{"title":"Individually tunable liquid lens arrays using transparent graphene for compound eye applications","authors":"A. Shahini, P. Zeng, Yang Zhao, M. Cheng","doi":"10.1109/MEMSYS.2016.7421696","DOIUrl":null,"url":null,"abstract":"For the first time, this paper reports a tunable liquid lens array that can be individually controlled by electrowetting on dielectric (EWOD) and pneumatic pressure. Flexible and transparent graphene electrodes are fabricated on a highly deformable membrane made of polydimethylsiloxane (PDMS) and parylene. The design has many advantages for compound eye applications, including a large field of view (FOV), a compact size and fast responses. Potassium chloride (KCl) and ionic liquid have been tested as liquid lenses with the tunable ranges of focal length between 3 and 8mm. Their optical performancees including, enlargement of FOV and the tuning of focal length of individual lens have been demonstrated.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2016.7421696","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
For the first time, this paper reports a tunable liquid lens array that can be individually controlled by electrowetting on dielectric (EWOD) and pneumatic pressure. Flexible and transparent graphene electrodes are fabricated on a highly deformable membrane made of polydimethylsiloxane (PDMS) and parylene. The design has many advantages for compound eye applications, including a large field of view (FOV), a compact size and fast responses. Potassium chloride (KCl) and ionic liquid have been tested as liquid lenses with the tunable ranges of focal length between 3 and 8mm. Their optical performancees including, enlargement of FOV and the tuning of focal length of individual lens have been demonstrated.