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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Tunable metamaterials for terahertz ultra-broadband absorption driven by microfluidics 微流体驱动太赫兹超宽带吸收的可调谐超材料
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421718
Q. Song, H. Cai, Yuandong Gu, P. Wu, Wu Zhang, W. Zhu, Q. X. Liang, Zhenchuan Yang, Y. Jin, Y. Hao, D. Kwong, T. Bourouina, Y. Leprince-Wang, A. Liu
{"title":"Tunable metamaterials for terahertz ultra-broadband absorption driven by microfluidics","authors":"Q. Song, H. Cai, Yuandong Gu, P. Wu, Wu Zhang, W. Zhu, Q. X. Liang, Zhenchuan Yang, Y. Jin, Y. Hao, D. Kwong, T. Bourouina, Y. Leprince-Wang, A. Liu","doi":"10.1109/MEMSYS.2016.7421718","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421718","url":null,"abstract":"A THz ultra-broadband absorber is realized using tunable metamaterials driven by a microfluidic system. In this work, a new technology is developed to precisely and continuously control the height of micro liquid pillars. Based on this technology, a proof-of-principle demonstration of tunable THz absorber is shown to have absorption frequency tuning from 0.245 THz to 0.415 THz with a tuning range of 51.5%. It creates a new paradigm for active metadevices based on tunable metamaterials with promising applications in detectors, sensors, imaging systems and stealth.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115298978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfluidic patterning of hemispherical dome-shape photonic colloidal crystals for wide-viewing-angle reflective display 用于宽视角反射显示的半球形球形光子胶体晶体的微流控图像化
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421700
N. Suzuki, E. Iwase, H. Onoe
{"title":"Microfluidic patterning of hemispherical dome-shape photonic colloidal crystals for wide-viewing-angle reflective display","authors":"N. Suzuki, E. Iwase, H. Onoe","doi":"10.1109/MEMSYS.2016.7421700","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421700","url":null,"abstract":"This paper describes a micropatterning method of hemispherical dome shape photonic colloidal crystals (PCCs) in microchannels for a wide-viewing-angle optical color filter of a reflective display. We fabricated hemispherical dome-top PDMS microchannels and crystalized colloidal particles inside the microchannel. These dome-shape micorchannels enable us to observe reflected light (structural color) from the PCCs in wide-viewing-angle (Fig. 1). We succeeded in patterning of two types of hemispherical PCCs in the dome-top micorchannels, and confirmed that those patterned PCCs reflected their structural color in wide-viewing-angle. Our patterning method could be effective to realize an optical filter for full-color, wide-viewing-angle and low-energy-consumption reflective displays.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116487086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Haptoskin - A flexible sheet-type tactile display with a CNT electrode Haptoskin -一种带有碳纳米管电极的柔性片状触觉显示器
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421838
Ryuhei Hatada, H. Ishizuka, M. Kawazoe, N. Miki
{"title":"Haptoskin - A flexible sheet-type tactile display with a CNT electrode","authors":"Ryuhei Hatada, H. Ishizuka, M. Kawazoe, N. Miki","doi":"10.1109/MEMSYS.2016.7421838","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421838","url":null,"abstract":"We developed a flexible sheet-type tactile display `Haptoskin' with a Carbon Nano Tube (CNT) electrode that can be attached to objects and decorate the objects with extra tactile characteristics, such as smooth and rough. When the voltage is applied to the electrode, the finger on the Ployldimethylsiloxan (PDMS) layer is attracted to the electrode and experiences vibration-like tactile sensation. We fabricated Haptoskin with MEMS-process friendly materials, PDMS and CNTs. We evaluated characterization of CNTs in bending test. Next, we actuated Haptoskin in several conditions and requested subjects whether or not tactile sensation was perceived. The Haptoskin successfully presented tactile sensations to the subjects. The developed Haptoskin can be readily used as a new human interface device.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126223247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Miniature tactile elements for tactile display with high stiffness resolution with magnetorheological fluid 用于高刚度分辨率磁流变流体触觉显示的微型触觉元件
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421843
H. Ishizuka, N. Miki
{"title":"Miniature tactile elements for tactile display with high stiffness resolution with magnetorheological fluid","authors":"H. Ishizuka, N. Miki","doi":"10.1109/MEMSYS.2016.7421843","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421843","url":null,"abstract":"This paper describes miniature tactile elements with the dimension of a few mm for stiffness representation. The elements encapsulate magnetorheological (MR) fluid inside the flexible polydimethylsiloxane (PDMS) membrane and change its stiffness by controlling an external magnetic field. Hollow hemispherical PDMS membrane with the diameter of 4 mm was fabricated with glycerin droplet and filled with MR fluid. The elements were evaluated with compression tests. From the results, the elements successfully changed its stiffness and represent stiffness of normal tissues and tumors. Tactile display that consists of the elements were also evaluated. From the results, magnetic field to one element affected other elements. However, the difference was smaller than minimum detectable stiffness difference.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124825862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Rapid and reversible immobilization of caenorhabditis elegans with an optoelectric device and pluronic F-127 利用光电装置和pluronic F-127快速可逆固定秀丽隐杆线虫
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421742
W. Chuang, H. Chuang
{"title":"Rapid and reversible immobilization of caenorhabditis elegans with an optoelectric device and pluronic F-127","authors":"W. Chuang, H. Chuang","doi":"10.1109/MEMSYS.2016.7421742","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421742","url":null,"abstract":"This paper reports a development of an optoelectric device with Pluronic (P) F-127 for reversibly immobilizing Caenorhabditis (C.) elegans. The gelation time was less than 5 s, and C. elegans also recovered from the immobilization within 10 s. The proposed device achieved addressable immobilization for long-term observation and imaging with less stress acting on worms. Assessments regarding growth, progeny, lifespan and stress were conducted. Worms imposed with simultaneous laser irradiation and an electric field in the PF-127 solution within 3 h incurred no adverse reactions. The technique is expected to benefit the research work on drug screening in the future.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126864456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro architected porous material with high strength and controllable stiffness 具有高强度和可控刚度的微结构多孔材料
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421658
J. Pikul, S. Ozerinc, Runyu Zhang, P. Braun, W. King
{"title":"Micro architected porous material with high strength and controllable stiffness","authors":"J. Pikul, S. Ozerinc, Runyu Zhang, P. Braun, W. King","doi":"10.1109/MEMSYS.2016.7421658","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421658","url":null,"abstract":"This paper reports the engineering of large area cellular solids with controllable stiffness and specific strengths up to 230 MPa/(Mg/m3), which is stronger than most high strength alloys including 4143 steel and Ti-6Al-4V. The high strength arises from the size-based strengthening of the nm-sized struts. The cellular solid's porosity can be varied from 30 to 90% to control the specific stiffness from 4-20 GPa/(Mg/m3). The cellular solid's regular microporous architecture and self-assembly based fabrication allow nanometer to micrometer control over the hierarchical geometry and chemistry, which enable large area materials with high strength and controllable stiffness.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121849070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Novel nanostructure replication process for robust superhydrophobic surfaces 鲁棒超疏水表面的新型纳米结构复制工艺
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421683
Sasha Hoshian, V. Jokinen, S. Franssila
{"title":"Novel nanostructure replication process for robust superhydrophobic surfaces","authors":"Sasha Hoshian, V. Jokinen, S. Franssila","doi":"10.1109/MEMSYS.2016.7421683","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421683","url":null,"abstract":"This paper reports a novel nanoreplication process. It consists of metal nanostructuring by acidic etching, atomic layer deposition (ALD) of TiO2 and polymer replication. Due to excellent conformality of ALD, the nanostructures are accurately covered. After polydimethylsiloxane (PDMS) casting, the metal is completely etched away, revealing the nanostructured TiO2/PDMS surface. Because no peeling is used, even retrograde structures can be released easily. The surface is superhydrophobic, and it repels water, wine and coffee. The surface is both flexible and damage tolerant: it retains its Cassie-state superhydrophobicity even after wear and damage.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125382337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Non-spherical liposome formation using 3D-laser-printed micro-cube structures 利用3d激光打印的微立方体结构形成非球形脂质体
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421592
K. Inoue, K. Kamiya, T. Osaki, N. Miki, S. Takeuchi
{"title":"Non-spherical liposome formation using 3D-laser-printed micro-cube structures","authors":"K. Inoue, K. Kamiya, T. Osaki, N. Miki, S. Takeuchi","doi":"10.1109/MEMSYS.2016.7421592","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421592","url":null,"abstract":"This conference paper describes a non-spherical liposome formation method using three-dimensional micro structures to emulate cytoskeleton proteins into biological cells. First, we fabricated a micro-cubic frame based on a stackable photoresist processed by direct laser writing. Next, we formed water-oil-water interfaces containing lipids on the faces of these microstructures in microfluidics channel. When the oil layer was sufficiently thin, lipid bilayer membranes (BLM) were formed. Moreover, we confirmed the BLM formation by reconstituting a membrane protein (alpha-hemolysin; αHL) and observed the diffusion of fluorescent molecules through the nanopores formed by αHL. We successfully formed the non-spherical liposomes with artificial cytoskeletons. The non-spherical liposomes will create new opportunities for the development of an artificial cell research model.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134620366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Dispersion-corrected metasurface for beam deflector and flat lens 光束偏转器和平面透镜的色散校正超表面
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-26 DOI: 10.1109/MEMSYS.2016.7421697
Libin Yan, H. Cat, Yuandong Gu, W. Zhu, P. Wu, Zhengchuan Yang, Yefeng Jin, Y. Hao, D. Kwong, A. Liu
{"title":"Dispersion-corrected metasurface for beam deflector and flat lens","authors":"Libin Yan, H. Cat, Yuandong Gu, W. Zhu, P. Wu, Zhengchuan Yang, Yefeng Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2016.7421697","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421697","url":null,"abstract":"In this paper, a reconfigurable metasurface is realized using microfluidic technology, which controls the amplitude and phase of the incident wave at sub-wavelength resolution. A dispersion-corrected beam deflector and a flat lens are demonstrated for proof-of-principle where the flat lens and beam deflector are tuned, in response to the change of the incident wavelength, to maintain their functionalities. This will make various applications such as on-chip spectrometers, high-performance dispersion-controllable devices in the next-generation telecommunication networks, and wavefront-tunable devices.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130318783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-performance microelectrode of PEDOT/Pt-black for low voltage neurostimulaiton 用于低压神经刺激的高性能PEDOT/Pt-black微电极
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-08 DOI: 10.1109/MEMSYS.2016.7421726
K. Yamaguchi, Masanori Tanaka, S. Yamagiwa, H. Sawahata, R. Numano, M. Ishida, T. Kawano
{"title":"High-performance microelectrode of PEDOT/Pt-black for low voltage neurostimulaiton","authors":"K. Yamaguchi, Masanori Tanaka, S. Yamagiwa, H. Sawahata, R. Numano, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2016.7421726","DOIUrl":"https://doi.org/10.1109/MEMSYS.2016.7421726","url":null,"abstract":"Here we report a material for low-voltage and micro-scale electrode stimulation, that combines high charge injecting and low impedance characteristics of poly (3, 4-ethylenedioxythiophene) (PEDOT) with a large effective surface area by using a platform of platinum black (Pt-black). The layer-by-layer assembled PEDOT/Pt-black electrode with the diameter of 30 μm exhibits the charge-injection delivery capacity (QCDC) is 684 mC/cm2, which is 1.6 times value of the same-sized Pt-black electrode. In vivo animal experiments confirm that the 8-μm-diameter PEDOT/Pt-black electrode enables the electrical stimulation of mouse's nerves with the voltage of 400 mV, which value is lower than conventional electrodes. The proposed small diameter and high QCDC electrode potentially offers powerful applications, including low voltage stimulation and stimulations of individual neurons in which the cell body has a diameter of ~10 μm.","PeriodicalId":157312,"journal":{"name":"2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131154852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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