内置差分电极的封装圆盘谐振陀螺仪

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI:10.1109/MEMSYS.2016.7421792

Chae HyuckAhn, D. D. Shin, V. Hong, Yushi Yang, E. Ng, Yunhan Chen, I. Flader, T. Kenny

{"title":"内置差分电极的封装圆盘谐振陀螺仪","authors":"Chae HyuckAhn, D. D. Shin, V. Hong, Yushi Yang, E. Ng, Yunhan Chen, I. Flader, T. Kenny","doi":"10.1109/MEMSYS.2016.7421792","DOIUrl":null,"url":null,"abstract":"In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area, while maintaining similar performance to the previously reported baseline DRG. The mode-matching operation yields a scale-factor of 1.37 mV/(7s) and an ARW of 0.29 °/√hr.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"Encapsulated disk resonator gyroscope with differential internal electrodes\",\"authors\":\"Chae HyuckAhn, D. D. Shin, V. Hong, Yushi Yang, E. Ng, Yunhan Chen, I. Flader, T. Kenny\",\"doi\":\"10.1109/MEMSYS.2016.7421792\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area, while maintaining similar performance to the previously reported baseline DRG. The mode-matching operation yields a scale-factor of 1.37 mV/(7s) and an ARW of 0.29 °/√hr.\",\"PeriodicalId\":157312,\"journal\":{\"name\":\"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"53 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-02-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2016.7421792\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2016.7421792","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 13

摘要

在这项研究中，我们首次展示了在晶圆级封装工艺中将差分内部电极集成到磁盘谐振陀螺仪(DRG)设计中。差分内部电极设计使器件能够在低直流电源(±5 V)下进行模式匹配操作，这得益于增强的转导面积，同时保持与先前报道的基线DRG相似的性能。模式匹配操作的比例系数为1.37 mV/(7s)， ARW为0.29°/√hr。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Encapsulated disk resonator gyroscope with differential internal electrodes

In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area, while maintaining similar performance to the previously reported baseline DRG. The mode-matching operation yields a scale-factor of 1.37 mV/(7s) and an ARW of 0.29 °/√hr.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量