Journal of Microelectromechanical Systems最新文献

{"title":"A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters","authors":"Zichen Tang;Giovanni Esteves;Sean Yen;Travis R. Young;Michael David Henry;Loren Gastian;Christopher Nordquist;Roy H. Olsson","doi":"10.1109/JMEMS.2024.3404420","DOIUrl":"10.1109/JMEMS.2024.3404420","url":null,"abstract":"In this paper, spurious mode suppression methods for Al0.72Sc0.28N Lamb wave resonators and filters using the lowest order symmetric (S0) Lamb wave were meticulously studied and exercised. By adopting the method formally known as apodization, which inherently incorporates controlled finger lengths and bus-interdigitated transducer (IDTs) separation, in conjunction with a full-width anchor and an aperture-matched release pit geometry, the complete eradication of spurious mode responses in the resonator passband was demonstrated. Owing to the high piezoelectric coefficient brought by the scandium alloying, and the resonator design that makes the most use of this coupling, the resonator exhibited an electromechanical coupling coefficient \u0000<inline-formula> <tex-math>$k_{mathrm {t}}^{2}$ </tex-math></inline-formula>\u0000 as high as 5.36%, an unloaded \u0000<inline-formula> <tex-math>$Q_{mathrm {u,p}}$ </tex-math></inline-formula>\u0000 of 2916 at the parallel resonant peak of 524.85 MHz and the associated figure of merit (FOM) of 156.0. Ladder filters built upon this design achieved an insertion loss of −3.72 dB and fractional bandwidths of 2.78%/1.8% for the reception (Rx)/transmission (Tx) branch, respectively. The ability to build spurious-free, frequency lithographically defined, and CMOS-compatible resonators and filters will be of great assistance in the realization of next-generation telecommunication systems.[2024-0034]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"456-467"},"PeriodicalIF":2.5,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141884709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Journal of Microelectromechanical Systems Publication Information","authors":"","doi":"10.1109/JMEMS.2024.3402279","DOIUrl":"https://doi.org/10.1109/JMEMS.2024.3402279","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"C2-C2"},"PeriodicalIF":2.7,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10547179","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141245240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film","authors":"Peng Zhang;Huwang Hou;Zhendong Luo;Ye Feng;Hongmei Zhong;Hui Zhang;Ting Meng;Yang Zhao","doi":"10.1109/JMEMS.2024.3384497","DOIUrl":"10.1109/JMEMS.2024.3384497","url":null,"abstract":"The optomechanical uncooled infrared (IR) detector, characterized by a straightforward manufacturing process and sensitivity comparable to photonic detectors, employs bi-material microcantilevers as individual pixels. The detector’s key performance parameters are thermomechanical sensitivity and time constant, which are directly proportional to the coefficient of thermal expansion (CTE) mismatch and thermal mass of the two materials. Carbon nanotubes (CNTs), which exhibit thermal contraction axially, have a CTE value of \u0000<inline-formula> <tex-math>$- 11 times 10 ^{-6},,text{K}^{-1}$ </tex-math></inline-formula>\u0000 around room temperature. When combined with metals, such as gold, which have a positive CTE, it is possible to create bi-material pixels with superior thermomechanical sensitivity. The low thermal mass nature of CNTs inherently endows the pixels with a rapid thermal response. To realize an optomechanical IR detector based on super-aligned CNTs, a microfabrication process was developed that incorporates a liquid-induced CNT self-assembled step. Theoretical analyses indicate that the thermomechanical sensitivity and response speed are doubled compared to traditional ceramic-metal based photomechanical uncooled IR detectors. The experimental results are in good agreement with the theoretical values, demonstrating a measured time constant and thermomechanical sensitivity of 62 ms and \u0000<inline-formula> <tex-math>$0.466~mu text{m}$ </tex-math></inline-formula>\u0000/K, respectively. This design offers a viable path towards the development of high-performance uncooled IR detectors, facilitated by the integration of super-aligned CNTs. [2024-0011]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"376-383"},"PeriodicalIF":2.7,"publicationDate":"2024-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Piezoresistive Micropillar Sensors for Nano-Newton Cell Traction Force Sensing","authors":"Isha Lodhi;Durga Gajula;Devin K. Brown;Nikolas T. Roeske;David R. Myers;Wilbur A. Lam;Azadeh Ansari;Oliver Brand","doi":"10.1109/JMEMS.2024.3382974","DOIUrl":"10.1109/JMEMS.2024.3382974","url":null,"abstract":"Several studies demonstrate that large variations in biologically cell-generated forces are strong indicators of diseases in the body. To realize the full potential of single-cell biomechanical properties as label-free, non-invasive biomarkers in cell-based disease diagnoses, we need high-throughput test platforms that interrogate single cells individually while allowing measurement of thousands of cells at a time. This work presents a piezoresistive sub-\u0000<inline-formula> <tex-math>$mu text{N}$ </tex-math></inline-formula>\u0000 lateral force sensing approach using vertical pillars as structural elements and silicon-based, N-type piezoresistors embedded underneath the pillars for stress-sensing. Experimental testing of the first generation of sensors developed shows excellent \u0000<inline-formula> <tex-math>$text{F}_{mathrm {x}}$ </tex-math></inline-formula>\u0000 sensing resolution down to \u0000<inline-formula> <tex-math>$sim $ </tex-math></inline-formula>\u000070 nN. Measured sensitivities of devices with different pillar geometries range from \u0000<inline-formula> <tex-math>$Delta text{R}$ </tex-math></inline-formula>\u0000/R = 0.05% to 0.14% \u0000<inline-formula> <tex-math>$mu text{N}^{-1}$ </tex-math></inline-formula>\u0000 and are varied by simply scaling pillar geometry. While having a comparable resolution to existing MEMS in-plane sensors, the sensor design sets itself apart from existing approaches with its 3D printed pillar-based approach, which is combined with traditional nanofabrication to achieve 500 nm to \u0000<inline-formula> <tex-math>$3 , mu text{m}$ </tex-math></inline-formula>\u0000 width, in-substrate piezoresistors. Effective device footprint is a compact few \u0000<inline-formula> <tex-math>$mu text{m}^{2}$ </tex-math></inline-formula>\u0000 on substrate which makes the sensor design ideal for implementation in large, dense sensing arrays with \u0000<inline-formula> <tex-math>$mu text{m}$ </tex-math></inline-formula>\u0000-scale sensor-to-sensor pitches in both in-plane axes. [2023-0190]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"395-402"},"PeriodicalIF":2.7,"publicationDate":"2024-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion","authors":"Tianjiao Gong;Muhammad Jehanzeb Khan;Yukio Suzuki;Takashiro Tsukamoto;Shuji Tanaka","doi":"10.1109/JMEMS.2024.3382768","DOIUrl":"10.1109/JMEMS.2024.3382768","url":null,"abstract":"In this study, we introduce an innovative approach to vacuum-encapsulation of MEMS resonators using Silicon Migration Seal (SMS) technology, a novel wafer-level vacuum packaging method. SMS utilizes silicon reflow phenomena under high-temperature (>1000°C) hydrogen environments to seal release holes effectively. We successfully demonstrated this technique on a MEMS resonator made on a standard SOI wafer, commonly used in inertial sensors and timing devices. After the encapsulation, hydrogen diffusion from the sealed cavity was performed through annealing at 430°C for 27 hours in a nitrogen environment. Further analysis using focused ion beam (FIB) penetration outside the resonating element confirmed an impressive vacuum level improvement in the sealed cavity, estimated at ~60 Pa. Notably, after additional air-baking at 145°C, the maintained high Q factor suggests a potential vacuum level below 10 Pa. These findings not only illustrate the efficiency of SMS in wafer-level vacuum packaging but also open up possibilities for optimizing sealing pressure in MEMS packaging. [2024-0014]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"369-375"},"PeriodicalIF":2.7,"publicationDate":"2024-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10497109","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Journal of Microelectromechanical Systems Publication Information","authors":"","doi":"10.1109/JMEMS.2024.3380331","DOIUrl":"https://doi.org/10.1109/JMEMS.2024.3380331","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 2","pages":"C2-C2"},"PeriodicalIF":2.7,"publicationDate":"2024-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10494226","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351461","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Parallel in-Plane Electrothermal Actuators","authors":"Yen Nee Ho;Aron Michael;Chee Yee Kwok;Cibby Pulikkaseril","doi":"10.1109/JMEMS.2024.3381836","DOIUrl":"10.1109/JMEMS.2024.3381836","url":null,"abstract":"This letter reports a novel electrothermal actuator with large in-plane displacement designed for MEMS-based pitch-tunable diffraction grating (MPDG) for beam steering applications. The actuator consists of two sets of parallel electrothermal beams that pull and push a lever to produce large in-plane displacement. The actuator has been simulated, fabricated and tested. The results show that the actuator generates a large in-plane displacement of \u0000<inline-formula> <tex-math>$mathrm {177 ~mu text {m} }$ </tex-math></inline-formula>\u0000 at a driving voltage of \u0000<inline-formula> <tex-math>$mathrm {6 text {V}}$ </tex-math></inline-formula>\u0000 consuming \u0000<inline-formula> <tex-math>$mathrm {115.32 text {m} text {W} }$ </tex-math></inline-formula>\u0000 with minimal out-of-plane movement. By doubling the number of parallel electrothermal beams, the actuator uniquely reduces power consumption while increasing force generated, resulting in large in-plane displacement. [2024-0001]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"305-307"},"PeriodicalIF":2.7,"publicationDate":"2024-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field","authors":"Yuki Okamoto;Rihachiro Nakashima;Ryo Oda;Thanh-Vinh Nguyen;Yusuke Takei;Masaaki Ichiki;Hironao Okada","doi":"10.1109/JMEMS.2024.3402211","DOIUrl":"10.1109/JMEMS.2024.3402211","url":null,"abstract":"Conventional electromagnetic microelectromechanical system scanners require a biaxial (two-axis) external magnetic field to obtain a biaxial torque, which increases the number of bulky external permanent magnets and the packaging size caused by 45°-orientated placement of permanent magnets. Thus, this study developed a two-axis resonant electromagnetic scanner with an asymmetric gimbal frame that generates two-axis torque via a one-axis lateral external magnetic field. As external permanent magnets can be placed parallel to the device die, the proposed method reduced the packaging size. Two driving forces were generated by two independent electromagnetic actuators placed on both sides of the asymmetric gimbal frame, which converted the unidirectional forces into two-axis torque. As the two driving actuators were independent of the connecting beams, gimbal frame, and mirror and were connected to the thick outer Si handle frame, the temperature increase of torsion beams and the asymmetric gimbal frame, which affects the resonant performance, were reduced. Additionally, as the current paths were not multiturn coil shapes, the paths can be formed with a via-less single metal layer. Also, the drive circuit can be simplified since drive signals for two-axis rotation can be applied to individual actuators. We demonstrated biaxial scanning using the proposed structure with a 4-mm mirror. The optical scanning angle was 4.84° for the 1.308 kHz X-axis scan and 16.1° for the 2.568 kHz Y-axis scan when a current of 300 mA was applied independently to the X- and Y-axes driving actuators. We obtained the large displacement at the resonant frequency using the asymmetric gimbal frame under a lateral magnetic field.[2024-0050]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"495-502"},"PeriodicalIF":2.5,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10541112","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141189295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation","authors":"Jiahao Wu;Penghui Song;Shuke Zang;Yan Qiao;Ronghua Huan;Wenming Zhang;Lei Shao","doi":"10.1109/JMEMS.2024.3379195","DOIUrl":"10.1109/JMEMS.2024.3379195","url":null,"abstract":"This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal resonance. Through proper frequency sweeping, phenomena of frequency locking and internal resonance are first observed on the amplitude-frequency curve. The phononic frequency combs’ generation region is then confirmed to locate exactly at the strongest internal resonance region, and its turn-on procedure and conditions are carefully presented. Both forward and reverse frequency sweeps are used to demonstrate the multistage evolution of phononic frequency combs, showing comprehensive nonlinear dynamics including chaos, period-doubling bifurcation, and cyclic-fold bifurcation. These rich bifurcations allow a wide tunability in comb tooth spacing, which evolves from 25 Hz to more than 200 Hz, reaching an order of magnitude. [2024-0013]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"384-394"},"PeriodicalIF":2.7,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140567864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles","authors":"Jorge Manrique Castro;Nilab Azim;Nicholas Castaneda;Ellen Kang;Swaminathan Rajaraman","doi":"10.1109/JMEMS.2024.3376238","DOIUrl":"10.1109/JMEMS.2024.3376238","url":null,"abstract":"The essential cytoskeletal protein actin and its functions are paramount for motility, communication, and locomotive processes in eukaryotic cells. Detection and quantification of actin protein is of great interest for in vitro studies potentially elucidating unknown cellular mechanisms affecting drug responses with an extension to the study of disease states (e.g., study of neurodegenerative disorders). To this end, development of biomedical platforms and biosensors plays an important role in providing reliable and sensitive devices to study such intracellular constructs. Here, we present for the first time the microfabrication, characterization, testing, and electrical/interfacial modeling of a microfluidic biosensor for actin protein characterization. The device allows for the interaction and characterization of actin bundles using electrochemical impedance spectroscopy (EIS). The device was tested with \u0000<inline-formula> <tex-math>$1 mu text{M}$ </tex-math></inline-formula>\u0000 and \u0000<inline-formula> <tex-math>$8 mu text{M}$ </tex-math></inline-formula>\u0000 actin bundles concentrations producing shifts in impedance response in the significant biological frequency of 1 kHz from 17 to 30 kOhm (\u0000<inline-formula> <tex-math>$text{k}Omega $ </tex-math></inline-formula>\u0000). Interfacial capacitance and electrical modeling showed that at increasing actin bundles concentrations, the distance from the electrode to the diffusion region (Debye length) was reduced from 386 to 136, and from 1526 to 539 Å. Interfacial capacitance was evaluated for \u0000<inline-formula> <tex-math>$1 mu text{M}$ </tex-math></inline-formula>\u0000 concentration at two dielectric constants (\u0000<inline-formula> <tex-math>$boldsymbol {varepsilon }_{mathbf {r}}$ </tex-math></inline-formula>\u0000 = 5 and 78) resulting in 3.8 and 15.6 mF/m2 respectively. Similarly, for \u0000<inline-formula> <tex-math>$8 mu text{M}$ </tex-math></inline-formula>\u0000 concentration, interfacial capacitance resulted in 10.1 and 43.3 mF/m2 for the same values of \u0000<inline-formula> <tex-math>$boldsymbol {varepsilon }_{mathbf {r}}$ </tex-math></inline-formula>\u0000. Based on these theoretical calculations, the interface model could accurately predict the quantification of the actin bundles previously elucidated by the experimental EIS method. [2023-0180]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"350-361"},"PeriodicalIF":2.7,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140302789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}