2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - 最新文献

MEMS digital parametric loudspeaker

Pub Date : 2016-03-23 DOI: 10.1109/MEMSYS.2016.7421826 A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds

Achieving clinically viable 12-CM readout distance from micromachined implantable intraocular pressure sensor using a standard clinical slit lamp

Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421596 J. Lee, Haeri Park, Oliver Chen, A. Balakrishna, Juan Du, D. Sretavan, H. Choo

A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope

Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421784 S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, F. Ayazi

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