MEMS数字参数扬声器

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-03-23 DOI:10.1109/MEMSYS.2016.7421826

A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds

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引用次数: 5

摘要

本文报道了一种适用于数字声音重构和参数定向扬声器的MEMS致动器阵列的设计与制造。制造了两种不同版本的装置:一种使用静电原理驱动，另一种使用压电原理驱动。两种版本的膜尺寸相似，直径均为500 μm。这些设备是最小的微机械超声换能器(MUT)阵列，可用于两种模式:数字声音重建和参数扬声器。芯片由256个换能器组成，尺寸为12mm × 12mm。单片总尺寸为:2.3 cm × 2.3 cm，包括接触片。

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MEMS digital parametric loudspeaker

This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads.

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来源期刊

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

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