{"title":"Solution processed highly conductive transparent electrodes","authors":"H. S. Park, Jaewon Jang, Liwei Lin","doi":"10.1109/MEMSYS.2016.7421688","DOIUrl":null,"url":null,"abstract":"We have successfully demonstrated highly transparent and conductive, antimony doped tin oxide (ATO) films based on a fabrication process using the sol-gel method. Three distinctive advancements have been accomplished: (1) solution-processed ATO films for low-cost, wide range applications; (2) highly transparent films of more than 95% transmittance in the visible light spectrum; and (3) high conductivity of over 20,000S/m. As such, this process opens up a new class of micro/nano fabrication process for making transparent and conductive electrodes in various systems, such as transparent electronics and displays.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2016.7421688","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have successfully demonstrated highly transparent and conductive, antimony doped tin oxide (ATO) films based on a fabrication process using the sol-gel method. Three distinctive advancements have been accomplished: (1) solution-processed ATO films for low-cost, wide range applications; (2) highly transparent films of more than 95% transmittance in the visible light spectrum; and (3) high conductivity of over 20,000S/m. As such, this process opens up a new class of micro/nano fabrication process for making transparent and conductive electrodes in various systems, such as transparent electronics and displays.