Encapsulated disk resonator gyroscope with differential internal electrodes

Abstract

In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area, while maintaining similar performance to the previously reported baseline DRG. The mode-matching operation yields a scale-factor of 1.37 mV/(7s) and an ARW of 0.29 °/√hr.