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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Bringing a MEMS startup to success from lab to market, with a fabless business model 通过无晶圆厂商业模式，将MEMS初创企业从实验室推向市场
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421559
N. Abelé, F. Khechana, L. Kilcher, M. Boella
{"title":"Bringing a MEMS startup to success from lab to market, with a fabless business model","authors":"N. Abelé, F. Khechana, L. Kilcher, M. Boella","doi":"10.1109/MEMSYS.2016.7421559","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421559","url":null,"abstract":"This paper describes the various ways for a MEMS startup to develop an innovative product derived from a University lab, and bring it to the market as a world leading product/technology. The paper describes the origin, the development and the trade sale of Lemoptix, a Swiss-based company created back in 2008, following 10 years of R&D and development of MEMS-scanning mirror-based laser projection systems for display electronics in consumer and automotive applications.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132509953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Individually tunable liquid lens arrays using transparent graphene for compound eye applications 使用透明石墨烯的单独可调液体透镜阵列用于复眼应用
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421696
A. Shahini, P. Zeng, Yang Zhao, M. Cheng
{"title":"Individually tunable liquid lens arrays using transparent graphene for compound eye applications","authors":"A. Shahini, P. Zeng, Yang Zhao, M. Cheng","doi":"10.1109/MEMSYS.2016.7421696","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421696","url":null,"abstract":"For the first time, this paper reports a tunable liquid lens array that can be individually controlled by electrowetting on dielectric (EWOD) and pneumatic pressure. Flexible and transparent graphene electrodes are fabricated on a highly deformable membrane made of polydimethylsiloxane (PDMS) and parylene. The design has many advantages for compound eye applications, including a large field of view (FOV), a compact size and fast responses. Potassium chloride (KCl) and ionic liquid have been tested as liquid lenses with the tunable ranges of focal length between 3 and 8mm. Their optical performancees including, enlargement of FOV and the tuning of focal length of individual lens have been demonstrated.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125566143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators 基于高掺杂单晶硅谐振器的烤箱双模时钟
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421565
Yunhan Chen, E. Ng, D. D. Shin, C. Ahn, Yushi Yang, I. Flader, V. Hong, T. Kenny
{"title":"Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators","authors":"Yunhan Chen, E. Ng, D. D. Shin, C. Ahn, Yushi Yang, I. Flader, V. Hong, T. Kenny","doi":"10.1109/MEMSYS.2016.7421565","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421565","url":null,"abstract":"This work demonstrates, for the first time, ovenization of a fully-encapsulated dual-mode silicon MEMS resonator operational over a large ambient temperature range. We maintain a localized, elevated operating temperature by utilizing the temperature coefficient of frequency (TCf) difference between two excitation modes of the same resonant body as a thermometer, and by integrating a micro-oven in the encapsulation layer. Preliminary results of real-time compensation demonstrate a stability of ±250ppb of the in-plane Lamé-mode frequency over -20°C to 80°C.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"99 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114043270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 30
Processing of platinum electrodes for parylene-C based neural probes 聚苯乙烯- c神经探针铂电极的制备
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421673
Xiao Chuan Ong, M. Forssell, G. Fedder
{"title":"Processing of platinum electrodes for parylene-C based neural probes","authors":"Xiao Chuan Ong, M. Forssell, G. Fedder","doi":"10.1109/MEMSYS.2016.7421673","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421673","url":null,"abstract":"This paper reports a method to improve the electrochemical properties of platinum electrodes fabricated using parylene-C based processes. It is found that the use of O2 reactive-ion etch to etch parylene-C, the state-of-the-art method for processing parylene-C, oxidizes a surface layer of platinum, which results in high electrochemical impedance of the electrode. By introducing an Ar+ ion milling step, the electrochemical impedance of the electrode is reduced by an order of magnitude. The surface roughness of the electrodes (Ra) using this method of de-insulation is found to be 13.1 nm.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131128551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Micro pillars with thin hydrophobic layer formed on the side walls to prevent cell protrusion toward side wall 在侧壁形成具有疏水层的微柱，防止细胞向侧壁突出
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421671
K. Noda, K. Hirayama, Kiyoshi Matsumoto, I. Shimoyama
{"title":"Micro pillars with thin hydrophobic layer formed on the side walls to prevent cell protrusion toward side wall","authors":"K. Noda, K. Hirayama, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2016.7421671","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421671","url":null,"abstract":"The paper reports on micro pillars with thin fluorocarbon layer formed onto their side walls and the surface of the substrate where the pillars are standing. Since the cell cannot adhere to the fluorocarbon layer, the cultured cells will adhere only to the top of the pillars. Therefore, the traction forces of the cells might be measured without considering their adhering positions. We fabricated micro pillars and formed 60 nm thick CYTOP layer around its side walls and to the surface of silicon substrate. By forming the CYTOP layer around micro pillars, we demonstrated that the numbers of the protruded cells to the gaps around the pillar became a half compared to those without CYTOP.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"112 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124893733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Decoupling of diameter and pitch in nanostructure arrays made by colloidal self-assembly 胶体自组装纳米结构阵列中直径和节距的解耦
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421655
Xiaolu Huang, Matthew D. Bjork, Jack Jongwon Kim, J. Yeom
{"title":"Decoupling of diameter and pitch in nanostructure arrays made by colloidal self-assembly","authors":"Xiaolu Huang, Matthew D. Bjork, Jack Jongwon Kim, J. Yeom","doi":"10.1109/MEMSYS.2016.7421655","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421655","url":null,"abstract":"This paper reports the fabrication of ordered nanostructure array using colloidal self-assembly. Colloidal lithography, also known as nanosphere lithography (NSL), has been extensively and exhaustively utilized to create various nanostructures with the limitation in the resulting morphology and array spacing. Especially, independent control over the individual nanostructure size and array pitch remains a challenge and is the subject of this paper. Here, we show three different methods that expand the type of the nanostructure array produced from NSL. First, the combined technique of NSL and metal-assisted chemical etching (MACE) is shown to generate vertically-aligned Si nanowire (SiNW) array with the unprecedented dimensional control. Second, a stretchable elastomer with transfer printing is utilized to control the pitch of the original NS arrays, and with a custom-designed radial stretcher, a hexagonal symmetry of the resulting nanostructures is conserved. An array of sparsely ordered silicon or quartz nanopillars is obtained along with metallic nanostructures on NSs as etch masks. Finally, a double lift-off method is introduced to create an array of metallic nanodots that are not conventionally realized using the NSL template.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121410006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors 用于MEMS/NEMS传感器的无转移晶圆级CVD石墨烯制造工艺
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421546
S. Vollebregt, B. Alfano, F. Ricciardella, A. Giesbers, Y. Grachova, H. V. van Zeijl, T. Polichetti, P. Sarro
{"title":"A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors","authors":"S. Vollebregt, B. Alfano, F. Ricciardella, A. Giesbers, Y. Grachova, H. V. van Zeijl, T. Polichetti, P. Sarro","doi":"10.1109/MEMSYS.2016.7421546","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421546","url":null,"abstract":"In this paper we report a novel transfer-free graphene fabrication process, which does not damage the graphene layer. Uniform graphene layers on 4\" silicon wafers were deposited by chemical vapor deposition using the CMOS compatible Mo catalyst. Removal of the Mo layer after graphene deposition results in a transfer-free and controlled placement of the graphene on the underlying SiO2. Moreover, pre-patterning the Mo layer allows customizable graphene geometries to be directly obtained, something that has never been achieved before. This process is extremely suitable for the large-scale fabrication of MEMS/NEMS sensors, especially those benefitting from specific properties of graphene, such as gas sensing.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125804385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 25
Photonic nanofences for integrated sub-wavelength structures-based sensing applications 基于集成亚波长结构传感应用的光子纳米栅栏
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421778
V. Cadarso, A. Llobera, M. Puyol, H. Schift
{"title":"Photonic nanofences for integrated sub-wavelength structures-based sensing applications","authors":"V. Cadarso, A. Llobera, M. Puyol, H. Schift","doi":"10.1109/MEMSYS.2016.7421778","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421778","url":null,"abstract":"Photonic nanofences (PNFs) are introduced here as advanced high-sensitivity chemical sensors. They are based on sub-wavelength high aspect ratio structures and allow creating evanescent field (EF) higher than 70%, while keeping the light confined in a defined region. Thus unprecedented light-analyte interaction can be achieved. We demonstrate the waveguiding capabilities of these structures by presenting bent PNFs, proving their efficient light coupling and guiding. Finally, PNFs are implemented as absorbance sensor for lead (Pb2+) detection in water environment.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129425318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microrna diagnosis using complementary DNA that brakes transit events through a biological nanopore 微核糖核酸诊断使用互补DNA，通过生物纳米孔阻止转运事件
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421623
T. Osaki, K. Kamiya, S. Fujii, S. Takeuchi
{"title":"Microrna diagnosis using complementary DNA that brakes transit events through a biological nanopore","authors":"T. Osaki, K. Kamiya, S. Fujii, S. Takeuchi","doi":"10.1109/MEMSYS.2016.7421623","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421623","url":null,"abstract":"MicroRNA, a biomarker for various diseases, was diagnosed by electrical monitoring of its transit event through a biological nanopore. The target microRNA in a sample solution selectively forms a duplex with a complementary DNA specially designed, which makes the transit time to slow down. An artificial lipid bilayer device previously reported allowed to implement the nanopore platform just by sequential injection of aqueous and lipid/oil solutions. A series of feasibility tests demonstrated rapid, selective, and label-free detection of the target microRNA with the simple operation. Further development on the limited sensitivity will offer a possible future application for the onsite diagnosis.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127924565","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Solution processed highly conductive transparent electrodes 溶液处理高导电性透明电极
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI: 10.1109/MEMSYS.2016.7421688
H. S. Park, Jaewon Jang, Liwei Lin
{"title":"Solution processed highly conductive transparent electrodes","authors":"H. S. Park, Jaewon Jang, Liwei Lin","doi":"10.1109/MEMSYS.2016.7421688","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421688","url":null,"abstract":"We have successfully demonstrated highly transparent and conductive, antimony doped tin oxide (ATO) films based on a fabrication process using the sol-gel method. Three distinctive advancements have been accomplished: (1) solution-processed ATO films for low-cost, wide range applications; (2) highly transparent films of more than 95% transmittance in the visible light spectrum; and (3) high conductivity of over 20,000S/m. As such, this process opens up a new class of micro/nano fabrication process for making transparent and conductive electrodes in various systems, such as transparent electronics and displays.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127983912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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