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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Muscle-actuated bio-hybrid mems by cell culture and differentiation on me tamaterial micro-scaffolds 肌肉驱动的生物杂交mems的细胞培养和在材料微支架上分化
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421729
M. Gullo, S. Takeuchi, O. Paul
{"title":"Muscle-actuated bio-hybrid mems by cell culture and differentiation on me tamaterial micro-scaffolds","authors":"M. Gullo, S. Takeuchi, O. Paul","doi":"10.1109/MEMSYS.2016.7421729","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421729","url":null,"abstract":"This paper reports on a 3D bio-hybrid metamaterial MEMS scaffold for the culture and differentiation of C2C12 muscle precursor cells. For the first time, preferential cells differentiation on a technical surface into functional myotubes is demonstrated. The micro-scaffolds are based on concatenated bowtie elements fabricated by two-photon lithography and designed to achieve an equivalent Young's modulus of 12kPa. The high flexibility promotes the differentiation of the muscle cells into contractile myotubes [1]. Compared to state-of-the-art gel-based cell culture substrates, mechanical metamaterials can be shaped into arbitrary complex 3D geometries opening pathways towards muscle-driven biohybrid MEMS.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133780256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Elasto-optic modulator integrated in high frequency piezoelectric MEMS resonator 集成在高频压电MEMS谐振器中的弹光调制器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421544
Siddhartha Ghosh, G. Piazza
{"title":"Elasto-optic modulator integrated in high frequency piezoelectric MEMS resonator","authors":"Siddhartha Ghosh, G. Piazza","doi":"10.1109/MEMSYS.2016.7421544","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421544","url":null,"abstract":"This paper presents a new type of MEMS-based optical modulator, which operates on the elasto-optic effect. The device consists of a photonic racetrack resonator embedded into a laterally-vibrating piezoelectric resonator for strain to be transferred. This constitutes the first demonstration of a MEMS strain-based optomechanical device in which the operation is based on refractive index changes due to the elasto-optic effect rather than conventional physical displacements. Optical modulation is observed at the device resonance frequency of 843 MHz. The device could be used for signal modulation in RF-Photonic systems. As an example of such applications, an elasto-optic based electronic oscillator is also demonstrated.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114245664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Encapsulated disk resonator gyroscope with differential internal electrodes 内置差分电极的封装圆盘谐振陀螺仪
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421792
Chae HyuckAhn, D. D. Shin, V. Hong, Yushi Yang, E. Ng, Yunhan Chen, I. Flader, T. Kenny
{"title":"Encapsulated disk resonator gyroscope with differential internal electrodes","authors":"Chae HyuckAhn, D. D. Shin, V. Hong, Yushi Yang, E. Ng, Yunhan Chen, I. Flader, T. Kenny","doi":"10.1109/MEMSYS.2016.7421792","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421792","url":null,"abstract":"In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area, while maintaining similar performance to the previously reported baseline DRG. The mode-matching operation yields a scale-factor of 1.37 mV/(7s) and an ARW of 0.29 °/√hr.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121479831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation 双极电晕放电绝对压力感测:设计、模拟与实验验证
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421755
V. Dau, T. Bui, T. X. Dinh, T. Terebessy, H. Phan
{"title":"Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation","authors":"V. Dau, T. Bui, T. X. Dinh, T. Terebessy, H. Phan","doi":"10.1109/MEMSYS.2016.7421755","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421755","url":null,"abstract":"In this paper we present, for the first time, a reliable cost-effective absolute pressure sensor based on a novel bipolar corona system, which monitors pressure by producing both polarities of corona discharge simultaneously. The unique setup increases sensitivity and stability of the sensor. Systematical design study, numerical simulation and experiment of five prototypes acquired consistent results. With sub-microampere operating current, the sensors have temperature-independent sensitivity and good repeatability.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122421002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Sensor array based on metal oxide modified graphene for the detection of multi-component mixed gas 基于金属氧化物修饰石墨烯的多组分混合气体检测传感器阵列
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421781
Dongzhi Zhang, Jingjing Liu, Peng Li, Bokai Xia
{"title":"Sensor array based on metal oxide modified graphene for the detection of multi-component mixed gas","authors":"Dongzhi Zhang, Jingjing Liu, Peng Li, Bokai Xia","doi":"10.1109/MEMSYS.2016.7421781","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421781","url":null,"abstract":"This paper reports a novel nanostructure sensor array combining with back-propagation (BP) neural network toward multi-component gases detection. Tin dioxide and copper oxide modified reduced oxide graphene (rGO) were used as sensing materials toward ammonia and formaldehyde. The sensor array was fabricated via a facile hydrothermal route and layer-by-layer self-assembly method on the substrate with interdigital electrodes (IDEs). And furthermore, this work successfully achieves the recognition and prediction of components in the gas mixture of ammonia and formaldehyde through the combination of graphene-based high-performance sensor array and neural network-based signal processing technologies.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122945637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A hybrid flapping-leaf microgenerator for harvesting wind-flow energy 用于收集风能的混合叶片微型发电机
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421858
Yuedong Xia, Jun Zhou, Tao Chen, Huicong Liu, Wenjie Liu, Zhan Yang, Pengbo Wang, Lining Sun
{"title":"A hybrid flapping-leaf microgenerator for harvesting wind-flow energy","authors":"Yuedong Xia, Jun Zhou, Tao Chen, Huicong Liu, Wenjie Liu, Zhan Yang, Pengbo Wang, Lining Sun","doi":"10.1109/MEMSYS.2016.7421858","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421858","url":null,"abstract":"Wind energy is a kind of inexhaustible renewable clean energy. Wind energy harvesting becomes a potential technique to solve the power supply problem of wireless sensor nodes in field environment. This paper demonstrates a hybrid flapping-leaf microgenerator (FLMG) that convert wind flow energy to electric energy. Both the piezoelectric and triboelectric parts will generate power from wind flow. The output performance can be improved by optimizing the size of the flapping leaf and the connecting position between the cantilever and leaf. At a wind speed of 4.5 m/s, the maximum power of the piezoelectric and triboelectric parts of one-side FLMG can be obtained as 8.1 μW and 13.6 μW at optimized load resistances of 1 MΩ and 0.75 MΩ, respectively.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"332 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122989237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
1.02 GHz cross-sectional Lamé mode resonator with high KT2 exceeding 4.6% 1.02 GHz横截面lam<s:1>模谐振器，KT2超过4.6%
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421712
C. Cassella, Z. Qian, G. Hummel, M. Rinaldi
{"title":"1.02 GHz cross-sectional Lamé mode resonator with high KT2 exceeding 4.6%","authors":"C. Cassella, Z. Qian, G. Hummel, M. Rinaldi","doi":"10.1109/MEMSYS.2016.7421712","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421712","url":null,"abstract":"This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in the microwave frequency range. These novel devices are identified as Cross-Sectional-Lamé-Mode resonators (CLMRs) as they rely on the piezoelectric transduction of a Lamé mode, in the cross-section of an AlN plate. Such 2-dimensional (2D) mechanical mode of vibration, characterized by motion along both the lateral and the thickness directions, is actuated and sensed piezoelectrically through the coherent combination of the en and en piezoelectric coefficients of AlN. This special feature enables the implementation of CLMRs with high values of electromechanical coupling coefficient (kt2). We demonstrate a kt2 value in excess of 4.6% in a CLMR operating around 1.02 GHz. Such kt2 value is the highest ever reported among AlN resonators employing interdigital-metal-electrodes (IDTs) to actuate and to sense the mechanical motion.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"373 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116626887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A novel 0–3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm 一种新型的0 - 3kpa压阻压力传感器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421754
Taotao Guan, Fang Yang, Wei Wang, Xian Huang, Boyan Jiang, Jun He, Li Zhang, F. Fu, Dan Li, Ruipei Li, Qian Zhao, Dacheng Zhang
{"title":"A novel 0–3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm","authors":"Taotao Guan, Fang Yang, Wei Wang, Xian Huang, Boyan Jiang, Jun He, Li Zhang, F. Fu, Dan Li, Ruipei Li, Qian Zhao, Dacheng Zhang","doi":"10.1109/MEMSYS.2016.7421754","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421754","url":null,"abstract":"This paper reported a novel high sensitivity and linearity 0-3 kPa piezoresistive pressure sensor by carefully trading off the stress on the beam edge and the deflection of the sensing diaphragm. A shuriken-structured diaphragm (SSD) was proposed for the first time to improve both sensitivity and linearity for the piezoresistive pressure sensor. The fabricated sensor showed a sensitivity of 4.72 mV/kPa/V and a nonlinearity of 0.18% FSO (full scale output) in the pressure range of 0-3 kPa. Compared with our previous work, the sensitivity was increased by 28.3%, while the nonlinearity was reduced by 50%.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129798385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
High dynamic ablation and injection by electric cavitation for wide range of materials 高动态烧蚀和电空化喷射，适用于各种材料
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421547
Kazuki Takahashi, Y. Arakawa, Y. Yamanishi
{"title":"High dynamic ablation and injection by electric cavitation for wide range of materials","authors":"Kazuki Takahashi, Y. Arakawa, Y. Yamanishi","doi":"10.1109/MEMSYS.2016.7421547","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421547","url":null,"abstract":"We have successfully carried out local reagent injection and perforation to materials of variety of hardness using bubble cavitation and plasma cavitation. Cavitation and plasma was generated by pulse discharge of microelectrode having special tip structure. Injection to soft material such as animal cell was performed only by cavitation of bubble, and perforation to hard materials such as seeds of plants or metals were achieved by synergistic effect of cavitation of bubble and plasma ablation. The novel device we produced has ability to perforate wide range of materials with high dynamic range of hardness.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122278665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
All-round micro sheath flow formation to realize complex cross sections by simply stacked PDMs structures 通过简单堆叠pdm结构，形成全方位的微鞘流，实现复杂截面
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421578
D. Yoon, Lisa Ariyoshi, D. Tanaka, T. Sekiguchi, S. Shoji
{"title":"All-round micro sheath flow formation to realize complex cross sections by simply stacked PDMs structures","authors":"D. Yoon, Lisa Ariyoshi, D. Tanaka, T. Sekiguchi, S. Shoji","doi":"10.1109/MEMSYS.2016.7421578","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421578","url":null,"abstract":"This research proposed a sheath flow formation method for complex 3D structure such as multi-core and multi-sheath using multi-stacked PDMS units. Cross sectional shape of the flow and the number of sheath layer were defined simply by combination of different PDMS units. The stacked PDMS units allowed independent fluid injection of different layers and the short sheath area realized low diffusion between each layer. Furthermore, the proposed 3D device fabrication method requires only one point alignment. The sheath flow formation method is useful for wide applications which require fiber materials of specific cross sectional shapes and layers.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122517129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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