion systems. [2023-0191]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 2","pages":"248-259"},"PeriodicalIF":2.7,"publicationDate":"2024-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950824","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0