Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-01-30 DOI:10.1109/JMEMS.2024.3510540

Xuankai Xu;Yushuai Liu;Tao Wu

引用次数: 0

Abstract

This letter presents a bidirectional thermo-acoustic (TA) modulator utilizing Y36-cut LiNbO

$_{\mathbf {3}}$

thin film. The device integrates two TA phase modulators and a one-dimensional (1D) phase-control transducer within a compact footprint of less than 0.35 mm2. The suspended LN thin film TA phase modulator demonstrates a phase response of 17°/mW. The composed TA amplitude modulator supports bidirectional amplitude modulation, achieving over 30 dB modulation at 460 MHz with a control voltage of 1.1 V. This compact and efficient design makes it ideal for phononic integrated circuit (PnIC) and advanced acoustic signal processing applications. [2024-0162]

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基于LiNbO₃薄膜的双向热声调制器

本文介绍了一种利用Y36-cut LiNbO $_{\mathbf{3}}$薄膜的双向热声（TA）调制器。该器件集成了两个TA相位调制器和一个一维（1D）相位控制传感器，占地面积小于0.35 mm2。悬浮LN薄膜TA相位调制器的相位响应为17°/mW。组成的TA调幅器支持双向调幅，在460 MHz下实现超过30 dB的调制，控制电压为1.1 V。这种紧凑而高效的设计使其成为声子集成电路（PnIC）和先进声学信号处理应用的理想选择。(2024 - 0162)

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.