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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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MEMS digital parametric loudspeaker MEMS数字参数扬声器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-03-23 DOI: 10.1109/MEMSYS.2016.7421826
A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds
{"title":"MEMS digital parametric loudspeaker","authors":"A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds","doi":"10.1109/MEMSYS.2016.7421826","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421826","url":null,"abstract":"This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116456914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Achieving clinically viable 12-CM readout distance from micromachined implantable intraocular pressure sensor using a standard clinical slit lamp 使用标准临床裂隙灯实现与微机械植入式眼压传感器在临床上可行的12cm读数距离
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421596
J. Lee, Haeri Park, Oliver Chen, A. Balakrishna, Juan Du, D. Sretavan, H. Choo
{"title":"Achieving clinically viable 12-CM readout distance from micromachined implantable intraocular pressure sensor using a standard clinical slit lamp","authors":"J. Lee, Haeri Park, Oliver Chen, A. Balakrishna, Juan Du, D. Sretavan, H. Choo","doi":"10.1109/MEMSYS.2016.7421596","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421596","url":null,"abstract":"Achieving a practical readout distance for implantable intraocular pressure (IOP) sensors is an essential step toward commercialization yet has remained as a major challenge. Using the Zeiss SL-30 slit lamp - a standard ophthalmic scope widely used by clinicians, we have demonstrated an optical readout distance of 12 cm from a micromachined IOP sensor implanted in an ex-vivo rabbit eye. We show that we have achieved this readout distance by (1) redesigning the sensing area of the IOP sensor and its fabrication steps to significantly improve the signal-to-noise ratio; and (2) incorporating a novel robust detection algorithm, which includes a much-improved opto-mechanical model, that allows us to remove the background noise and instantaneously map the sensor's optical signal to the corresponding IOP value. A significant increase in readout distance accomplished using a well established ophthalmic clinical scope makes our IOP system a more clinically viable choice.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128393264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope 高频外延封装单驱动四质量三轴谐振音叉陀螺仪
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421784
S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, F. Ayazi
{"title":"A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope","authors":"S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, F. Ayazi","doi":"10.1109/MEMSYS.2016.7421784","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421784","url":null,"abstract":"This paper introduces a `high-frequency' resonant tri-axial tuning fork gyroscope (TFG) with a single-drive mode of operation. The quad-mass device is implemented on a 2×2 mm2 vacuum-packaged die fabricated using the epi-seal process, making this one of the smallest wafer-level packaged 3-axis gyros. In contrast to conventional resonant TFGs, the resonant frequencies are designed to be relatively high (~138 kHz) permitting high bandwidth for mode-matched operation and enhancing resistance to shock and vibration. The results show sensitivity to all three axes with mode-matched operation for the Z-axis and mode-split for the X- and Y-axes.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124544269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Ultra-thin elastomer membrane array wrinkling for bladder cancer diagnosis 超薄弹性体膜阵列起皱诊断膀胱癌
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421650
Jennie H. Appel, Mandy L. Y. Sin, J. Liao, J. Chae
{"title":"Ultra-thin elastomer membrane array wrinkling for bladder cancer diagnosis","authors":"Jennie H. Appel, Mandy L. Y. Sin, J. Liao, J. Chae","doi":"10.1109/MEMSYS.2016.7421650","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421650","url":null,"abstract":"We report an ultra-thin silicone membrane array to simultaneously discern the presence of cancerous cells in as many as 16 samples from multiple individuals. This high throughput parallel array relies on the intrinsic and specific biophysical properties of cancerous cells to induce deformation, or `wrinkling' on the arrayed membrane. In contrast, non-cancerous cells fail to generate these membrane wrinkles. We evaluated an initial pilot study to test clinical urine samples from patients at a high risk for bladder cancer. We also expanded the functionality of the ultra-thin membrane array beyond bladder cancer toward the screening of cervical cancer. This screening array has the potential to be deployed at the point-of-care to improve throughput compared to sequential analysis by individual membranes and may be able to enhance reliability and accuracy by coordinating controls for false results concurrently.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129702313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An impedance wire integrated with flexible flow sensor and FFR sensor for cardiovascular measurements 一种集成了柔性流量传感器和FFR传感器的阻抗线，用于心血管测量
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421631
Longjun Tang, Jingquan Liu, Bin Yang, Xiang Chen, Chunsheng Yang
{"title":"An impedance wire integrated with flexible flow sensor and FFR sensor for cardiovascular measurements","authors":"Longjun Tang, Jingquan Liu, Bin Yang, Xiang Chen, Chunsheng Yang","doi":"10.1109/MEMSYS.2016.7421631","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421631","url":null,"abstract":"This paper reports on an impedance wire with flexible flow sensor and FFR sensor integrated on its surface, which will allow, for the first time, minimally invasive in-vivo measurement of blood flow rate and fractional flow reserve (FFR) simultaneously. These two sensors are first constructed on parylene-C film into a single device, with gold electrodes and leading wires embed in it. With a total thickness of 8 μm, the device has extremely flexibility and can work well on a thin wire with a diameter of 380 um. The flow sensor and the FFR sensor are both based on electrochemical impedance (EI) transduction, The EI-based sensor is the first time employed for FFR determination. The capability of the two sensors was demonstrated in-vitro. A favorable linearity of the impedance/flow relation of the flow sensor was found over 0-250ml/min. The FFR sensor also exhibited high sensitivity at the range of FFR from 0.6 to 1.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121846656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ultrathin flat parabolic reflector based on gradient metasurface 基于梯度超表面的超薄平面抛物面反射器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421705
Wei Ma, D. Jia, Xiaomei Yu, Yun Feng, Yuejin Zhao
{"title":"Ultrathin flat parabolic reflector based on gradient metasurface","authors":"Wei Ma, D. Jia, Xiaomei Yu, Yun Feng, Yuejin Zhao","doi":"10.1109/MEMSYS.2016.7421705","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421705","url":null,"abstract":"This paper reports an ultrathin flat parabolic reflector to focus a laser beam of 1.47μm wavelength based on gradient metasurface. The metasurface consists of an array of sub-wavelength cross resonators fabricated on a continuous gold film spaced by a layer of SiO2. The cross resonators are arranged in a radially periodic manner following a hyperboloidal phase distribution, which is controlled by varying their arm lengths and widths. Transverse profiles of the laser spot were captured by an IR detector along the propagating direction, showing the minimum spot size to be 167μm at focal point with the focal length of 5.8 cm and the overall reflection efficiency of 44%. The symmetric design in the resonators also renders its performance of polarization independence to the incident light, which was also experimentally verified.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132122887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Frequency-tunable current-assisted AlGaN/GaN acoustic resonators 频率可调电流辅助AlGaN/GaN声学谐振器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421573
A. Ansari, M. Rais-Zadeh
{"title":"Frequency-tunable current-assisted AlGaN/GaN acoustic resonators","authors":"A. Ansari, M. Rais-Zadeh","doi":"10.1109/MEMSYS.2016.7421573","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421573","url":null,"abstract":"This work reports on frequency tunable AlGaN/GaN acoustic resonators that utilize piezoelectric actuation based on depletion-mediated strain in the AlGaN layer and piezo-resistive readout utilizing the two-dimensional electron gas (2-DEG) induced at the AlGaN/GaN interface. The effects of the DC current flowing through (I) forward-biased Schottky inter-digitated electrodes in Class I resonators, and (II) drain/source Ohmic contacts of an integrated AlGaN/GaN HEMT in Class II resonators are studied. The readout electrodes in Class I resonators are Ni/Au Schottky contacts, whereas in Class II resonators, Ti/Al/Ti/Au metal stack is deposited and annealed to form Ohmic contacts. In both classes of devices, wide-range frequency tuning is achieved by flowing DC current through the contacts, causing large elastic modulus change due to Joule heating of the device. Frequency tuning allows for compensation of effects of fabrication variations as well as environmental changes. The 9th-order width-extensional resonance mode at 730 MHz of Class I resonators is tuned by more than 500 ppm at 25 mW of input DC power, while maintaining a quality factor (Q) of ~4,500 with no performance degradation over the tuning range. The same mode of Class II resonators at ~719 MHz shows Q amplification from 1,710 at VDS= 4 V to 13,851 at VDS= 9 V, with more than 2,500 ppm of frequency tuning. Resonant devices with such large frequency tuning are perfect candidates as in-situ temperature sensors, where the resonance frequency shift is an indicator of the temperature rise in the channel of the suspended HEMT.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"447 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134048550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A novel shock protection method based on MEMS compliant latching stopper 一种基于MEMS柔性锁止器的冲击保护新方法
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421833
Kaisi Xu, N. Zhu, Xianfeng Zhang, W. Su, Wei Zhang, Y. Hao
{"title":"A novel shock protection method based on MEMS compliant latching stopper","authors":"Kaisi Xu, N. Zhu, Xianfeng Zhang, W. Su, Wei Zhang, Y. Hao","doi":"10.1109/MEMSYS.2016.7421833","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421833","url":null,"abstract":"This paper reports a novel shock protector on the basis of compliant latching system for the shock resistance enhancement of microelectromechanical systems (MEMS) devices applied in high shock environment. For the first time, MEMS latches have been employed to dissipate energy during impact. Through the machine logic, the MEMS latches have realized different shock protection functions upon relative impact amplitudes to reduce the impact force applied on microstructures. In this work, the compliant latching stopper has been verified to provide multi-fold shock resistance improvement compared with some traditional shock protection structure such as hard stopper and compliant spring stopper.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"5 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131437657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Patterned soft-micropolyhedra by self-folding and molding 自折叠成型的软微多面体
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421594
Shivendra Pandey, ChangKyu Yoon, Zhilin Zhang, Hye Rin Kwag, Jinpyo Hong, D. Gracias
{"title":"Patterned soft-micropolyhedra by self-folding and molding","authors":"Shivendra Pandey, ChangKyu Yoon, Zhilin Zhang, Hye Rin Kwag, Jinpyo Hong, D. Gracias","doi":"10.1109/MEMSYS.2016.7421594","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421594","url":null,"abstract":"It is extremely challenging to mass-produce polymeric microstructures with patterns in all three dimensions (3D). In this paper, we describe a highly parallel strategy to create such patterned soft-micropolyhedra with a range of polymers and even live mammalian cell-laden hydrogels. Specifically, we first patterned metallic micropolyhedra using photolithography and capillary force assisted self-folding. Inverse molds were created in the elastomer polydimethylsiloxane (PDMS); interestingly, the patterns were imprinted on the side walls of the molds. The molds were then filled with pre-polymers such as NOA73, PEGDA, and pNIPAM-AAc and cell-laden hydrogel solutions and cross-linked to form soft patterned micropolyhedra. Our results suggest that the combination of self-folding and molding could be used to create a variety of smart particles and building blocks with precisely patterned surfaces for applications in colloidal science, self-assembly, drug delivery and tissue engineering.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123898281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A flexible, foldable, tubular μDMFC for powering wrist bands 一种灵活的、可折叠的管状μDMFC，用于为腕带供电
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421553
Zonglin Wu, X. Wang, X. Kuang, Litian Liu
{"title":"A flexible, foldable, tubular μDMFC for powering wrist bands","authors":"Zonglin Wu, X. Wang, X. Kuang, Litian Liu","doi":"10.1109/MEMSYS.2016.7421553","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421553","url":null,"abstract":"This paper reports a flexible tubular passive micro direct methanol fuel cell (μDMFC) for powering wrist bands at the first time. The tubular μDMFC, featured by flexible electrodes and foldable whole structure, shows excellent power density and long-term performance compared to batteries. The novelty claims of this work are: (1) a novel foldable structure and its fabrication, as well as assembly method proposed are usable for the flexible tubular μDMFCs and even other multi-layer flexible microfluidic devices; (2) the prototype achieves a power density of 15.3mWcm-2 and a maximum output of 38mW at room temperature; (3) the assembled μDMFC with a DC/DC converter is integrated into a wristband to power a LED and a DC motor (25mW) for about 20h with 1mL methanol. As such, it is believed that this μDMFC is applicable to serve as the power unit for wrist bands (typically 1~20mW) or even other wearable devices.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127460758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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